树脂基圆弧金刚石砂轮的在位精密成形修整技术

针对球面、非球面及自由曲面超精密磨削加工用树脂基圆弧形金刚石砂轮难以精密修整的问题,提出基于旋转绿碳化硅(GC)磨棒的在位精密成形修整技术。在分析GC磨棒和圆弧砂轮几何关系的基础上,确定修整过程中圆弧插补轨迹的补偿方法及GC磨棒运动轨迹的设计方案。采用KEYENCE激光测微仪采集砂轮圆弧特征点,表征圆弧砂轮的修整状况。研究不同粒度的GC磨棒、进给深度和圆弧插补速度对圆弧金刚石砂轮修整率和修整精度的影响规律。研究结果表明,该修整方法可根据加工曲率半径要求实现不同圆弧半径砂轮的精密在位修整,修整后可自动消除砂轮垂直方向的位置偏差;采用400#和800#的GC磨棒对D3和D7砂轮均有较高的修整率(0.7~6.7);与400#和1500#的GC磨棒相比,800#GC磨棒更适合粒度为D3和D7圆弧金刚石砂轮的精密修整;相比圆弧插补速度,进给深度对砂轮的圆弧半径尺寸误差和形状误差影响更大,进给深度越小,圆弧半径尺寸误差和形状误差越小;修整后两种砂轮的圆弧半径误差均可控制在5%以内,D3砂轮的形状误差可控制在3μm/4 mm以内,D7金刚石砂轮可控制在6μm/4 mm以内,修整后比修整前形状误差提高14倍左右。     

光学自由曲面反射镜模芯的镜面成型磨削

采用精密修锐修整的圆弧形粗金刚石砂轮在CNC精密磨床上进行了数控成型磨削加工,实现了高效镜面磨削。分析金刚石砂轮圆弧形轮廓的成型修整原理,建立了圆弧形修整的数控模式。通过建立曲面数控成型磨削的行走轨迹算法,实现了自由曲面的圆弧包络成型磨削加工。分析了磨削工艺参数和砂轮出刃形貌参数与超光滑表面形成的作用机制,进行了镜面磨削试验并检测表面微观形貌和粗糙度,分析实现镜面磨削的脆/塑性磨削转换机理。理论分析表明,降低砂轮行走速度,提高砂轮转速以及改善出刃形貌可以获得纳米级粗糙度的超光滑磨削表面。试验结果显示,先将砂轮修锐修整再控制砂轮行走速度小至15 mm/min时,表面粗糙度小于10 nm以下,且微观加工表面没有发生脆性破坏,形成镜面。加工高速钢自由曲面时,面形误差(PV值)可以达到10 μm以下,表面粗糙度R_a可以达到约16 nm。实验结果表明:利用数控技术和粗金刚石砂轮可以实现自由曲面模芯的高效镜面磨削加工,保证了高精度的光学自由曲面反射镜注塑模芯。     

Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

A mechanical fabrication of micro pyramid-structured silicon surface is proposed using crossed grooving with a 60° V-tip of diamond grinding wheel. It can obtain high form-accuracy, good surface quality and efficient productivity in contrast to laser machining and etching, and also assure a high aspect ratio in contrast to other mechanical processes. In order to describe its micro-structured topography, a white-light interferometer was employed, and its measured point cloud was matched using an Iterative Closest Point (ICP) algorithm. In micro grinding, a novel CNC mutual-wear truing was first developed to sharpen the wheel V-tip; then, the effects of microscopic wheel topography, silicon crystal-orientation and grinding parameter were investigated on ground micro-topography, truing ratio and material removal ratio; finally, its form-accuracy, pyramid top radius, groove tip radius, surface roughness and aspect ratio were evaluated. It is shown that better microscopic grain protrusion topography on wheel V-tip produces much larger material removal ratio and much better micro-structured topography in micro grinding, but it leads to much less truing ratio in finer GC truing. In micro grinding, silicon crystal-orientation has little effect on micro-structured topography due to diamond crystal-orientations that are randomly distributed on wheel V-tip. Although the micro pyramid-structured form error is only about 3.4 μm, its V-groove bottom and pyramidal top have very large form errors (23.1-47.9 μm) due to the sharpness of wheel V-tip and the frangibility of micro pyramid top. On increasing feed speed, its pyramid top radius decreases and its groove tip radius slightly increases, ultimately leading to an increase in aspect ratio, whereas its surface quality descends. It is concluded that the micro-pyramid arrays may be precisely patterned on silicon surface using a SD600 wheel with crossed tool paths, on-machine V-tip truing and the depth of cut in 1 μm.     

