光激励激型硅谐振器研究

本文介绍了一种可以形成新型光纤传感器的微型硅谐振器，其基本原理是微型硅谐振器在调制光的光热艇下产生谐振，被测物理参数使谐振频率发生改变，文中给出了用单晶硅制作桥型微谐振器的方法，研究了微型谐振器在光激励下产生振动的机理。     

基于硅悬臂梁谐振器的新型气体传感器

研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.     

Design of a Silicon Beam Resonator for a Novel Gas Sensor

研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.     

光激、光拾硅微机械谐振传感器的进展

从基本工作原理着手阐述了光激、光拾硅微机械谐振式传感器,评述了近年来在光激、光拾方式下工作的硅微机械谐振式压力、温度传感器的进展,并就该领域未来的发展作了展望。     

电热激励微谐振器及谐振式传感器

硅微谐振式传感器具有灵敏度和分辨率高、准数字信号输出、抗干扰能力强的优点,在精确测量领域具有独特的优势。其中,电热激励/压敏电阻拾振的微谐振器与工业IC技术兼容,可将敏感元件与信号调理电路集成在一块芯片上构成功能强大的智能传感器。着重论述了电热激励/压敏电阻拾振的硅微谐振器的几种典型结构及其制造技术,并在此基础上阐述了以该谐振器为敏感元件开发的质量流量、气体、压力、温度和接近传感器等多种谐振式传感器。     

光激励微硅梁谐振机理研究

用实验的方法研究了微硅梁在光激励下产生谐振的机理 ,解释了微硅梁在光激励下的谐振是由于光 热 机能量转化的结果     

带尾纤的全光型硅微谐振器

带尾纤的全光型硅微谐振器引入了集成光学技术,具有独立的拾振光路和简单易行的拾振方式,可以完全脱离光学平台运作．对带尾纤的全光型硅微谐振器进行了实验测量及较详细的理论分析,给出了悬臂梁振子的固有谐振频率、谐振频率的总温度系数、悬臂梁对简谐激励的响应等表达式;归纳出了该谐振器具有光纤与振子间未对准误差容限较大,输出测量信号与光纤有效光学长度无关及振子谐振频率不受硅片内应力影响等特点．     

石英晶体谐振器声负载敏感性的分析

针对石英晶体谐振器（ＱＣＲ）的声负载敏感性，在一种三层结构力学模型的基础上，导出了具有广泛适用意义的谐振电阻及谐振频率随谐振器表面参数变化的公式。结合石英谐振式气、湿敏传感器的理论分析表明，ＱＣＲ的谐振幅值与谐振频率均可作为传感器的检测参量。谐振幅值主要反映了表面阻尼情况，谐振频率则在反映表面质量负载情况的同时，受到表面阻尼的影响，在传感器研制中应引起足够的重视     

微型振动陀螺仪

用Ｓｉ表面微机械加工技术制作了一种具有４００μｍ×８００μｍ薄多晶硅谐振器的振动微型陀螺仪。陀螺仪受静电力的作用进行横向驱动，并检测谐振器与衬底之间电容变化的输出信号。０．１帕压力下获得的多晶硅谐振器驱动模和检测模的机械Ｑ值分别为２８００和１６０００。介绍了调整驱动模和检测模谐振频率变化差的有效方法。试验器件的噪声等效速率为７°／ｓ。     

AIN薄膜体声波谐振器性能分析

采用体硅微细加工工艺制备了背空腔型AIN薄膜体声波谐振器。研究了压电层、上电极及支撑层厚度对谐振器性能的影响。测试结果表明，谐振器所用AIN压电薄膜具有（002）择优取向，器件频率特性良好。当上电极、压电层、底电极和支持层的厚度分别为110，2600，110，200nm时，谐振频率为1．759GHz，机电耦合系数3．75％，品质因数79．5。结合Mason等效电路模型模拟分析与实验结果，分析了各层厚度对频率特性的影响机理。     

Novel optically excited resonant pressure sensor

A novel pressure sensitive microresonator structure has been fabricated by anisotropic etching of silicon. An intensity modulated laser beam is focused onto the resonator and generates transverse vibrations, which are detected using optical heterodyne interferometric techniques. The pressure and temperature dependence of the resonant frequency of this structure is reported     

一种硅微机械谐振器的单光源激振测振方法

提出一种用于硅微机械谐振传感器研究的单光源激振测振新方法,即微谐振器的激励及其谐振信号的测量使用同一光源。该方法采用全光纤斐索干涉仪结构,将干涉信号与光源强度变化信号进行运算后,通过选频技术解调出谐振器的振动信息,同时采用贝塞耳函数比值法扩大了振动幅度的测量范围,省去了一些难以获得准确数值的工作参数的计算。采用该方法实现了微悬臂梁结构形式的谐振器件的单光源激振与测振,获得了器件的谐振频率约为8.81kHz以及谐振状态下的振动幅度约为135nm。实验结果与采用其他双光源激振测振方法基本一致,新方法的可行性得到了验证。     

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.      

