基于主动红外的倒装芯片缺陷检测研究

传统的倒装芯片无损检测技术并不能完全满足倒装焊检测需要,为此提出了一种基于主动红外的倒装芯片缺陷检测方法。通过非接触方式对倒装芯片施加热激励,并结合红外测温设备检测芯片温度分布情况,从而对芯片内部缺陷进行诊断与识别。实验研究表明,该方法能较好地检测出倒装焊点缺陷,可应用于倒装焊芯片的缺陷检测与诊断研究。     

倒装芯片热电极键合工艺研究

文章将论述一种无掩模制造细小焊料凸点技术。利用热电极键合工艺将带有凸点的倒装芯片焊到基板上。此项工艺能将间距小至40μm的倒装芯片组装到基板上。文章也论述了间距为40μm、电镀AuSn钎料凸点的倒装芯片组装工艺技术。金属间化合物相的形成对焊点可靠性有重要影响,尤其是对于细小焊点。文中研究了金属间化合物相的形成与增加对可靠性的影响。讨论分析了热循环和湿气等可靠性试验结果。     

Solder wetting in a wafer-level flip chip assembly

Wafer-level flip chips provide an innovative solution in establishing flip chip as a standard surface mount process. In this paper, the wetting of solder bumps within confining underfill during the reflow of a wafer-level flip chip assembly is addressed. For real time monitoring of an assembly during the reflow process, a system using a high-speed camera is utilized. The collapse of solder bumps on the chip in the vertical direction is found to be a prerequisite of solder wetting. Underfill voids and outgassing are found to cause chip drift and tilt during the reflow process. In addition, symmetry of the underfill flow and fillet formation is identified as a critical factor in maintaining chip to substrate alignment. During solder wetting of the metallization pads on the substrate, the underfill needs to maintain a low viscosity. With the selection of a thermally stable underfill and corresponding process development, wafer-level flip chip assemblies with good solder interconnects are demonstrated     

Effect of Gold Stud Bump Topology on Reliability of Flip Chip on Flex Interconnects

The flip chip technique using conductive adhesives have emerged as a good alternative to solder flip chip methods. Different approaches of the interconnection mechanism using conductive adhesives have been developed. In this paper, test chips with gold stud bumps are flip-chipped with conductive adhesives onto a flexible substrate. An experimental study to characterize the bonding process parameters is reported. Initial results from the environmental studies show that thermal shock test causes negligible failure. On the other hand, high humidity test causes considerable failure in flip chip on flex assemblies. Improvements in the reliability of the assembly are achieved by modifying the shape of the gold stud bumps.     

Defect inspection of solder bumps using the scanning acoustic microscopy and fuzzy SVM algorithm

Flip chip technology has been extensively used in high density electronic packaging over the past decades. With the decrease of solder bumps in dimension and pitch, defect inspection of solder bumps becomes more and more challenging. In this paper, an intelligent diagnosis system using the scanning acoustic microscopy (SAM) is investigated, and the fuzzy support vector machine (F-SVM) algorithm is developed for solder bump recognition. In the F-SVM algorithm, we apply a fuzzy membership to input feature data so that the different input features can make different contributions to the learning procedure of the network. It solves the problem of feature data aliasing in the traditional SVM. The SAM image of flip chip is captured by using an ultrasonic transducer of 230 MHz. Then the segmentation of solder bumps is based on the gradient matrix of the original image, and the statistical features corresponding to every solder bump are extracted and adopted to the F-SVM network for solder bump classification and recognition. The experiment results show a high accuracy of solder defect recognition, therefore, the diagnosis system using the F-SVM algorithm is effective and feasible for solder bump defect inspection.     

Decapsulation Method for Flip Chips with Ceramics in Microelectronic Packaging

The decapsulation of flip chips bonded to ceramic substrates is a challenging task in the packaging industry owing to the vulnerability of the chip surface during the process. In conventional methods, such as manual grinding and polishing, the solder bumps are easily damaged during the removal of underfill, and the thin chip may even be crushed due to mechanical stress. An efficient and reliable decapsulation method consisting of thermal and chemical processes was developed in this study. The surface quality of chips after solder removal is satisfactory for the existing solder rework procedure as well as for die-level failure analysis. The innovative processes included heat-sink and ceramic substrate removal, solder bump separation, and solder residue cleaning from the chip surface. In the last stage, particular temperatures were selected for the removal of eutectic Pb-Sn, high-lead, and lead-free solders considering their respective melting points.     

