Changes in the microstructural and electrical behavior of poly-Si films subjected to ion implantation and annealing process modifications

Polycrystalline silicon (poly-Si) films implanted with arsenic using beam currents of 500 μA (400°C) and 230 μA (room temperature) have been investigated via transmission electron microscopy (TEM), secondary ion mass spectrometry (SIMS), and spreading resistance analysis (SRA). Experimental observations demonstrated the annealed high beam current-implanted poly-Si to possess inferior electrical properties compared with that implanted at a lower beam current. The reduced electrical activity of the high beam current-versus the low beam current-implanted poly-Si was directly related to the postimplant microstructure (small grains ～140 nmvs. amorphous) and the mechanism of the subsequent anneal (grain growth vs. recrystallization). The recrystallization mechanism augmented the electrical activation of the As dopant (decreased sheet resistivity) via a reduction of total grain boundary area. Further improvement in the electrical performance of the low beam current-implanted poly-Si, a resistivity decrease of up to 28%, was incurred via a two-step annealing process. This process induced grain growth, which in turn minimized total grain boundary area and dopant trapping.     

高阻值纳米薄膜材料的热电特性测量

为了实现高阻值纳米薄膜材料的热电系数测量,搭建了一套塞贝克系数测量系统。研究了该系统的温控精度和温差生成机制并测量了高阻值条件下微弱电压。首先,建立了高真空度和带有多重电磁屏蔽的真空测试环境;然后,设计了高稳定度温差控制平台,以便为测试样品提供可控温差;同时根据高阻条件下的微弱电压的检测要求,消除了检测通道的漏电流和分布电容的影响。最后,提出了一种循环温差的测量方法,用于有效去除分布电容引起的塞贝克电压长期漂移。采用该方法对高阻值的有机半导体材料进行了塞贝克系数的测定,结果显示:阻值高达7×1012Ω的有机薄膜材料的塞贝克系数的测量精密度2%,温度控制精度为±0.001K。得到的结果表明,该系统能够实现对样品阻值高达1012Ω的纳米薄膜材料的塞贝克系数的测量。     

用于热机械微纳加工的掺Al多晶硅加热器

针对热机械式微纳米结构的加工,提出了一种以掺Al多晶硅为材料,集成于微悬臂梁上的加热器.采用Al诱导退火晶化(AIC)方法,在750 K对Al/a-Si∶H复合薄膜低温晶化18 h,制备出掺Al多晶硅.通过低温退火,使复合薄膜的拉曼特征峰由478 cm-1移至520 cm-1,完成由非晶硅向多晶硅的转变;由四探针仪测得...     

汽车尾气热电转换装置电气拓扑结构优化

针对汽车尾气热电转换装置多个热电器件温差和自身特性的差异,为了最大化发挥各热电器件的发电潜能,对热电转换装置的热电模块进行拓扑结构的优化,基于图论的方法将热电模块的串并联问题抽象为数学问题,再针对性地设计了算法,通过实验室台架实验测试和数据验证,使得热电转换装置对外输出最大功率。     

稳健优化设计进程策略的研究及实践

分析了田口方法和容差模型法的各自特点，提出了一种综合运用两种方法使其互补的稳健优化设计进程策略。在一个机械锁紧装置的稳健优化设计实践中运用这一进程策略，取得了高精度和高效率的结果。     

Optimal parameter design for chip-on-film technology using the Taguchi method

Chip on film (COF) is a new technology aggressively developed by liquid crystal display (LCD) module manufacturers. COF is a potential replacement method for tape-automated bonding (TAB) and chip-on-glass (COG) technology. COF technology has the following advantages: low power consumption, low cost, small structure, light weight and high resolution. It has become the major LCD module application. However, COF technology has several nonconforming items that should be reduced. These items include bonding misalignment, insufficient bonding strength and surface mount technology (SMT), solder joint defects, etc. The purpose of this study is to determine the optimum process parameters for COF technology improvement. An L₁₈ orthogonal array is employed to conduct the design of experiment for finding the optimum process parameters. The results show that bonding misalignment is reduced and bonding strength increased .     

集装箱船余热回收系统中温差发电模块的热电耦合分析

随着热电发电、热电制冷技术研究的不断深入,热电在船舶余热回收方面有了重大突破.以集装箱船余热回收系统中温差发电模块为研究对象,考虑了热电模块热端和冷端温度差存在温度变化的实际情况,运用ANSYS软件建立了热电单P-N结模型,分析了热电单元温度场的分布规律,得到了温差发电系统的输出特性,根据分析结果进行了温差发电模块用于...     

