深紫外光栅反常偏振器件的设计与分析

为实现金属光栅偏振器件在光刻机偏振照明系统中的应用,基于共振域光栅的反常偏振效应,提出一种以二氧化硅为基底、铝与氟化镁作为栅线材料的介质-金属光栅偏振器。与传统的亚波长金属光栅偏振器相比,该偏振器的光栅周期接近入射波长(0.19～0.20μm),表现出透射TE偏振光、反射TM偏振光的反常特性。由时域有限差分算法(FDTD)的数值模拟结果可得,当波长为0.193μm的光垂直入射时,该光栅偏振器对TE偏振光的透过率大于60%,偏振消光比大于180。与具有相同结构参数和栅线材料的单层金属光栅偏振器相比,该介质-金属光栅偏振器在深紫外波段具有良好的偏振性能,TE偏振光透过率提升了约10%,偏振消光比提升了4.5倍左右(在0.193μm波长下)。     

800 nm亚波长夹层式金属偏振分束光栅

为获得高性能的偏振分束光栅,设计了一种亚波长夹层式金属光栅结构,通过严格耦合波分析和遗传算法优化出最佳光栅结构。所设计的光栅在波长为800 nm时,0级衍射级次上TM偏振波的透射率和TE偏振波的反射率分别为98%和96.5%。在波长747 nm 854 nm,以及入射角-27 27范围内,光栅的透射和反射消光比都大于20 dB,达到了高衍射效率、高消光比、宽带宽及大角度的要求,数值分析表明该光栅对周期、槽深、覆盖层厚度具有优良的工艺容差。该光栅结构简单,性能稳定,对入射光损耗低,偏振分束效果明显,在光学偏振器件、激光器系统、偏振成像等领域具有广泛的应用前景。     

一种微纳多齿谐振光栅偏振分束器

微纳光学器件是光路集成、片上光电转换和检测的重要基础器件,基于硅基微纳多齿谐振光栅,设计了一种高性能的微纳多齿谐振光栅偏振分束器(PBS),应用光栅对于TE和TM偏振光表现出不同的衍射性质,从而实现偏振分束的目的, 通过严格耦合波理论分析?研究了光栅PBS的性能。结果表明,在1.53 ~ 1.62μｍ(90ｎｍ)的宽带光谱上,该PBS的衍射效率大于97％,消光比(ER)大于16ｄＢ,以及角度带宽为8°等的优越性能。此外,还研究了结构参数对光栅PBS性能的影响,数值分析表明,该装置具有良好的工艺容差,可广泛应用于通信系统的路由和交换设备。     

基于二氧化硅薄膜夹层式亚波长金属光栅的宽波段太赫兹偏振分束器

设计出一种结构新颖的宽波段太赫兹偏振分束器,这种偏振分束器由夹层式亚波长金属光栅制成。亚波长金属光栅偏振分束器可以将入射的任意自然光分成两束偏振状态垂直的线偏振光。其中,TE模反射而TM模透射。设计的偏振分束器在3.5~5.5 THz波段可以达到很高的衍射效率与消光比。但是,在光栅的实际制作过程中,加工技术的缺陷引起的误差大大影响了光栅的性能,比如衍射效率,消光比等。因此文中对一些结构参数进行了计算,从计算结果可以看出这种偏振分束器也有很好的工艺容差。当覆盖层厚度D1与底层介质厚度D3的变化范围分别为1~1.2 m和2.8~3 m时,T0TM大于96.9%,R0TE大于98.7%。Tc和Rc分别大于31 dB和33.4 dB。结果显示,设计的偏振分束器在2 THz的带宽10的大角度范围内,衍射效率高于90%,消光比大于20 dB。因此文中设计对于太赫兹调制器件的研究,以及太赫兹通信系统的集成都有很大的参考价值。     

基于斜极化法的电光聚合物光波导偏振转换器

采用斜极化法研制了电光聚合物光波导偏振转换器,分析并设计了器件的45°斜角电极化结构,并基于DR1/PMMA电光聚合物材料,对器件进行了制作.所研制的偏振转换器,由TE模到TM模和由TM模到TE模的偏振模转换效率分别约为93.6%和95.1%,偏振转换周期电压约为380V.并讨论了器件性能进一步提高的可能性与方法.     

