共查询到19条相似文献,搜索用时 140 毫秒
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为了实现蓝宝石基片的快速平坦化,对蓝宝石基片进行系统的单因素单面研磨试验,研究了磨料种类、磨料粒径、研磨盘转速、研磨压力以及磨料质量分数等研磨工艺参数对蓝宝石基片材料去除率和表面粗糙度的影响规律。试验结果表明:金刚石磨料适合蓝宝石基片的单面研磨;随着磨料粒径的增大,材料去除率逐渐增大,表面越来越粗糙;随着研磨盘转速的增大,材料去除率先增大后减小,表面粗糙度值在20~60 r/min区间变化不大,稳定在Ra 0. 12~Ra 0. 13μm之间,而在60~100 r/min区间波动较大,当研磨盘转速为60 r/min时,材料去除率最大;随着研磨压力的增大,材料去除率逐渐增大,而表面粗糙度值越来越低;随着磨料质量分数的增大,材料去除率先增大后减小,表面粗糙度先增大然后趋于平缓,当磨料质量分数为3 wt%时,材料去除率最大,且表面粗糙度值相对较小;最后通过正交试验优化了工艺参数,在优化的工艺条件下依次选用粒径为W40、W14、W3的金刚石磨料对蓝宝石基片进行粗研、半精研及精研,取得了表面粗糙度为Ra 7. 9 nm的平坦表面。 相似文献
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采用集群磁流变效应研磨加工工艺进行SrTiO3陶瓷基片研磨加工,分析了研磨盘材料、磨粒种类、研磨压力和磨粒团聚等因素对SrTiO3陶瓷基片表面粗糙度和表面完整性的影响。
结果表明:磁流变效应研磨工作液中的SiC、Al2O3和CeO2等磨料的大尺寸磨粒在SrTiO3陶瓷基片研磨加工表面产生的局部大尺寸划痕破坏了加工表面的完整性;采用铸铁研磨盘和SiO2磨料的磁流变研磨工作液研磨加工后,原始表面粗糙度Ra从约1.7854μm下降到0.6282μm,并且表面完整,SrTiO3材料与SiO2磨料之间存在的化学机械研磨过程促进了研磨加工表面性能的改善;研磨压力也是影响研磨加工表面粗糙度和大尺寸划痕的主要因素之一,研磨压力取较小值(1.875kPa)为宜。
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为抑制氧化镓晶片在研磨过程中的解理现象,通过NAKAMURA的方法,重新设计、研制一种黏弹性固着磨料新型研磨垫对氧化镓晶片进行研磨实验研究,对比分析其与传统铸铁研磨盘对单晶氧化镓研磨的材料去除率和表面质量的影响规律,结果表明:在同一研磨参数下,采用铸铁盘研磨时,晶片材料去除率较高,为358 nm/min,研磨后晶片表面粗糙度Ra由初始的269 nm降低到117 nm,降幅仅为56. 5%;而采用新型研磨垫研磨时,其材料去除率虽较低,为263nm/min,但研磨后晶片表面粗糙度Ra却降低至58 nm,降幅达到78. 4%,晶片表面质量得到明显提高,为后续氧化镓晶片的抛光奠定了良好的基础,因而新型研磨垫更适合对氧化镓进行研磨。同时,也为氧化镓晶片研磨提供了参考依据。 相似文献
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针对聚晶金刚石复合片精加工后需达到镜面级表面的指标要求,基于正交试验法优化聚晶金刚石复合片精加工工艺参数,采用极差分析法处理试验数据,并绘制试验指标与各试验因素间的关系曲线图,得出了各因素对表面粗糙度的影响规律,并以此为基础优化工艺参数,进行聚晶金刚石复合片镜面加工工艺优化研究。研究表明:抛光盘转速和研抛时间对工件表面粗糙度影响较大,各因素对表面粗糙度的影响程度按从大到小的顺序依次为:抛光盘转速、研抛时间、研抛压力和抛光液磨料粒度。采用优化后的最优工艺参数组合进行加工试验,当研抛压力为90 kPa、抛光盘转速为1 200 r/min、抛光液磨料粒度为1μm、研抛时间为30 min时,得到了表面粗糙度Ra为0.019μm的质量表面,达到了聚晶金刚石复合片镜面加工(Ra0.02μm)的效果。 相似文献
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制备了超微粒金刚石和富勒烯研磨工具,并分别进行了硅片研磨试验,详细分析了两种材料的研磨特性如表面粗糙度的稳定性、磨料粒度对研磨效果的影响以及研磨材料的显微结构等。试验结果表明,使用0~1/8μm粒度的金刚石研具获得的表面粗糙度值大于使用0~1/4μm粒度金刚石研具的表面粗糙度值,这是因为磨粒被粘结剂覆盖所致。研究结果表明,采用富勒烯研具研磨硅片可获得Ra5nm的超平滑镜面。 相似文献
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Ceramic Response to High Speed Grinding 总被引:7,自引:0,他引:7
Material response was investigated with respect to normal grinding forces, surface roughness, and removal mechanisms in grinding of alumina, silicon carbide, silicon nitride, and zircona with a resin-bond 160 μm grit diamond wheel at the grinding speeds of upto 160 m/s. The results reveal that the normal grinding forces decreased significantly with an increase in grinding speed; they also increased substantially with an increase in a complex relation of the ceramic hardness and toughness. High speed grinding produced a reduction in surface roughness for silicon carbide and alumina but gave no improvement for zirconia and silicon nitride. Also the surface roughness in high speed grinding was found to be material-dependent that the ground silicon nitride exhibited much smoother than the other ground ceramics. The influence of grinding speed on material removal mechanisms was analyzed in terms of grinding geometry and ceramic material properties. 相似文献
