半导体激光器封装中热应力和变形的分析

为了解决半导体激光器封装的热应力和变形问题,利用有限元软件ANSYS对SnPb、In、AuSn三种焊料焊接激光器管芯的情况分别进行了模拟,得到了相应的热应力大小和变形情况,分析了焊料和热沉对激光器热应力和变形的影响.对比了这几种不同封装方法的激光器发光区图像的弯曲程度,验证了模拟结果.由模拟和实验结果可见,采用In焊料是减小激光器热应力和变形的最佳选择.另外,适当增加热沉厚度,选择热匹配的材料,焊接时进行预热,可减小激光器的热应力和变形.通过模拟和实验分析,提出了减小热应力和变形的方法,为优化激光器的封装设计提供了参考依据.     

高功率二极管激光器Au80Sn20焊料焊接实验研究

半导体激光器封装工艺过程对于激光器的输出特性、寿命等性能有重要影响,其中焊料的选择和焊接工艺是最关键的因素。本文采用磁控溅射的方法,在 WCu 热沉上制备了Au80Sn20合金焊料,取代了传统的In焊料,并对焊接工艺进行了改进。国外沉积的和我们制备的Au80Sn20合金焊料焊接DL芯片后的性能参数很接近。充分说明双靶分层溅射镀膜可以实现二极管激光器的封装要求,从而为优化半导体激光器制备工艺和提高半导体激光器的性能奠定基础。     

微通道散热大功率半导体激光器研究

基于GaInAs/AlGaAs应变量子阱大光腔结构激光器芯片和无氧铜微通道热沉,采用In焊料烧结工艺,制作了976nm大功率连续激光器单条。在20℃热沉冷却条件下,输入电流110A时,输出功率104.9W,电光转换效率达到最大值64%。输入电流300A时,输出功率276.6W,电光转换效率达到54.2%。对激光器单条的热阻以及特征温度进行了测试分析,根据分析结果模拟了激光器单条在大电流下的输出特性,模拟结果显示热饱和是限制激光器最大输出功率的原因。因此,为了提高大功率激光器的输出功率,需要进一步提高激光器的特征温度,并降低热阻以改善散热情况。     

VL020回流炉中半导体激光器芯片In焊接研究

利用VL020真空烧结炉,选用In焊料对半导体激光器芯片的焊接技术进行较为深入的研究,分别对焊接时气体保护、焊接前期芯片、热沉的处理、真空工艺过程压力的施加、夹具设计和烧结工艺曲线等因素进行实验分析。结果表明,以上参数对半导体激光器芯片的焊接均有显著的影响,在N2/H2体积分数为95%/5%气体的保护下,通过对夹具施加适当的静压力,In焊料与Au能够充分和快速润湿,实现较高的焊接质量。蔡司显微镜检测结果表明,采用焊接技术可以使半导体激光器芯片具有较低的空洞率,高达90%以上的焊透率,其焊接过程主要通过夹具装配完成,人为影响因素少,成品率高,并适用于小批量生产。     

有关QFN72和CQFN72的热阻计算

文章介绍了QFN72和CQFN72结到外壳的等效热路分析及结到外壳热阻θJC的简化计算方法,结果表明原设计下CQFN72的热阻约为1.25 K·W-1,几乎是QFN72的一倍。优化CQFN热设计的主要途径是适当减薄陶瓷基板厚度、在陶瓷基板中嵌入钨柱阵列、芯片减薄和采用金基焊料焊接等。从CQFN热设计考虑,不应在主散热区热沉下采用4J29或4J42焊接垫片,否则会使热阻θJC增大10%以上。     

键合材料对GaAs/GaAlAs双异质结激光器和发光管串联电阻和热阻的影响

本文就双异质结激光器和双异质结发光二极管的三种焊料(In、InSn、Ausn)对其器件的串联电阻(Rs)、热阻(RT)的影响作了初步的探索研究。从实验结果获得AuSn焊料所焊接的器件的串联电阻最低可降到0.25Ω·cm,一般平均值都在0.4Ω·cm左右,比Insn合金焊料所焊接的器件的串联电阻约低13.3%,比纯In所焊接的器件的串联电阻约低60%左右。而Insn的热阻约为46℃/w,比纯In焊料所焊接的器件的热阻约低三分之一。从降低半导体光电器件的串联电阻和热阻的大小以及器件的热稳定性和可靠性观点出发,预示AuSn合金材料将是一种有前途的GaAs光电器件的键合材料。另外,本文分析影响半导体光电器件的串联电阻和热阻的主要因素是:在进行键合时,环境气氛、焊接温度高低,时间长短以及键合材料的选择等有关。其次就是器件在键合过程中,由于工作条件不完善(如未进行氮气保护或不是在真空中焊接)而引起焊料的氧化以及形成金属间化合物等问题,只要妥善地解决了以上两个问题,对于半导体光电器件的焊接来说,将会得到理想的高可靠性的器件。     

大功率半导体激光器高可靠烧结技术研究

近几年大功率半导体激光器的应用领域越来越广,许多应用领域都要求半导体激光器能够高可靠性工作.工作焊接质量直接影响着大功率半导体激光器的可靠性,焊接缺陷会导致激光器迅速退化.目前国内普遍采用的铟焊料和锡铅焊料都是软焊料,焊层有形成晶须和热疲劳等可靠性问题.为提高烧结可靠性,采用了金锡焊料烧结激光器新技术.金锡焊料是硬焊料,焊接强度高,抗疲劳性好,对金层无浸蚀现象.通过实验研究掌握了金锡焊料的制备和烧结技术,并与铟焊料、锡铅焊料进行了对比实验.实验结果显示采用金锡焊料烧结激光器可获得更好的性能,是提高半导体激光器可靠性的有效途径.     

