A novel technique for dressing metal-bonded diamond grinding wheel with abrasive waterjet and touch truing

The dressing of metal-bonded diamond grinding wheels is difficult despite their availabilities on hard and brittle materials. In this paper, a novel compound technology that combines abrasive waterjet (AWJ) and touch truing is proposed for dressing metal-bonded diamond grinding wheel precisely and efficiently. The dressing experiments of a coarse-grained and a fine-grained bronze-bonded diamond grinding wheel were carried out on a surface grinder with a developed AWJ system. The feasibility of this method was verified by analyzing the wheel runout, the truing forces, and the wheel surface topography. The variations of 3D surface roughness of wheel surface topography during the compound dressing process were quantitatively analyzed. The mechanism of AWJ and touch compound dressing is also discussed. Further, a reaction-bonded silicon carbide block was ground to validate the dressing quality. The experiment results indicate that the grinding wheels that were well dressed by the proposed technique leads to a smaller grinding force and a smaller surface roughness than that of undressed wheels.     

An experimental study of ultrasonic vibration-assisted grinding of polysilicon using two-dimensional vertical workpiece vibration

An experimental study of polysilicon grinding with ultrasonic vibration assistance was presented. The two-dimensional (2D) vertical vibration was applied on the workpiece directly and vibrated perpendicular to both the workpiece and grinding wheel. The grinding forces were measured using a three-component dynamometer, and the surface conditions were examined using a surface profilometer and a laser microscope. The experimental results showed that the grinding force and surface roughness with ultrasonication were much less than those in conventional grinding. In the case of ultrasonication, the wheel speed and worktable feed rate would have a more positive effect on the grinding force decrement/increment, especially for the tangential force while the wheel depth of cut had a negative effect. The surface condition of the ground polysilicon surface was improved with the assistance of ultrasonication. This research indicated that the 2D ultrasonic vibration-assisted grinding technique can be an effective method for the high-efficiency machining of hard brittle polysilicon material.     

超硬磨料碟形砂轮新型修整器设计及其稳定性实验研究

介绍了一种新型的碟形超硬磨料砂轮修整器。该修整器采用SiC和金刚石磨料杯形砂轮作为修整工具可以对刚性较差的大直径碟形超硬磨料砂轮完成修形和修锐工作,并利用变频器实现修整时的无级调速以达到最佳修整效果。通过以修整力为研究对象对修整器的系统工作稳定性进行了实验研究,得出该新形修整器的工作稳定性好,可以满足超硬磨料碟形砂轮的精密修整工艺要求。     

OPTIMIZATION OF DRESSING CONDITIONS FOR A RESIN-BONDED DIAMOND WHEEL BY TOPOGRAPHY ANALYSIS

The macro-geometry (run-out, shape, profile, etc.) and the micro-geometry (density, distribution, and shape of the grains) of a grinding wheel are measured after both truing and dressing. The effectiveness of the truing is studied by analysing the topography of the wheel to characterize the tool and its effect on workpiece surface quality during the grinding process. Using wheel replicas, the surfaces are analyzed with a non-contact interference microscope and the measurements are processed with MountainsMap Software. For different truing and dressing conditions, the dressing efficiency, the grain density, and its effects on the roughness and wear of the wheel in the grinding process are investigated.     

IN SITU TRUING/DRESSING OF DIAMOND WHEEL FOR PRECISION GRINDING

An application for achieving on-machine truing/dressing and monitoring of diamond wheel is dealt with in dry grinding. A dry electrical discharge （ED） assisted truing and dressing method is adopted in preparation of diamond grinding wheels. Effective and precise truing/dressing of a diamond wheel is carried out on a CNC curve grinding machine by utilizing an ED assisted diamond dresser. The dressed wheel is monitored online by a CCD vision system. It detects the topography changes of a wheel surface. The wear condition is evaluated by analyzing the edge deviation of a wheel image. The benefits of the proposed methods are confirmed by the grinding experiments. The designed truing/dressing device has high material removal rate, low dresser wear, and hence guarantees a desired wheel surface. Real-time monitoring of the wheel profile facilitates determining the optimum dressing amount, dressing interval, and the compensation error.     

