Single wafer encapsulation of MEMS devices

Packaging of micro-electro-mechanical systems (MEMS) devices has proven to be costly and complex, and it has been a significant barrier to the commercialization of MEMS. We present a packaging solution applicable to several common MEMS devices, such as inertial sensors and micromechanical resonators. It involves deposition of a 20 /spl mu/m layer of epi-polysilicon over unreleased devices to act as a sealing cap, release of the encapsulated parts via an HF vapor release process, and a final seal of the parts in 7 mbar (700 Pa) vacuum. Two types of accelerometers, piezoresistive and capacitive sensing, were fabricated. Piezoresistive accelerometers with a footprint smaller than 3 mm/sup 2/ had a resolution of 10 /spl mu/g//spl radic/Hz at 250 Hz. Capacitive accelerometers with a 1 mm/sup 2/ footprint had a resolution of 1 mg/spl radic/Hz over its 5 kHz bandwidth. Resonators with a quality factor as high as 14,000 and resonant frequency from 50 kHz to 10 MHz have also been built. More than 100 capacitive accelerometers and 100 resonators were tested, and greater than 90% of the resonators and accelerometers were functional.     

Large-scale multiplexing of interferometric fiber-optic sensorsusing TDM and DWDM

This paper describes multiplexing schemes for interferometric fiber sensors based on time-division multiplexed and dense wavelength-division multiplexing using optical add/drop multiplexers. The results of an experimental arrangement, which is based on one of the architectures, is also presented. Topics include a discussion of the noise sources in the system, dynamic range, and a characterization of the distributed feedback fiber laser source noise. We show the crosstalk levels in the experimental arrangement to be between -47 and -76 dB depending on the mechanism involved. The multiplexing schemes demonstrate the potential to address at least 192 interferometric sensors through two fibers based on a system with six wavelengths with a phase resolution less than 20 μrad/√Hz. For application to sonar arrays, our analysis has shown that hydrophones multiplexed in this type of architecture would achieve ambient acoustic noise-limited pressure resolution with an in-water dynamic range up to 135 dB at frequencies up to 10 kHz. In general, these architectures would find application in systems requiring very large numbers of sensors with a minimum of telemetry cabling required     

A 455-Mb/s MR preamplifier design in a 0.8-μm CMOS process

In this paper, we present a CMOS preamplifier for use with magnetoresistive (MR) read elements in disk drives. The performance of the CMOS design is competitive with the more expensive current generation of BiCMOS MR preamplifiers. The measured gain for the preamplifier is 43 dB and the measured 3-dB bandwidth is greater than 273 MHz corresponding to a 455-Mb/s data rate. Likewise, the measured input-referred voltage noise is less than 0.57 nV/√Hz, and measured input-referred current noise is less than 10.54 pA/√Hz at an MR bias current of 10 mA, The preamplifier has been implemented in a 0.8-μm 5 V CMOS process and occupies a die area of 1.78×1.78 mm ² In this paper, we introduce a new scheme to reduce current noise below that contributed by a single MOS device, This technique has the potential for even more impact for future submicron processes. We also showed that voltage amplifiers offer lower noise than transimpedance amplifiers for similar gain and bandwidth constraints     

Measurements of fundamental thermal induced phase fluctuations inthe fiber of a Sagnac interferometer

We demonstrate measurements of fundamental thermal induced phase fluctuations in the fiber-loop of a Sagnac interferometer. Loop lengths of 1.1 and 2.2 km are considered, showing phase noise levels between ~0.2-1.4 μrad rms/√(Hz) in the frequency range 1-100 kHz. Good agreement between theory and experiment is demonstrated. We show that the frequency dependent noise floor can have a considerable impact on threshold detection's for a Sagnac based sensor for detection of reciprocal measurands, as well as on the random walk coefficient in fiber optic gyroscopes     

Optical fiber sensor for vibration amplitude measurement

An optical fiber vibration sensor capable of measuring vibration amplitudes ranging from 1 mm down to 0.1 μm with a wide range of frequencies form 0.5 Hz to 100 kHz is described. The proposed method can be used to calibrate accelerometers. In this method the light from a tungsten halogen lamp is made to pass through an optical fiber whose exit end is mounted on the object under test. The emergent light is detected by a lock-in amplifier and then measured by a digital panel meter which can be made to give direct reading of the vibration amplitude. The main advantages of this method are wide dynamic range, wide frequency range, linearity, noise reduction, ruggedness, and light weight. The ultimate detectability can be as much as 0.5 Å/√Hz at 1 kHz     

