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| 基于二维表面等离子体激元的微结构 | |
| 引用本文： | 章蓓,栾峰,徐军,金艳波,徐万劲,张会珍,钱怡,马骁宇,朱恪,刘玉龙.基于二维表面等离子体激元的微结构[J].固体电子学研究与进展,2002,22(4):476-478,486. |
| 作者姓名： | 章蓓 栾峰 徐军 金艳波 徐万劲 张会珍 钱怡 马骁宇 朱恪 刘玉龙 |
| 作者单位： | 1. 北京大学物理系和介观物理国家重点实验室,100871 2. 中国科学院半导体研究所,北京,100083 3. 中国科学院物理研究所,北京,100080 |
| 基金项目： | 国家自然科学基金项目 698962 60 ,60 0 770 2 2，集成光电子国家重点实验室，中科院物理所光物理实验室开放课题资助 |
| 摘 要： | 在介电常数符号相反的两个材料的界面处可激发出表面等离子体激元 (Surface plasmon)。文中利用普通扫描电子显微镜中出现的电子束诱导沉积纳米碳基本现象 ,提出和发展了一种无需光刻胶和额外掩模的亚微米图形化技术。采用这一新方法 ,成功地在镀金的半导体 In Ga Al P量子阱表面制备了各种亚微米点阵结构 ,并得到基于二维表面等离子体激元的可见波段半导体发光的增强作用 |
| 关 键 词： | 电子束诱导沉积 表面等离子体激元 铟镓铝磷量子阱 光致发光 纳米碳 |
| 文章编号： | 1000-3819(2002)04-476-03 |
The Microstructures Based on 2-dimensional Surface Plasma |
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| ZHANG Bei,LUAN Feng,XU Jun,JIN Yanbo,XU Wanjin,ZHANG Huizhen,QIAN Yi.The Microstructures Based on 2-dimensional Surface Plasma[J].Research & Progress of Solid State Electronics,2002,22(4):476-478,486. | |
| Authors: | ZHANG Bei LUAN Feng XU Jun JIN Yanbo XU Wanjin ZHANG Huizhen QIAN Yi |
| Abstract: | Surface plasma could be excited at the interface between materials with dielectric constant of opposite sign. In this paper, a technique of submicron patterning without resist and mask was proposed and developed. It utilizes the electron beam induced deposition of nanocarbon in an ordinary scanning electron microscope. By adopting this technique, a variety of patterns with 2 dimensional symmetric dots have been successfully prepared on the gold coated InGaAlP quantum well epitaxial samples. The enhancement of semiconductor visibel emission based on two dimensional surface plasma was demonstrated. |
| Keywords: | electron beam induced deposition surface plasma InGaAlP quantum well photoluminescence nanocarbon |
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