140GHz二倍频器的研制

太赫兹通信中本振链输出功率无法满足实际需求,因此提出一种基于肖特基变容二极管的宽带、高效率140 GHz二倍频器设计方案。该倍频器结构基于波导腔体石英基片微带电路的混合集成方式实现。采用三维有限元与非线性谐波平衡联合仿真方法,实现了倍频器的最优化设计。根据仿真结果,完成了140 GHz二倍频器的加工、制作与测试工作。实测结果表明,在20 dBm的驱动功率下,倍频器的输出功率最高达6.6 mW,倍频效率7.15%;输入功率23 dBm对应的最大输出功率可达11.2 mW。该器件的成功研制使得实现太赫兹通信中的本振链成为可能。     

基于肖特基二极管的太赫兹二倍频器设计

固态倍频器是太赫兹源应用中的关键器件,如何利用非线性器件提高太赫兹倍频器件的效率是设计太赫兹固态电路的关键。本文介绍了利用肖特基二极管非线性特性设计固态太赫兹二倍频器的2种方法,即采用直接阻抗匹配和传输模式匹配设计了2种不同拓扑结构的170 GHz二倍频器,针对设计的结构模型,分别进行三维有限元电磁仿真和非线性谐波平衡仿真。仿真结果表明,在17 dBm输入功率的驱动下,倍频器在160 GHz~180 GHz输出频率范围内,倍频效率在15%左右,输出功率大于7 mW。最后对2种方法设计的倍频器结构进行了简单对比和分析,为今后太赫兹倍频研究和设计提供仿真方法。     

340 GHz GaN大功率固态倍频链

随着太赫兹技术的应用和发展,对大功率太赫兹固态源的需求愈加迫切。文中基于GaN肖特基二极管(SBD)工艺设计并制造了具有高功率输出的170 GHz和340 GHz太赫兹倍频器,实现了340 GHz大功率太赫兹固态倍频链。采用多管芯GaN SBD提高器件功率承载能力,综合开展电路优化设计提升倍频性能,通过仿真研究和实验测试,验证了倍频器设计的有效性和先进性。170 GHz倍频器的实测峰值输出功率达到580 mW,倍频效率为14.5%。340 GHz倍频器的实测峰值输出功率为66 mW,倍频效率为12.5%。该太赫兹固态倍频链性能优良,在太赫兹系统中具有重要的应用价值。     

高功率110 GHz平衡式肖特基二极管频率倍频器

高频段的太赫兹信号通常是由多个倍频器级联输出的,因此要求倍频链路的前级必须具备高输出功率的能力。为了提升太赫兹倍频器的功率容量和效率,结合高频特性下肖特基二极管有源区电气模型建模方法,采用高热导率的陶瓷基片,利用对称边界条件,在HFSS和ADS中实现对倍频器电路的分析和优化,研制出了高功率110 GHz平衡式倍频器。最终测试结果表明,驱动功率为28 dBm左右时,该倍频器在102~114.2 GHz的工作带宽内的最高输出功率和效率分别为108 mW和17.6%,为链路后续的二倍频和三倍频提供足够的驱动功率。     

0.14 THz倍频器的设计与仿真

固态倍频器是毫米波及亚毫米波频段超外差接收机中的关键器件,其研制对太赫兹通信具有重要意义。介绍了一种基于肖特基变容二极管的宽带、高效率0.14 THz二倍频器的拓扑结构和仿真设计。该倍频器基于波导腔体石英基片微带电路形式,通过引线互联分别实现肖特基二极管接地和施加外部直流偏置,倍频器各部分采用了宽带电磁耦合结构设计。在开展了二极管建模及阻抗特性分析的基础上,采用三维有限元与非线性谐波平衡联合仿真方法,实现了倍频器的最优化设计。仿真结果表明,当输入频率为65 GHz~75 GHz,驱动功率为20 dBm时,倍频器的输出功率最高达10.1 dBm,倍频效率达10.8%。     

固态太赫兹二倍频器设计

研制了一种平衡结构的太赫兹二倍频器,采用Teratech公司的AS1太赫兹平面肖特基二极管。在对太赫兹肖特基二极管建模和分析的基础上,结合HFSS和ADS软件对太赫兹二倍频器进行仿真。对该倍频器进行加工测试,实测结果表明,在180~192GHz,最大输出功率16.3mW,最大倍频效率为9.1%。     