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Sunil Jha V. K. Jain Ranga Komanduri 《The International Journal of Advanced Manufacturing Technology》2007,33(7-8):725-729
Magnetorheological abrasive flow finishing (MRAFF) was developed as a new precision finishing process for complicated geometries
using smart magnetorheological polishing fluid. This process introduces determinism and in-process controllability of rheological
behaviour of abrasive laden medium used for finishing intricate shapes. Magnetorheological polishing (MRP) fluid is comprised
of carbonyl iron powder and silicon carbide abrasives dispersed in a viscoplastic base of grease and mineral oil and exhibits
change in rheological behaviour in presence of external magnetic field. This smart behaviour of MRP fluid is utilized to precisely
control finishing forces. The process performance in terms of surface roughness reduction depends on process variables like
hydraulic extrusion pressure, magnetic flux density in the finishing zone, number of finishing cycles, and composition of
MRP fluid. In the present work, experiments were conducted on a hydraulically powered MRAFF experimental setup to study the
effect of extrusion pressure and number of finishing cycles on the change in surface roughness of stainless steel grounded
workpieces. A new observation of “illusive polishing” action with the initial increase in number of finishing cycles is reported.
The actual finishing action is possible only after removal of initial loosely held material remaining after grinding. 相似文献
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集群磁流变变间隙动压平坦化加工试验研究 总被引:3,自引:1,他引:2
为了提高光电晶片集群磁流变平坦化加工效果,提出集群磁流变变间隙动压平坦化加工方法,探究各工艺参数对加工效果的影响规律。以蓝宝石晶片为研究对象开展了集群磁流变变间隙动压平坦化加工和集群磁流变抛光对比试验,通过检测加工表面粗糙度、材料去除率,观测加工表面形貌、集群磁流变抛光垫中磁链串受动态挤压前后形态变化,研究挤压幅值、工件盘转速、挤压频率以及最小加工间隙等工艺参数对加工效果的影响规律。试验结果表明:集群磁流变平坦化加工在施加工件轴向微幅低频振动后,集群磁流变抛光垫中形成的磁链串更粗壮,不但使其沿工件的径向流动实现磨粒动态更新、促使加工界面内有效磨粒数增多,而且在工件与抛光盘之间的加工间隙产生动态抛光压力、使磨粒与加工表面划擦过程柔和微量化,形成了提高材料去除效率、降低加工表面粗糙度的机制。对于2英寸蓝宝石晶电(1英寸=2.54 cm)集群磁流变变间隙动压平坦化加工与集群磁流变抛光加工效果相比,材料去除率提高19.5%,表面粗糙度降低了42.96%,在挤压振动频率1 Hz、最小加工间隙1 mm、挤压幅值0.5 mm、工件盘转速500 r/min的工艺参数下进行抛光可获得表面粗糙度为Ra0.45 nm的超光滑表面,材料去除率达到3.28 nm/min。证明了集群磁流变变间隙动压平坦化加工方法可行有效。 相似文献
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分析了Cu-3镍铜合金砂带磨削加工过程中,砂带粒度和磨削用量的不同对磨削加工效率、工件表面质量和砂带磨损的影响。采用氧化铝磨料砂带在不同的砂带线速度或磨削压力下对镍铜合金进行了工艺试验,对材料去除量、工件表面粗糙度和砂带磨损量进行了测量。研究表明:增加砂带线速度和磨削压力可在一定程度上提高材料去除率和磨削比;随着磨削压力的增大,工件表面粗糙度呈增大趋势;随着砂带粒度的增大,工件表面粗糙度呈减小趋势;砂带线速度为25m/s,磨削压力为43N,砂带粒度为P240时,镍铜合金综合磨削效果最好。 相似文献
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Predictive Modeling of Surface Roughness in Grinding of Ceramics 总被引:1,自引:0,他引:1
