Confocal Image 3D Surface Measurement with Optical Fiber Plate

A whole-field 3D surface measurement system for semiconductor wafer inspection is described. The system consists of an optical fiber plate, which can split the light beam into N2 subbeams to realize the whole-field inspection. A special prism is used to separate the illumination light and signal light. This setup is characterized by high precision,high speed and simple structure.     

Design of a multi-channel free space optical interconnec-tion component

A multi-channel free space optical interconnection component, fiber optic rotary joint, was designed using a Dove prism.When the Dove prism is rotated an angle of α around the longitudinal axis, the image rotates an angle of 2α. The opticalinterconnection component consists of the signal transmission system, Dove prim and driving mechanism. The planetarygears are used to achieve the speed ratio of 2:1 between the total optical interconnection component and the Dove prism.The C-lenses are employed to couple different optical signals in the signal transmission system. The coupling loss betweenthe receiving fiber of stationary part and the transmitting fiber of rotary part is measured.     

Design of a multi-channel free space optical interconnection component

A multi-channel free space optical interconnection component, fiber optic rotary joint, was designed using a Dove prism. When the Dove prism is rotated an angle of at around the longitudinal axis, the image rotates an angle of 2 at. The optical interconnection component consists of the signal transmission system, Dove prim and driving mechanism. The planetary gears are used to achieve the speed ratio of 2：l between the total optical interconnection component and the Dove prism. The Clenses are employed to couple different optical signals in the signal transmission system. The coupling loss between the receiving fiber of stationary part and the transmitting fiber of rotary part is measured.     

Detection and Ranging System of Flight Aid Lights

Dynamic detection based on optics sensors and ranging radars is a new method to detect the luminous intensity of flight aid lights. The optics sensors can get the illumination information of each light, the ranging radar gets the distance information, and then data amalgamation technology is used to compute the luminous intensity of each light. A method to modify the errors of this dynamic detection system is presented. It avoids the accumulation error and measurement carrier＇s excursion error by using peak value detection based on optics sensors to estimate the accurate position of each light, then to modify the lights＇ lengthways distance information and transverse position information. The performance of the detection and ranging system is validated by some experiments and shown in pictures.     

Design and nonlinearity compensation of Fabry-Perot type tunable optical filters for dynamic strain sensing systems

The collected spectrum of the fiber Bragg grating(FBG) and the loss of the detected optical power are discussed with respect to the 3-dB bandwidth of a Fabry-Perot(F-P) type tunable optical filter(TOF),respectively.And the optimized parameters of the TOF are obtained consequently.It is demonstrated that the relationship between the transmission wave-length of the TOF and its drive voltage is nonlinear.A new method to compensate the nonlinearity of the TOF is proposed.The linear sweeping of the transmission wavelength of the TOF is achieved through modifying the drive voltage using interpolation algorithm.It is observed that the average error and the maximum error of the transmission wavelength are reduced sharply under linear fit.The dynamic strain sensing is realized by use of a reference FBG and moving averaging algorithm in this system.     

基于声表面波的喇曼型声光移频器的研究

A Raman acousto-optic frequency shifter （AOFS） based on surface acoustic wave （SAW） is presented. It consists of a double-ended SAW resonator and optical waveguide system. The structure parameters of the SAW resonator are optimized using COM software and the optical waveguide system is designed using an effective index method. The AOFS prototype fabricated using MEMS technology is detected. The optical beat signals su- perimposed by ± 1st-order and ±2nd-order diffracted beams are detected. The frequency shift of 78.2201 MHz related to the 1 st-order diffracted beams and 156.2306 MHz related to the 2nd-order diffracted beams are obtained respectively.     

