反应溅射Zr-Si-N复合膜的微结构与力学性能

在Ar、N2混合气氛中，通过双靶反应磁控溅射方法制备了一系列不同Si含量的Zr-Si-N复合薄膜，采用EDS、XRD、SEM、AFM和微力学探针表征了复合膜的成分、相组成、微结构和力学性能。结果表明：随着Si的加入，Si3N4界面相形成于ZrN晶粒表面并阻止其长大。低Si含量下，晶粒的细化使Zr-Si-N薄膜得到强化，在Si含量为6．2at％时其硬度和弹性模量分别达到最高值29．8GPa和352GPa。继续增加Si的含量，薄膜逐渐向非晶态转变，同时产生ZrxSiy相，并伴随有明显的力学性能降低。Zr-Si-N薄膜力学性能增加受到限制，可能与Si3N4界面相和ZrN晶粒之间的低润湿性有关。     

Ag-SiO2复合纳米颗粒薄膜的制备及其光学特性研究

利用溶胶一凝胶法在玻璃基底上成功制备了Ag—SiO2复合纳米颗粒薄膜,SEM、TEM和XRD的表征分析表明Ag是以单晶纳米颗粒的形态均匀分散在SiO2基质中,形成了多孔状Ag—SiO2复合纳米颗粒薄膜。从Ag—SiO2复合纳米颗粒薄膜的光吸收谱发现,该复合薄膜中鲰纳米颗粒具有较强的等离子共振吸收峰,峰位在430nm附近,随着复合薄膜中Ag、Si摩尔比的逐渐增大,等离子共振吸收峰不断增强且发生蓝移,蓝移量可达30nm;研究Ag—SiO2复合纳米颗粒薄膜的光敛发光特性发现,当激发波长为220nm时,复合薄膜分别在330nm和375nm处出现了两个发光带,随着复合薄膜中Ag、Si摩尔比增大到0．11,两发光带均逐渐增强,继续增加Ag、Si摩尔比,两发光带又逐渐减弱,且375nm处的发光带变化尤为显著。     

Size-controlled Ag nanoparticle modified WO3 composite films for adjustment of electrochromic properties

Size-controllable Ag nanoparticle ultrathin films, which were fabricated by vacuum deposition method from high purity Ag wire onto cleaned indium tin oxide conducting glass, have different color fabricated by variation of preparation conditions. The UV/Vis spectra showed that optical absorption peak of these Ag nanoparticle films can be tuned in a range from 457 nm to >650 nm. Scanning electron microscopy images showed that with increasing film thickness Ag particle size was larger. Ag/WO₃ composite films were prepared by cathodic electrodeposition of WO₃ onto the surface of Ag nanoparticle films. Spectroelectrochemistry and electrochromic properties of the resulting composite films were characterized. It was found that the electrochemical and electrochromatic properties of the composite films were adjustable with change the size of Ag nanoparticles in the composite films. Compared with a single component system of WO₃, a substantial enhancement in the electroactive and electrochromic performance for the Ag embedded WO₃ composite system was clearly observed.     

Optical properties of erbium oxide thin films deposited by electron beam evaporation

Erbium oxide thin films were deposited by electron beam evaporation on substrates heated to 300 °C. The effect of the introduction of oxygen on the structural, chemical and optical properties of the films was investigated. The films were characterized using X-ray diffraction, X-ray photoelectron spectroscopy and normal-incidence transmittance and reflectance. The films had microcrystallites embedded in an amorphous matrix, and their stoichiometry was dependent on the oxygen partial pressure. The transmittance spectra of the films revealed that they were optically inhomogeneous. A model based on an inhomogeneous layer was applied to extract the refractive index and extinction coefficient from the transmittance and reflectance spectra.     

