磨削参数对陶瓷加工表面粗糙度影响的实验研究

通过对砂轮粒度、砂轮速度、磨削深度、进给速度等4因素及各因素之间交互3水平正交实验的数据分析,证明砂轮粒度对表面粗糙度影响最大,在各因素中起主导作用.发现砂轮粒度和砂轮速度的交互对表面粗糙度的影响大于砂轮速度单因素的影响,粒度和磨削深度的交互对表面粗糙度的影响大于磨削深度单因素的影响,砂轮粒度和工件速度的交互对表面粗糙度的影响大于工件速度单因素的影响.因此,应按砂轮粒度与切削用量的交互对表面粗糙度的影响规律来确定切削用量各参数的选择,而不能按单因素对表面粗糙度的影响规律来确定切削用量参数.     

工程陶瓷内圆磨削表面粗糙度研究

研究工程陶瓷内圆磨削表面粗糙度的影响因素。利用氮化硅陶瓷内圆磨削正交试验,分析了砂轮线速度、工件线速度与磨削深度对表面粗糙度的影响,并在此基础上进行了砂轮粒度单一因素影响试验,采用泰勒粗糙度测量仪测得了加工表面粗糙度从0.2646μm~0.5424μm的一系列磨削表面,分析试验结果建立了氮化硅陶瓷内圆磨削表面粗糙度经验公式预测模型。由试验结果得到表面粗糙度随砂轮粒度号的增大、砂轮线速度的提高及工件线速度的降低而减小,随磨削深度的增加整体上呈变大趋势,且砂轮线速度的影响较大,工件线速度次之,磨削深度的改变对表面粗糙度的影响作用不是很明显。经F检验表明预测模型具有较好的预测效果,最大相对误差为10.23%,为实际加工合理选择磨削参数提供了试验依据和参考。     

金刚石砂轮磨削铁氧体的表面粗糙度与形貌分析

本文研究了树脂结合剂金刚石砂轮磨削铁氧体材料时,磨削深度、工件进给速度对磨削表面粗糙度和材料去除方式的影响规律,以此探索提高铁氧体磨削表面质量的有效途径。采用单因素法设计试验方案对铁氧体进行磨削,测量表面粗糙度数据并对其进行方差分析,对铁氧体磨削表面形貌进行观察。结果表明：随着磨削深度、工件进给速度的增加,表面粗糙度值升高,同时表面塑性痕迹减少,脆性断裂痕迹增加,且磨削深度对表面粗糙度的影响要比工件进给速度的更显著,因此,制定磨削工艺时,考虑到粗磨为了提高效率,降低表面损伤,优化得到磨削工艺为磨削深度5μm,工件进给速度10 m/min;精磨为了获得较低的表面粗糙度,采用磨削深度5μm、工件进给速度为5 m/min,可以提高磨削表面延展性。     

微晶刚玉砂轮磨削钛合金TC17磨削力研究

针对航空发动机常用材料钛合金TC17,采用白刚玉砂轮与微晶刚玉砂轮开展磨削试验,研究微晶刚玉砂轮对工件表面质量和磨削力大小的影响规律。试验结果表明:微晶刚玉砂轮磨削后工件表面质量更好,表面粗糙度值降低0.14 μm,磨削力降低10%左右。针对微晶刚玉砂轮进行磨削参数对磨削力影响规律的单因素试验,从磨削力角度分析微晶刚玉砂轮磨削钛合金的合理工艺参数。综合磨削力与加工效率因素,确定磨削钛合金TC17的合理参数为:砂轮线速度v_s=27 m/s、磨削深度a_p=0.01 mm、工件进给速度v_w=12 m/min;对磨削力试验数据进行多元线性回归分析,建立了法向磨削力和切向磨削力的回归模型。      

RV减速器摆线齿轮磨削表面粗糙度试验研究

为研究RV减速器摆线轮的表面完整性,开展了20CrMnTi钢摆线轮成型磨削试验,分析砂轮的旋转速度、摆线轮进给速度、磨削深度以及砂轮粒度对摆线齿面粗糙度的影响规律。结果表明：砂轮粒度对表面粗糙度的影响最显著,砂轮旋转速度次之,进给速度最不显著。选用粒度为150目的砂轮、采用不同的磨削参数进行试验,获得摆线齿轮磨削后的表面粗糙度预测模型,当砂轮转速为3 200 r/min、摆线轮进给速度为12 m/min及磨削深度为012 mm时,可使摆线轮齿面获得较低的表面粗糙度,预测模型具有较高的预测效果,最大相对误差仅为 51%,为实际加工合理选择磨削参数提供有益的参考。     