硅基槽波导级联多模干涉耦合器型偏振分束器

提出了一种基于硅基槽波导的级联多模干涉(MMI)耦合器型偏振分束器,由锥形及矩形结构MMI耦合器构成.级联结构使器件长度无需为两偏振模自镜像长度的公倍数,不仅能有效减小器件尺寸,而且提高设计灵活性.同时,利用槽波导的高双折射特性及MMI耦合器的锥形结构,可进一步缩短器件尺寸.分析结果表明,所提器件能够有效实现偏振束分离,两级MMI工作区总长度仅为42μm,准TE与准TM模的偏振消光比分别为29.8和31.4d B,1.55μm波长下的插入损耗分别为0.395和0.699 d B,偏振消光比大于20 d B时光带宽为43 nm,覆盖整个C波段.最后,详细分析了器件关键参数的制造误差对器件性能的影响.     

基于斜极化法的电光聚合物光波导偏振转换器

采用斜极化法研制了电光聚合物光波导偏振转换器,分析并设计了器件的4 5°斜角电极化结构,并基于DR1/PMMA电光聚合物材料,对器件进行了制作.所研制的偏振转换器,由TE模到TM模和由TM模到TE模的偏振模转换效率分别约为93.6 %和95 .1% ,偏振转换周期电压约为380 V.并讨论了器件性能进一步提高的可能性与方法     

基于Bragg光栅的超高消光比SOI波导偏振器设计

波导偏振器是片上集成相干光学系统中的关键器件之一,超高消光比、低损耗、紧凑型波导偏振器的设计一直是研究的热点。基于绝缘体上硅平台的倾斜Bragg光栅被用于实现超高消光比波导偏振器结构。利用一维光子晶体能带理论分别计算TE和TM模式光的能带结构分布,选择TE模式禁带与TM导带重叠带隙设计光栅,可实现TM模式低损传输,而TE模式被Bragg光栅高效反射,从而产生超高偏振消光比。3D FDTD仿真表明:16 μm倾斜Bragg光栅波导偏振器可在中心波长1550 nm附近70 nm的带宽内,实现大于37 dB的超高消光比,器件的损耗小于0.64 dB;进一步增加光栅周期数,当长度为25 μm时,消光比可提高至46 dB。Bragg光栅倾斜角与刻蚀宽度偏差仿真表明:设计的结构加工误差容限较大,同时该结构仅需一次曝光刻蚀,工艺流程简单。     

基于谐振波导光栅的偏振选择广角光探测器(英文)

高性能偏振选择型光探测器是偏振检测系统中不可或缺的一部分。提出了一种由硅基谐振波导光栅和InP/InGaAs PIN光探测器混合集成的光探测器结构。利用严格耦合波分析方法设计了硅基谐振波导光栅结构,利用时域有限差分法优化了该混合集成光探测器的结构参数。数值仿真结果表明该光探测器在宽带范围内具有高量子效率、较大入射角容差及偏振选择性。该器件可以应用于偏振敏感系统中。     

金属开口谐振环结构的太赫兹波吸收特性

太赫兹调制器、滤波器、吸收器是太赫兹波应用领域的关键器件,而金属开口谐振环是这些器件的常用结构。通过仿真及实验的手段,系统地比较了不同亚波长金属开口谐振环结构的太赫兹波吸收特性。设计并制备两种不同形式的亚波长金属谐振环,利用时域有限差分（FDTD）的模拟方法与光泵浦太赫兹探测（OPTP）的实验方法,分析了电磁波入射谐振环时,TM与TE模式下的太赫兹透射特性。发现在TM模式下,吸收峰峰值均反比于谐振环的等效电容值与等效电感值。而在TE模式下,由于偶极子振荡长度相同导致了两种谐振环吸收峰峰值相近。此外,改变外部光激励条件时实验结果表明TM模式下,单开口环比双开口环对光激励更敏感:泵浦光功率为5 mW相比无泵浦光时,单开口环透射率增加了80%,而双开口环透射率仅增加了43%。     