石墨烯热电器件栅控特性研究

为了获得一种稳定可控的能源,提出一种栅控石墨烯热电器件。通过对石墨烯通道的载流子输运机理的分析,获得了温度和栅压对通道电阻的影响。依据半经典Mott公式推导了石墨烯塞贝克系数的表达式,同时给出了石墨烯的电导率和热导率模型。最后通过有限元分析(FEA)建模获得不同栅压条件下的器件温度,当栅极电压V_B=0 V时,石墨烯热电器件热端和冷端温度差为30 K;当V_B=6 V时,最大温差达到50 K;当V_B=30 V时,最小温差只有10 K。结果表明,栅压对热电器件的性能有明显的调控性。该研究可为石墨烯热电器件的设计提供理论参考。     

热压法制备P型Si0.8Ge0.2合金及其热电性能

采用真空熔炼和热压烧结法制备了B含量为0．3％～０．72％的P型Si0．8Ge0．2固溶体合金，对样品进行了物相结构分析和微观形貌表征，并研究了掺B量对合金热电性能的影响。结果表明：随着B掺杂量的增加，电导率σ增大，塞贝克系数α减小。功率因子α2σ在B掺入量约为0．6％时达到最大值。     

Effect of cation on micro/nano-tribological properties of ultra-thin ionic liquid films

Room temperature ionic liquids (RTILs) have some unique characteristics which meet the requirements as high performance lubricants. In this work, three kinds of RTILs films with the same anion but different cations were prepared on single-crystal silicon wafer by dip-coating method. Thermal stability of the RTILs was evaluated using thermal gravity analysis in a nitrogen atmosphere. The morphology, nano-friction and nano-adhesion properties of the RTILs films were experimentally investigated at nano-scale using AFM/FFM. Chemical compositions of the films were characterized with a multi-functional X-ray photoelectron spectrometer. Micro-tribological properties of RTILs films were investigated using AISI-52100 steel ball in ball-on-plate configuration, and compared with perfluoropolyether. The worn surface morphologies were measured with a 3D optical surface profilometer. Results show that 3-butyl-1-methyl-imidazolium tetrafluoroborate exhibited the best anti-wear ability in comparison with the other three lubricants. RTILs films could be used as a kind of novel lubricant for application in M/NEMS. The corresponding friction-reduction and anti-wear mechanisms of the tested ultra-thin RTILs films under tested condition were proposed based on the experimental observation. The investigation revealed that friction-reduction and anti-wear properties of RTILs were strongly dependent on their chemical structures. For the friction at nano-scale, the flexibility and surface energy of the lubricant played significant role, while for the friction at micro-scale, both the rigid cycle structure and flexible chain of the RTILs played crucial role.     

热电制冷器对太阳能电池输出电压的影响

太阳能电池(photovoltaic,PV)长时间暴露在阳光下会使其表面温度迅速升高,从而降低其输出电压。为降低太阳能电池板的表面温度,对太阳能电池板背面装载的热电制冷器(thermoelectric cooler,TEC)进行了研究,测试其在不同室温下对太阳能电池板输出性能的影响。研究表明:当不含TEC且环境温度分别为26℃、29℃、33℃时,太阳能电池板的实验最大输出电压分别是2.32 V、2.25 V、2.20 V;加载TEC之后,在上述环境温度下太阳能电池板的最大输出电压分别为2.54 V、2.59 V、2.47 V,输出电压分别增加9.4%、15.1%、12.3%。因此在太阳能电池板中加载热电制冷器既可以增大输出电压,又可以避免因温度升高而降低太阳能电池板的寿命。     

基于温差发电的自动搅拌马克杯设计与实现

针对当前市场上销售的普通马克杯功能单一,带有电动搅拌功能的马克杯搅拌不均匀,能源损耗的情况,设计了一种基于温差发电的自动搅拌马克杯。采用温差发电作为供电来源,实现全自动搅拌,杯内温度可实时监测。设置杯内饮料的保温温度,具有操作人性化,界面友好,能源合理应用的特点。     

Optimization of stereolithography process parameters for part strength using design of experiments

Rapid prototyping (RP) is an emerging technology that has been implemented in many spheres of industry – particularly in the area of new product development. Growth of this field has been rapid in recent years. Stereolithography (SL) is one of the most popular RP process used for rapid tooling applications. There are several process parameters contributing to the strength of an SL product. The contribution of three parameters; namely, layer thickness, post curing time and orientation are most significant. In light of this concern, an attempt has been made to study and optimize these process parameters for maximum part strength, and develop an empirical relationship between process parameters and part strength through design of experiments (DOE). The proposed DOE is verified with the data of experiments conducted under standard conditions.     

