毫米级微型装配机器人虚拟绕组定位精度控制方法研究

提出了基于电磁型微马达的毫米级微型机器人的高定位精度控制方法。该方法通过虚拟绕组的概念,克服了微型马达加工工艺的限制性,实现了微型机器人的高精度定位,满足了微型零件装配任务的要求。     

一种硅基静电微马达

本文介绍我们最近研制的一种硅基集成微马达。其制作工艺非常简单，仅包括四次光刻，两次多晶硅薄膜淀积和两次ＳｉＯ２牺牲层淀积。实现了快速、方便及批量地制作测量分析用的微马达样品。该微马达转子和定子由厚度为２．５μｍ左右的ＬＰＣＶＤ多晶硅膜一次形成，因而转子与定子的间距可减小到１．０￣１．５μｍ。     

微纳马达及其制备和应用研究进展

微纳马达是指尺寸在纳米或者微米级别的,可以运动的,具备特殊功能或能执行微观体系任务的器件。由于其在化学,环境以及生物医药领域都具有良好的应用前景,因此,微纳马达已成为当今纳米工程领域一个重要的前沿研究方向。近几年来,微纳马达发展迅速,其制备方法和应用领域均得了很大进展。基于微纳马达不同的运动机理,建立了多种低成本易操作的制备方法,出现了各种不同形状不同功能的微纳马达。这些微纳马达在诸如物质识别,蛋白质传递,DNA识别,癌细胞捕捉,细菌隔离,油污处理等方面的应用被相继报道,并引起了人们的巨大兴趣。如何精确调控微纳马达的运动行为,使其在微观系统中完成各种复杂的任务已成为当今微纳马达研究的发展趋势。本文就微纳马达的分类、工作原理、制备方法及其应用进行了全面介绍,以期促进我国今后在该领域的研究。     

一种微型转子的激光加工和光致旋转

利用单束强聚焦激光产生的光学力可以驱动微型器件,具有无机械接触和无需导线等优点,为微型机电系统提供了一种新型的驱动方式。在自行研制的飞秒激光微细加工系统中,采用一种新型的丙烯酸酯紫外光固化树脂,通过双光子聚合加工出直径6μm的万字形微转子。利用光镊装置实现了微转子的俘获,并在激光功率50mW时实现了转速为200rpm的光致旋转。微型转子的光致旋转为实现微机械马达提供了一种有效手段。     

微纳马达行为控制与驱动燃料研究

人造微米马达是一种通过特定工艺制备而成的微米尺寸器件,在特定刺激下,能够实现各种各样的机械运动。微纳马达发展至今,取得了很多重大的突破和进展,科学家们通过多种材料制备了能在不同化学燃料中运动的微纳马达。主要对微纳马达行为控制与驱动燃料进行研究。     

微机械加工的微型压电行波马达

在分析压电行波马达工作原理的基础上，采用微机械加工工艺分析研制成定子和转子，并通过微组装得到了完整的微机械压电马达，马达定子，转子的尺寸均为２ｍｍ，初步实验表明，在小于１０伏交流信号激励下，马达旋转转速可达到的５０ｒｐｍ。     

使用聚酰亚胺通过两次刻蚀制备微马达线圈

采用感光性聚酰亚胺和高粘附性聚酰亚胺双层刻蚀技术,在基片上制备了微马达线圈的定子绕组。该工艺不仅工艺简单,而且保留聚酰亚胺作为线圈的绝缘层,提高了微马达线圈的绝缘性能和耐热性能,使微马达的整体性能得到了提高。     

基于戊二醛偶联技术制备脲酶-Au-MMP“双面神”酶驱动马达及其运动性能

采用磁控溅射技术在磁性微球的半球上溅射Au层,得到Au-磁性微球(MMP)粒子;在Au侧依次偶联半胱胺、戊二醛(GA)和脲酶制备脲酶-Au-MMP"双面神"酶驱动马达;并采用场发射扫描电子显微镜、能谱仪和光学显微镜对马达形貌、成分以及运动性能进行表征。结果表明:脲酶-Au-MMP马达呈"双面神"结构,Au侧表面粗糙; C和Fe元素均匀分布在整个球体上,Au元素只分布在马达的半球上;脲酶不对称修饰在马达的半球上;尿素燃料浓度的提高可以有效提高马达的运动速率,当尿素浓度为10 mmol/L时,其运动速率可达3. 75μm/s;马达是以磁性微球作为基体,其运动方向可以通过外部磁场的进行精确控制。     

电磁型微马达的研究

用微细加工和精密加工相结合的方法研制成结构新颖的直径为２ｍｍ的电磁型微马达，其速度可调，转向可逆，较详细地讨论了电磁型微马达的驱动原理和制备工艺。     

一种新型压电微马达的致动机理分析

 研制高性能、微体积的微型马达将极大地促进微机械电子系统的发展.给出了一种结构简单、易于微型化的压电致动马达.利用振动学理论,建立了其振动模型,并在此基础上进行了运动和动力特性分析.     