二维超声磨削复相陶瓷加工表面质量的试验研究

本文通过对二维超声磨削纳米复相陶瓷和普通磨削进行对比试验研究,分析了磨削深度、工件速度、砂轮粒度对工件表面质量的影响.研究结果表明,采用二维超声振动磨削能大大提高工件的表面质量;表面粗糙度随着切深的增大而增大,随着切削深度的进一步增加,超声振动在磨削加工中所起的作用减弱;二维超声振动磨削大大扩大了复相陶瓷磨削的塑性加工区域,二维超声振动磨削过程的塑性域是切削深度小于5μm,而普通磨削塑性域是磨削深度小于2μm;二维超声振动磨削时,表面粗糙度随着砂轮粒度的减小而明显减小,且比较稳定,故二维超声振动磨削有利于使用细粒度砂轮;工件速度对二维超声振动磨削表面粗糙度影响很大,其值随着工件速度的增加而增大.     

金刚石砂轮磨削轴承用ZrO2 陶瓷表面质量研究

在氧化锆陶瓷磨削中为获得较高质量表面,采用单因素试验研究磨削深度、砂轮线速度、工件进给速度对氧化锆陶瓷精密磨削表面质量的影响规律及材料去除机理,通过超景深三维显微镜以及扫描电子显微镜,观察氧化锆陶瓷试件磨削后的表面形貌,最后用正交试验法进行优选并验证。结果表明:磨削表面的粗糙度随磨削深度、工件进给速度增大而增大,随砂轮线速度增大先减小、后增大。在磨削深度5 μm、砂轮线速度40 m/s、工件进给速度1 000 mm/min的优化组合条件下,磨削3组氧化锆陶瓷的平均表面粗糙度R_a为0.388 9 、0.417 0和0.403 7 μm。      

高速磨削工艺参数对K9玻璃表面粗糙度的影响规律研究

为了考查高速磨削工艺参数对K9玻璃表面粗糙度的影响,为K9玻璃的高速磨削工艺改进提供参考依据,并通过高速磨削工艺的改进降低K9玻璃的加工成本。文章采用高温钎焊工艺制作磨粒有序排布的单层钎焊金刚石砂轮,经过砂轮修整,采用拟定工艺参数对K9玻璃进行高速磨削实验,通过显微镜观察考查工件表面形态随工艺参数的变化,通过K9玻璃表面粗糙度的测量考查工艺参数的影响规律。研究表明随着磨削速度的增加磨削表面的较大缺陷明显减小,表面粗糙度也有较大的改善,表面纹理的连续性加强,去除模式趋向于延性域方向变化。粗粒度砂轮磨削K9玻璃时欲获得较好的表面质量,工艺参数选择应取工件速度小于1m/min,磨削速度大于70m/s,切深5μm左右。     

微粉金刚石钎焊砂轮磨削氧化铝陶瓷的磨削力和表面粗糙度特征

在不同磨削深度、砂轮转速和进给速度组合下,研究微粉金刚石钎焊砂轮磨削氧化铝陶瓷过程的磨削力及工件的表面粗糙度的变化规律,并筛选出低磨削力和低工件表面粗糙度的加工工艺参数。试验结果表明:在微粉金刚石钎焊砂轮的磨削过程中,氧化铝陶瓷主要通过脆性断裂的方式去除;随着磨削深度、进给速度的增加,砂轮在进给方向和切深方向的力以及工件表面粗糙度都上升;随着砂轮转速的增加,进给方向和切深方向的力以及工件表面粗糙度都下降。试验获得的低磨削力和低工件表面粗糙度精密加工工艺参数分别为:磨削深度为1.0 μm,进给速度为12 mm/min,砂轮转速为24 000 r/min和磨削深度为1.0 μm,进给速度为1 mm/min,砂轮转速为20 000 r/min。低磨削力磨削时,微粉金刚石钎焊砂轮受到的X方向和Z方向的磨削力分别为0.15 N和0.72 N;精密加工后的氧化铝陶瓷的表面粗糙度值可达0.438 μm。      

大尺寸硅片自旋转磨削的试验研究

利用基于自旋转磨削原理的硅片超精密磨床,通过试验研究了砂轮粒度、砂轮转速、工件转速及砂轮进给速度等主要因素对材料去除率、砂轮主轴电机电流以及磨削后硅片表面粗糙度的影响关系。研究结果表明,增大砂轮轴向进给速度和减小工件转速,采用粗粒度砂轮有利于提高磨削硅片的材料去除率,砂轮轴向进给速度对材料去除率的影响最为显著;适当增大砂轮转速,减小砂轮轴向进给速度,采用细粒度砂轮可以减小磨削表面粗糙度;在其它条件一定的情况下,砂轮速度超过一定值会导致材料去除率减小,主轴电机电流急剧增大,表面粗糙度变差;采用比#2000粒度更细的砂轮磨削时,材料去除率减小,硅片表面粗糙度没有明显改善。     

