硅基槽型微环谐振器及其调谐特性研究

仿真和实验研究了含槽型(slot)光波导的反馈波导型微环谐振器的特性,将槽型光波导集成到Si基微环谐振器中,丰富Si基光波导的功能,为新型光电子器件的实现提供途径。通过锥形波导结构实现从传统波导到槽型波导的模式转换,减小传输损耗,采用时域有限差分法(FDTD)研究了光功率的分布和模式转换过程。结果显示,光功率逐渐转移到锥形结构两侧的槽型波导中并最终形成槽型波导中的传输模式,通过优化锥形结构能实现较高的模式转换效率,可以达到90%以上。采用电子束刻写技术和等离子刻蚀技术制备了反馈波导型槽型微环谐振器。实验显示,锥形波导能够实现模式的转换,光传输过程良好。通过在槽型波导中填充电光聚合物来改变槽型光波导的折射率,测量结果显示,传输谱谐振峰发生了明显移动,移动幅度达到5.6nm,器件具备很好的可调谐性。

Researches on the silicon slot microring resonator and its tunable properties

The properties of the silicon slot microring resonator with feedback waveguide are researched. Slot waveguides are integrated into microring resonators in order to enrich the fun ctions of the silicon waveguides and provide methods for advanced optoelectronic devices. T he taper structure is used to transform the optical power from traditional waveguide to slot waveguide ,which can decrease the transmission loss . T he op tical power distribution and mode transform ing process are studied by using finite difference in time domain (FDTD) method. Results show that the power is transformed into the slot s around the tape r adiabatically ,and forms the transmission mode of the slot waveguide finally . A n e xcellent m ode transforming efficiency as high as 90% can be achieved by optimizing the taper design. A slot microring resonator with feedback waveguide is fabricat ed on SOI wafer by using electron beam lithography and plasma etching technologies. Experiment results show that t he optical transmission and the mode transforming in the slot device are successful . T he index of the slot is changed by spin coating electro - op-tic polymer into the slot. M easurement s show that the shift of the peaks of the spectrum is as large a s 5.6nm . T he device shows a good tunable property. I t can be developed into tunable optical filter,optical modulator and biosensor .