Light‐Driven ZnO Brush‐Shaped Self‐Propelled Micromachines for Nitroaromatic Explosives Decomposition

Self‐propelled micromachines have recently attracted lots of attention for environmental remediation. Developing a large‐scale but template‐free fabrication of self‐propelled rod/tubular micro/nanomotors is very crucial but still challenging. Here, a new strategy based on vertically aligned ZnO arrays is employed for the large‐scale and template‐free fabrication of self‐propelled ZnO‐based micromotors with H₂O₂‐free light‐driven propulsion ability. Brush‐shaped ZnO‐based micromotors with different diameters and lengths are fully studied, which present a fast response to multicycles UV light on/off switches with different interval times (2/5 s) in pure water and slow directional motion in aqueous hydrogen peroxide solution in the absence of UV light. Light‐induced electrophoretic and self‐diffusiophoretic effects are responsible for these two different self‐motion behaviors under different conditions, respectively. In addition, the pH of the media and the presence of H₂O₂ show important effects on the motion behavior and microstructure of the ZnO‐based micromotors. Finally, these novel ZnO‐based brush‐shaped micromotors are demonstrated in a proof‐of‐concept study on nitroaromatic explosive degradation, i.e., picric acid. This work opens a completely new avenue for the template‐free fabrication of brush‐shaped light‐responsive micromotors on a large scale based on vertically aligned ZnO arrays.     

微操作机器人及其显微视觉伺服控制系统的研究

介绍了一种在生物医学工程领域用于完成显微操作的微驱动机器人系统 ,包括其物理结构和逻辑结构。该系统采用基于梯度方差方法恢复显微图像深度信息的显微视觉伺服控制策略以提高该机器人操作精度。目前 ,该机器人系统已成功地完成了人类血液红细胞的分离实验。     

微细超声工作台的设计与微振幅测量

微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件,其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率,提出了一种恒力控制的微振幅测量方法,成功的测量出能精确到0.1微米的微振幅。本文首先对微细超声工作台中的微细超声振动系统进行了理论设计,然后采用基于恒力控制的超声振幅测量方法,对不同功率作用下的微细超声振动系统的振幅值进行了测量。     

钢丝磷化层质量评定的研究

应用微观形貌、显微硬度和声发射技术对石钢丝表面的磷化层进行了分析和测定，发现磷化层的质量与微观组织、显微硬度值和声发现信号特征有着很好的对应关系。这三种试验数据可作为磷化层质量评估的判据。     

光成型技术在微小机械加工中的应用

探讨了光成型技术用于微小机械加工的可能性,由于微小机械具有要求成型分辨率高,存在尺度效应等特点,微小机械光成型工艺有着不同于一般光成型工艺的特殊问题及关键技术。报道了关于微小机械光成型特殊工艺的研究,微小机械光成型实验系统建造和调试以及光成工艺的实验研究等方面的结果。     

微小管道探测机器人系统

阐述了在国家高技术研究与发展计划的资助下,在研制TubotⅠ、TubotⅡ机器人系统过程中取得的主要进展。该微小管道探测机器人系统由管内移动机构、驱动与控制系统、管道缺陷信号检测系统等几个部分组成。     

Magnetically Powered Shape‐Transformable Liquid Metal Micromotors

Shape‐transformable liquid metal (LM) micromachines have attracted the attention of the scientific community over the past 5 years, but the inconvenience of transfer routes and the use of corrosive fuels have limited their potential applications. In this work, a shape‐transformable LM micromotor that is fabricated by a simple, versatile ice‐assisted transfer printing method is demonstrated, in which an ice layer is employed as a “sacrificial” substrate that can enable the direct transfer of LM micromotors to arbitrary target substrates conveniently. The resulting LM microswimmers display efficient propulsion of over 60 µm s^?1 (≈3 bodylength s^?1) under elliptically polarized magnetic fields, comparable to that of the common magnetic micro/nanomotors with rigid bodies. Moreover, these LM micromotors can undergo dramatic morphological transformation in an aqueous environment under the irradiation of an alternating magnetic field. The ability to transform the shape and efficiently propel LM microswimmers holds great promise for chemical sensing, controlled cargo transport, materials science, and even artificial intelligence in ways that are not possible with rigid‐bodies microrobots.     

Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes

Out-of-plane type piezoelectric micro grippers (briefly, OPPMG) actuated by micro cantilevers using sol-gel multi-coated PZT (Pb(Zr_0.52Ti_0.48)O₃) films with the thickness of 1.2 μm were newly designed and fabricated using MEMS processes. Electromechanical and gripping characteristics of fabricated micro PZT cantilevers and OPPMG using them have been investigated. Two types of micro PZT cantilevers were fabricated with two types of supporting layers, respectively. The OPPMG was formed by two micro PZT cantilevers of the same type facing each other across the spacer of polyimide (PI). Precise gripping and positioning of metallic ball with diameter of 100 μm using fabricated OPPMGs was successfully done at a low actuating voltage of 7 V, without any adhesion problems between two jaws of gripper and the ball.     

Vibration-Driven Microrobot Positioning Methodologies for Nonholonomic Constraint Compensation

This paper presents the formulation and practical implementation of positioning methodologies that compensate for the nonholonomic constraints of a mobile microrobot that is driven by two vibrating direct current(DC) micromotors. The open-loop and closed-loop approaches described here add the capability for net sidewise displacements of the microrobotic platform. A displacement is achieved by the execution of a number of repeating steps that depend on the desired displacement, the speed of the micromotors, and the elapsed time. Simulation and experimental results verified the performance of the proposed methodologies.     

新型平面直线驱动系统及其在机器人末端操作器中的应用

研制了一种机器人微驱动末端操作器用新型二自由度平面直线驱动系统 ,该二自由度电动机由于在X及Y方向采用共用永磁体的结构 ,与传统电机系统比较具有较高的性能体积比 ,应用于实际操作器系统中取得良好的效果