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准分子激光加工陶瓷表面形貌的分形特性
引用本文:刘莹,陈志新.准分子激光加工陶瓷表面形貌的分形特性[J].湖北工业大学学报,2002,17(4):15-17.
作者姓名:刘莹  陈志新
作者单位:南昌大学机电工程学院,江西,南昌,330029
基金项目:江苏省自然科学基金 0 5 2 0 0 18
摘    要:根据用Talysurf表面轮廓仪测量准分子激光加工Al2O3陶瓷表面轮廓的数据,用结构函数分析了准分子激光加工陶瓷表面,采用功率谱法计算了准分子激光加工陶瓷表面轮廓的分形维数,并把计算所得的分形维数与其轮廓高度的算术平均值和均方根值进行了比较,得出它们之间为非线关系,并拟合出它们的关系式。

关 键 词:准分子激光  Al2O3陶瓷  表面形貌  分形
文章编号:1003-4684(2002)12-0015-03
修稿时间:2002年6月20日

Fractal Features of Surface Topograbhy of Excimer Laser Processing Ceramic
LIU Ying,CHEN Zhi xin.Fractal Features of Surface Topograbhy of Excimer Laser Processing Ceramic[J].Journal of Hubei University of Technology,2002,17(4):15-17.
Authors:LIU Ying  CHEN Zhi xin
Abstract:The basic concepts of fractal theory and two calculation approaches for fractal parameters are pressented.Surface profile testing data of excimer laser processing Al 2O 3 ceramic are obtained by the Talysurf surface profile testing instrument.Analysis on its structure function shows that the surface of excimer laser processing ceramic is a fractal surface.Its fractal dimension is compared with the average surface roughness and their nonlinear relationship is conformed and simulated.
Keywords:excimer laser  Al  2O  3 ceramic  surface topography  fractal
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