光学自由曲面反射镜模芯的镜面成型磨削

采用精密修锐修整的圆弧形粗金刚石砂轮在CNC精密磨床上进行了数控成型磨削加工,实现了高效镜面磨削。分析金刚石砂轮圆弧形轮廓的成型修整原理,建立了圆弧形修整的数控模式。通过建立曲面数控成型磨削的行走轨迹算法,实现了自由曲面的圆弧包络成型磨削加工。分析了磨削工艺参数和砂轮出刃形貌参数与超光滑表面形成的作用机制,进行了镜面磨削试验并检测表面微观形貌和粗糙度,分析实现镜面磨削的脆/塑性磨削转换机理。理论分析表明,降低砂轮行走速度,提高砂轮转速以及改善出刃形貌可以获得纳米级粗糙度的超光滑磨削表面。试验结果显示,先将砂轮修锐修整再控制砂轮行走速度小至15 mm/min时,表面粗糙度小于10 nm以下,且微观加工表面没有发生脆性破坏,形成镜面。加工高速钢自由曲面时,面形误差(PV值)可以达到10 μm以下,表面粗糙度R_a可以达到约16 nm。实验结果表明:利用数控技术和粗金刚石砂轮可以实现自由曲面模芯的高效镜面磨削加工,保证了高精度的光学自由曲面反射镜注塑模芯。     

Online dressing of profile grinding wheels

Improving the dressing accuracy and efficiency of profile grinding wheels has been increasingly demanded. The significance is addressed in the practical application of precision engineering. In this study, an online dressing system of profile grinding wheels is introduced. A special feature of the system is the application of the non-contact image measuring method used to evaluate deviation of the grinding wheel’s edge in determining the timing and amount of dressing. Diamond form rollers were selected to generate the profile grinding wheels with steep profile flanks by taking advantage of their high flexibility, short dressing times, and low wear rate. A series of grinding and dressing tests were carried out to investigate the dressing accuracy and surface quality for the profile grinding wheels with the proposed system. Through repeated experimental investigations, it was found that the dressing force is a key parameter in determining the number of passes needed in achieving high efficiency dressing. This is to assure that the length of the dressing time, and waste of the dresser and grinding wheel can be minimized. Other main dressing conditions that influence the grinding wheel and workpiece roughness include speed ratio, cross feed and roller profile radius.     

金刚石微粉烧结棒与杯形砂轮修整碟形金刚石砂轮的对比试验研究

以反映砂轮平面度的端面跳动变化率和径向跳动变化率作为修整效率的评价依据,以插齿刀的齿形精度和齿面精度作为修整效果的评价依据,从试验和实际加工出的插齿刀齿形两方面对金刚石微粉烧结棒和杯形砂轮修整碟形金刚石砂轮进行了对比试验研究。结果表明,杯形砂轮的修整效率高于金刚石微粉烧结棒的修整效率;杯形砂轮修整的碟形金刚石砂轮具有较高的磨削能力。     

A new model of grit cutting depth in wafer rotational grinding considering the effect of the grinding wheel,workpiece characteristics,and grinding parameters

Wafer rotational grinding is widely employed for back-thinning and flattening of semiconducting wafers during the manufacturing process of integrated circuits. Grit cutting depth is a comprehensive indicator that characterizes overall grinding conditions, such as the wheel structure, geometry, abrasive grit size, and grinding parameters. Furthermore, grit cutting depth directly affects wafer surface/subsurface quality, grinding force, and wheel performance. The existing grit cutting depth models for wafer rotational grinding cannot provide reasonable results due to the complex grinding process under extremely small grit cutting depth. In this paper, a new grit cutting depth model for wafer rotational grinding is proposed which considers machining parameters, wheel grit shape, wheel surface topography, effective grit number, and elastic deformation of the wheel grit and the workpiece during the grinding process. In addition, based on grit cutting depth and ground surface roughness relationship, a series of grinding experiments under various grit cutting depths are conducted to produce silicon wafers with various surface roughness values and compare the predictive accuracy of the proposed model and the existing models. The results indicate that predictions obtained by the proposed model are in better agreement with the experimental results, while accuracy is improved by 40%–60% compared to the previous models.     

