聚酰亚胺/银红外空芯波导的研制

设计并制备了一种新型的聚酰亚胺/银空芯波导，其实验工作的重点是聚酰亚胺薄膜的制备。采用改进的液相工艺，我们在石英毛细管内制备了表面光滑均一的银膜，然后，再将近折射率非常接近理论最佳值（√2）的聚酰腚胺膜涂覆在银管内。通过控制聚酰亚胺膜的厚度，可以对银空芯波导在特定的波长处有降低损耗的作用，除了6-9μm处的基因吸收外，这种空芯波导在中红外区域的损耗都很小。在10.6μm波长处的损耗为0.4dB/m，传输能量为10w时，可以稳定传输20min以上，基本上可以满足CO2激光在医疗中的应用。     

医用CO2激光传输用空芯波导的研制

本文作者设计并制备了一种新型的CO2激光传输用空芯波导。除了6μm-9μm处的基团吸收外，这种空芯波导在整个中红外区域的损耗都很小，在10.6μm波长处的损耗约为0.4db/m，传输能量为10W时，可以稳定传输20分钟以上，基本上可以满足CO2激光在医疗中的应用。     

10.6μm空芯传能光纤的研制

为研制10.6μm空芯传能光纤,讨论了银层质量、碘化银层质量对空芯波导传输损耗的影响.介绍了研制波长为10.6 μm的空芯传能光纤的工艺方案及其典型参数.通过液相化学沉积法,在石英基底管内壁成功地生成了优质金属银层和碘化银电介质包层.制作了出具有高透过率的空芯红外波导.     

低损耗红外传输Ge30As10Se30Te30玻璃光纤的制造

利用改进的纯化技术和工艺技术制造Ｇｅ３０Ａｓ１０Ｓｅ３０Ｔｅ３０玻璃光纤，所制得的光纤在６．６μｍ波长的最低损耗达０．１１ｄＢ／ｍ。这是所报道的红外区任何碲（Ｔｅ）玻璃光纤的最低损耗。此外，这种光纤在５．２５￣９．５μｍ的损耗小于１ｄＢ／ｍ。     

超荧光光纤光源的工作特性

研制了一种激光二极管泵浦的掺钕超荧光光纤光源,在波长１．０８μｍ处获得了１．０ｍＷ的光功率输出,谱线宽度为２１．２ｎｍ,实验中使用的是掺钕单模光纤,芯径５μｍ,截止波长１．０μｍ,其损耗在泵浦波长０．８μｍ处为１５００ｄＢ／ｋｍ,而在输出波长１．０８μｍ处为１０ｄＢ／ｋｍ。     

SIMOX大截面单模脊型光波导的研制

以注入氧隔离(SIMOX)技术制备的SOI(silicon—on-insulator)为衬底,利用气相外延生长技术获得了质量良好的厚膜SOI材料,进而通过反应离子刻蚀方法在厚膜SOI材料上成功研制了SIMOX大截面单模脊型光波导。对于波长为1．55μm的光,其传输损耗小于0．6dB／cm。     

低损耗玻璃光波导的溶胶-凝胶法制备

采用溶胶－凝胶（Ｓｏｌ－ｇｅｌ）技术制备了ＳｉＯ２－ＴｉＯ２低损耗平面光波导,在６３３ｎｍ处的传输损耗为０．５７ｄＢ／ｃｍ。同时在硅基板上制备了脊型Ｙ形波导分束器,分束比为１１。     

大长度,低损耗,红外传输As40S（60—x）Sex玻璃纤维的制备

业已制作出长５０ｍ，在１－６μｍ波长区传输的聚四氟乙烯包层和Ａｓ４０Ｓ６０玻璃包层Ａｓ４０Ｓ５５Ｓｅ５光纤，其最损耗分别为０．０９８和０．６５ｄＢ／ｍ。     

日本实现10Gb／S波长直接变换技术

日本实现１０Ｇｂ／Ｓ波长直接变换技术面对多媒体时代的到袭日本致力于开发新的光纤传输与光交换技术。目前，已实现以光纤最低损耗１．５５μｍ为中心，在９０ｕｍ范围内、可任意变换光波波长的１０Ｇｂ／Ｓ波长直接变换技术。这一结果与以往的技术相比（速率２．５Ｇｂ...     

聚合物脊形光波导设计

用5层非对称平面波导理论和等效折射率法(ERIM)分析了金属电极对聚合物脊形光波导横向模式特性及其传输损耗的影响。计算结果表明：在工作波长1．55μm波段,当常规脊形光波导的芯层厚度大于0．8μm、包层厚度大于3．0μm时,才能保证传输损耗的理论极限小于0．1dB／cm;当脊波导刻蚀深度为0.l一0．2μm、对应脊波导宽度为7—5μm时,可满足脊波导横向单模传输。     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.