温度冲击下粗铝丝键合强度退化行为研究

对大功率器件中两种直径(250μm/380μm)铝丝键合强度在温度冲击试验下的退化行为进行了研究,分析了试验后铝丝键合强度的退化情况。设置了不同的工艺参数水平,通过温度冲击试验加速键合点失效,对不同参数水平进行评估。对不同温度冲击试验条件下的退化行为进行比较。采用扫描电子显微镜对试验后脱键点的断口形貌及组织成分进行分析,分析了不同镀金层厚度对键合点强度及可靠性的影响。结果表明,两种直径铝丝均出现键合强度退化现象,厚金焊盘键合强度下降不明显,薄金焊盘在试验后出现大量键合点脱键现象,表现出较差的抗温度冲击能力。     

其它焊接方法

键合时间对粗铝丝超声引线键合强度的影响，用于应急抢修的无电焊接技术及其应用，     

基于铜铟微纳米层常温超声辅助瞬态固相键合技术

目的 采用针状形貌铜铟微纳米层和超声能量,在常温下实现键合互连,保证互连的可靠性,从而解决传统回流焊工艺因高温引发的高热应力、信号延迟加剧等问题。方法 将镀有铜铟微纳米层的基板表面作为键合偶,对键合接触区域施加超声能量和一定压力,实现2块铜铟基板的瞬态固相键合。用扫描电子显微镜、透射电子显微镜、X射线衍射(XRD)、焊接强度测试仪等分析键合界面处的显微组织、金属间化合物及剪切强度,并对键合界面进行热处理。结果 在超声作用和较小的压力下,铜铟微锥阵列结构相互插入,形成了稳定的物理阻挡结构。键合界面处的薄铟层在超声能量作用下,其原子快速扩散转变为金属间化合物Cu2In。Cu2In是一种优质相,具有良好的塑性,有利于提高互连强度。当键合界面铟层的厚度为250 nm,键合压力为7 MPa,键合时间为1 s时,获得了相对最佳的键合质量,同时键合界面孔洞消失。热处理实验结果表明,这种固相键合技术无需额外进行热处理,就能获得良好的键合强度。结论 铜铟微纳米针锥的特殊形貌及超声波能量的引入,使键合在室温条件下即可瞬间完成,键合质量良好,可以获得较小的键合尺寸。     

Ni-Al超声楔焊键合分离界面的结构特性及演变规律

设计了一系列的粗铝线楔焊键合试验，用扫描电镜测试分离的楔焊界面，通过采集驱动电信号分析了压电陶瓷输入功率特性。结果表明，Ni—Al超声键合的界面模式形如脊皱圆环，中心和外边是未结合的摩擦痕，脊皱构成强度，相同参数条件下，一焊脊皱峰和转化的超声能大于二焊；其它参数不变的条件下，随压力的增加，键合面尺寸增大，圆环的短轴延伸为长轴，随时间的增加，脊皱扩展为完整的圆环，脊皱尺寸向中央扩大，随功率的增加，摩擦痕和脊皱加剧，且这些参数存在一个最佳范围。     

热超声倒装键合环状界面的形成

采用压力约束模式夹持倒装芯片,实现了热超声倒装键合,观察到环状的键合界面微观形貌,脊状撕裂棱以及表皮层碎片.采用有限元方法计算了键合界面应力、应力场的大小和分布在热超声倒装键合过程中的变化,从应力的角度揭示了环状界面的形成机理.研究结果表明,应力分布显示接触面边沿较其它位置更有利于去除表皮层、更有利于原子扩散形成键合强度,是形成环状界面的重要原因;振动的加载过程改变了应力和应力场的分布,使得应力分布进一步集中在振动位移决定的键合界面边沿位置,促进了环状界面的形成.     

铂金丝超声键合正交试验及焊点质量评价

采用正交试验法对直径为20μm的铂金丝进行超声波键合试验,并通过三轴测量显微镜观察键合区域形貌和测量键合点根部高度.结果表明,在研究的4个参数中,键合时间、搜索高度和超声功率的影响都较大,而键合力的影响较小.通过正交试验法可以快速获得较优的键合参数,最佳工艺条件为:键合力0.013 N,键合功率0.325W(W为键合区宽度),键合时间30 ms,搜索高度0.2 mm.键合点质量可以通过测量键合点根部高度进行评价,当根部高度在4~10μm之间时,引线拉力均在0.03 N以上.而且,当键合区接近椭圆形,且当W≈2D(D为引线丝直径)时,引线拉力较高,当键合区形貌为矩形或有裂纹出现时,拉力则较小.     

