掠出射X射线荧光光谱仪研制

掠出射X射线荧光分析技术是分析薄膜特性和介质表面的一种重要工具.文中简述了利用掠出射X射线荧光技术分析薄膜厚度的原理和方法,介绍了一种在实验室里由激发光源、样品承载系统、色散系统、探测系统和数据收集及处理系统构成的掠出射X射线荧光光谱仪系统,并给出了利用⁵⁵Fe放射性同位素标定该光谱仪系统的试验结果.     

掠出射X射线荧光分析技术与掠入射X射线荧光分析技术

依据工作原理,比较了掠出射X射线荧光分析技术(GEXRF)和掠入射X射线荧光分析技术(GI-XRF)的优缺点,比较角度包括实验装置、探测限、可探测元素范围、基体效应以及实验精度.比较结果表明,GEXRF的优点体现为:对实验装置要求低,对轻元素(4＜Z＜20)特别灵敏,能对大样品进行检测,实验精度高;缺点体现为:临界厚度小,探测限高."对轻元素特别灵敏"的特点决定了GEXRF的应用领域将主要集中在化学元素微量和痕量分析以及半导体工业中Si薄膜表面轻元素检测等方面.     

整体多毛细管X光透镜在扩展X射线 吸收精细结构分析技术中的应用

为了将整体多毛细管X光透镜应用到扩展X射线吸收精细结构分析技术中,对整体多毛细管X光透镜的功率密度增益、光斑稳定性、高能滤波性质等进行了系统表征。通过实验可知,利用基于整体多毛细管X光透镜的扩展X射线吸收精细结构分析设备可对样品进行微区分析,其空间分辨为25 μm左右;利用整体多毛细管X光透镜会聚激光等离子体发出的X射线进行超快时间分辨扩展X射线吸收精细结构分析时,透镜的功率密度增益约为3 000。实验结果证明,整体多毛细管X光透镜可以改善扩展X射线吸收精细结构分析设备的性能。     

大高宽比、高线密度X射线透射光栅的制作

利用电子束光刻、X射线光刻和微电镀技术,成功制作了面积为1 mm × 1 mm,周期为300 nm,金吸收体厚度为1 μm的用于X射线显微成像技术的透射光栅。首先利用电子束光刻和微电镀技术在Si3N4薄膜上制作周期为300 nm,厚度为250 nm的高线密度光栅掩模。然后利用X射线光刻和微电镀技术复制厚度为1 μm,占空比接近1：1,高宽比为7的X射线透射光栅。整个工艺流程充分利用了电子束光刻技术制作高分辨率图形和X射线光刻技术制作大高宽比结构的优点     

基于XRD的Al2O3纳米薄膜残余应力测试

利用X衍射技术测试了物理气相沉积Al2O3纳米薄膜的残余应力，分析了薄膜和基体间的应力测试原理，讨论了沉积温度、沉积速度和薄膜厚度等技术参数对残余应力的影响。实验结果表明，随着沉积温度升高，Al2O3薄膜残余应力值增大；当沉积速度增加时，Al2O3薄膜的残余应力增大，且从拉应力变为压应力；由于热膨胀系数的不同而产生热拉应力和温度不同产生马氏体相变的残余压应力，残余应力值先是随着晶化温度的升高而下降，然后随之而上升，在400℃进行晶化处理时，残余应力值表现为最小；残余应力随着薄膜厚度的增加而不断增大，当薄膜厚度较小时，薄膜残余应力的变化比较平缓，残余应力值较小，有利于提高薄膜界面结合强度。选择合理的薄膜制备参数，能精确地控制薄膜的残余应力，从而达到提高其结合强度的目的。     

硫化锌纳米粒子的X射线衍射研究

利用X射线衍射技术对硫化锌纳米粒子进行了测试分析,详细研究了X射线衍射过程中扫描狭缝、接收狭缝、电压、电流、扫描速度及步长等参数对产物衍射峰的影响,优化出适合硫化锌纳米粒子的最佳测试参数,并利用最佳的X射线衍射曲线对产物进一步深入分析,获得硫化锌纳米粒子的粒径和晶格参数等信息,为X射线衍射技术在纳米材料领域的应用提供了实例。     

PMMA材料制作X射线组合透镜技术研究

给出了基于衍射理论的评价X射线聚焦组合透镜三维聚焦性能的理论方法.利用该理论方法分析得出X射线组合透镜的聚焦性能与透镜的工作波长、透镜材料、单元透镜数量及凹面半径等参数之间的关系.用LIGA技术中的软X射线光刻方法制作了PMMA材料X射线组合透镜.该组合透镜由40个平凹折射单元依次排列而成,相邻的两透镜单元彼此相切,凹面半径分别为200 μm,400 μm,500 μm,600 μm,700 μm.此外,X射线组合透镜的表面粗糙度测试结果表明,粗糙度均方根值小于50 nm.     