激光二极管合束模块整体散热热阻分析

半导体激光器散热是在热源至热沉之间尽可能提供一条低的热阻通路。其主要目的是降低外热阻(即激光器芯片至散热空间的热阻),使发热激光器芯片与被冷却表面之间保持一个低的温度梯度和良好的热接触。对于接触热阻冷却方法,人们往往根据自身的研究对象,用实验方法来解决接触热阻的问题。通过对单管合束模块整体热阻逐步进行分析,通过软件模拟和结合频率红移法对激光二极管热阻进行测量,得出单管合束模块整体散热热阻小于0.25 ℃/W。此散热模块可以满足百瓦级半导体激光器的散热要求。     

焊料空隙对条形量子阱激光器温度布的影响

针对量子阱半导体激光器建立了内部的热源分布模型,利用有限元方法模拟计算得到了条形量子阱半导体激光器的三维稳态温度分布,分析了芯片与热沉间的焊料空隙对芯片内部稳态温度分布的影响.模拟结果表明焊料空隙的位置和尺寸都将影响到芯片内部的温度分布,焊料空隙的存在将导致空隙上方的芯片内部出现局部热点.随着焊料空隙的增大,芯片内热点区域增大,温度增高.位于芯片的条形电极中心下方的焊料空隙引起的芯片内部局部温升最大,并且沿腔长方向光出射腔面上温度相对较高,易引起光出射腔面上正反馈的电热烧毁,与实验结果吻合.     

焊料空隙对条形量子阱激光器温度分布的影响

针对量子阱半导体激光器建立了内部的热源分布模型,利用有限元方法模拟计算得到了条形量子阱半导体激光器的三维稳态温度分布,分析了芯片与热沉间的焊料空隙对芯片内部稳态温度分布的影响.模拟结果表明焊料空隙的位置和尺寸都将影响到芯片内部的温度分布,焊料空隙的存在将导致空隙上方的芯片内部出现局部热点.随着焊料空隙的增大,芯片内热点区域增大,温度增高.位于芯片的条形电极中心下方的焊料空隙引起的芯片内部局部温升最大,并且沿腔长方向光出射腔面上温度相对较高,易引起光出射腔面上正反馈的电热烧毁,与实验结果吻合.     

Thermal simulation of joints with high thermal conductivities for power electronic devices

The thermal properties of new power modules joined by materials with high thermal conductivities, such as Ag or Cu nanoparticle joints, can differ from those of current modules joined by ordinary solders with low thermal conductivities. However, these properties have not been thoroughly investigated thus far. The overall thermal resistance of a simple simulation module was calculated by the 3-dimensional finite element method to study the correlation between the thermal conductivity of the joint layer and the thermal properties. The calculation results identified an optimal thickness to achieve the minimum thermal resistance when the thermal conductivity of the joint layer is much higher than that of the heatsink. This is presumed to occur because the thermal resistance decreases in the heatsink much more than it increases in the joint layer, owing to the increased uniformity of thermal spreading as the joint-layer thickness increases to the optimal value. This effect of thermal resistance reduction with thickening of the joint layer is seen when the thermal conductivity of the joint layer is sufficiently higher than that of the heatsink and the area of the joint layer is sufficiently smaller than that of the heatsink. The same effect is also expected in an actual module with a joint between a silicon carbide chip and a direct bonded copper substrate. This study reveals that the design concept for power modules should change to preliminarily estimate the optimal thickness to achieve the minimum thermal resistance when the thermal conductivity of the joint layer is much higher than that of the heatsink.     

用于大功率半导体激光器的新型焊料

在大功率半导体激光器列阵及叠阵的组装中,焊料的选择是极其关键的,因为焊料直接参与对激光器的导电、导热激光器所需的电流全部从焊料通过,而半导体激光器列阵或叠阵工作时电流是很大的,可达50A～100A。同时半导体激光器工作时产生的热量非常大,如焊料的导热性不好,由于电流的热效应,就会在焊料上产生巨大的热量,使焊料熔化。文中研制了一种新型的焊料,这种焊料在两层铟之间蒸镀几层金,焊料由钨/镍/金/铟/铜等多层金属构成。利用这种焊料研制出脉冲功率达100W的半导体激光器列阵。     

基于ANSYS的半导体激光器热特性模拟

介绍了ANSYS有限元软件在半导体激光器热特性模拟中的应用,计算了一个单量子阱980nm半导体激光器在脉冲下的瞬态热分布图,结果表明使用AN'Y'软件进行热分析可以做到模型建立便捷,施加载荷直观,求解速度快,图形显示功能强大,可以推广到各类半导体激光器件的热学特性分析中去.     