楔焊键合分离界面特性及阻抗分析

为认识超声键合机理,设计粗铝线楔焊键合试验,对分离的楔焊界面进行扫描电镜和EDS能谱仪测试分析,用GDS-820示波器采集电信号分析压电陶瓷(PZT)驱动的输入阻抗特性。结果表明,超声键合的界面模式形如脊皱圆环,中心和外边是未结合的摩擦痕,脊皱构成强度,相同参数条件下,一焊脊皱峰、输入阻抗大于二焊,一焊键合强度高于二焊。PZT的输入阻抗分析的结论与界面微结构判断一致。     

单晶铜键合丝的球键合性能研究

通过对自制单晶铜键合丝进行球键合工艺试验,并对键合后焊点分别进行键合拉力(BPT)和剪切力(BST)测试,以及对键合点的组织、界面进行观察和显微硬度测试.结果表明, 单晶铜键合丝进行球键合后,焊点所能承受的拉断力和剪切力均为近似正态分布,具有较高的可信度,50 μm的单晶铜键合丝的CPK值达到1.8以上,属于优质的过程能力指数.焊点经过可靠性试验后,界面依然清晰、较为平直,没有发现界面处形成微量弥散分布的金属间化合物和Kirkendall空洞,表现出稳定的电学和界面组织性能.     

Si-glass-Al阳极键合电流特性及其力学性能

采用两步法实现了Si-glass-Al的可靠连接,提出了键合三层晶片的电流-时间模型.键合电流结果表明,两次阳极键合的电流变化规律一致,即先迅速增加至最大值,然后呈指数式下降;发现第二次键合的电流峰值总是大于第一次,结合提出的电流-时间模型,表明键合材料之间因不完全接触而产生的电阻会对电流峰值产生显著影响.利用扫描电镜（SEM）观察Si-glass-Al界面形貌,界面结合良好,在450℃/800 V的条件下,glass-Al及glass-Si界面处Na+耗尽层厚度分别达到了546,820 nm.试样的拉伸强度随着电压的增大而升高,无论是先键合Si还是先键合Al箔,断裂总是发生在第二次键合界面附近或玻璃基体上.     

一种基于点压技术的新型晶圆键合方法

金金热压键合法在半导体制造领域中应用广泛，为了进一步改进该键合方法，首次提出了一种基于点压技术的新型晶圆键合方法，并研究了工艺温度、压强以及时间对点压键合法单点键合面积的影响. 通过超声扫描显微镜图像，着重比较了传统金金热压键合法与点压键合法的键合面积比. 对点压键合法的可选择键合性进行了讨论. 结果表明，点压键合法工艺步骤简单，工艺稳定性较好，且具有一定的可选择键合特性，在半导体制造领域中将具有广泛的应用前景.     

Effect of ultrasonic power on wedge bonding strength and interface microstructure

During the aluminum wire wedge bonding, the ultrasonic power and bonding strength were obtained. Based on those data, the relationship between ultrasonic power and bonding strength was studied. The results show that： 1） ultrasonic power is affected by ultrasonic power ratio and other uncontrolled factors such as asymmetric substrate quality, unstable restriction on the interface between wedge tool and aluminum wire; 2） when ultrasonic power is less than 1.0 W, increasing ultrasonic power leads to increasing bonding strength and decreasing failure bonding; on the contrary, when ultrasonic power is greater than 1.6 W, increasing power leads to decreasing bonding strength and increasing failure bonding; 3） only when ultrasonic power is between 1.0 W and 1.6 W, can stable and high yield bonding be reached. Finally, the microstructure of bonding interface was observed, and a ring-shaped bond pattern is founded in the center and friction scrape besides the ring area.     

表面毛化不锈钢与纯铝的真空扩散连接

采用冷金属过渡技术(CMT)对不锈钢表面进行毛化,在其表面制备高度为3 mm、分布密度为9个/cm2的毛刺,毛刺中心横向及纵向间距均为3 mm. 研究其与纯铝进行真空扩散连接接头的界面组织和性能,分析不同保温时间对接头组织和性能的变化规律. 结果表明,在扩散连接温度为600 ℃,保温时间为60 min,压力为3 MPa的工艺条件下,表面毛刺刺入铝母材内部,使得表面氧化膜有效去除,接头形成连续的Fe₂Al₅+FeAl₃界面反应层,相比不锈钢与纯铝的直接真空扩散连接,接头拉剪强度显著提高. 此外,在扩散连接温度一定时,随保温时间的增加,反应层厚度增加,接头拉剪强度呈现先增大后减小的变化趋势.     