Angular behavior of the absorption limit in thin film silicon solar cells

We investigate the angular behavior of the upper bound of absorption provided by the guided modes in thin film solar cells. We show that the 4n² limit can be potentially exceeded in a wide angular and wavelength range using two‐dimensional periodic thin film structures. Two models are used to estimate the absorption enhancement; in the first one, we apply the periodicity condition along the thickness of the thin film structure, but in the second one, we consider imperfect confinement of the wave to the device. To extract the guided modes, we use an automatized procedure that is established in this work. Through examples, we show that from the optical point of view, thin film structures have a high potential to be improved by changing their shape. Also, we discuss the nature of different optical resonances that can be potentially used to enhance light trapping in the solar cell. We investigate the two different polarization directions for one‐dimensional gratings, and we show that the transverse magnetic polarization can provide higher values of absorption enhancement. We also propose a way to reduce the angular dependence of the solar cell efficiency by the appropriate choice of periodic pattern. Finally, to obtain more practical values for the absorption enhancement, we consider the effect of parasitic loss that can significantly reduce the enhancement factor. Copyright © 2013 John Wiley & Sons, Ltd.     

Nanoimprinted Grating‐Embedded Perovskite Solar Cells with Improved Light Management

Organic–inorganic halide perovskite solar cells are one of the most efficient photovoltaic devices, and their power conversion efficiency (PCE) continues to grow rapidly due to the optimization of device architecture and functional materials. The involved optical design has an important impact on performance by affecting the light harvesting capability. Here, demonstrated is a simple and effective strategy to boost device performance from the perspective of light management. A diffraction grating pattern into the TiO₂ scaffold and antireflection layer is simultaneously introduced to construct a double grating design for perovskite solar cells. The grating pattern obtained using a commercial compact disk as the hard mold can modulate light transport by enhancing the light transmittance and, thus, light absorption in perovskite solar cells. The grating pattern‐induced light trapping can significantly increase the short‐circuit current density and PCE by 4.8% and 7.9%, respectively, on average. The present work develops a feasible method by tailoring the morphology‐related optical property to further improve the performance of perovskite solar cells. The double grating design can also generate structural color and can provide an alternative solution for fabricating colorful solar cells.     

基于圆顶锥壳阵列的超宽带太阳能吸收器研究

提出了一种顶锥壳阵列超宽带全向超材料吸收器,研究了圆顶锥壳的几何参数、顶部的几何形状以及不同密排方式对宽带吸收的影响.研究了包覆金属薄膜的圆顶锥壳阵列在太阳辐射能谱区的超宽带吸收特性,结果显示在250～2 500 nm范围内的平均吸收率达到95.39％.在0°～65°的大角度入射下,对于TE和TM偏振的平均吸收率分别为92.7％和94.59％,表明所提出的结构具有偏振无关和入射角不敏感性.空气质量1.5加权平均吸收率为95.24％,证明能够有效地吸收地球上的太阳辐射.通过结合胶体球光刻技术和表面镀膜成功制备了所提出的吸收器,初步测试结果表明,其吸收性能存在提升空间.     

Efficient Polymer Solar Cells with Surface Relief Gratings Fabricated by Simple Soft Lithography

Polymer‐based photovoltaic cells, with periodic sub‐micrometer structures as an efficient light‐trapping scheme, are investigated to improve the performance of organic solar cells based on poly(3‐hexylthiophene) and 1‐(3‐methoxycarbonyl)propyl‐1‐phenyl‐(6,6)C₆₁. A soft lithographic approach that uses photoresponsive azo polymer films as masters and poly(dimethylsiloxane) as stamps is used to form surface relief gratings (SRGs) on the active layers. The effect of periodic gratings on solar cell performance is precisely investigated according to various grating conditions such as period, depth, and dimension. The solar cells with 1D and 2D SRGs present improved incident‐photon‐to‐current conversion efficiencies and an overall increase in power conversion efficiencies, primarily resulting from the enhancement of short‐circuit current density, indicating that periodic structures induce further photon absorption in the active film.     