一种低成本倒装芯片用印刷凸焊点技术的研究

利用化学镀底部金属化层结合丝网印刷制作凸焊点的技术,通过剪切实验得到了凸焊点的剪切强度,用电子显微镜对失效表面进行了分析研究,应用SEM及EDAX分析了凸焊点的组织结构与成分变化,对热老炼后凸焊点的强度变化进行了研究。结果表明凸焊点内部组织结构的变化是剪切失效的主要原因。经X光及扫描声学显微镜检测,表明组装及填充工艺很成功。对已完成及未进行填充的两种FCOB样品进行热疲劳实验对比,发现未进行填充加固的样品在115周循环后出现失效,而经填充加固后的样品通过了1 000周循环,表明下填料明显延长了倒装焊封装的热疲劳寿命。     

A novel approach for flip chip solder joint quality inspection:laser ultrasound and interferometric system

A novel, noncontact, nondestructive approach for flip chip solder joint quality inspection is presented. In this technique, a pulsed laser generates ultrasound on the chip's surface, exciting the whole chip into a vibration motion. An interferometer was used to measure the vibration displacement of the chip's surface. Because changes in solder joint quality produce a different vibration response, a value, "error ratio," is used to measure the difference between a good chip and a chip with defects. An automatic signal-processing algorithm to calculate the error ratio was developed and implemented, as well as a frequency analysis algorithm. The inspection system was characterized, and results are presented for two cases of flip chips with missing solder balls. Results indicate that a laser ultrasonic/interferometeric system offers great promise for solder bump inspection in flip chip, BGA, chip scale, and micro BGA packages     

基于小波分析的倒装芯片主动红外缺陷检测

随着微电子技术的需求和发展,倒装芯片技术在高密度微型化封装领域得到了快速发展和广泛应用,而现有的一些倒装芯片检测方法存在一定的不足之处。为此,研究了主动红外的倒装芯片缺陷检测方法。实验中使用激光加热对倒装样片施加非接触热激励,通过红外热像仪获取样片温度分布。采用小波分析方法提取包括小波熵在内的信号特征,采用自组织神经网络对不同类型焊球进行聚类识别。研究表明,通过自组织神经网络可以有效地将不同缺陷焊球与参考焊球通过距离映射法映射到不同区域从而区分开,并且可以将未知焊球信号映射到相应的区域实现聚类识别。因此该方法可以有效实现倒装芯片的缺陷检测。     

Effect of substrate flexibility on solder joint reliability

Solder joint fatigue failure is a serious reliability concern in area array technologies, such as flip chip and ball grid array packages of integrated-circuit chips. The selection of different substrate materials could affect solder joint thermal fatigue lifetime significantly. The reliability of solder joint in flip chip assembly for both rigid and compliant substrates was evaluated by accelerated temperature cycling test. Experimental results strongly showed that the thermal fatigue lifetime of solder joints in flip chip on flex assembly was much improved over that in flip chip on rigid substrate assembly. Debonding area of solder joints in flip chip on rigid board and flip chip on flex assemblies were investigated, and it was found that flex substrate could slow down solder joint crack propagation rate. The mechanism of substrate flexibility on improving solder joint thermal fatigue was investigated by thermal mechanical analysis (TMA) technique. TMA results showed that flex substrate buckles or bends during temperature cycling and this phenomenon was discussed from the point of view of mechanics of the flip chip assembly during temperature cycling process. It was indicated that the thermal strain and stress in solder joints could be reduced by flex buckling or bending and flex substrates could dissipate energy that otherwise would be absorbed by solder joints. It was concluded that substrate flexibility has a great effect on solder joint reliability and the reliability improvement was attributed to flex buckling or bending during temperature cycling.     

Genetic algorithms for defect detection of flip chips

Flip chip packaging technology is widely used in high density assembly and superior performance devices. The solder joints are sandwiched between dies and substrates, leading to the defects optically opaque. Defect inspection of flip chips become more difficult. In this paper, a nondestructive detection method was presented. Ultrasonic excitations were forced on the surface of the flip chips and the raw vibration signals were measured by a laser scanning vibrometer. Eleven time domain features and twenty-four frequency domain features were extracted for analysis. After that, the genetic algorithm was introduced for feature selection and the back propagation network was adopted for classification and recognition. The flip chips were divided into three categories: good flip chips, flip chips with missing solder joints, and flip chips with open solder joints. They are recognized under the features selected by genetic algorithms rapidly and accurately, compared with those under other feature datasets, demonstrating that the approach using genetic algorithms is effective for defect inspection in flip chip packaging.     