光纤石英玻璃基板微V槽阵列的精密磨削

针对脆性石英玻璃的微加工,利用自主研发的金刚石砂轮微尖端修整工艺,研发了光纤阵列石英玻璃微V槽磨削技术。分析了60°的微V槽形状偏差对光纤耦合损耗的影响,然后,研究了砂轮微尖端的误差补偿修整工艺。最后,实验分析了微V槽的磨削精度。理论分析显示:微V槽角度、间距和宽度的偏差分别控制在±0.42°、±1.04μm和±1.2μm以内时,耦合损耗小于0.5dB。实验结果表明:开发的数控磨削工艺可加工高精度的60°微V槽阵列;采用数控轨迹和角度补偿修整后,砂轮微尖端半径可平均达到10.46μm,角度精度为(60±0.22)°;对石英玻璃进行微磨削后,微V槽的角度偏差达到0.4°,尖端半径为10.5μm,宽度偏差为0.3μm,间距偏差为0.5μm,可保证光纤阵列的精密对接。     

圆弧金刚石砂轮的修形及修锐技术研究

针对圆弧金刚石砂轮加工非轴对称非球面的平行磨削法中砂轮的修形精度要求较高，通常使用的水平圆弧杯状砂轮修整器很难保证加工精度的问题，提出带倾角圆弧修整器的设计方法。通过对修整器接触弧长的计算，修形延后率设计和修形补偿方法的研究及实验表明：新型圆弧修整器可满足高精度非轴对称非球面加工的要求。     

F-Theta自由曲面透镜的精密与镜面磨削

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题,提出将金刚石砂轮的椭圆环面代替圆环面,进行F-Theta自由曲面磨削加工,研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面,提出自由曲面磨削的法向误差补偿加工模式。最后,采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明:传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外,超细砂轮磨削可使得自由曲面的粗糙度达到28 nm,其镜面磨削工艺有别于较粗砂轮磨削工艺。因此,椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法,而且,无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。     

非轴对称非球面平行磨削误差补偿技术研究

针对非轴对称非球面的成形加工法柔性不足及球形砂轮加工法对工具和机械的要求太高的缺点,提出采用普通圆弧金刚石砂轮加工的平行磨削法。对于新方法加工中存在的加工误差问题,提出在非轴对称非球面加工中使用带倾角圆弧修整器及对主轴半径和副轴半径误差采用离线补偿的加工技术。通过理论分析和试验表明此方法可达到提高非轴对称非球面的加工精度的效果。     

Investigation of internal ultrasonically assisted grinding of small holes: effect of ultrasonic vibration in truing and dressing of small CBN grinding wheel

In internal grinding of small holes, it is hard to realize high accuracy truing and dressing for the grinding wheel when a conventional truing/dressing method using single diamond dresser or rotary cup wheel is employed. Because of the cantilever support condition of the spindle shaft the stiffness of shaft is reduced. Thus the truing force leads the shaft to a significant deformation during truing/dressing. In this study, for improving the truing and dressing accuracy, a new truing/dressing method was proposed, in which the grinding wheel is ultrasonically vibrated along its axis during truing/dressing with a GC rotary cup wheel. A series of experiments were carried out to investigate the effects of the wheel ultrasonication on the truing force reduction, the truing accuracy improvement and the wheel surface condition. In addition, the grinding force and work surface roughness experimentally obtained by using the wheels trued with or without ultrasonication were compared. The experimental results indicated that applying ultrasonic vibration to the wheel decreases the normal and tangential grinding forces by more than 20% and 24%, respectively, and the surface roughness by as much as 18%.     