基于光学零差偏振探测和锁相的合束激光偏振控制

激光偏振合束是提升窄线宽光纤激光亮度的重要技术,能实现多路激光的共孔径合束输出,同时维持较高的光束质量和线偏振态。文中探索和研究了基于线性锁相技术的合束激光偏振控制系统,详细分析和建立了光零差偏振检测物理模型和线性锁相控制环路的数学模型。利用高精度的光零差技术对合束激光的偏振相位进行检测,并通过快速实时反馈进行激光锁相,获得了输出功率为279 mW的线偏振态激光。锁相控制后,合束激光的偏振消光比达到19.3 dB,控制带宽高达39.6 kHz,剩余相位噪声为710-4 rad/Hz（1 Hz）和310-4 rad/Hz。当提高激光输出总功率达1 W时,偏振消光比维持在~15 dB,其限制因素在于光功率波动引入的相位噪声和光斑空间模式不匹配。     

4-Gb/s PSK homodyne transmission system using phase-lockedsemiconductor lasers

Homodyne detection of 4-Gb/s pilot-carrier binary-phase-shift-keyed (BPSK) optical signals using external-cavity semiconductor lasers synchronized by a linear phase-locked loop is discussed. A 2¹⁵-1 pseudorandom binary sequence (PRBS) has been transmitted through a short fiber with a receiver sensitivity of -44.2 dBm or 72 photons/bit. After transmission through 167 km of standard single-mode fiber, the sensitivity is -43.6 dBm or 83 photons/bit. A balanced PIN/HEMT transimpedance receiver which has a 3-dB bandwidth from 100 kHz to 10.1 GHz and an average equivalent input noise current of 10.8 pA/√Hz is used     

Suppression of the intensity noise in a diode-pumped neodymium:YAGnonplanar ring laser

We investigate the intensity noise properties of a continuous-wave diode pumped Nd:YAG ring-laser system and present results for an active feedback loop that suppresses the relaxation oscillation noise. This system reduces the intensity noise to within 6.1 dB of the quantum noise equivalent level (which is at 1.5×10^-8/√Hz for 1.5 mA) for frequencies between 10 kHz to 300 kHz and to less than 1×10^-7/√Hz for frequencies between 300 Hz and 10 kHz. The technical properties of the optimized feedback system are presented. The theoretical limits of performance for the system are discussed and it is shown that the performance is within 3.1 dB of these limits. We also present data from an optical beat experiment demonstrating that the intensity control system does not introduce any new features into the frequency noise spectrum     

A low-voltage tunneling-based silicon microaccelerometer

This paper describes the design, fabrication, and testing of a low-voltage tunneling-based silicon microaccelerometer. The device has been successfully batch-fabricated by the boron etch-stop dissolved wafer process. A 4 h, 1100°C oxygen, post-diffusion annealing process has been developed to eliminate the stress gradient in and warpage of thin (≈3 μm) heavily-boron-doped silicon microstructures. Using a simple discrete readout circuit, the device with an active area of 400×400 μm² provides a measured sensitivity of 1.66×10⁴ ppm/g (133 mV/g), bandwidth of 2 kHz in air, and a full scale range of 30 g with a nonlinearity of 0.6%. The measured noise spectrum exhibits a typical 1/f behavior and drops from 1.75 mg/√Hz (at 50 Hz) to 0.25 mg/√Hz (at 2 kHz), corresponding to a minimum detectable acceleration of 22.8 mg. The variations of the offset output voltage and device sensitivity are ±40 mV (≈0.5%) and ±0.65 mV/g (≈0.49%) in continuous operation over thirty days. The temperature coefficient of offset (TCO) and temperature coefficient of sensitivity (TCS) are -600 ppm/°C and 1200 ppm/°C, respectively     

Transmissive serial interferometric fiber sensor array

A transmissive serial array architecture for multiplexed interferometric fiber-optic sensors based on time division addressing is discussed. The configuration gives rise to intrinsic optical crosstalk between sensor elements of the system due to multiple cross-coupling of pulses between the series of sensor elements and the output fiber bus. This crosstalk is theoretically analyzed in detail, and compared to experimental results obtained with both three- and eight-sensor networks. Phase detection sensitivities as low as ~10 μrad/√Hz at a signal frequency of 1 kHz are reported     

