TiO2纳米薄膜的微结构控制

通过有机酸修饰的水基sol-gel法,分别制备了由层状、针形和球形纳米粒子构成的纳米二氧化钛薄膜,采用SEM、XRD、红外光谱进行了表征。研究发现,调节水解过程中钛酸四丁酯:醋酸的摩尔比,可以控制薄膜的微结构,并对其机理进行了分析。该方法可以应用于sol-gel法制备其他纳米薄膜过程中的材料微结构控制。     

等离子体状态对PECVD SiC薄膜微结构的影响

在PECVD法制备SiC薄膜过程中,深入研究了工作气压及工作气体中氢稀释比例对薄膜的影响．发现以上两个参数是通过共同调整等离子体状态的两个主要参数——等离子体成分及离子能量来起作用的。在此基础上,讨论了等离子体状态在SiC薄膜微结构从非晶转化为纳米晶过程中的作用．发现可以通过控制等离子体成分及离子能量来得到可用于场发射阴极的纳米晶SiC薄膜。     

磁性纳米颗粒膜微波物性研究

采用磁控溅射工艺和复合靶技术制备FeCoB-SiO2磁性纳米颗粒膜;利用X射线衍射仪、扫描探针显微镜分析这类薄膜的微结构和形貌特征;采用振动样品磁强计、四探针法、微波矢量分析仪及谐振腔法测量薄膜试样的磁电性能和微波复磁导率;重点对SiO2介质相含量、薄膜微结构对电磁性能产生重要影响的机理做了分析和探讨.结果表明,这类FeCoB-SiO2磁性纳米颗粒膜具有良好的软磁性能和高频电磁性能,2GHz时,磁导率μ＞50,可以应用于高频微磁器件中.     

纳米晶粒PLT（28）薄膜的制备和性能研究

本文首先报道了纳米晶粒ＰＬＴ（２８）薄膜的制备，并研究其微结构、铁电、电光性能，讨论不同热处理条件对薄膜微结构的影响，以及晶粒尺寸与电光性能的关系。     

PECVD法生长氮化硅薄膜及其微结构梁特性的研究

采用化学气相沉积法(PECVD)在石英基片上制备氮化硅薄膜,应用MEMS工艺将氮化硅薄膜制作成双端固定的微结构梁,纳米压痕仪测量氮化硅薄膜的杨氏模量表明其值在136～172 Gpa之间,用曲率半径法测试薄膜的残余应力,并对微结构梁的弹性系数进行计算,结果表明弹性系数值在11.4～57 N/m.之间,根据实验所得弹性系数对微结构梁的驱动电压进行计算,其驱动电压在32.8～73V之间,微结构梁的实际驱动电压测得为34～60V。     

TiO2染料敏化薄膜的制备与结构表征

采用溶胶-凝胶法添加聚乙二醇表面活性剂制备了TiO2纳米粒子,采用滚压涂敷法在玻璃基底上制得TiO2纳米多孔薄膜,采用吸附法对多孔薄膜表面进行染料敏化处理.染料敏化处理前后,薄膜的微结构没有改变,但薄膜表面的成分发生了改变.对薄膜进行了XPS,AFM,SEM和XRD分析.结果表明,TiO2纳米晶薄膜中纳米粒子晶型为锐钛矿,薄膜具有网络多孔结构,TiO2粒子的粒径在20～30nm间,薄膜中空穴的孔径在50～150nm不等,未敏化处理的薄膜空隙中吸附了大量的氧,薄膜敏化处理后,表面的吸附氧被敏化剂分子中的氧取代,染料敏化剂分子通过化学吸附在薄膜表面.     

直流溅射法制备SnO_2纳米薄膜及其表征

采用直流溅射法,以纯锡为靶材制备出了SnO_2纳米薄膜,并利用X射线衍射仪、透射电镜及台阶仪对纳米薄膜的物相结构及厚度进行了分析测试。结果表明:采用单晶硅作为衬底时可以制备出晶态的SnO_2纳米薄膜,该纳米薄膜由粒径几纳米到十几纳米的SnO_2小颗粒组成,而采用载玻片作为衬底时则制备出了非晶态的SnO_2纳米薄膜;通过控制溅射时间,可以得到一系列不同厚度的SnO_2纳米薄膜,直流溅射法制备SnO_2纳米薄膜的膜厚公式为d=0.29UIt(其中d为薄膜厚度,,1=0.1 nm;U为溅射电压,V;I为溅射电流,A;t为溅射时间,s)。     