Dual-Double Slot Antennas Fabricated with Single Superconducting Film for Millimeter Wave Camera

We propose an entirely plane-structure camera for millimeter wave astronomy, in order to reduce production cost and time. The camera is composed of a silicon lens-let, antennas, feed lines, and detectors made from the same superconducting aluminum film on a silicon substrate. A couple of double-slot antennas are located the same focal plane of a small substrate lens to enhance the packing density of detectors and observation efficiency. To achieve high sensitivity, we adapted a microwave kinetic inductance detector as a photon sensor, which consists of a superconducting microresonator. We examined the optical performance of the camera attached to a silicon lens array at 220 GHz in a 0.3 K cryostat. The measured beams were in good agreement with the calculations within the dynamic range of the setup (20 dB). Polarization misalignments between the dual-double slot antenna were less than 2^°, and cross-polarization level was around ?7 dB. The relatively high cross-polarization would be explained by an antenna crosstalk mediated by quasiparticle diffusion.     

Effects of Resonator Loss on Output Characteristics of Ring Microresonator Filter

The ring microresonator filter considering resonator inner loss is analyzed theoretically, which has one input port and two output ports, Some universal relations for coupling of optical power between microresonator and dielectric waveguides are presented. The analytical expressions of filter bandwidth or the full width at half maximum （FWHM）, free spectral range and finesse of resonator are derived. The characteristics of the ring microresonator filter are discussed numerically. It is demonstrated that the loss of the ring resonator reduces the peak value of transmission, widens the filter bandwidth, and reduces the finesse of the resonator filter.     

硅压阻式传感器的温度特性及其补偿

基于硅压阻式传感器的工艺过程与后续电路设计 ,讨论了减小其温度影响的措施。文中对在相同的硅基底上 ,采用诸如扩散、离子注入、薄膜淀积以及溅射等不同加工工艺制作实现的不同的压敏电阻特性 ,特别是温度特性进行了探讨和比较。针对一种具体的硅杯结构的压阻式传感器 ,设计、选择了加工工艺 ,给出了压敏电阻的近似温度补偿公式 ,讨论了传感器补偿电路的实现方案     

Proposal to Produce Coupled Resonator-Induced Transparency and Bistability Using Microresonator Enhanced Mach–Zehnder Interferometer

We propose a microresonator scheme for a Mach-Zehnder interferometer in which a microresonator is side coupled to one arm and the other is inserted in the other arm, to produce coupled resonator-induced transparency (CRIT) and absorption (CRIA) effects. In this system, CRIT and CRIA effects with one effect next to another over a frequency range when two microresonators are identical and Fano-resonance line shape when the sizes of two microresonators are unequal are achieved. We also theoretically investigate the improving optical bistability characteristic based on CRIT.     

Optical mm-Wave Signal Generation by Frequency Quadrupling Using an Optical Modulator and a Silicon Microresonator Filter

By adjusting the direct current (dc) bias on an electrooptic modulator to suppress the first-order sideband and subsequently using a double-waveguide micro-ring resonator to filter out the optical carrier, millimeter (mm)-wave signal was generated at a frequency of four times the 10-GHz local oscillator. A monolithic integrated silicon-based optical mm-wave signal generator by frequency quadrupling is proposed. A silicon integrated microresonator filter was fabricated and its design parameters are given. High extinction ratio optical mm-wave signal was obtained. The single sideband noise spectrum of the generated 40-GHz optical signal was measured, showing similar performance when compared with that generated by a radio-frequency synthesizer.      

梳状微谐振器的简单器件综合。

介绍了MEMS器件中微谐振器的简单综合方法:在给出一要求的频率值和明确设计变量与设计约束的条件下,提出一组规范尺寸,并用一种有效面积的综合方法,得到相应的微谐振器器件拓扑结构图,以及一组优化且实际有效的拓扑参数,实现微谐振器的简单器件综合。并用ANSYS软件进行了返回验证,结果误差均很小,符合设计要求。     

基于微型谐振腔的环形光探测器设计

提出了一种基于微型谐振腔的新型环形光探测器(MRPD),MRPD采用谐振腔和吸收腔分离的结构.MRPD避免了直波导与环形腔完全耦合时限制因子极低的问题,具有更强的可行性.导出了量子效率的表达式,分析了量子效率与谐振腔半径的关系及透射系数与光谱半高全宽(FWHM)的关系.