传输矩阵法求解长短周期级联光纤光栅传输谱

基于光纤光栅的模式耦合理论,用传输矩阵法对长短周期级联光纤光栅的传输谱特性进行分析。先由耦合模方程分别得到长周期光纤光栅(LPFG)、连接光纤段和短周期光纤光栅(FBG)的传输矩阵,然后将它们相乘得到总的传输矩阵,最后再结合边界条件求得长短周期级联光纤光栅(CLBG)的传输谱。进一步对CLBG的传输谱进行了数值模拟,并通过实验进行了验证。实验结果表明,CLBG的传输谱中出现了由纤芯模和包层模耦合形成的两个谐振峰,与模拟计算的结果一致,证明了传输矩阵法求解CLBG传输谱的可行性,为CLBG在多参量传感和测量领域的广泛应用提供了理论支持。     

基于表面等离子波耦合的流体波导光栅耦合器

提出了一种由金属光栅和流体光波导结构组成的,基于表面等离子波耦合的光栅耦合器。利用光栅的衍射效应,将金属光栅与介质分界面之间产生的表面等离子波耦合到流体光波导中,并且能够沿着流体光波导稳定地向前传播。通过采用基于有限时域差分算法的FDTD Solutions软件对光栅耦合器进行了参数优化及特性分析,通过优化使该结构在650 nm波长下的耦合效率达到56%。此外,由于该结构对TE偏振光和TM偏振光的选择比达到70∶1,因此具有偏振器的功能。同时由于TE偏振光耦合频谱的频带宽度仅为20 nm,该结构还具有窄带滤波的作用。此外,还研究了光栅结构参数、入射角以及流体折射率对耦合频谱的影响。     

Complete Polarization Conversion Characteristics of Dielectric Grating Composed of Left-Handed Materials

The TE/TM polarization conversion characteristics of dielectric grating composed of left-handed materials for the case of plane wave oblique incidence are carefully investigated by a method which combines the multimode network theory with the rigorous mode matching method. It is indicated that complete polarization conversion between TE and TM modes can be realized using left-handed gratings. This can hardly achieve in the conventional right-handed gratings. Comparisons of polarization conversion properties between right-handed gratings and left-handed gratings are given with physical explanations. This unique merit of left-handed periodic structure is of important significance for accurate design of new millimeter wave TE/TM polarization converters.     

基于光栅侧面耦合的宽光带集光技术

利用光栅侧面耦合技术多为单波长或窄带光耦合,用于光纤激光器泵浦、光波导集成等领域,而用于可见光宽带耦合的研究很少。通过在波导上集成亚波长衍射光栅结构,可以引导太阳光在波导的侧面进行出光汇集,作为一种新型的太阳能集光器结构。利用时域有限差分算法软件(FDTD)对光栅结构进行仿真,以获得最大衍射效率的光栅结构参数,并对不同入射角度下的衍射耦合效率进行了分析。结果显示,在宽波段的光谱范围内,以上光栅结构均达到较好的衍射效率,其中闪耀光栅衍射效率最大,其衍射效率可达48.8%。这种利用亚波长衍射光栅结构的小型集光器有望应用在有关太阳能能量的收集应用中,例如照明、太阳能电池等。     

Cascaded coupling: Realization and application to spectral maneuvering

In this paper, we analyze a scheme of three mode coupling referred to as cascaded coupling in an optical fiber by employing a pair of superimposed long period gratings. In the cascaded coupling process, interaction between two modes takes place via an intermediate mode. We show that cascaded coupling gives us an additional degree of freedom to tune the transmission spectrum to achieve desired spectral features by appropriate choice of grating parameters i.e. grating strength, length and wavelength of operation. Applications of the proposed design to achieve flat wavelength response and gain flattening filters for erbium doped fiber amplifiers are presented.     

Design of Highly Efficient Light-Trapping Structures for Thin-Film Crystalline Silicon Solar Cells

We present a design optimization of a highly efficient light-trapping structure to significantly increase the efficiency of thin-film crystalline silicon solar cells. The structure consists of an antireflection (AR) coating, a silicon active layer, and a back reflector that combines a diffractive reflection grating with a distributed Bragg reflector. We have demonstrated that with careful design optimization, the presented light-trapping structure can lead to a remarkable cell-efficiency enhancement for the cells with very thin silicon active layers (typically 2.0-10.0 mum) due to the significantly enhanced absorption in the wavelength range of 800-1100 nm. On the other hand, less enhancement has been predicted for much thicker cells (i.e.,>100 mum) due to the limited absorption increase in this wavelength range. According to our simulation, the overall cell efficiency can be doubled for a 2.0-mum-thick cell with light-trapping structure. It is found that the improvement is mainly contributed by the optimized AR coating and diffraction grating with the corresponding relative improvements of 36% and 54%, respectively. The simulation results show that the absolute cell efficiency of a 2.0-mum-thick cell with the optimal light-trapping structure can be as large as 12%.