特种化学气相沉积法制备大面积纳米硅薄膜的微结构和电学性能研究

采用可与Si平面工艺兼容的特殊设计的化学气相沉积系统在玻璃衬底上制备了大面积的纳米Si薄膜.高分辨率电子显微镜和选区电子衍射分析表明,成膜温度对薄膜微结构有关键影响,衬底温度的升高促进了薄膜晶态率的提高和Si晶粒的长大.660℃成膜时非晶Si薄膜基体中镶嵌了尺寸为8～12nm,晶态率为50%的纳米Si晶粒,具有明显的纳米Si薄膜微结构特征.用变温薄膜暗电导率测试系统研究表明,随成膜温度的升高,薄膜的晶态率提高、室温暗电导率提高而相应的电导激活能降低,用热激活隧道击穿机制解释了纳米Si薄膜微结构与特殊电学性能的关系.研究了原位后续热处理对薄膜微结构和电学性能的影响,发现延长热处理时间以及采用低温成膜、高温后续退火的热处理方法能有效提高纳米Si薄膜的晶态率,进而提高其室温暗电导率.     

溶胶-凝胶法制备低折射率SiO2薄膜的过程控制研究

纳米多孔二氧化硅薄膜具有优良的物理化学特性和广阔的应用前景.以溶胶-凝胶法制备低折射率SiO2薄膜为例,对化学法镀膜中的溶胶制备、溶胶保存、薄膜制备等3个阶段进行了研究,利用透射电镜、红外光谱仪、原子力显微镜、椭偏仪等对溶胶和薄膜的特性进行了检测,并对其制备过程进行了控制,这对制备性能良好的薄膜材料及其产业化应用具有一定的指导意义.     

Sol-GeI法制备含银二氧化硅纳米薄膜

用soI-geI法在浮法玻璃表面制备了含银二氧化硅薄膜。用TEM和HEED测定了纳米薄膜的微结构。用光谱仪、高阻计和光纤传感器等分别测定了样品的透光率、电阻率和气敏性。     

Microstructure Control of Nanoporous Silica Thin Film Prepared by Sol-gel Process

Nanoporous silica films were prepared by sol-gel process with base, acid and base/acid two-step catalysis.Transmission electron microscope （TEM） and particle size analyzer were used to characterize the microstructure and the particle size distribution of the sols. Scanning electron microscopy （SEM）, atomic force microscopy （AFM） and spectroscopic ellipsometer were used to characterize the surface microstructure and the optical properties of the silica films. Stability of the sols during long-term storage was investigated. Moreover,the dispersion relation of the optical constants of the silica films, and the control of the microstructure and properties of the films by changing the catalysis conditions during sol-gel process were also discussed.     

溶胶凝胶法制备的TiO2薄膜结构对光催化活性的影响

TiO2多孔纳米薄膜采用溶胶－凝胶法在普通载玻片上制得。薄膜的结构如孔径、孔分布和厚度可控制。通过稀醋酸的分解来测定锐钛矿TiO2多孔薄膜的结构对光催化活性的影响。     

二氧化钛薄膜材料的制备及其性能研究

采用溶胶-凝胶法,以钛酸丁酯[Ti(OC4O9)]4为原料,乙醇为溶剂,冰醋酸为抑制剂,制备了二氧化钛薄膜,同时以硝酸镧和硝酸镍为掺杂物制备了单掺、共掺的二氧化钛薄膜,研究了其可见光吸收性能和光催化降解性能。实验表明,掺杂后的二氧化钛薄膜在可见光区仍有明显吸收,掺镧的二氧化钛薄膜对亚甲基蓝降解效果较好,光催化降解率达到76.54%。     

磷钨酸修饰的纳米TiO_2薄膜的制备及光催化性能

以钛酸四丁酯为前驱物,乙酸为溶剂,用溶胶-凝胶法制备了磷钨酸修饰的纳米TiO2薄膜(PW12/TiO2)。通过FT-IR、UV-Vis、XRD、BET、SEM进行了表征。结果表明,磷钨酸修饰的纳米TiO2具有锐钛矿晶型和较大的比表面积,磷钨酸在TiO2中仍保持Keggin结构,并抑制了粒子烧结过程中的长大。研究了PW12/TiO2薄膜在对氯苯酚光降解中的催化活性。当磷钨酸与TiO2的摩尔比为0.02∶1,240℃焙烧,PW12/TiO2薄膜的光催化降解反应遵循L-H机理,一级反应速率常数为0.016min-1。磷钨酸与TiO2在光催化反应中有明显的协同作用。     