Ag-Nd2O3复合介质薄膜的光吸收特性研究

在真空中用蒸发沉积的方法制备了埋藏有金属Ag纳米微粒的稀土氧化物复合介质薄膜Ag-Nd2O3.通过对这种薄膜的透射电子显微镜观察和光吸收实验研究,发现在相同Nd2O3的薄膜上沉积数量和大小不同的Ag纳米粒子,Ag-Nd2O3复合介质薄膜的光吸收特性随Ag粒子尺寸和体积分数的增大,吸收峰向长波方向移动.而且在光波长310～1 200 nm区域内,吸收比随Ag粒子尺寸和体积分数的增加而增加.分析表明Nd2O3与Ag粒子之间的相互作用是影响吸收峰位置和吸收比大小的主要原因,Ag粒子的体积分数是导致吸收峰移动的主要因素.     

Ag掺杂非晶碳膜结构、力学与电学行为研究

采用反应磁控溅射技术, 通过改变溅射靶电流实现了不同Ag掺杂含量0.7at%~41.4at%非晶碳膜(a-C:Ag)的可控制备, 并系统研究了Ag含量对薄膜组分、结构、机械特性的影响规律, 以及薄膜的电学特性。结果表明: 当Ag含量在0.7at%~1.2at%时, Ag原子固溶于非晶碳基质; 当Ag含量在13.0at%~41.4at%范围, 薄膜中出现尺寸约为6 nm的Ag纳米晶。随着Ag含量增加, 碳网络结构的sp ²团簇尺寸增大, 结构无序度降低。应力测试表明, 在低Ag含量范围, Ag原子固溶于碳膜网络结构中, 起到枢纽作用, 促进碳网络结构键长、键角畸变弛豫, 从而降低薄膜应力。随着Ag含量增加, 部分Ag原子将形成Ag纳米晶粒, 薄膜通过Ag纳米晶与非晶碳界面处的滑移以及扩散作用释放过高的畸变能降低应力。Ag含量为37.8at%时, 在11.6 K附近, 薄膜出现金属-半导体特性转变。而Ag含量为41.4at%的薄膜, 在2~400 K测试温度范围内, 均表现为半导体特性, 其中在164~400 K范围内, 薄膜表现出典型的热激活导电机制。     

Microstructure and optical properties of plasmapolymer thin films with embedded silver nanoparticles

Plasmapolymer thin films with embedded silver nanoparticles were deposited by simultaneous plasma polymerization and metal evaporation. The particle size and shape were determined by transmission electron microscopy (TEM) and analysed by optical image processing. The optical properties in the UV/ VIS/NIR spectral region were determined by the plasma resonance absorption of the silver particles. Transmittance spectra were calculated with the Bergman effective medium theory and compared with experimental spectra.     

Ag-MgF2复合纳米金属陶瓷薄膜的微粒尺寸效应

本文用Maxwell-Gamett有效介质理论计算了不同体积成分比的Ag-MgF2复合纳米金属陶瓷薄膜在2.50 nm-830 nm波段的光学常数,考虑了由于金属颗粒尺寸对其内部传导电子平均自由程的限制而产生的尺寸效应。同时讨论了Ag-MgF2复合薄膜中的Ag微粒表面等离子体共振吸收峰的峰强、峰位、半高宽以及由于金属微粒的尺寸效应而引起的峰位移动的情况,并将考虑尺寸效应后所得到光学常数的理论值和实验结果进行了比较。     

Influence of the interaction between metal particles on optical properties of Ag-Si3N4 composite films. I. Experiment

Ag-Si3N4 composite films with metal fractions of 20% and 33% were prepared by magnetron sputtering. The Ag particles inside the composite films were less than 5 nm in radius. The optical absorption and near-field enhancement properties of the composite films were measured. On the plots of optical absorption, the extra absorption was observed as well as the surface plasmon resonance absorption. The intensity of the extra absorption depended on the particle size and metal fraction. Moreover, the composite films with higher extra absorption had better near-field enhancement properties. These phenomena were possibly related with the interaction between Ag particles in composite films.     