Design and nonlinearity compensation of Fabry-Perot type tunable optical filters for dynamic strain sensing systems

The collected spectrum of the fiber Bragg grating （FBG） and the loss of the detected optical power are discussed with respect to the 3-dB bandwidth of a Fabry-Perot （F-P） type tunable optical filter （TOF）, respectively. And the optimized parameters of the TOF are obtained consequently. It is demonstrated that the relationship between the transmission wave- length of the TOF and its drive voltage is nonlinear. A new method to compensate the nonlinearity of the TOF is proposed. The linear sweeping of the transmission wavelength of the TOF is achieved through modifying the drive voltage using interpolation algorithm. It is observed that the average error and the maximum error of the transmission wavelength are reduced sharply under linear fit. The dynamic strain sensing is realized by use of a reference FBG and moving averaging algorithm in this system.     

Research on immunosensor based on porous silicon

Porous silicon is functionalized using thermal oxidation and silanization. The HYSA antibodies are immobilized to the porous surface in this paper. The changes in the reflection spectrum and photoluminescence spectrum are investigated when BSA are attached to the PS surface. The result shows that the luminescence peak of PS disappears. After the antigen- antibody reaction, the higher light emission is observed and the reflection spectrum also red shifts. Therefore, this research lays a foundation for the development of sensitive label-free optical immunosensor.     

Research on immunosensor based on porous silicon

Porous silicon is functionalized using thermal oxidation and silanization. The HYSA antibodies are immobilized to the porous surface in this paper. The changes in the reflection spectrum and photoluminescence spectrum are investigated when BSA are attached to the PS surface. The result shows that the luminescence peak of PS disappears. After the antigen-antibody reaction,the higher light emission is observed and the reflection spectrum also red shifts. Therefore,this research lays a foundation for the development of sensitive label-free optical immunosensor.     

Combined optical fiber interferometric sensors for the detection of acoustic emission

A type of combined optical fiber interferometric acoustic emission sensor is proposed. The sensor can be independent on the laser source and make light interference by matching the lengths of two arms,so it can be used to monitor the health of large structure. Theoretical analyses indicate that the system can be equivalent to the Michelson interferometer with two optical fiber loop reflectors,and its sensitivity has been remarkably increased because of the decrease of the losses of light energy. PZT is powered by DC regulator to control the operating point of the system,so the system can accurately detect feeble vibration which is generated by ultrasonic waves propagating on the surface of solid. The amplitude and the frequency of feeble vibration signal are obtained by detecting the output light intensity of interferometer and using Fourier transform technique. The results indicate that the system can be used to detect the acoustic emission signals by the frequency characteristics.     

Spectrum Illumination for 3-D Surface Imaging System

A method using spectrum illumination to reconstruct 3-D object image is a new concept in the field of computer vision. The design of optical illumination system is crucial in this method. Several ways to achieve multi-color spectrum illumination are discussed. A prism illumination system is designed by means of aligning symmetrically the prism at the mid-wavelength (n d=1.806 274) of light path and using reflection collimating lens, cylindrical expending lens and two optical shutters. The relations between deviation angles and light wavelengths are given, and some 3-D reconstruction results are presented.     

基于棱镜和微透镜的LED混光投射透镜设计

基于透镜侧面棱镜和前后膜芯添加微透镜设计一款出光角度可变的均匀混光照明透镜。采用棱镜和微透镜结合的新型方法,分别对透镜外侧棱镜和模芯微透镜进行新的设计。对目标角度进行映射关系的计算及推导,得到全反射棱镜的轮廓曲线图,中心内外部分采用折射型的微透镜阵列,通过Solidworks建立透镜模型,然后导入光学仿真软件Lighttools中进行光线追迹。采用12颗30 mm×30 mm贴片式不同色温的LED作为光源,设计了一款高度20 mm,直径52 mm的单颗实用型投射透镜。仿真与实测结果表明：所设计的透镜匹配该阵列光源后,光学效率高于87%,半光强角为40.6°,可以实现均匀混光投射照明。     

新型激光投影显示方棒照明系统的设计

以非成像理论中光学扩展量的传递规律为依据,给出了激光二极管(LD)阵列作为光源的新型激光投影显示系统中方棒照明光路元器件尺寸及入射光束孔径角的确定方法。选用3×8红光LD阵列作为光源,0.45inch(1inch=25.4mm)硅基液晶(LCOS)芯片为空间光调制器(SLM),应用光学设计软件Zemax给出了方棒照明系统的设计实例,包括LD阵列光源光束整形系统、方棒匀光系统、方棒中继系统的设计。结果显示方棒照明系统具有较高的光能利用率及较好的光斑均匀性。由此得出较高光能传递质量的新型激光投影显示系统中方棒照明系统的设计方法。     