核主泵用流体动压密封环复杂形面超精密磨削

提出采用回转台带动密封环回转和杯形砂轮端面切入磨削来加工核主泵用流体动压密封环复杂形面新方法,其原理为选择适当的砂轮半径、砂轮俯仰角、砂轮侧偏角、砂轮与回转台中心距使磨削接触弧线是密封环波纹面上且以其内、外周边为边界的一条曲线的精确逼近,联动控制回转台转动和砂轮或回转台的同步跟随运动使磨削接触弧线一端点在波纹面外周边上进而通过磨削接触弧线扫掠运动形成高精度波纹面,在砂轮轴线与回转台轴线平行时磨削密封坝面。其实现策略是采用细粒度金刚石杯形砂轮做恒定切削深度微进给切入磨削。其优点是砂轮磨损对磨削精度没有影响,面形精度取决于回转台的回转运动和砂轮或回转台的同步跟随运动精度,能够实现核主泵用流体动压密封环复杂形面的高面形精度、低表面粗糙度加工。     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

Optimization of the dressing operation using load cells and the Taguchi method in the centerless grinding process

The finishing processes of industrial components use grinding due to the elevated quality generated by this method. Centerless grinding is among the main manufacturing processes due to its high flexibility, accuracy, and great volume of production that is necessary in modern industry. However, the dressing operation has been a pronounced bottleneck in the centerless grinding process due to the time lost to make the corrections in the grinding wheel. This work presents an optimization of the dressing operation in centerless grinding using load cells and the Taguchi method. The experimental tests were carried out on the shop floor of a manufacturer of shock absorbers. The input parameters were the depth of dressing, the feed rate of dressing, the diameter of the grinding wheel, and the speed of the regulating wheel. The responses were the surface roughness, the roundness error, and the dressing force. The results show that the dressing time was reduced, generating an increase in machine productivity, the surface roughness of the work pieces was reduced with an improvement in quality, and the dressing force was proportional to the depth of dressing.     

Evaluation of wheel life by grinding ratio and static force

A degree of sharpness in wheel grains affects the surface roughness and dimensional accuracy in the grinding process. If a wheel with dull grains is used, the grinding force is increased and the surface roughness is deteriorated. In ovder to produce a precision component economically, the magnitude of the wear amount in the grinding wheel has to be limited. In this study, experimental evaluation of a wheel life varying with the grinding ratio and static grinding force was conducted. The grinding ratio and grinding force were measured to seek the grinding performance of the WA wheel. The relationship between the grinding ratio and static grinding force was presented.     

Mist-jetting electrical discharge dressing (MEDD) of nonmetal bond diamond grinding wheels using conductive coating

Diamond wheels are widely used in high-precision grinding of hard and brittle materials; unfortunately, they are difficult to true and dress. This paper addresses that problem in that it proposes an effective dressing technique—mist-jetting electrical discharge dressing (MEDD) of nonmetal bond diamond grinding wheels using conductive coating. A conductive phase is coated on the wheel surface to increase the conductivity of the nonmetal bond. Electrical discharge model was built to analyze feasibility and select optimized parameters of MEDD. Experiments were conducted to evaluate the dressing performance of MEDD in terms of surface morphology of the wheel surface, grinding force, and surface roughness of the workpiece. Experimental results show that abrasive grains on the wheel protrude are satisfied. The discharge parameters have an important influence on the dressing result. The grinding force and the surface roughness of the workpiece significantly reduced after dressing.     

Experimental study of time-dependent performance in superalloy high-speed grinding with cBN wheels

The time-dependent performance of grinding is expressed as the change of process output measures as a function of time during grinding. Although the wheel capability will be restored by dressing, the time-dependent performance of grinding during one dressing skip is the determinant on the grinding quality variation in terms of surface integrity and workpiece geometric accuracy. Therefore, understanding of grinding time-dependent performance in relation with the wheel–workpiece microscopic interaction is critical for wheel and process development to achieve stable grinding processes. In this article, the grinding of superalloy with cubic boron nitride (cBN) grinding wheels is performed. The time-dependent performance is recorded to represent the characteristic features, and the microscopic wheel topography is measured under scanning electron microscope (SEM) throughout the grinding process, so as to reveal the root cause for the time-dependent performance and its impact on the workpiece quality variation. The experiment results indicate that during the grinding process, there exist three characteristic stages, namely, initial wheel wear stage, severe wheel wear stage, and wheel resharpening stage. Moreover, the change trend of spindle power consumption, workpiece quality on surface hardness and roughness, wheel wear condition, and G ratio are consistent with the wheel topography evolution reflected by SEM photos, which can be used to present the three grinding stages. The wear and replacement of the efficient grain cutting edges result in the time-dependent performance during superalloy high-speed grinding with cBN wheels.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Abstract