粗磨粒金刚石砂轮精密磨削工程陶瓷的试验研究

为了实现粗磨粒金刚石砂轮延性域磨削加工SiC陶瓷材料,采用碟轮对粒径为297~420μm的粗磨粒金刚石砂轮进行了精密修整。然后,使用经过修整好的粗磨粒金刚石砂轮对SiC陶瓷进行磨削加工。在此基础上,对不同的砂轮线速度、工件进给速度、磨削切深对SiC陶瓷表面粗糙度和表面形貌的影响进行了研究。试验结果表明:经过精密修整的粗磨粒金刚石砂轮是能够实现SiC陶瓷材料的延性域磨削的,表面粗糙度值Ra达到0.151μm;随着砂轮线速度增大、工件进给速度和磨削切深减小,SiC陶瓷表面的脆性断裂减小,塑性去除增加。     

An experimental study of flat fixed abrasive grinding of silicon wafers using resin-bonded diamond pellets

The purpose of this paper is to investigate the effect of the diamond grain size, the wheel rotation speed, the table rotation speed, and the applied pressure in the vertical flat grinding on the surface roughness of silicon wafers using Taguchi orthogonal array design. Besides, the pits and resistivity on the wafers were studied as well. The experiment results showed that the diamond grain size and the wheel rotation speed of the vertical flat grinding for the roughness of wafers obtained are the relatively larger significant contribution. When the smaller diamond grit size, the faster wheel rotation speed, the faster table rotation speed, and the smaller applied pressure in the flat grinding are employed, the traces produced by the grains are denser and the chip thickness and the depth of cut were smaller, which cause the silicon wafer to produce the higher degree of the ductile grinding. This will lead the wafer surface to produce the smaller amount and size of the pits, thereby generating the lower surface roughness. In addition, the center site of the wafer obtained is the smaller amount and size of the pits than the outer of the wafer, which produces the better surface roughness and the lower resistivity.     

Ground surface integrity of granite by using dry electro-contact discharge dressing of #600 diamond grinding wheel

Dry electro-contact discharge (ECD) dressing of metal-bonded #600 diamond grinding wheel is proposed for grinding of various granites. As compared to mechanical GC dressing, Dry ECD dressing can not only protrude fine diamond grains from wheel metal-bond without any damage, but also eliminate bond-tail behind the protruded grain. The objective is to understand how the synthetic factors including granite structure, grinding parameters and dressing method influence the ground surface integrity of multi-crystal granite such as surface roughness and surface crack appearance in contrast to homogeneous optic glass. First a micron-scale indentation experiment was carried out to display the growth mechanism of micro-cracks on polished surface, then Dry ECD dressing and mechanical GC dressing were carried out in grinding experiment, respectively, finally surface roughness and micro-surface crack were investigated in connection with granite crystal size, work speed and dressing method. It is found that in almost all cases the multi-crystal granite has always worse ground surface than homogeneous optic glass even if grinding parameter is changed. Moreover, the improvement of ground surface for granite is more sensitive to grain protrusion feature than that for optic glass. Although it is very difficult to find out obvious relationship between surface roughness and grinding parameter such as work speed, it has a good correlation with granite structure such as granite crystal size: it decreases with the increase of the granite crystal size. It is concluded that Dry ECD dressing may more greatly improve the ground surface integrity of various granites than mechanical GC dressing.     

Study on axial-feed mirror finish grinding of hard and brittle materials in relation to micron-scale grain protrusion parameters

An axial-feed mirror finish grinding of hard and brittle materials is proposed by controlling grain protrusion parameters. In this grinding, the grinding wheel feed is along the wheel axial direction rather than in the traditional wheel cutting direction. The objective is to understand how micron-scale grain protrusion parameters influence ductile-mode grinding and ultimately to realize efficient mirror finish grinding using a coarse diamond grinding wheel. In this study, the grain tip truncation (GT-truncation) was performed after dressing to improve grain protrusion topography. First, a formation model of axial-feed ground surface was constructed to analyze the effect of grain protrusion parameters and grinding parameters on the critical cutting depth transferred from brittle-mode removal to ductile-mode removal; then GC dressing and GT-truncation of #180 diamond grinding wheel were experimentally performed to investigate surface roughness and ductile-mode grinding behavior with reference to grinding parameters and grain protrusion parameters; finally, a truncated coarser #60 diamond grinding wheel was employed for mirror finish grinding to observe active grain number and grain protrusion angle. Theoretical analysis shows that this ductile-mode grinding is dominated by active grain number, active grain protrusion angle, wheel rotating speed and axial-feed speed, but it does not depend on the depth of cut assumed to be less than the grain protrusion height. Experimental results indicate that the GT-truncation may increase active grain number and grain protrusion angle for ductile-mode grinding when the axial-feed speed decreases to some extent. Moreover, the micro tip radius of diamond grain also influences the ground surface. It is confirmed that by increasing active grain number and grain protrusion angle synchronously, a truncated #60 diamond grinding wheel can be applied for efficient mirror finish grinding of the SiC ceramic plate at the axial-feed speed of 50 mm/min and the tool path interval of 0.1 mm.     