基于非均匀棱镜阵列的三维集成成像视角增强方法

针对传统集成成像系统视角受限于单元透镜尺寸及其焦长的问题,提出了一种基于非均匀棱镜阵列的三维集成成像视角增强方法。以传统集成成像重构显示原理为基础,借助于非均匀棱镜阵列对重构光线的偏转作用,设计了显示透镜阵列和非均匀棱镜阵列组合的立体显示模式。依据集成成像的三维重构显示原理,利用光线追迹理论,导出了非均匀棱镜阵列的结构参数和集成成像系统视角之间的关系模型。仿真实验表明,基于非均匀棱镜阵列的集成成像系统视角比传统集成成像系统有了显著提高。     

基于DMD的红外场景仿真系统光学引擎设计

针对DMD(Digital Micromirror Device)器件是针对可见光波段设计,直接用于红外波段会遇到问题,提出了一种远心投影光学引擎架构,包括投影光学系统和照明光学系统.该光学引擎采用柯勒远心照明架构,并引入一片场镜来分离投影和照明光束.这种光学引擎结构紧凑、照明均匀、光能利用率高.     

用于室内照明的自由曲面均匀配光透镜设计

以非成像光学为基础,设计了一种在大发散角范围内均匀配光的大功率LED室内照明二次配光透镜方案。采用划分网格法建立光源LED和接收面的映射关系,推导透镜自由曲面面形的一般方程,采用差分法求解透镜面形方程获得面形轮廓数据,再用三维软件建立透镜模型,通过光学仿真软件对所建模型进行光线追迹。结果表明:此方案适用于40°～140°配光角度要求的均匀配光;仿真配光角度120°的照明系统,当透镜的口径与LED发光面直径之比大于等于10时,照明系统的均匀性优于0.9,能量利用率大于92%,且照明效果不受接收面高度的影响。该设计方法为实现大功率LED室内均匀照明系统的小型化和简单化提供了一种有效的途径。     

基于大剪切方棱镜的三维电子散斑干涉技术

提出了一个新的测量物体三维形变量的系统.其中,光源部分由3个激光器组成,参考物被粘贴在压电陶瓷(PZT)相移器上,通过该相移器产生参考光并实现相移,物光和参考光通过放置在CCD前方的大剪切棱镜产生干涉.为了验证该系统的可行性,对简支梁进行了位移场的测量,并给出了实验结果.由于大剪切方棱镜采用普通玻璃材料制成,因此不仅克...     

实现大范围均匀照明的LED透镜二次光学设计

提出了一种新的、利于实施计算的实现大范围均匀照明的LED灯具透镜设计方法。基于能量守恒定理和光线折射Snell定理,通过Matlab编程计算出自由曲面透镜坐标点。借助CAD软件和光学模拟软件Tracepro,模拟了自由曲面透镜的具体应用,在光源高为3m,接收面直径为10m的圆形照明区域,得到了均匀度达80%以上的照度分布,该设计可以应用在商场、工厂等室内照明灯具上。     

一种实现均匀照明的LED平凸透镜设计

为实现均匀圆形光斑的照明,提出了一种自由曲面平凸透镜的算法。依据非成像光学核心理论:光学扩展量守恒和能量守恒,根据Snell定律,建立透镜轮廓曲线所满足的常微分方程,采用Matlab中的DDE(动态传输)技术与Tracepro中的Scheme语言完成动态数据的链接,从而完成透镜的3D建模,省去了导入3D软件拟合曲线所带来的误差,让建模变得更加精确。结果表明,该种算法可在特定区域实现均匀照明,透镜直径23 mm,材质为光学级PC,且在透镜距离光源10 mm时光学效率可达51.99%