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

核主泵用流体静压密封环圆锥面超精密磨削

提出采用工件旋转杯形砂轮切入磨削原理来加工核主泵用流体静压密封环圆锥面新方法,对密封环圆锥面的径向轮廓误差随砂轮半径、回转台与砂轮中心距,砂轮俯仰角、砂轮侧偏角的变化规律进行深入分析,发现选择适当的机床结构参数,采用工件旋转杯形砂轮切入磨削原理加工核主泵用流体静压密封环圆锥面时,由磨削原理引入的径向轮廓误差极小,为纳米量级。根据最小径向轮廓误差和最小磨削接触弧长原则确定了核主泵用流体静压密封环圆锥面的超精密磨削实现策略。在工件旋转杯形砂轮切入磨削机床上实现了核主泵用碳化硅密封环圆锥面的高精度、低表面粗糙度磨削,测得周向跳动、径向轮廓误差和表面粗糙度Ra分别为0.16 m、0.15 m和3 nm。     

电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究

大尺寸光学玻璃元件主要采用细磨粒金刚石砂轮进行精密/超精密磨削加工,但存在砂轮修整频繁、工件表面面形精度难以保证、加工效率低等缺点。采用大磨粒金刚石砂轮进行加工则具有磨削比大、工件面形精度高等优点,然而高效精密的修整是其实现精密磨削的关键技术。采用Cr12钢对电镀金刚石砂轮(磨粒粒径151 μm)进行粗修整,借助修整区域聚集的热量加快金刚石的磨损,可使砂轮的回转误差快速降至10 μm以内。结合在线电解修锐技术,采用杯形金刚石修整滚轮对粗修整后的电镀砂轮进行精修整,砂轮的回转误差可达6 μm以内,轴向梯度误差由6 μm降至2.5 μm。通过对修整前后的金刚石砂轮表面磨损形貌成像及其拉曼光谱曲线分析了修整的机理。对应于不同的砂轮修整阶段进行熔融石英光学玻璃磨削试验,结果表明,砂轮回转误差较大时,工件材料表面以脆性断裂去除为主;随着砂轮回转误差和轴向梯度误差的减小,工件表面材料以塑性去除为主,磨削表面粗糙度为Ra19.6 nm,亚表层损伤深度低至2 μm。可见,经过精密修整的大磨粒电镀金刚石砂轮可以实现对光学玻璃的精密磨削。     

Form-truing error compensation of diamond grinding wheel in CNC envelope grinding of free-form surface

In computer numerical control (CNC) grinding of free-form surface, an ideal arc profile of trued diamond grinding wheel is generally employed to plan 3D tool paths, whereas its form-truing errors greatly influence the ground form accuracy. A form-truing error compensation approach is proposed by using an approached wheel arc profile to replace the previously designed ideal one. The objective is to directly compensate the trued wheel arc-profile errors. It may avoid the time consumption of traditional approach that compensates the measured coordinate point errors of workpiece to an iterative grinding operation. First, the 3D tool path surface was constructed to plan the 3D tool paths. Second, the CNC arc truing of grinding wheel was conducted to analyze the form-truing error distribution relative to the applied wheel arc profile. Then, the form-truing error compensation was carried out in CNC envelope grinding. Finally, the iterative closest point (ICP) algorithm was used to match the measured coordinate points of workpiece to ideal free-form surface. It is shown that the 3D tool path surface constructed is practicable to plan arbitrary 3D tool paths for the form-truing error compensation. The ICP matching may be used to investigate 3D ground form error distribution. It is confirmed that the form-truing error compensation can directly improve the 3D ground form accuracy. It may decrease the 3D ground form error by about 20% when the 2D form-truing error is reduced by about 58% using the same truing conditions for CNC grinding.     

Influences of dressing lead on surface roughness of ultrasonic-assisted grinding

Although the surface characteristics of the grinding wheel as well as its correlation with the grinding performance are largely influenced by dressing lead in conventional grinding (CG), little focus is placed on dressing lead in ultrasonic-assisted grinding (UAG). In this research, the effects of dressing lead and ultrasonic vibration on ultrasonic-assisted grinding are studied. Longitudinal vibration at ultrasonic frequency range is applied to the workpiece. The surface roughness and the characteristics of the three-dimensional ground surface morphology are compared between CG and UAG at several dressing leads and vibration amplitudes. The kinematics of the peak of the grinding wheel is employed for the theoretical analysis. The results show that the surface roughness has been improved for all UAG experiments and that the vibration amplitudes have exerted different influences on the surface roughness at different dressing leads. The dressing lead is an optimum one when it is four times the amplitude, at which minimal surface roughness is produced.