| 金刚石厚膜的制备及应用研究 |
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| 引用本文： | 金曾孙,吕宪义.金刚石厚膜的制备及应用研究[J].高技术通讯,1994,4(8):1-4. |
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| 作者姓名： | 金曾孙 吕宪义 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室 |
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| 摘 要： | 用电子增强热灯丝ＣＶＤ（化学汽相沉积）方法制备出膜厚为０．１－２ｍｍ的金刚石厚膜，研究了金刚石厚膜的耐磨性和热导特性，用它制作了金刚石膜焊接刀具和半导体激光器用金刚石膜热沉。
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| 关 键 词： | CVD 金刚石薄膜 半导体薄膜 制备 |
Synthesis and Applications of Diamond Thick Film |
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| Jin Zengsun, Lu Xianyi, Gu Changzhi Wang Chunlei, Bai Yizhen, Huang Fuping, Qin Dong, Zou Guangtian.Synthesis and Applications of Diamond Thick Film[J].High Technology Letters,1994,4(8):1-4. |
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| Authors: | Jin Zengsun Lu Xianyi Gu Changzhi Wang Chunlei Bai Yizhen Huang Fuping Qin Dong Zou Guangtian |
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| Abstract: | A diamond thick film(0.1-2mm thick )has been grown by electron assistant hot filament CVDmethod. The wear resistivity and thermal conductivity of the diamond thick film are investigated,anddiamond film brazed cutting tools and heat sinks of diamond film have been made using the diamond thickfilm. |
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| Keywords: | Electron assistant hot filament CVD Diamond thick film Diamond film brazed tcol Heat sink of diamond film |
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