高灵敏度加速度抵消型分布反馈有源光纤光栅水听器研究

研究了高灵敏度抗加速度型分布反馈(DFB)有源光纤光栅水听器。采用λ/4相移型掺铒光纤光栅构成DFB激光器,输出窄线宽激光,利用弹性膜片增敏方法封装有源光纤布拉格光栅,构成了高灵敏度有源光纤光栅水听器,并以两边对称的弹性膜片构成封装结构来抵消轴向加速度干扰,提高水听器在运动情况下的检测能力,并通过对结构的优化大大提高了光纤光栅水听器的耐静水压能力。研究结果表明水听器在100～1000Hz频率范围内声-相位灵敏度达到-132.7±0.7dB(0dB=1rad/μPa),加速度灵敏度可做到-20dB(0dB=1rad/g)以下,耐静水压可达2MPa。     

干涉型保偏光纤微振动矢量传感器研究

报道了干涉型保偏光纤微振动矢量传感器的理论与实验结果。传感器采用全保偏光纤结构 ,消除了偏振不稳定性 ,系统采用光频调制相位载波 (PGC)解调信号处理技术 ,消除了干涉仪初始相差的影响 ,从而实现了对传感信号的稳定检测。对三轴正交芯轴式干涉型全保偏推挽结构的光纤微振动矢量传感器进行了理论和实验研究。由理论得到了简化公式 ,并通过公式分析了各种参数对传感器谐振频率与灵敏度等特性的影响。由实验得到系统谐振频率约为 370Hz,与 375Hz的理论结果基本一致。在 5～ 2 0 0Hz频段系统灵敏度响应平坦 ,约为 340rad/g ,略低于 35 6rad/g的理论值。该传感器具有良好的矢量性 ,在 4 5°方向的灵敏度约为轴向灵敏度的 0 7倍 ,与理论结果一致 ,正交方向串扰小于 - 2 6dB。系统最小可测相位为 10 -5rad ,最小可测加速度为 3× 10 -8g。     

基于双金属膜片结构的海底地震勘探光纤加速度传感器研究

针对全光海底地震检波器技术的特殊应用需求,设计了一种基于双金属矩形膜片的缠绕式光纤加速度传感器。利用弹性力学理论对光纤加速度传感器的加速度灵敏度和一阶共振频率的特性进行了分析,制作了光纤加速度传感器样品并对其性能进行了测试。结果表明,本文加速度传感器的灵敏度为45dB re∶0dB=1rad/g,一阶共振频率在820Hz左右,与理论分析值很好吻合。在10～400Hz工作带宽中,交叉去敏度约为30dB。测试系统中,使用的相位生成载波(PGC)解调算法的最小相位检测精度为10-5 rad/Hz1/2,因此理论能探测的最小加速度信号为56ng/Hz1/2。由于采用全金属结构,本文类型光纤加速度传感器能够更好地满足海底永久布放检波器的特殊要求。     

A compact low noise operational amplifier for a 1.2 μm digitalCMOS technology

A compact low noise operational amplifier using lateral p-n-p bipolar transistors in the input stage has been fabricated in a standard 1.2 μm digital n-well CMOS process. Like their n-p-n counterparts in p-well processes, these lateral p-n-p transistors exhibit low 1/f noise and good lateral β. The fabricated op amp has an area of only 0.211 mm² with E_n=3.2 nV/√(Hz), I_n=0.73 pA/√(Hz), E_n and I_n 1/f noise corner frequencies less than 100 Hz, a -3 dB bandwidth greater than 10 MHz with a closed loop gain of 20.8 dB, a minimum PSRR (DC) of 68 dB, a CMRR (DC) of 100 dB, a minimum output slew rate of 39 V/μs, and a quiescent current of 2.1 mA at supply voltages of ±2.5 V. The operational amplifier drives a 1 kΩ resistive load to 1 V peak-to-peak at 10 MHz and has been used as a versatile building block for mixed-signal IC designs     

