| 高测速双频激光干涉仪及其性能检测 |
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| 引用本文： | 闫聚群,吴健,高赛,殷纯永.高测速双频激光干涉仪及其性能检测[J].计量学报,2005,26(1):5-7,19. |
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| 作者姓名： | 闫聚群 吴健 高赛 殷纯永 |
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| 作者单位： | 1. 清华大学精密仪器与机械学系,精密测量技术与仪器国家重点实验室,北京,100084
2. 普锐科创科技有限责任公司,北京,100085 |
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| 基金项目： | 国家自然科学基金(50027002)，清华大学博士生创新基金(第二期) |
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| 摘 要： | 新型驱动电机和高速传动器件的发展使得数控机床和三坐标测量机等的运行速度已经达到1000mm/s，而目前商用外差干涉仪的测量速度不能完全满足这一要求。为此，研制了一种基于5MHz频差双频激光器的高测速干涉仪，理论上的最高测量速度可达1580mm／s。通过实验对测量速度和计数频率进行了检测，结果证明，这种干涉仪可以达到的最高测量速度为980mm／s，外触发计数频率达11kHz。
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| 关 键 词： | 计量学 双频激光干涉仪 高测速 外触发频率 |
| 文章编号： | 1000-1158(2005)01-0005-04 |
Dual-frequency Laser Interferometer with High Measurement Speed and Its Performance Testing |
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| YAN Ju-qun,WU Jian,GAO Sai,YIN Chun-yong.Dual-frequency Laser Interferometer with High Measurement Speed and Its Performance Testing[J].Acta Metrologica Sinica,2005,26(1):5-7,19. |
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| Authors: | YAN Ju-qun WU Jian GAO Sai YIN Chun-yong |
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| Affiliation: | YAN Ju-qun~1,WU Jian~2,GAO Sai~1,YIN Chun-yong~1 |
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| Abstract: | With the development of novel drive motor and high speed driving device, the moving velocity of the machine centers and the CMMs are increased to 1000 mm/s. However, at present the measurement speed of the commercial heterodyne interferometer can not meet the requirement. A high speed measurement interferometer is developed which is based on a kind of 5 MHz beat frequency bi-reflectance laser. Experiments are set-up to testify the measurement speed and the sampling frequency of the interferometer. The results show that the maximum measurement speed is 980 mm/s and the maximum external trigger frequency is 11 kHz. |
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| Keywords: | Metrology Dual-frequency laser interferometer High measurement speed External trigger frequency |
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