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用于产生等离子体的高压脉冲电源的研制
引用本文:朱志杰,张贵新,刘亮,罗承沐,刘敏传.用于产生等离子体的高压脉冲电源的研制[J].高电压技术,2007,33(2):28-31.
作者姓名:朱志杰  张贵新  刘亮  罗承沐  刘敏传
作者单位:1. 清华大学电机与应用电子技术系,北京,100084
2. 北京四方继保自动化股份有限公司,北京,100085
基金项目:国家自然科学基金资助项目(50477005),清华大学基础研究基金(JCPY2005053)
摘    要:为给高压脉冲装置提供脉冲电压使其在低气压下激发出低温等离子体,研制了一台等离子体的高压脉冲电源。介绍了该套高压脉冲电源装置的构成原理、工作性能后,分析了实验的实际脉冲电压波形与仿真波形,发现二者比较接近,证明利用Simulink可模拟仿真气隙放电,采用此种碳刷型旋转开关,并适当改善定转子尺寸及倍率DT可以得到频率从0-800Hz,幅值为±20kV的高压脉冲电压。

关 键 词:研制  高压脉冲电源  碳刷型旋转开关  等离子体  建模仿真
文章编号:1003-6520(2007)02-0028-04
修稿时间:2006-01-09

Development of a Pulse Generator for Exciting Plasma
ZHU Zhijie,ZHANG Guixin,LIU Liang,LUO Chengmu,LIU Minchuan.Development of a Pulse Generator for Exciting Plasma[J].High Voltage Engineering,2007,33(2):28-31.
Authors:ZHU Zhijie  ZHANG Guixin  LIU Liang  LUO Chengmu  LIU Minchuan
Institution:1. Department of Electrical Engineering and Applied Electronic Technology, Tsinghua University, Beijing 100084, China; 2. Beijing Sifang Automation Co., Ltd, Beijing 100085, China
Abstract:A plasma reactor is designed and plasma is excited by a low frequency high-voltage pulse generator,its repetitive rate of the pulse is in the range from 0Hz to 800Hz and the amplitude is up to 20kV.The generator consists of one storage capacitor,one AC power supply,silicon stack,resistance networks,high voltage divider and a motor-controlled carbon brush switching.The frequency of the high-voltage pulse can be adjusted by altering the speed of motor,and its duty cycle can also be adjusted by adding the rotor radius of the brush switching or reducing the number of carbon brushes included in brush switching.The authors present the structure of this low frequency high-voltage pulse generator designed in our lab,give the valuable simulation results,compare it with the actual experiment waveforms and find that there is enough similarity between them,proving the carbon brush switching designing principle is feasible.The Matlab Simulink software is a good tool in the simulation of this high-voltage pulse generator.Now plasma has successfully been excited at low pressure by using the low frequency high-voltage pulse generator,which assures our normal research about applications of plasma.
Keywords:development  low frequency high-voltage pulse generator  carbon brush switching  plasma  matlab simulink
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