聚甲基丙烯酸甲酯材质硬X射线组合Kinoform透镜的制作

为提高硬X射线聚焦元件的聚焦性能,利用LIGA(Lithographie,Galvanoformung,Abformung)技术,制备了深度为60μm的聚甲基丙烯酸甲酯(PMMA)材质硬X射线组合Kinoform透镜(CKL),并获得了良好的面形。制备的CKL以宽度为几个微米的细窄线条为主要结构,包括曲面和直角面形,线条最窄宽度为2μm。为保证CKL良好的曲面及直角结构,样品制备分为三部分:过渡掩模板的制备,LIGA掩模板的制备,以及最终样品的硬X射线曝光制备。在LIGA掩模板制备过程中,采用制备有纳米柱阵列的硅衬底有效解决了光刻胶脱胶的问题。在最终样品制备过程中,选用分子量较高的PMMA片作衬底,提高了PMMA刚度,有效缓解了细窄线条的倒塌黏连问题,保证了CKL的良好面形。在北京同步辐射光源(BSRF)成像站测试了CKL透镜的性能,结果显示其对于8keV的X射线,聚焦焦斑的半高全宽(FWHM)为440nm。     

用离子束溅射法制备X射线多层膜的实验和工艺

叙述了用离子束溅射镀膜机进行X射线波段多层膜镀膜实验及制备X射线多层膜光学元件方面的工作，简述离子束溅射镀膜机的工作原理，X射线多层膜的制备过程，主要工艺参数及注意事项，以及用X射线小角衍射仪对制备样品进行检测的部分结果。     

惯性约束聚变靶丸高精度X射线数字成像

为了实现惯性约束聚变(ICF)靶丸几何尺寸的高精度、高效率检测,开展了靶丸X射线数字化成像系统的设计与研制。首先,分析了X射线直接投影成像和X射线透镜耦合显微成像的适用范围,根据ICF靶丸尺寸小、吸收衬度弱的特点,确定了基于X射线透镜耦合显微成像的技术路线。然后,分析了影响系统成像分辨率、图像衬度和测量效率的关键因素,确定了低几何放大成像,低电压、小焦点、高功率X射线源及高分辨CCD探测的总体技术方案,该方案能够有效抑制相衬效应和半影误差,解决了现有X射线数字成像设备测量靶丸时边缘扩展严重、尺寸测量误差大的问题。最后,对系统的性能进行了分析测试,实验结果表明,系统成像衬度良好,成像效率较高,分辨率优于0.5μm。靶丸几何尺寸的测量不确定度可达0.9μm(k=2),满足ICF靶丸几何尺寸高精度、高效率的检测需求。     

Thermal elastohydrodynamic lubrication of starved elliptical contacts

For the starved thermal elastohydrodynamic lubrication in elliptical contacts, a numerical solver based on the multi-grid technique was developed and numerical solutions were achieved. The influences of the thickness of oil-supply layer, elliptical ratio, entrainment velocity, slide-roll ratio, and the maximum Hertzian pressure on the lubrication behaviour were investigated. The thermal solutions were compared with isothermal solutions. The numerical results show that, for an oil-starved contact, the central and minimum film thicknesses predicted by both thermal and isothermal solutions change at the same trend as the thickness of the oil-supply layer increases. That is, as the thickness of the oil-supply layer increases, in the beginning both the central and minimum film thicknesses increase rapidly, however, their increasing rates become smaller gradually, at last, when the thickness of the oil-supply layer reaches a certain value, both the central and minimum film thicknesses almost stop increasing. Such situation was called a quasi-fully flooded state in this study. It has been found that the amount of the supplied oil for the quasi-fully flooded state differs with the elliptical ratio, and the maximum amount of the supplied oil is required by a circular contact.     

Minimum and central film thickness formulae for an elastic layer firmly bonded to a rigid cylindrical substrate under entraining motion

Analytical minimum and central film thickness formulae have been derived for elastic layers firmly bonded to rigid cylindrical substrates under entraining motion when the contact width is significantly larger than the layer thickness. The elastic layer has been assumed to be either a compressible or an incompressible material; the corresponding Poisson's ratios are assumed to be 0.4 and 0.5 respectively. Good agreement has been found between the film thicknesses predicted by these film thickness formulae and some numerical solutions for similar conditions. Good agreement has also been found with the general full numerical solution for incompressible elastic layered surfaces.     

Confined fluid compressibility predicted using molecular dynamics simulation

Fluid compressibility is investigated using molecular dynamics simulation of three fluids with distinct molecular shapes confined to various film thicknesses and subject to a wide range of loads. The effects of film thickness and fluid structure are evaluated, and the simulated densities are compared to predictions of an empirical, bulk fluid compressibility model. Results show that thin films are less compressible than their bulk counterparts and that this difference is related to the effect of confinement on molecular ordering. Additionally, it is found that molecular dynamics simulation can predict bulk compressibility if the model film thickness is sufficiently large.     