高速磨削对18CrNiM07-6表面完整性的影响研究

目的对试件表面粗糙度和残余应力进行分析,为研究高速磨削齿轮材料表面完整性提供试验依据,并对齿轮材料高速磨削工艺进行深入探讨。方法选择以平面磨削为主要研究方式,根据Salomon理论和高速磨削理论,提出以单因素法对齿轮材料18CrNiMo7-6进行高速磨削工艺试验,试验变量为砂轮线速度、磨削深度和工作台速度,以此得到了高速磨削工艺参数与表面完整性(主要为表面粗糙度和残余应力)之间的关系。结果齿轮材料18CrNiMo7-6的表面粗糙度随砂轮线速度的增大、磨削深度和工作台速度的降低而得以改善,用三维粗糙度表征法可以准确地评定工件表面形貌。试验得到砂轮线速度对残余应力的影响最大,磨削深度次之,工作台速度的影响较小。除V_s=160 m/s外,经高速磨削的渗碳淬火18CrNiMo7-6试件表面残余压应力值得到提升。结论通过分析高速磨削对表面完整性的影响,可得到该研究材料的最优磨削参数组合为:V_s=120 m/s,V_w=4 m/min,a_p=0.02 mm。在此磨削参数下,试件的残余压应力值最大,将有利于提高试件表面完整性。     

小直径砂轮超声振动磨削SiC陶瓷的表面质量研究

用小直径砂轮超声振动磨削和普通磨削加工SiC陶瓷零件,对比研究砂轮线速度、工件进给速度、磨削深度和超声振幅对其磨削表面质量的影响。结果表明:与普通磨削相比,超声振动磨削的磨粒轨迹相互交叉叠加,工件表面形貌更均匀,表面质量更好。由于超声振动时的磨粒划痕交叉会使磨粒产生空切削,因而降低了其磨削力,使磨削过程更加稳定。超声振动磨削的表面粗糙度和磨削力随砂轮线速度和超声振幅的增加而降低,随工件进给速度和磨削深度的减小而降低。且砂轮线速度、工件进给速度较小时,超声振动磨削的效果更明显。      

Study on surface roughness model and surface forming mechanism of ceramics in quick point grinding

The quick-point grinding experiment of fluorophlogopite was conducted by using a MK9025A profile grinder which considered the simple single factor, such as the grinding wheel and table feed speed, grinding depth, inclining angle and deflection angle. The experimental results indicated that the surface roughness was mainly influenced on inclining angle and deflecting angle. Moreover, the modified model of the quick-point grinding process was proposed in the paper, which based on Malkin kinematics model, Snoeys empirical model and grinding thickness empirical model. The inclining angle and deflecting angle was introduced in the modified model. Comparison of the predicted results of these models and experimental ones indicated that the modified model was in well agreement with the experimental data. Further, standard deviation of these models and experiment was studied in the paper, it is found that the modified model was the more ideal. In order to study the effect of various technology factors on the sensitivity of surface roughness, “Relative extremum error” concept was first proposed in the paper. It was found that simple single factor in the modified model were relatively sensitive to surface roughness than other models.     

树脂金刚石砂轮磨削钒酸钇晶体中磨削参数对力和磨削表面质量的影响

本文用树脂结合剂金刚石砂轮对钒酸钇晶体进行了平面磨削实验,研究了砂轮线速度、工件进给速度和磨削深度对磨削力和磨削表面粗糙度的影响。结果表明:磨削力和磨削表面粗糙度都是随着砂轮线速度的增加而减小,随进给速度和磨削深度的增加而增加,其中磨削深度对磨削力影响最大,砂轮线速度对磨削表面粗糙度影响最大。钒酸钇晶体的磨削表面主要由断裂区域和光滑区域组成,当砂轮线速度为30m/s时,磨削表面存在宽度约100μm的裂痕,而随着砂轮线速度的上升,裂痕宽度降低到50μm以下,同时光滑区域所占的比例增加,这可能与发生塑性变形的机率增大有关。