| 石英基片上(110)取向PLZT薄膜及其光学性能研究 |
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| 引用本文： | 张继华,莫尚军,闻伟,陈宏伟,杨传仁.石英基片上(110)取向PLZT薄膜及其光学性能研究[J].功能材料与器件学报,2011,17(3). |
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| 作者姓名： | 张继华 莫尚军 闻伟 陈宏伟 杨传仁 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室; |
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| 基金项目： | 国家自然科学基金项目(编号:60607004) |
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| 摘 要： | 在低成本的石英玻璃衬底上制备高性能电光薄膜非常有吸引力。本文采用溅射方法,并结合Pb3O4气氛退火工艺,在ITO/石英玻璃衬底上制备锆钛酸铅镧(PLZT 8/65/35)薄膜。结果表明:在优化工艺条件下,薄膜为(110)方向择优生长,表面均方根粗糙度为3.1nm,可见光范围内透过率为81.3%,消光系数为0.003。这种表面光滑和高光学性能的PLZT薄膜在集成光学和光电子器件具有重要的应用潜力。
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| 关 键 词： | 铁电 锆钛酸铅镧(PLZT) 薄膜 光学性能 |
(110) Oriented PLZT Thin Films on Quartz and Their Optical Properties |
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| ZHANG Ji-hua,MO Shang-jun,WEN Wei,CHEN Hong-wei,YANG Chuan-ren.(110) Oriented PLZT Thin Films on Quartz and Their Optical Properties[J].Journal of Functional Materials and Devices,2011,17(3). |
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| Authors: | ZHANG Ji-hua MO Shang-jun WEN Wei CHEN Hong-wei YANG Chuan-ren |
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| Affiliation: | ZHANG Ji-hua,MO Shang-jun,WEN Wei,CHEN Hong-wei,YANG Chuan-ren(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China) |
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| Abstract: | It is very attractive to grow electro-optical thin film on quartz substrate.In this paper,utilizing sputtering deposition and annealed in Pb3O4 atmosphere,Lead lanthanum zirconate titanate(PLZT 8/65/35) thin films were prepared on indium tin oxides(ITO)/quartz substrates.Results show that under the optimized conditions,the PLZT film is preferably(110) oriented and RMS roughness is as low as 3.1 nm.In the range of visible light,the average transmittance is 81.3%,the extinction coefficient is 0.003.The superi... |
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| Keywords: | Ferroelectric Lead lanthanum zirconate titanate(PLZT) Films Optical Properties |
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