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Si3N4粉体的表面改性及其对立体光刻成型的影响
引用本文:陈汝菲,段文艳,王功,刘兵山,刘晓冬,李鑫.Si3N4粉体的表面改性及其对立体光刻成型的影响[J].硅酸盐通报,2021,40(6):1957-1964.
作者姓名:陈汝菲  段文艳  王功  刘兵山  刘晓冬  李鑫
作者单位:中国科学院空间应用工程与技术中心,太空制造技术重点实验室,北京 100094;中国科学院大学,北京 100049;中国科学院空间应用工程与技术中心,太空制造技术重点实验室,北京 100094
基金项目:中国科学院空间应用工程与技术中心所长基金(CSU-QZKT-2019-04);国家自然科学基金(51802319) ;中国科学院青年创新促进会(2021160)
摘    要:传统的陶瓷加工技术成本高、周期长、缺陷多,难以生产高性能陶瓷,立体光刻技术是制造形状复杂陶瓷零件的一种高效手段。纯Si3N4粉体的折射率(n=2.1)与树脂(n=1.49)的折射率相差较大,光散射严重,导致其陶瓷浆料的固化深度较低,很难直接利用立体光刻技术成型Si3N4陶瓷零件。为解决Si3N4粉体难以光固化的难题,本研究采用表面包覆有机物和表面氧化两种方式改性Si3N4粉体,并对比两种方式对Si3N4粉体光固化特性的影响规律。结果表明,包覆实验后,有机物单体经过一定反应时间后可均匀附着在Si3N4粉体表面;氧化处理后,Si3N4粉体表面形成非晶SiO2层,该层均匀附着在粉体表面上。原始Si3N4粉体的固化深度仅为20 μm,经过包覆改性和800 ℃氧化4 h后,Si3N4粉体的固化深度分别可提高到40 μm和50 μm,两种方式均能有效提高原始Si3N4粉体的固化深度。

关 键 词:立体光刻  氮化硅  表面改性  包覆  表面氧化  固化深度
收稿时间:2021-03-12

Surface Modification of Si3N4 Powder and Its Effect on Digital Light Processing
CHEN Rufei,DUAN Wenyan,WANG Gong,LIU Bingshan,LIU Xiaodong,LI Xin.Surface Modification of Si3N4 Powder and Its Effect on Digital Light Processing[J].Bulletin of the Chinese Ceramic Society,2021,40(6):1957-1964.
Authors:CHEN Rufei  DUAN Wenyan  WANG Gong  LIU Bingshan  LIU Xiaodong  LI Xin
Affiliation:1. Key Laboratory of Space Manufacturing Technology (SMT), Technology and Engineering Center for Space Utilization,Chinese Academy of Sciences, Beijing 100094, China; 2. University of Chinese Academy of Sciences, Beijing 100049, China
Abstract:Traditional ceramic processing technology has high cost, long cycle and many defects, which makes it difficult to produce high-performance ceramics. The refractive index (n=2.1) of pure Si3N4 powder is quite different from that of resin (n=1.49), and the light scattering is serious, which leads to the lower curing depth of the ceramic paste. It is difficult to directly use stereolithography technology to form Si3N4 ceramic parts. In order to solve the problem that Si3N4 powder is difficult to be cured, two methods of surface coating and surface oxidation were used to modify Si3N4 powder, and the influence of the two methods on the light curing characteristics of Si3N4 powder was compared. The results show that the organic monomer uniformly attaches to the surface of Si3N4 powder after a certain reaction time; after being oxidized at 800 ℃ for 4 h, amorphous SiO2 layer is formed on the surface of Si3N4 powder, which is uniformly attached to the surface of Si3N4 powder. The curing depth of original Si3N4 powder is merely 20 μm, and the curing depth of Si3N4 powder after coating modification and oxidation modification increase to 40 μm and 50 μm, respectively. Both methods effectively improve the curing depth of original Si3N4 powder.
Keywords:digital light processing  silicon nitride  surface modification  coating  surface oxidation  curing depth  
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