Wear of the blade diamond tools in truing vitreous bond grinding wheels: Part II. Truing and grinding forces and wear mechanism

Truing and grinding forces and the wear mechanism of particle and rod diamond blade tools used to generate precise and intricate forms on rotating vitreous bond silicon carbide grinding wheels are presented. A Hall effect sensor was used to measure the change of grinding spindle power during truing and grinding. A signal processing procedure was developed to identify individual truing passes and to extract the average, peak-to-valley, and standard deviation of the variation of truing force for each pass. The truing force data and SEM micrographs of worn surfaces on blade tools reveal micro- and macro-fracturing of the diamond. The attritious and erosion wear of the diamond rod and particle, erosion of the metal bond, and pulling-out of the diamond particle are also identified. Grinding force data shows that, for the same truing parameters, a wheel trued by the rod diamond blade tool has higher grinding forces than one trued by a particle diamond blade tool.     

电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究

大尺寸光学玻璃元件主要采用细磨粒金刚石砂轮进行精密/超精密磨削加工,但存在砂轮修整频繁、工件表面面形精度难以保证、加工效率低等缺点。采用大磨粒金刚石砂轮进行加工则具有磨削比大、工件面形精度高等优点,然而高效精密的修整是其实现精密磨削的关键技术。采用Cr12钢对电镀金刚石砂轮(磨粒粒径151 μm)进行粗修整,借助修整区域聚集的热量加快金刚石的磨损,可使砂轮的回转误差快速降至10 μm以内。结合在线电解修锐技术,采用杯形金刚石修整滚轮对粗修整后的电镀砂轮进行精修整,砂轮的回转误差可达6 μm以内,轴向梯度误差由6 μm降至2.5 μm。通过对修整前后的金刚石砂轮表面磨损形貌成像及其拉曼光谱曲线分析了修整的机理。对应于不同的砂轮修整阶段进行熔融石英光学玻璃磨削试验,结果表明,砂轮回转误差较大时,工件材料表面以脆性断裂去除为主;随着砂轮回转误差和轴向梯度误差的减小,工件表面材料以塑性去除为主,磨削表面粗糙度为Ra19.6 nm,亚表层损伤深度低至2 μm。可见,经过精密修整的大磨粒电镀金刚石砂轮可以实现对光学玻璃的精密磨削。     

IN SITU TRUING/DRESSING OF DIAMOND WHEEL FOR PRECISION GRINDING

An application for achieving on-machine truing/dressing and monitoring of diamond wheel is dealt with in dry grinding. A dry electrical discharge （ED） assisted truing and dressing method is adopted in preparation of diamond grinding wheels. Effective and precise truing/dressing of a diamond wheel is carried out on a CNC curve grinding machine by utilizing an ED assisted diamond dresser. The dressed wheel is monitored online by a CCD vision system. It detects the topography changes of a wheel surface. The wear condition is evaluated by analyzing the edge deviation of a wheel image. The benefits of the proposed methods are confirmed by the grinding experiments. The designed truing/dressing device has high material removal rate, low dresser wear, and hence guarantees a desired wheel surface. Real-time monitoring of the wheel profile facilitates determining the optimum dressing amount, dressing interval, and the compensation error.     

Automatic compensation for grinding wheel wear by pressure based in-process measurement in wet grinding

This paper deals with an application to automatic compensation of grinding wheel wear by a pressure based in-process measurement method in wet grinding. A pressure sensor is set beside a grinding wheel with a small gap. When grinding fluid is dragged into the gap by the rotation, hydrodynamic pressure, which corresponds to the gap length and the topography, can be measured. No electromagnetic properties of the workpiece and grinding wheel affect measured results. This method is applied to a CNC surface grinding machine. The pressure distribution and the relationship between the pressure and the gap length are measured. The pressure is decreased with the increase of the gap length. Its dispersion is around 1% for 0.5 μm-wear of a grinding wheel with 250 μm grit size. The dimensional error of a workpiece using the feedback of the wear is less than the feeding step, for the compensation, of 1 μm.     