近紫外区宽带反光镜的膜系优化设计与制备

依据紫外光学系统中紫外反光镜的使用要求,并结合汞灯发光光谱,提出了R93%@300~450 nm(R为反射率);T_(avg)85%@500~1 000 nm(T_(avg)表示平均透过率)的近紫外区宽带高反射率的设计指标。选用Ta_2O_5和SiO_2分别作为高低折射率材料,并采用正交试验法确定了Ta_2O_5和SiO_2膜料的折射率、消光系数和制备工艺参数。在规整周期性膜系的基础上,利用膜系设计软件进行优化设计,同时分析了膜层的敏感度,保证了镀制的可重复性。通过曲线测试和环境试验结果表明,该膜系满足设计使用要求。     

应用纳米压痕法测试类金刚石薄膜的力学性能

纳米压痕仪被称为材料机械性质微探针,它借助于加载-卸载过程中压痕对载荷和压入深度的敏感关系,使得测试始终在薄膜材料的弹性限度内,克服了维氏法和努氏法等传统方法引起压痕边缘模糊或者碎裂的缺点,从而正确地、可靠地测试出薄膜材料的硬度和弹性模量等纳米力学性能.试验用微波电子回旋共振等离子体增强化学气相沉积技术,在不同偏压条件下制备三种类金刚石薄膜(DLC膜),用纳米压痕仪测试不同载荷下薄膜的硬度和弹性模量值.试验结果表明,材料的纳米硬度和弹性模量随着载荷的增大而逐渐减小.     

微型热电发电器的性能测试分析

按照微型热电发电器输出功率的理论模型，对内阻、塞贝克系数和热导率等热电性能参数在不同温度范围内进行了测量和拟合。实验测试了不同电偶臂对数、电偶臂高度以及不同冷热端温度时微型热电发电器的最大输出功率，结果表明：一定范围内的最大输出功率随电偶臂高度的减小而增大，对电偶臂高度面积的比值进行适当选取，可使最大输出功率达到最优值；一定范围内的最大输出功率随电偶臂对数的增多而增大；温差和平均温度达到一定值时，最大输出功率可得到最优。根据测试分析结果，研制了微小型热电转换装置。     

内置式温差发电器热通道的数值模拟

内置式结构在强化传热的同时将不可避免的对流体的流动产生阻力,为研究不同内置结构对温差发电器热端综合换热效果的影响,利用fluent商用软件对热通道的内流场和换热特性进行了数值模拟。详细介绍了从CAD软件辅助建模,网格划分和边界层定义到计算结果输出与后处理的整个过程,并通过计算得出了不同速度条件下光管、内置板以及内置粗糙肋板等热端模型的阻力与传热特性,并通过对计算结果的分析为热通道的结构优化指出了方向。     

Optimization design technique for reduction of sloshing by evolutionary methods

The oscillation of a fluid caused by external force, called sloshing, occurs in moving vehicles containing liquid masses, such as trucks, railroad cars, aircraft, and liquid rockets. This sloshing effect could be a severe problem in vehicle stability and control. Therefore, development of efficient and easy method to reduce sloshing effect is positively necessary. In this study, optimization design technique for reduction of the sloshing using evolutionary method is suggested. Two evolutionary methods are employed, respectively, the artificial neural network (ANN) and genetic algorithm (GA). ANN is used for the analysis of sloshing and GA is adopted as optimization algorithm. The considered storage tank for fluid is a rectangular tank. The design variables are width and installation location of the baffle, and sloshing reduction coefficient by baffle is used as an object function in the optimization. As a result of this study, the optimal design for sloshing reduction is presented.     

热电制冷微型低温恒温器的研究与设计

以热电制冷器为制冷源的微型恒温器,采用热电制冷器进行冷却。用同时限定隔热层外表面的最低温度与单位面积隔热层的漏热量的方法确定隔热层厚度,以同时满足降温阶段冷负荷与稳定工作阶段冷负荷确定制冷量,给出了设计方法。     

Robust design of multiple dynamic quality characteristics

The Taguchi method is a useful technique to improve the performance of products or processes at a lower cost and in less time. The traditional Taguchi method focused on a single characteristic to optimize the parameter conditions. In practice, most products and processes have more than one quality characteristic. Several approaches dealing with multiple static quality characteristic problems have been reported. However, little attention has been focused on optimizing the multiple dynamic quality characteristics. This research presents an approach to optimizing multiple dynamic problems based on quality loss. The objective is to minimize the total average quality loss for the multiple dynamic quality characteristics experiment.