MECHATRONICS 2000. Seventh Mechatronics Forum InternationalConference and Mechatronics Education Workshop

The following topics are dealt with: flip chip solder joint quality inspection; direct chip attach packaging for microsystems; reliability analysis of no-underfill flip chip package; ASIC/memory integration by system-on-package; wafer-level and flip chip designs through solder prediction models and validation; reliability evaluation of under bump metallurgy in two solder systems; a method to improve the efficiency of the CMP process; thermal and reliability analysis of packaging systems     

Structural Modal Analysis for Detecting Open Solder Bumps on Flip Chips

Although flip chips have received wide acceptance as an integrated circuit package, significant manufacturing problems exist with the integrity of the connection between the package and the printed circuit board (PCB). Conventional X-ray, ultrasonic and electronic testing systems have been used to assess the integrity of this connection, however, none of these have proven suitable for detecting open solder bumps between the chip and the board. The inability to detect open solder bumps with traditional methods merits the investigation of new, nondestructive methods for detecting defects in a manufacturing environment. This work assesses the feasibility of monitoring the vibration characteristics of flip chips to detect open solder joints. Test vehicles with open solder joints were created, and a nondestructive laser ultrasonic system was used to measure the free vibration response of the chips attached to the printed circuit board. The algorithm of mode isolation (AMI) was applied to the vibration response data in order to extract the modal parameters of the chip. The statistical differences between the modal parameters of sets of damaged and undamaged chips were assessed, revealing the ability of the method to determine the location and severity of these defects in the presence of experimental scatter and manufacturing variation. The parameters of the first mode of vibration, especially its mode shape, were found to be much more sensitive to damage than those of a higher frequency mode.     

The effects of underfill on the reliability of flip chip solder joints

Thermal fatigue damage of flip chip solder joints is a serious reliability concern, although it usually remains tolerable with the flip chip connections (of smaller chips) to ceramic boards as practiced by IBM for over a quarter century. However, the recent trend in microelectronics packaging towards bonding large chips or ceramic modules to organic boards means a larger differential thermal expansion mismatch between the board and the chip or ceramic module. To reduce the thermal stresses and strains at solder joints, a polymer underfill is customarily added to fill the cavity between the chip or module and the organic board. This procedure has typically at least resulted in an increase of the thermal fatigue life by a factor of 10, as compared to the non-underfilled case. In this contribution, we first discuss the effects of the underfill to reduce solder joint stresses and strains, as well as underfill effects on fatigue crack propagation based on a finite element analysis. Secondly, we probe the question of the importance of the effects of underfill defects, particularly that of its delamination from the chip side, on the effectiveness of the underfill to increase thermal fatigue life. Finally, we review recent experimental evidence from thermal cycling of actual flip chip modules which appears to support the predictions of our model.     

Using GA-SVM for defect inspection of flip chips based on vibration signals

Flip chip technology has been widely used in IC packaging, and the combination of flip chip technology and solder joint interconnection technology has been utilized in the manufacturing of electronic devices universally. As the development of flip chip towards high density and ultra-fine pitch, the inspection of flip chips is confronted with great challenges. In this paper, we developed an intelligent system used for the detection of flip chips based on vibration. Thirty-four features including 18 time domain features and 16 frequency domain features were extracted from the raw vibration data. The support vector machine was employed to implement the recognition and classification of flip chips. In order to improve the classification accuracy of SVM, cross validation (CV) and genetic algorithm (GA) were utilized to optimize the parameters of SVM respectively. SVM, CV-SVM and GA-SVM were applied to classification separately and the results were obtained. By comparison, GA-SVM can recognize and classify the flip chips rapidly with high accuracy. Thus, GA-SVM is effective for the defect inspection of flip chips.     