Si基片上Ag膜的微结构及光学常数研究

用真空蒸镀法在室温Si基片上制备了Ag薄膜 ,并用X射线衍射及反射式椭偏光谱技术对薄膜的微结构和光学常数进行了测试分析。结构分析表明 :制备的Ag膜晶体仍为面心立方结构 ,呈多晶状态 ,晶粒择优取向于 [111],平均晶粒尺寸约为 2 2 7nm ,晶格常数 ( 0 4 0 860nm)比标准值 ( 0 4 0 862nm)略小。在 2 5 0～ 83 0nm波长范围椭偏光谱测量结果表明 :Ag膜的折射率和消光系数分别在 0 15～ 1 4 9和 0 3 1～ 5 77之间。与块材相比 ,在块材的折射率大于一定值 ( 1 0 0～ 1 3 3 )时 ,Ag膜的折射率比块材的小 ,其余范围则增大 ;Ag膜的消光系数减小。并给出了一套较为可靠的、具有实用价值的Ag薄膜光学常数。     

Instantaneous formation of SiOx nanocomposite for high capacity lithium ion batteries by enhanced disproportionation reaction during plasma spray physical vapor deposition

Nanocomposite SiO_x particles have been produced by a single step plasma spray physical vapor deposition (PS-PVD) through rapid condensation of SiO vapors and the subsequent disproportionation reaction. Core-shell nanoparticles, in which 15 nm crystalline Si is embedded within the amorphous SiO_x matrix, form under typical PS-PVD conditions, while 10 nm amorphous particles are formed when processed with an increased degree of non-equilibrium effect. Addition of CH₄ promotes reduction in the oxygen content x of SiO_x, and thereby increases the Si volume in a nanocomposite particle. As a result, core-shell nanoparticles with x = 0.46 as anode exhibit increased initial efficiency and the capacity of lithium ion batteries while maintaining cyclability. Furthermore, it is revealed that the disproportionation reaction of SiO is promoted in nanosized particles attaining increased Si diffusivity by two orders of magnitude compared to that in bulk, which facilitates instantaneous composite nanoparticle formation during PS-PVD.     

Optical and morphological characterization by atomic force microscopy of luminescent 2-styrylpyridine derivative compounds with Poly(N-vinylcarbazole) films

The present work addresses the optical and morphological properties of organic films based on low molecular weight dyes styrylpyridine derivatives 2-styrylpyridine (A), 4-chlorophenyl-2-vinylpyridine (B) and 4-fluorophenyl-2-vinylpyridine (C), embedded in a polymeric matrix poly(N-vinylcarbazole) (PVK). The films were prepared by a spin-coating technique from solutions with dye:PVK ratios of 0.25:1, 0.5:1 and 1:1. Solvents were chloroform and toluene. The molar absorption coefficient (ε) spectra for a dye:PVK mixture in solution were a combination of the absorptions of both components separately, but for the deposited films, the shape of the spectrum showed that the poly(N-vinylcarbazole) absorption dominated. However, when the same films were dissolved again in CHCl₃, their spectra showed an absorption shape similar to that of the solution mixture before the deposition. Solution viscosity measurements were carried out with an Ubbelohde glass capillary viscometer to corroborate the results that showed a better mixture of the dye with the host in chloroform. The morphology of the prepared films was analyzed by atomic force microscopy and exhibited a solvent effect, with a pinhole-free, smooth surface when toluene was used and a wavy surface with chloroform. The ratio dye:matrix was the principal parameter for obtaining optical quality films; for 0.25:1 and 0.5:1 ratios, the films were of good quality, but for 1:1, the dye was expelled from the PVK and a crystallization was present over the surface of the films. Film thickness was also measured and films deposited from toluene solutions gave an average thickness of 54 nm while films from chloroform solutions had an average thickness greater than 160 nm that increased depending on chromophore concentration.     