Temperature effect in thermosonic wire bonding

1 Introduction Currently, thermosonic wire bonding and flip chip bonding are the main electrical packaging types in first level IC chip manufacture domain. Wire bonding is simple and somewhat mature, and nowadays it holds 75% in all electrical packaging …     

Cratering on thermosonic copper wire ball bonding

Copper wire bonding offers several mechanical and electrical advantages as well as cost saving compared to its gold wire predecessor. Despite these benefits, silicon cratering, which completes the fracture and removal of bond pad underlayers, has been a major hurdle to overcome in copper wire bonding. Copper wire is harder than gold, and thus needs greater ultrasonic power and bond force to bond it onto metal pads such as aluminum. This paper reports a study on the influence of wire materials, bond pad hardness, and bonding-machine parameters (i.e., ultrasonic power and bond force) on silicon cratering phenomenon. Ultrasonic power and z-axis bond force were identified as the most critical bonding machine parameters in silicon cratering defects. A combination of greater bond force and lower ultrasonic power avoids silicon cratering and gives the desired effects. Results also show that a harder bond pad provides relatively good protection from silicon cratering.     

Effect of ultrasonic power and bonding force on the bonding strength of copper ball bonds

Copper wire, serving as a cost-saving alternative to gold wire, has been used in many high-end thermosonic ball bonding applications. In this paper, the bond shear force, bond shear strength, and the ball bond diameter are adopted to evaluate the bonding quality. It is concluded that the ef/~cient ultrasonic power is needed to soften the ball to form the copper bonds with high bonding strength. However, excessive ultrasonic power would serve as a fatigue loading to weaken the bonding. Excessive or less bonding force would cause cratering in the silicon.     

表面毛化WC-Co硬质合金与铝的真空扩散连接

采用机械方法对WC-Co硬质合金表面进行焊前毛化加工,然后采用BNi2钎料对毛化后的硬质合金表面进行预涂覆处理,最终利用毛化凸台在铝中的压入及界面元素的扩散反应实现WC-Co硬质合金与铝的真空扩散连接. 结果表明,接头界面结构为:Al/Al₃Ni+Al₃Ni₂+Al₅Co₂/Co-Ni(s.s)/W-Co-Ni/WC-Co. 随着预涂覆温度的升高,W-Co-Ni化合物相的体积增大,界面由平齐向不规则演变;随着扩散温度的提高,Al₃Ni+Al₃Ni₂+Al₅Co₂层厚度增加. 当工艺参数增加时,接头抗剪强度呈现出先升高后降低的变化趋势,特别是当预涂覆温度为1 050 ℃,扩散连接温度为575 ℃,保温时间为90 min时,接头室温抗剪强度达到最大值51 MPa,明显高于未毛化接头的抗剪强度.     

Bonding mechanism of ultrasonic wedge bonding of copper wire on Au/Ni/Cu substrate

The ultrasonic wedge bonding with d 25 μm copper wire was achieved on Au/Ni plated Cu substrate at ambient temperature. Ultrasonic wedge bonding mechanism was investigated by using SEM/EDX, pull test, shear test and microhardness test. The results show that the thinning of the Au layer occurs directly below the center of the bonding tool with the bonding power increasing. The interdiffusion between copper wire and Au metallization during the wedge bonding is assumed negligible, and the wedge bonding is achieved by wear action induced by ultrasonic vibration. The ultrasonic power contributes to enhance the deformation of copper wire due to ultrasonic softening effect which is then followed by the strain hardening of the copper wedge bonding.     

Mechanical properties and interface morphology of Mg/Al ultrasonic spot weld bonding welds

This paper investigates the mechanical properties and interface morphology of Mg/Al ultrasonic spot welding (USW) joint, adhesive bonding (AB) joint and ultrasonic spot weld bonding (USWB) joint. The peak load and fracture energy of USWB joint increased significantly compared to that of USW joint and AB joint. The USWB joint presented a hybrid fracture mode which was composed of the delamination failure at adhesive/Mg interface, cohesive failure within the adhesive and cleavage failure in the weld zone. The interface morphology suggested that USWB joint exhibited fewer defects in the cured adhesive matrix and elevated connection density of adhesive/metal interface, which improved joint strength and altered the fracture mode.     

Ultrasonic evaluation of the bonding strength of dissimilar metal bonds

Diffusion bonding of steel plates to titanium plates was carried out, and shear testing and ultrasonic measurement of bonds were performed to obtain the relationships between bonding strength, state of bonding interface and ultrasonic parameters. Fourier spectra of the ultrasonic wave reflected from the bonding interface were dependent on the state of the bonding interface; when an interlayer did not melt the spectrum showed a simple profile with one peak, and when the interlayer melted, the spectrum showed a profile with large irregularity. Transfer functions obtained from the spectrum were analysed with the subspace method (a kind of principal component analysis) and were represented by two major components. The bonding strength was quantitatively evaluated by two major components and a diameter estimated from the ultrasonic measurement.