三分量全保偏光纤加速度传感器的研究

报道了三分量全保偏光纤加速度传感器的实验研究结果。传感器由6个弹性柱体共同支撑1个质量块构成三分量结构,由3个迈克尔逊全保偏光纤干涉仪共用一个光源组成。光学部分采用全保偏光纤干涉仪结构,消除了干涉光束偏振态随机变化引起的信号衰落,采用光频调制相位载波解调信号处理技术,消除了相位随机漂移引起的信号衰落,从而实现了对加速度信号的稳定检测。传感器的工作频带为5~500 Hz,加速度灵敏度达到660 rad/g,系统最小可测相位差为10-5rad,最小可测加速度达1.5×10-7m/s2,工作频带内加速度灵敏度变化小于2 dB。三轴加速度灵敏度和频率响应曲线与理论分析的结果基本一致。     

Frequency-bandwidth-tunable powerline notch filter for biopotential acquisition systems

Presented is a novel powerline notch filter embeddable into a chopperstabilised instrumentation amplifier for biopotential measurements. The frequency-translation property of the chopper enables the powerline notching to be indirectly implemented by two resonant zeros around the chopper frequency, resulting in substantial silicon area savings. Transistor-level implementation in 90 nm CMOS using a pseudo-LC circuit topology with Q-enhancement demonstrates 50 to 60 Hz frequency tunability, 25/41 dB powerline rejection at 5/30 Hz bandwidth, and 1000x relaxation of time constant under a 4 kHz chopper frequency.     

A broad-band tunable CMOS channel-select filter for a low-IFwireless receiver

This paper presents a broad-band bandpass filter (BPF) designed as a channel-select filter for wireless applications. It is implemented as a low-pass filter (LPF) in series with a high-pass filter (HPF) for lower power consumption compared to true BPF. Semiscaling of the filter nodes is superior in the wireless receiver over traditional full scaling. The HPF is built with low-pass feedback of an amplifier. The bandwidth is selectable from 625 kHz, 2.5 MHz, or 10 MHz. The filter stopband loss is more than 50 dB extending beyond 100 MHz, and passband ripple less than 2.5 dB. Fabricated in a 0.6-μm CMOS process, it provides a minimum input noise of 16 nV/√Hz noise with 22.5-dBm out-of-band IIP3, while draining an average 14 mA from 3.3 V     

基于FBG选频的低噪声窄线宽单频光纤激光器

采用未泵浦掺铒光纤作为饱和吸收体压缩线宽,窄带高反光纤光栅作为波长选择器件,通过偏振控制器和偏振相关隔离器控制环形腔中行波的偏振态,利用反馈电路控制980 nm泵浦源的输入电流,以减小铒离子的弛豫振荡对光强波动带来的影响。研制的光纤激光器线宽小于8 kHz,相对强度噪声（RIN）10 kHz内小于-100dB/Hz,1 kHz处1 m程差干涉仪的相位噪声小于-120 dB/（Hz）^1/2,长时间监测无跳模现象,输出激光功率稳定。     

A low-noise CMOS instrumentation amplifier for thermoelectricinfrared detectors

A low-noise CMOS instrumentation amplifier for low-frequency thermoelectric infrared sensor applications is described which uses a chopper technique to reduce low-frequency noise and offset. The offset reduction efficiency of the band-pass filter, implemented to reduce residual offset due to clock feedthrough, has been analyzed and experimentally verified. The circuit has been integrated in a transistor-only 1-μm single-poly n-well CMOS process. It features a gain of 52 dB with a 500 Hz bandwidth and a common-mode rejection ratio (CMRR) of more than 70 dB. The equivalent input low frequency noise is 15 nV/√Hz. The typical residual input offset is 1.5 μV. The amplifier power consumption is 1.3 mW     

Digital Synthetic-heterodyne Interferometric Demodulation Based on Embedded System

Optical fiber acceleration seismometer as an important instrument can offer high sensitivity, anti-jamming and non-touched advantage which has an extensive application field. Its signal processing ability will decide whole system＇s performance to some extent because it will affect directly the factors such as resolving power, precision and dynamic range. The signal processing is usually realized by analog circuits which was more inferior in stability, flexibility and anti-jamming to digital processing system. A digital processing system of optical fiber acceleration seismometer has been designed based on the embedded system design scheme. Synthetic-heterodyne demodulation has been studied, and signal processing has been realized. The double processors of ARM and DSP are employed to implement respectively the system control and signal processing, and to provide the output interfaces such as LCD, DAC and Ethernet interface. This system can vary with the measured signal in real time and linearly, and its work frequency bandwidth is between 10 Hz and 1 kHz. The system has better anti-jamming ability and can work normally when the SNR is 40 dB.