高效170 GHz平衡式肖特基二极管倍频器

太赫兹源的输出功率是限制太赫兹技术远距离应用的重要参数。为了实现高效的太赫兹倍频器,基于高频特性下肖特基二极管的有源区电气模型建模方法,利用指标参数不同的两种肖特基二极管,研制出了两种170 GHz平衡式倍频器。所采用的肖特基二极管有源结区模型完善地考虑了二极管IV特性,载流子饱和速率限制,直流串联电阻以及趋肤效应等特性。通过对两种倍频器仿真结果进行对比,完备地分析了二极管主要指标参数对倍频器性能的影响。最后测试结果显示两种平衡式170 GHz倍频器在155~178 GHz工作带宽内的最高倍频效率分别大于11%和24%,最高输出功率分别大于15 mW和25 mW。从仿真和测试结果表示,采用的肖特基二极管建模方法和平衡式倍频器结构适用于研制高效的太赫兹倍频器。     

335 GHz非平衡式肖特基二极管三倍频器

基于混合集成的方式,采用对称锥形渐变线匹配结构设计了335 GHz非平衡式三倍频器。在保证单模传输的条件下,该匹配结构不仅能够固定二极管位置,而且可以增大匹配效果,解决了高频段倍频器3 dB带宽较窄的问题。实测结果表明,该倍频器在330~356 GHz频率范围内输出功率均大于5 mW。驱动功率为220 mW时,有最高输出功率11.2 mW,由它作为核心器件组成的固态太赫兹本振源,能够驱动超外差接收机中670 GHz二次谐波混频器。     

基于50 nm GaN HEMT技术的180～220 GHz平衡二倍频器MMIC

采用50 nm GaN HEMT技术实现了一款太赫兹波有源平衡式二倍频器单片微波集成电路(MMIC)。通过在输入端使用巴伦,可以确保二倍频器良好的基波抑制性能。在没有任何后置放大器的情况下,当输入功率为22 dBm时,在205 GHz的输出频率下二倍频器的最大输出功率为12 dBm。该MMIC芯片尺寸为2.0 mm×1.8mm,可方便地集成到多功能芯片中。     

基于肖特基变容二极管的0.17 THz 二倍频器研制

研制了一种基于肖特基变容二极管的0.17 THz 二倍频器, 该器件为0.34 THz 无线通信系统收发前端提供了低相噪、低杂散的本振信号.倍频器结构基于波导腔体石英基片微带电路实现, 其核心器件是多结正向并联的肖特基变容二极管.文中采用结参数模型和三维电磁模型相结合的方式对二极管进行建模, 通过两种电路匹配方式实现了0.17 THz 二倍频器的最优化设计, 最终完成器件的加工及测试.测试结果表明, 在输入80~86 GHz, 20 dBm 的驱动信号下, 倍频器的最大输出功率达12.21 mW, 倍频效率11%, 输出频点为163 GHz;当前端输入功率达到饱和状态时, 该频点输出功率可达21.41 mW.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.     

High-quality single-crystal CdSe nanoribbons and their optical properties

Large-scale synthesis of single-crystal CdSe nanoribbons is achieved by a modified thermal evaporation method, in which two-step-thermal-evaporation is used to control CdSe sources＇ evaporation. The synthesized CdSe nanoribbons are usually several micrometers in width, 50 nm in thickness, and tens to several hundred micrometers in length. Studies have shown that high-quality CdSe nanoribbons with regular shapes can be obtained by this method. Room-temperature photolumines-cence indicates that the lasing emission at 710 nm has been observed under optical pumping （266 nm） at power densities of 25-153 kW/cm^2. The full width half maximum （FWHM） of the lasing mode is 0.67 nm     

Propagation of hermite-cosh-gaussian beams passing through ABCD optical system with an annular aperture

By using the expansion of the aperture function into a finte sum of complex Gaussian functions, the corresponding analytical expressions of Hermite-cosh-Gaussian beams passing through annular apertured paraxially and symmetrically optical systems written in terms of ABCD matrix were derived, and they could reduce to the cases with squared aperture. In a similar way, the corresponding analytical expressions of cosh-Gaussian beams through annular apertured ABCD matrix were also given. The method could save more calculation time than that by using the diffraction integral formula directly.     

Influence of polarization extinction ratio on distributed polarization coupling detection

Distributed polarization coupling in polarization-maintaining fibers can be detected by using a white light Michelson interferometer. This technique usually requires that only one polarization mode is excited. However, in practical measurement, the injection polarization direction could not be exactly aligned to one of the principal axes of the PMF, so the influence of the polarization extinction ratio should be considered. Based on the polarization coupling theory, the influence of the incident polarization extinction on the measurement result is evaluated and analyzed, and a method for distributed polarization coupling detection is developed when both two orthogonal eigenmodes are excited.     

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正Communications—VLSI Researches and industries of telecommunications have been growing rapidly in the last 20 years and will keep their high growing pace in the next decade.The involved researches and developments cover mobile communications,highway and last-mile broadband communication,domain specific communications,and emerging D2D M2M communications.Radio communication steps into its