| 薄膜厚度的电子探针测量软件与应用 |
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| 引用本文： | 尚玉华,郭延风,刘志东,徐乐英.薄膜厚度的电子探针测量软件与应用[J].金属学报,1997,33(4):443-448. |
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| 作者姓名： | 尚玉华 郭延风 刘志东 徐乐英 |
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| 作者单位： | 中国科学院金属研究所!沈阳，110015 |
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| 摘 要： | 利用Ｓｅｗｅｌｌ的Ｘ射线激发深度公式建立起用电子探针测量有衬底纯元素薄膜厚度的应用软件，测量了Ｔｉ，Ｃｕ，Ｍｏ等四种厚度的薄膜标准的质量厚度，并对测量误差进行分析，最后给出了各纯元素薄膜厚度的测量下限。
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| 关 键 词： | 电子探针 金属薄膜 质量 厚度 测量 软件 |
| 收稿时间： | 1997-04-18 |
| 修稿时间： | 1997-04-18 |
AN EPMA SOFTWARE FOR DETERMINATION OF THIN METAL FILM THICKNESS AND IT'S APPLICATION |
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| SHANG Yuhua,GUO Yanfeng,LIU Zhidong,XU Leying.AN EPMA SOFTWARE FOR DETERMINATION OF THIN METAL FILM THICKNESS AND IT''S APPLICATION[J].Acta Metallurgica Sinica,1997,33(4):443-448. |
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| Authors: | SHANG Yuhua GUO Yanfeng LIU Zhidong XU Leying |
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| Abstract: | A software for determinating the thickness of thin metal film with EPMA was developed on the bass of Sewell's formula. It is based physically on that the exciting depth of X-ray decreased as the accelerate voltage of incident electron lowered. When the exciting depth is equal to the film depth, the ratio of X-ray intensities from film and bulk standard is unity. The thicknesses of several thin metal films of pure elements on Si and Al substrates were determined by this method, and the relative error of mass thickness is smaller than 1.6%.The minimum mass thicknesses for various elements, which can be measured, were also obtained. |
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| Keywords: | measurement software electron probe microanalyser thin film mass thickness |
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