The surface roughness represents the quality of ground surface since irregularities on the surface may form nucleation for cracks or corrosion and thus degrade the mechanical properties of the component. The surface generation mechanism in grinding of ceramic materials could behave as a mixture of plastic flow and brittle fracture, while the extent of the mixture hinges upon certain process parameters and material properties. The resulting surface profile can be distinctively different from these two mechanisms. In this article, a physics-based model is proposed to predict the surface roughness in grinding of ceramic materials considering the combined effect of brittle and ductile material removal. The random distribution of cutting edges is first described by a Rayleigh probability function. Afterwards, surface profile generated by brittle mode grinding is characterized via indentation mechanics approach. Last, the surface roughness is modeled through a probabilistic analysis of ductile and brittle generated surface profile. The model expresses the surface finish as a function of the wheel microstructure, the process conditions, and the material properties. The predictions are compared with experimental results from grinding of silicon carbide and silicon nitride workpieces (SiC and Si3N4, respectively) using a diamond wheel. 相似文献
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Magnetorheological finishing (MRF) utilizes magnetorheological (MR) fluid, which consists of magnetic particles, nonmagnetic abrasives, and some additives in water or other carrier to polish the materials. An experimental study is conducted to predict the effect of process parameters (concentration of magnetic particles and abrasive particles, carrier wheel speed, and initial surface roughness) on surface finish and material removal rate in MRF of single crystal silicon blank. The final surface roughness value in terms of arithmetical mean roughness (Ra) obtained is as low as 8 nm from the initial value of 1300 nm. An optimization study is also carried out to find optimum values of process parameters from the selected range. 相似文献
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氮化硅陶瓷球研磨去除机制试验与仿真研究 总被引:1,自引:0,他引:1
为研究研磨过程中氮化硅陶瓷球的材料去除形式及磨损行为,结合陶瓷材料动态压痕断裂力学理论,进行陶瓷球研磨加工试验,采用超景深三维显微镜和扫描电镜对研磨后陶瓷球表面进行观察,同时建立单颗金刚石磨粒冲击作用有限元模型并进行仿真研究。试验结果表明:氮化硅陶瓷球表面材料去除以脆性断裂去除和粉末化去除为主,陶瓷球表面残留有大量贝壳状缺陷和呈簇状随机分布的粉末化材料区域;研磨过程中,陶瓷球表面存在擦伤、划伤和凹坑等缺陷;磨粒冲击作用时,表面材料会受微切削作用产生破碎去除,同时也会受挤压作用产生脆性断裂去除,当磨粒以滚动方式作用在陶瓷球表面时,陶瓷球表面更容易形成粉末化去除,且材料去除率更高。仿真结果表明:各磨粒冲击作用方式产生的最大等效应力由大到小的顺序为滚动磨粒变切深、滚动磨粒定切深、磨粒挤压、滑动磨粒定切深,其中,滚动磨粒变切深产生的亚表面裂纹最深。 相似文献
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The dependence of the rate of material removal from glass and fused silica specimens on the carrier fluid used in free abrasive grinding was observed and other abrasion parameters, i.e. surface roughness, bed thickness and drag force, were measured. The similarity between the damage produced by silicon carbide particles during free abrasive grinding and that found after indentation with a sharp point encouraged the formulation of a rotation/ indentation model of abrasion. This semi-quantitative model showed good agreement with the experimental data. 相似文献