High-performance MIM capacitor using ALD high-k HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectrics

For the first time, we successfully fabricated and demonstrated high performance metal-insulator-metal (MIM) capacitors with HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectric using atomic layer deposition (ALD) technique. Our data indicates that the laminate MIM capacitor can provide high capacitance density of 12.8 fF//spl mu/m/sup 2/ from 10 kHz up to 20 GHz, very low leakage current of 3.2 /spl times/ 10/sup -8/ A/cm/sup 2/ at 3.3 V, small linear voltage coefficient of capacitance of 240 ppm/V together with quadratic one of 1830 ppm/V/sup 2/, temperature coefficient of capacitance of 182 ppm//spl deg/C, and high breakdown field of /spl sim/6 MV/cm as well as promising reliability. As a result, the HfO/sub 2/-Al/sub 2/O/sub 3/ laminate is a very promising candidate for next generation MIM capacitor for radio frequency and mixed signal integrated circuit applications.     

合成己二腈反应技术研究——(Ⅴ)己二腈工业反应过程模拟与反应器改造

对己二腈工业反应器提出了两釜串联带回流的模型,通过模拟计算得出模型的级间返混系数 f=6的结论。该模型能较好地预测工业反应器中物料组分浓度变化和气、液两相的流动特性;指出了现工业反应器的鼓泡中和段体积偏小是造成己二酸浓度偏高的关键;提出了可以通过增加串连一个鼓泡预反应段的改造方案,能有效地降低己二酸的浓度,从7%降至4%左右,从而能较好地减缓腐蚀和结焦。     

软X射线对血液有形成分表面电荷的影响——2、淋巴细胞和血小板膜电荷的变化

软X射线不仅能引起红细胞表面电荷的变化,同时也能导致淋巴细胞和血小板表面电荷下降,表现为照射后它们的电泳率下降。低剂量范围内,这种电荷的变化是暂时性的,照后4小时降到最低点,24小时后恢复到对照的水平。细胞电泳率的下降与辐射剂量相关。淋巴细胞是一个复杂的细胞群,正常状态下,按细胞在电场中泳动速度的快慢,可分为两个组分:快峰为T细胞,慢峰为B细胞。软X射线照射以后,T和B细胞的电泳率皆减慢,频数分布峰值下降,离散度加大。血小板成分单一,电泳率较一致。 从照射浓集的血小板再加回自身血浆中电泳率的下降较照射血浆再加到血小板中的电泳率下降大得多;受照射的血小板在磷酸缓冲液中电泳率下降较在血浆悬液中严重得多;2000 rad照后,悬浮于血浆中的血小板电泳率能恢复,而悬浮于磷酸缓冲液中则不能恢复,三个方面来看,血浆中可能存在抗辐射因子。超氧化物岐化酶能有效地预防血小板电泳率的下降,从而可阻止血小板的凝聚。     

野外大气扩散试验中四面体气球示踪实验的初步评价

1985年11月在瑞士北部进行了一次以探讨“冷池”条件下的扩散和湍流特征为目的的国际野外大气试验,本文介绍其中的四面体气球示踪实验的结果。一共进行了三次由雷达跟踪的四面体示踪实验,释放了10个四面体球。按多轨迹法和单轨迹法分别估算并比较了其中两次示踪实验得到的水平扩散参数σ_y,探讨了风摆效应的贡献。采用“体源模式”并结合单轨迹法估算了微弱风场不定风向条件下的扩散参数,分析了静风,弱风条件下的水平风向标准差和湍流强度。     

Modeling electromigration lifetime under bidirectional currentstress

Electromigration reliability of interconnect under bidirectional current stress has been studied in a wide frequency range (mHz to 200 MHz). Experimental results show that the AC lifetime rises with the stress current frequency. The current density exponent and the activation energy of AC lifetime are found to be twice that of DC lifetime. Pure AC current stress failure at extremely high current density is believed to result from thermal migration of metal at hot/cold transition points     

Variations in Spectral Slope in Lake Taihu,a Large Subtropical Shallow Lake in China

Spectral slope (S), describing the exponential decrease of the absorption spectrum over a given wavelength range, is an important parameter in the study of of chromophoric dissolved organic matter (CDOM) dynamics, and also an essential input parameter in remote sensing models. Furthermore, S is often used as a proxy for CDOM composition, including the ratio of fulvic to humic acids and molecular weight. The relative broad range in S values reported in the literature can be explained by the different spectral ranges and fitting methods used. A single exponential model is used to fit the S values for 17 investigations involving 458 samples in Lake Taihu from January to October in 2004. The average S value was 15.18 ± 1.39 μm⁻¹ for the range of 280–500 nm, which fell within the range reported in the literature. The frequency distribution of S value basically obeyed a normal distribution. Significant differences in S values between summer and other seasons showed that phytoplankton degradation was one of the important sources of CDOM in summer, whereas CDOM mainly came from the river input in other seasons. Furthermore, the estimated S value decreased with increasing wavelength range used in regression. The maximum and minimum values derived from the regression were 17.89 ± 1.25 μm⁻¹ and 13.62 ± 2.11 μm⁻¹ for the wavelength ranges of 280–380 nm and 400–500 nm, respectively, a decrease of 23.9%. S values significantly decreased with the increase of CDOM absorption coefficients. CDOM absorption coefficients could be more appropriately estimated from exponential model introducing the variation of S with absorption coefficients, making them useful for a remote sensing bio-optical model of Lake Taihu. DOC-specific absorption coefficient a*(λ) and the parameter M describing molecular size of the humic molecules could also be used as a proxy for the sources and types of CDOM. A general relationship was found between S and a*(λ), and M values. S increased with the decrease of DOC-specific absorption coefficient and the increase of M corresponding to the decrease of molecular weight.     

基于"资产中心"模式的炼油化工企业设备编码体系设计

针对“资产中心”模式对设备管理系统以及设备编码的要求,设计出松耦合的编码体系,并根据炼油化工企业的特点给出了主要的编码结构。解决了编码层次的固化与设备实际层次结构的多样化之间的矛盾,支持“资产中心”模式下设备管理对信息系统功能的需求。     

In situ polymerization and characterization of polyester‐based polyurethane/nano‐silica composites

Polyester‐based polyurethane/nano‐silica composites were obtained via in situ polymerization and investigated by Fourier‐transform infrared spectroscopy (FTIR), or FTIR coupled with attenuated total reflectance (FTIR‐ATR), Transmission electron microscopy (TEM), atomic force microscopy (AFM), an Instron testing machine, dynamic mechanical analysis (DMA) and ultraviolet‐visible spectrophotometry (UV‐vis). FTIR analysis showed that in situ polymerization provoked some chemical reactions between polyester molecules and nano‐silica particles. FTIR‐ATR, TEM and AFM analyses showed that both surface and interface contained nano‐silica particles. Instron testing and DMA data showed that introducing nano‐silica particles into polyurethane enhanced the hardness, glass temperature and adhesion strength of polyurethane to the substrate, but also increased the resin viscosity. UV‐vis spectrophotometry showed that nano‐silica obtained by the fumed method did not shield UV radiation in polyurethane films. Copyright © 2003 Society of Chemical Industry