Effect of substrate flexibility on solder joint reliability. Part II: finite element modeling

Solder joint fatigue failure is a serious reliability concern in area array technologies, such as flip chip and ball grid array packages of integrated-circuit chips. The selection of different substrate materials could affect solder joint thermal fatigue life significantly. The mechanism of substrate flexibility on improving solder joint thermal fatigue was investigated by thermal mechanical analysis (TMA) technique and finite element modeling. The reliability of solder joints in real flip chip assembly with both rigid and compliant substrates was evaluated by accelerated temperature cycling test. Finite element simulations were conducted to study the reliability of solder joints in flip chip on flex assembly (FCOF) and flip chip on rigid board assembly (FCOB) applying Anand model. Based on the finite element analysis results, the fatigue lives of solder joints were obtained by Darveaux’s crack initiation and growth model. The thermal strain/stress in solder joints of flip chip assemblies with different substrates were compared. The results of finite element analysis showed a good agreement with the experimental results. It was found that the thermal fatigue lifetime of FCOF solder joints was much longer than that of FCOB solder joints. The thermal strain/stress in solder joints could be reduced by flex buckling or bending and flex substrates could dissipate energy that otherwise would be absorbed by solder joints. It was concluded that substrate flexibility has a great effect on solder joint reliability and the reliability improvement was attributed to flex buckling or bending during temperature cycling.     

Thermomechanical Reliability Study of Flip Chip Solder Bumps: Using Laser Ultrasound Technique and Finite Element Method

Current techniques for nondestructive quality evaluation of solder bumps in electronic packages are either incapable of detecting solder bump cracks, or unsuitable for in-line inspection due to high cost and low throughput. As an alternative, a solder bump inspection system is being developed at Georgia Institute of Technology using laser ultrasound and interferometric techniques . This system uses a pulsed Nd:YAG laser to induce ultrasound in electronic packages in the thermoelastic regime; it then measures the transient out-of-plane displacement responses on the package surfaces using laser interferometric technique. The quality of solder bumps in electronic packages is evaluated by analyzing the transient responses. This paper presents a systematic study on thermomechanical reliability of flip chip solder bumps using laser ultrasound–interferometric inspection technique and finite element (FE) method. The correlation between the failure parameter extracted from FE simulation for evaluating solder bump reliability and quality degradation characterization of solder bumps through noncontact, nondestructive laser ultrasound testing has also been investigated.      

倒装芯片焊点可靠性的有限元模拟法综述

随着集成电路封装技术的发展,倒装芯片技术得到广泛的应用。由于材料的热膨胀失配,使倒装焊点成为芯片封装中失效率最高的部位,而利用快捷又极具参考价值的有限元模拟法是研究焊点可靠性的重要手段之一。介绍了集成电路芯片焊点可靠性分析的有限元模拟法,概括了利用该方法对芯片焊点进行可靠性评价常见的材料性质和疲劳寿命预测模型。     

A Modified Electromigration Test Structure for Flip Chip Interconnections

Due to decreasing dimensions, electromigration becomes a major concern for flip chip joint reliability. A novel test structure for in-situ monitoring of electromigration in a flip chip connection is proposed. With this structure, small resistance changes at the cathodic and anodic sides can be mounted separately. This allows studying the asymmetric behavior of solder joints under electromigration conditions. The design of the new test structure is described and compared to the traditional measurement method. As a first test case, a Cu–Sn–Cu flip chip joint, stressed with a current of 6000Amp/cm$^2$at 150$^circ$C, is studied. First tests clearly indicate diverging resistance values when comparing the cathodic and anodic side of the flip chip bumps. Microstructural analysis shows extensive Cu-migration from cathode to anode.     

Improved thermal fatigue reliability for flip chip assemblies usingredistribution techniques

The bond pad design on a chip can be reconfigured to a new pad design using a redistribution layer, based on multichip module-deposited (MCM-D) technology. The new pad configuration can be used for flip chip mounting. The thermo-mechanical reliability of these redistributed flip chip structures is in particular determined by the visco-plastic deformations of the solder joints and by the stresses in the photosensitive BCB redistribution layers. In this paper, the influence of this redistribution layer on the solder joint reliability is investigated. Also the induced stresses in this redistribution layer may not exceed the ultimate stress level. Three different redistribution processes are considered. Finite element simulations and Coffin-Manson based reliability models are used to compare the thermal cycling reliability of redistributed and standard flip chip assemblies. The existence of a photosensitive BCB redistribution layer on the chip influences the thermal fatigue of solder joints. The largest reliability improvement using redistributed chips is achieved by moving the solder joints from the perimeter to the interior of the die resulting in an area array flip chip