Fabrication of small aspheric moulds using single point inclined axis grinding

Single point inclined axis grinding techniques, including the wheel setting, wheel–workpiece interference, error source determination and compensation approaches, were studied to fabricate small aspheric moulds of high profile accuracy. The interference of a cylindrical grinding wheel with the workpiece was analysed and the criteria for selection of wheel geometry for avoiding the interference was proposed. The grinding process was performed with compensation focused on two major error sources, wheel setting error and wheel wear. The grinding results showed that the compensation approach was efficient and the developed grinding process was capable to generate small aspheric concave surfaces on tungsten carbide material with a profile error of smaller than 200 nm in PV value after two to three compensation cycles.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface

The purpose of this paper is to propose a compensation grinding method for large aspheric mirror surface. Because the tradition grinding is not suitable for large aspheric mirror surface, in this paper, a grate parallel grinding in 3-axis and an on-machine measurement system are applied. Based on that, it presents the errors that mainly affect the form accuracy and technology of compensation grinding. An experiment of compensation grinding was carried out for large aspheric mirror surface. With the separation of decentering, wheel arc, and residual grinding system error, the PV value further decreased comparing to tradition compensation. These results indicated that this compensation can improve the form accuracy significantly in large aspheric mirror surface grinding.     

直线成形面数控展成磨削技术研究

研究在数控平面磨床上利用碟形砂轮对直线成形面进行精密磨削加工。综合直线成形面的常见磨削技术,采取数控展成加工的原理,利用数控平面磨床的两轴联动,用碟形砂轮或斜边砂轮对直线成形面进行展成磨削。分析数控展成磨削的磨削原理、表面成形机理、砂轮的修整技术以及砂轮的安装误差和形状误差、磨削的进给行距及数控系统等因素对成形面精度的影响,得到了直线成形面的数控展成磨削新技术。     

OPTIMIZATION OF DRESSING CONDITIONS FOR A RESIN-BONDED DIAMOND WHEEL BY TOPOGRAPHY ANALYSIS

The macro-geometry (run-out, shape, profile, etc.) and the micro-geometry (density, distribution, and shape of the grains) of a grinding wheel are measured after both truing and dressing. The effectiveness of the truing is studied by analysing the topography of the wheel to characterize the tool and its effect on workpiece surface quality during the grinding process. Using wheel replicas, the surfaces are analyzed with a non-contact interference microscope and the measurements are processed with MountainsMap Software. For different truing and dressing conditions, the dressing efficiency, the grain density, and its effects on the roughness and wear of the wheel in the grinding process are investigated.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Abstract

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

Wear of the blade diamond tools in truing vitreous bond grinding wheels: Part I. Wear measurement and results

The wear of stationary blade diamond tools used to generate a precise and intricate form on the vitreous bond grinding wheel is presented. Two types of blade tools made of rod and particle diamond were used. A method to measure the wear of the blade diamond tool in the μm-scale range using the size difference of two parts ground before and after truing was introduced. Two sets of experiments with four truing feeds and four tool traverse speeds across the grinding wheel were conducted on the rod and particle blade diamond tools, respectively. Experimental results showed the wear rate of blade diamond tools was improved at higher truing feeds and traverse speeds due to the brittle fracture of the abrasive and vitreous bond.     

A novel technique for dressing metal-bonded diamond grinding wheel with abrasive waterjet and touch truing

The dressing of metal-bonded diamond grinding wheels is difficult despite their availabilities on hard and brittle materials. In this paper, a novel compound technology that combines abrasive waterjet (AWJ) and touch truing is proposed for dressing metal-bonded diamond grinding wheel precisely and efficiently. The dressing experiments of a coarse-grained and a fine-grained bronze-bonded diamond grinding wheel were carried out on a surface grinder with a developed AWJ system. The feasibility of this method was verified by analyzing the wheel runout, the truing forces, and the wheel surface topography. The variations of 3D surface roughness of wheel surface topography during the compound dressing process were quantitatively analyzed. The mechanism of AWJ and touch compound dressing is also discussed. Further, a reaction-bonded silicon carbide block was ground to validate the dressing quality. The experiment results indicate that the grinding wheels that were well dressed by the proposed technique leads to a smaller grinding force and a smaller surface roughness than that of undressed wheels.