点接触弹流润滑供油条件退化的乏油分析

在点接触弹流润滑中,如果不能及时补充新油,则接触区的供油条件会随着润滑次数而退化。分析了供油油膜厚度、中心膜厚、最小膜厚和润滑油膜压力区形成位置与润滑次数的关系。结果表明:润滑开始时,由于供油油膜厚度较大,系统处于充分供油状态;随着润滑次数的增加,有一部分油从两侧泄漏,系统逐渐转到乏油状态,供油油膜厚度、中心膜厚和最小膜厚均逐渐变小,压力区形成位置则逐渐向Hertz接触区靠近;最终供油油膜厚度、中心膜厚和最小膜厚趋于定值,压力区趋于Hertz接触区,从而达到一种稳定乏油状态。     

真空紫外波段Al膜保护层MgF_2的光学常数

由于Al膜的保护层MgF_2薄膜的光学常数对Al/MgF_2高反射镜的性能有极大的影响,本文研究了获取MgF_2薄膜光学常数的方法。用热舟蒸发的方法在室温B270基底上镀制了3块不同MgF_2厚度的Al/MgF_2反射镜样品,通过掠入射X射线小角反射方法表征样品,获得了膜层厚度和粗糙度。在国家同步辐射实验中心计量站测试了入射角为5°时,样品在105~130nm波段的反射率。在Al、MgF_2膜层的厚度和Al的光学常数已知条件下,依据菲涅尔公式,得出了满足某波长处样品反射率的等值曲线,然后从三条曲线的交点得出了MgF_2薄膜在108~128nm波段的光学常数。对比和分析显示:利用此方法得到的108~128nm波段MgF_2薄膜光学常数计算的反射率曲线和实际测试得到的反射率曲线吻合较好。     

Quantitative elastohydrodynamic film thickness of mechanically degraded oil

The low-shear viscosities of new oil and used (degraded) oil were measured to moderately high pressure. Shear-thinning flow curves were generated over a range of shear stress important to EHL film forming. Mechanical shear degradation only affected the viscosity at low shear stress while the viscosity at high stress remained unchanged. A recently published film thickness equation for double-Newtonian shear-thinning, employing the measured rheology, predicts the surprising result that thickness of the EHL film was not changed by the degradation although the low-shear viscosities were reduced substantially. Colorimetric measurements of the film thicknesses validate the predictions. Concern over the permanent loss in viscosity due to degradation may be misplaced when addressing EHL films.     

In situ 3D measurement of lubrication behavior at interface between tool and workpiece by direct fluorescence observation technique

A new direct observation method, which is based on an optical microscopy and a conventional fluorescence method, is developed in order to measure the oil film thickness at the interface between the tool and the workpiece in lubricated upsetting. The oil film thickness is measured using this method. The oil film thickness and the distribution at the interface during lubricated upsetting can be measured three dimensionally. The calculated central thicknesses at the instant of entrapment are in good agreement with the measured ones for lubricants with higher viscosity at higher compression speed. The 3D surface topography of workpiece at the end surface can be clearly visualized.     

Film Thickness of Ionic Liquids Under High Contact Pressures as a Function of Alkyl Chain Length

Ionic liquids are generally considered as environmentally friendly material. The film thicknesses of ionic liquids and silicone oils at high pressures up to 3 GPa are measured employing the relative optical interference intensity method. The results show that for the three ionic liquids the relative order of film thickness is 1-octyl-3-methylimidazolium hexafluorophosphate ([OMIM]PF₆) > 1-hexyl-3-methylimidazolium hexafluorophosphate ([HMIM]PF₆) > 1-butyl-3-methylimidazolium hexafluorophosphate ([BMIM]PF₆). In elastohydrodynamic lubrication the order of viscosity can simply account for this fact. In thin film lubrication condition the length of alkyl side chain and arrangement manner of cation are used to explain the experimental results. Another remarkable phenomenon is that even though the viscosities of silicone oils are close to those of ionic liquids, the measured film thicknesses of silicone oils are quite less than those of the ionic liquids. The results show that long alkyl chain ionic liquid can form rather thick films at high pressure.     

机械结构液体层厚度超声谐振的测量方法

针对机械结构安全运行的需要,进行机械结构液体层厚度超声谐振测量方法研究。基于垂直入射纵波在三层介质中传播的连续模型,通过对不同厚度液体层超声反射系数分析,提出一种基于超声反射系数谐振频率的液体层厚度测量方法。在对超声谐振测量系统进行标定的基础上,进行机械结构液体层厚度超声谐振测量试验研究,同时研究了3层介质的声学特性对液体层超声反射系数及厚度测量的影响。结果表明,液体层反射系数的谐振频率能够表征其厚度。在对测量系统进行标定的基础上,测量误差基本保持在5%以内。液体层两侧介质材料的变化对液体层的测量基本没有影响,但液体层介质材料的变化将对测量系统产生影响,需要重新对测量系统进行标定。     

The film-forming properties of polyalkylene glycols

It is now recognised that, for many practical applications, an important property of a lubricant is its ability to generate thick, elastohydrodynamic (EHD) films in concentrated contacts. This paper describes a study of the EHD film- forming properties of polyalkylenie glycol lubricants. A wide range of polyglycol structures have been examined, with different monomer types, initiators, and molecular weights. Film thickness has been measured at several different temperatures using both conventional and ultra-thin film interferometry. From the measured film thicknesses, the effective pressure–viscosity coefficients of the lubricants have been evaluated. This has enabled a systematic investigation of the effect of polyalkylene glycol structure on both pressure–viscosity coefficient and EHD film formation.