Optoelectronic properties of sputter-deposited Cu2O-Ag-Cu2O treated with rapid thermal annealing

Cu₂O and two types of Cu₂O-Ag-Cu₂O (CAC) multilayered thin films were deposited on glass substrates using DC-magnetron sputtering. For CAC films, the mass thickness of Ag layer was controlled at 3 nm. After deposition, some of these films were annealed using a rapid thermal annealing (RTA) system at 650 °C, in order to create embedded Ag particles. AC films were used to study the clustering effect of Ag in Ar atmosphere, as well as for forming the 2nd type of CAC film by covering another Cu₂O layer on the annealed AC structure. A UV-VIS-NIR photometer, a Hall measurement system, and a I-V measurement system were used to characterize the optical and electrical properties of these films with and without RTA. The results show that 2-dimensional Ag layer can transform into many individual particles due to its high surface tension at annealing temperature, no matter when the annealing was carried out. For CAC films, without annealing, the optical transmission and the resistivity are decreased with the inserted Ag layer. After annealing, both the transmission and resistivity are increased, possibly due to the clustering effect of Ag layer. Most importantly, it is found that the embedded Ag particles can increase the light absorption in the NIR-IR region, which can increase photo-induced current.     

Characterization on pulsed laser deposited nanocrystalline ZnO thin films

Nanocrystalline zinc oxide thin films were deposited on glass and silicon substrates by using pulsed laser deposition at different laser energy densities (1.5, 2, and 3 J/cm²). The film thickness, surface roughness, composition, optical and structural properties of the deposited films were studied using an α-step surface profilometer, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), optical transmittance, and X-ray diffraction (XRD), respectively. The film thickness was calculated as 244 nm. AFM analysis shows that the root-mean-square roughness increases with increasing laser energy density. XPS analysis shows that the interaction of zinc with oxygen atoms is greatly increased at high laser energy density. In the optical transmittance spectra, a shift of the absorption edge towards higher wavelength region confirms that the optical band gap increases with an increase in laser energy density. The particle size of the deposited films was measured by XRD, it is found to be in the range from 7.87 to 11.81 nm. It reveals that the particle size increases with an increase in laser energy density.     

Surface morphology and optical properties of magnetron - sputtered ultrathin Al films

Ultrathin Al films with different thicknesses were deposited on glass substrates by DC magnetron sputtering. The effects of film thickness on morphology and optical properties of the films were investigated in detail. When film thickness increases from 7.0 to 84.0 nm, the average grain size and surface roughness enlarges from 27.6 to 94.2 nm and from 0.25 to 1.87 nm, respectively. Below critical thickness of 28.0 nm, which is the thickness that Al films form continuous film, the optical properties vary significantly with thickness increasing and then tend to be stable. In the absorptance spectra, all films exhibit distinct broad peaks which can be attributed to the absorption due to the interband transition. The possible reasons for the shift in the peak position are due to the quantum size effects and internal stress in the ultrathin Al films.     

Reactive particle beam based deposition process of nano-crystalline silicon thin film at low temperature for the flexible AM-OLED backplane

A novel deposition process for depositing nano-crystalline silicon (nc-Si) thin films at low temperature was developed using reactive particle beam assisted chemical vapor deposition (RPB-CVD) for applications to the thin film transistor (TFT) backplane of flexible active matrix-OLEDs with plastic substrates. During the formation of nc-Si thin films by the RPB-CVD process with a silicon reflector electrode at low temperatures or room temperature, energetic particles could induce the formation of a crystalline phase in polymorphous Si thin films without additional substrate heating. The effects of the incident RPB energy controlled by the reflector bias were confirmed by Raman spectroscopy. The dark conductivity of polymorphous Si thin films increased with increasing reflector bias, whereas the ratio of photo and dark conductivity decreased monotonically. The optical band gap of the Si thin films also could be changed from amorphous to nano-crystalline by controlling the reflector bias. The first results of a primitive nc-Si TFT by RPB-CVD at room temperature demonstrate the technical potential of RPB-based processes as flexible TFT backplanes.     