Nanostructural and electrochemical characteristics of cerium oxide thin films deposited on AA5083-H321 aluminum alloy substrates by dip immersion and sol-gel methods

In this paper nano sized cerium oxide coating were applied by sol-gel and conversion (dip immersion) method on AA5083-H321 aluminum alloy. Nanostructural and phase properties of nano sized cerium oxides were investigated by SEM, EDX and AFM studies. Potentiodynamic polarization and EIS tests have been used to study corrosion behavior of nano sized cerium oxide films in 3.5% NaCl. Results indicated that cerium oxide which obtained by sol-gel method performed better corrosion and pitting resistance compared with dip immersion method.     

Influence of calcinated and non calcinated nanobioglass particles on hardness and bioactivity of sol�Cgel-derived TiO2�CSiO2 nano composite coatings on stainless steel substrates

Thick films of calcinated and non calcinated nanobioglass (NBG)-titania composite coatings were prepared on stainless steel substrates by alkoxide sol-gel process. Dip-coating method was used for the films preparation. The morphology, structure and composition of the nano composite films were evaluated using environmental scanning electron microscope, X-ray diffraction and Fourier transform infrared spectroscope. The SEM investigation results showed that prepared thick NBG-titania films are smooth and free of macrocracking, fracture or flaking. The grain size of these films was uniform and nano scale (50-60 nm) which confirmed with TEM. Also FTIR confirmed the presence of Si-O-Si bands on the calcinated NBG-titania films. The hardness of the prepared films (TiO(2)-calcinated NBG and TiO(2)-Non calcinated NBG) was compared by using micro hardness test method. The results verified that the presence of calcinated NBG particles in NBG-titania composite enhanced gradually the mechanical data of the prepared films. The in vitro bioactivity of these films was discussed based on the analysis of the variations of Ca and P concentrations in the simulated body fluid (SBF) and their surface morphologies against immersion time. Surface morphology and Si-O-Si bands were found to be of great importance with respect to the bioactivity of the studied films. The results showed that calcinated NBG-titania films have better bioactivity than non calcinated NBG-titania films.     

Influences of organic ligands on the microstructure and properties of sol-gel antimony-doped tin oxide thin films

The antimony-doped tin oxide (ATO) thin films were prepared by sol-gel dip-coating process from SnCl2 2H2O and SbCl3 in alcoholic solutions. The influences of organic ligands, including acetic acids (HAc), acetic acids with monoethanolamine (in brief HAc + MEA), and acetic acids with acetylacetone (in brief HAc + AcAc), on the the microstructure and electrical properties of the thin films have been investigated. The thermal behavior of the ATO gels powders and the microstructures of the thin films have been characterized by using thermogravimetric (TG), differential scanning calorimetric (DSC), Fourier transform infra-red spectral (FTIR), X-ray diffraction (XRD), scanning electron microscopy (SEM) analysis. The electrical resistivity of the thin films was detected by four-probe instrument measurement. The thin films with HAc + MEA as coordination ligands had a good crystal quality and showed a preferred orientation along (101) plane when heated at 450 degrees C. As a consequence, it exhibited the best electrical performance. An electrical resistivity of about 6.3 x 10(-3) omega cm could be achieved for the films with 500 nm thickness.     

纳米SiO2-Al2O3/聚酰亚胺杂化薄膜的制备及表征

用溶胶-凝胶法制得二氧化硅(SiO2)及三氧化二铝(Al2O3)溶胶,将其掺入到聚酰胺酸基体中,得到SiO2-Al2O3/聚酰亚胺杂化薄膜,并对其结构性能进行了研究.结果表明,薄膜材料中SiO2和Al2O3粒子分散均匀,与有机相存在键合;材料热分解温度有所提高.     

溶胶-凝胶法制备无机纳米/聚酰亚胺杂化膜及其表征

采用溶胶-凝胶法制备了SiO2及A12O3溶胶,并将其掺入到聚酰胺酸基体中,得到无机纳米SiO2-Al2O3/聚酰亚胺杂化膜,并对其结构性能进行了研究.实验表明,薄膜材料中无机纳米SiO2和Al2O3粒子分散均匀,与有机相存在键合;材料热分解温度有所提高.