A Pyrenylpropyl Phosphonic Acid Surface Modifier for Mitigating the Thermal Resistance of Carbon Nanotube Contacts

Efforts to utilize the high intrinsic thermal conductivity of carbon nanotubes (CNTs) for thermal transport applications, namely for thermal interface materials (TIMs), have been encumbered by the presence of high thermal contact resistances between the CNTs and connecting materials. Here, a pyrenylpropyl‐phosphonic acid surface modifier is synthesized and applied in a straight forward and repeatable approach to reduce the thermal contact resistance between CNTs and metal oxide surfaces. When used to bond nominally vertically aligned multi‐walled CNT forests to Cu oxide surfaces, the modifier facilitates a roughly 9‐fold reduction in the thermal contact resistance over dry contact, enabling CNT‐based TIMs with thermal resistances of 4.6 ± 0.5 mm² K W^?1, comparable to conventional metallic solders. Additional experimental characterization of the modifier suggests that it may be used to reduce the electrical resistance of CNT‐metal oxide contacts by similar orders of magnitude.     

Characterization of solder interfaces using laser flash metrology

Thermal conductivity and normalized thermal resistance measurements on eight bulk solders and three tri-layer samples were performed using the laser flash technique. In this study, the laser flash technique is demonstrated to be capable of measuring thermal conductivity of 0.7-mm-thick solders ranged from 20 to 90 W/m K with an average uncertainty of 11%. Laser flash was then used to measure the intrinsic thermal resistance of Cu/Solder/Cu, tri-layer sandwich structures. Analysis shows that the total intrinsic thermal resistance measurement is confounded by sample voiding. C-SAM scanning ultrasonic microscope metrology was shown to be useful in providing information regarding solder voiding and the quality of the solder/copper interfaces. The laser flash method also proved to be useful in assessing voiding effects resulting from different assembly processes and different contacting surfaces on package thermal performance.     

Effect of silver content on thermal fatigue life of Sn-xAg-0.5Cu flip-chip interconnects

The thermal fatigue properties of Sn-xAg-0.5Cu (x=1, 2, 3, and 4 in mass%) flip-chip interconnects were investigated to study the effect of silver content on thermal fatigue endurance. The solder joints with lower silver context (x=1 and 2) had a greater failure rate compared to those with higher silver content (x=3 and 4) in thermal fatigue testing. Cracks developed in the solders near the solder/chip interface for all joints tested. This crack propagation may be mainly governed by the nature of the solders themselves because the strain-concentrated area was similar for tested alloys independent of the silver content. From the microstructural observation, the fracture was a mixed mode, transgranular and intergranular, independent of the silver content. Higher silver content alloys (x=3 and 4) had finer Sn grains before thermal cycling according to the dispersion of the Ag₃Sn intermetallic compound, and even after the cycling, they suppressed microstructural coarsening, which degrades the fatigue resistance. The fatigue endurance of the solder joints was strongly correlated to the silver content, and solder joints with higher silver content had better fatigue resistance.     

The Shear Strength and Fracture Behavior of Sn-Ag-<Emphasis Type="Italic">x</Emphasis>Sb Solder Joints with Au/Ni-P/Cu UBM

This study investigates the effects of Sb addition on the shear strength and fracture behavior of Sn-Ag-based solders with Au/Ni-P/Cu underbump metallization (UBM) substrates. Sn-3Ag-xSb ternary alloy solder joints were prepared by adding 0 wt.% to 10 wt.% Sb to a Sn-3.5Ag alloy and joining them with Au/Ni-P/Cu UBM substrates. The solder joints were isothermally stored at 150°C for up to 625 h to study their microstructure and interfacial reaction with the UBM. Single-lap shear tests were conducted to evaluate the mechanical properties, thermal resistance, and failure behavior. The results show that UBM effectively suppressed intermetallic compound (IMC) formation and growth during isothermal storage. The Sb addition helped to refine the Ag₃Sn compounds, further improving the shear strength and thermal resistance of the solders. The fracture behavior evolved from solder mode toward the mixed mode and finally to the IMC mode with increasing added Sb and isothermal storage time. However, SnSb compounds were found in the solder with 10 wt.% Sb; they may cause mechanical degradation of the solder after long-term isothermal storage.     

固体激光器热效应引起像差的研究

利用哈特曼波前探测器测量固体激光器中由热效应引起的像差,通过与理论计算得到的像差进行比较,修正理论计算中的不足。在热效应分析的基础上,计算固体激光器中由热效应引起的动态畸变,并以像差的形式表示,像差形式只包括均匀相移和纵向离焦,其他像差形式为零。对固体激光器像差的测量结果进行分析,得出实验中测得的固体激光器中由热效应引起的动态热畸变,并利用三维相位畸变显示动态热畸变,给出动态热畸变的像差形式,其中主要的像差为纵向离焦。