Ag-BaO复合薄膜光吸收谱中的双峰结构

经超额Ba激活的Ag-BaO复合薄膜光吸收谱显示,该薄膜样品在可见-近红外光波段存在2个吸收峰.理论分析表明,位于可见光区的主吸收峰源于埋藏在BaO半导体中的Ag纳米粒子的表面等离子激元共振吸收;而位于近红外光区的次吸收峰则是由BaO半导体基质中杂质能级的光吸收引起的.杂质能级的产生与超额Ba在BaO晶体中造成的氧缺位有关.     

Size variation and optical absorption of sol-gel Ag nanoparticles doped SiO2 thin film

In this research, we have focused on the formation of Ag nanoparticles dispersed in SiO₂ matrix using sol-gel method. The influences of the metal concentration on the size variation of Ag nanoparticles and the size effect on the surface plasmon absorption have been studied. Sol-gel silica thin films containing Ag particles were synthesized by dip-coating on soda-lime glasses. The molar ratio of Ag / Si was chosen from 0.2% to 8%. All films were dried in air at 100 °C for 1 h. Using X-ray photoelectron spectroscopy, the Ag / Si ratios in the prepared films have been measured. In addition, it was shown that the prepared matrix was a stoichiometric composition as SiO₂, and the synthesized nanoparticles were mainly in the metallic state. Size and distribution of the nanoparticles were measured by high resolution scanning as well as transmission electron microscopy and also atomic force microscopy analyses for low and high Ag concentrations, respectively. We have found that by decreasing the Ag / Si ratio from 8 to 0.2 mol%, the particle size reduces from 95 to 4 nm with a nearly spherical shape. UV-visible spectrophotometry showed that the size reduction of the Ag nanoparticles for the Ag / Si molar ratios ranging from 8 to 0.2 mol% leads to an intensity reduction of the absorption peak and a blue shift from 460 to 410 nm.     

Dielectric and optical properties of CaCu3Ti4O12 thin films containing Ag nanoparticles

Simple sol-gel techniques are used to prepare thin films of a high dielectric constant perovskite CaCu₃Ti₄O₁₂, containing different amounts of metallic silver nanoparticles. The formations of the silver nanoparticles are verified by X-ray diffraction, scanning electron microscopy, transmission electron microscopy and optical absorption studies. The dielectric properties are found to be significantly affected by the presence of the silver nanoparticles. A maximum in the dielectric constant is observed at an intermediate metal particle concentration. This is explained in terms of the polarization at the particle-dielectric interface and the internal barrier layer capacitor effect. The optical absorption spectrum is compared with Mie theory in electrodynamics for the optical absorption of small particles to extract the particle size of the silver particle. Non-uniform distributions of Ag particles through the thickness of the thin films are reported.     

Influence of Cr contents and nanograin sizes on microstructure, mechanical and sliding tribological behaviors of hard Cr-diamond-like carbon films

The influence of Cr content and nanograin size on the microstructure, the mechanical and sliding tribological behaviors of Cr-containing diamond-like carbon (Cr-DLC) films, deposited on (100) Si substrate by a mid-frequency dual-magnetron system, was explored. The Cr-containing nanoparticles (combining Cr with C) were dispersed in the amorphous DLC matrix while some nanoparticles were transformed into compounds of C/Cr. The incorporation of Cr into Cr-DLC films improved the crystallinity of the Cr-rich nanoparticles and partially converted the nanoparticles to Cr/C phase. The films with Cr content ranging between 5-10 at% and with Cr-containing nanograin sizes in range of 15-27 nm were found to possess higher hardness, lower intrinsic stress, lower coefficient of friction (COF) and wear rate than those of 16-28 at% Cr content and 46-74 nm nanograin sizes. The superhard Cr-DLC film with 8.3 at% Cr and 18.4 nm Cr-containing grain gave the favorable micro-tribological characteristics with COF at micro approximately 0.1 and wear rate at 3.6 x 10(-8) mm3/Nm.