基于HTCC工艺的X波段小型化双面多腔体外壳的研制

基于高温共烧陶瓷(HTCC)工艺,利用共面波导和同轴线理论,设计了一款应用于X波段的双面多腔陶瓷外壳,以实现四通道T/R组件封装外壳的小型化、轻量化、低成本以及微波性能要求。首先,用HFSS软件对射频传输结构进行优化,其次利用HTCC工艺平台制作外壳样品,最后利用夹具、矢量网络分析仪和GSG探针测试微波传输性能。该外壳的微波性能测试结果为:X波段内,输出通道插入损耗≤0.7dB,回波损耗≥21.7dB;输入通道插入损耗≤1.18dB,回波损耗≥14.6dB。在考虑了测试基板和所键合金丝影响之后,测试结果与设计值吻合度较好。     

微波宽频段高性能高集成T/R组件设计

基于微波宽频段有源相控阵系统T/R组件工程化迫切需求,针对传统T/R组件工作频带不够宽、体积尺寸大、稳定性差、移相衰减精度不高等问题,本文设计了一种X-Ku波段宽频段高性能高集成T/R组件。在突破八通道组件架构设计技术、基于LTCC整板的高密度集成设计技术、宽带GaN功放高可靠高效率及散热设计技术、高频宽带高隔离防腔体效应设计技术、组件模块化设计及可制造性设计技术等关键技术基础上,研制出X-Ku波段10～18GHz八通道T/R组件。组件具有收发放大、幅相控制和安全保护等主要功能,实测结果全频带内输出功率≥23.9W、噪声系数≤3.52dB、移相精度≤3.90°（RMS,均方根值）、衰减精度≤0.94dB（RMS）、驻波≤1.98、效率≥23%。其中,工作带宽指标由之前的单频段10～12GHz、15～17GHz拓宽到宽频段10～18GHz,输出功率由之前的10W量级提高到20W量级,噪声系数由之前的4.3dB提升到小于3.52dB。本组件具有高频、宽带、高效、高集成的特性,可应用于新型综合传感器雷达系统、多功能综合电子系统等装备中。     

基于GaN HEMT的13～17 GHz收发多功能芯片

基于GaN高电子迁移率晶体管(HEMT)工艺设计制作了一款收发(T/R)多功能芯片(MFC),主要用于射频前端收发系统.该芯片集成了单刀双掷(SPDT)开关用于选择接收通道或发射通道工作,芯片具有低噪声性能、高饱和输出功率和高功率附加效率等特点.芯片接收通道的LNA采用四级放大、单电源供电、电流复用结构,发射通道的功率放大器采用三级放大、末级四胞功率合成结构,选通SPDT开关采用两个并联器件完成.采用微波在片测试系统完成该芯片测试,测试结果表明,在13～ 17 GHz频段内,发射通道功率增益大于17.5 dB,输出功率大于12W,功率附加效率大于27％.接收通道小信号增益大于24 dB,噪声系数小于2.7 dB,1 dB压缩点输出功率大于9 dBm,输入/输出电压驻波比小于1.8∶1,芯片尺寸为3.70 mm×3.55 mm.     

5~22GHz平坦高增益单片低噪声放大器

使用0.25μm G aA s PHEM T工艺技术,设计和制造了性能优良的5-22 GH z两级并联反馈单片低噪声放大器。在工作频率5-22 GH z内,测得增益G≥18 dB,带内增益波动ΔG≤±0.35 dB,噪声系数N F≤3.2 dB,输入输出驻波V SW R≤1.7,最小分贝压缩点输出功率P1dB≥10.5 dBm,电流增益效率达2.77 mA/dB。测试结果验证了设计的正确性。     

一种新颖的DC—50GHz低插入相移MMIC可变衰减器

介绍了一种新颖的DC－50GHz低相移、多功能的GaAs MMIC可变衰减器的设计与制作，获得了优异的电性能。微波探针在片测试结果为：在DC－50GHz频带内，最小衰减≤3.8dB，最大衰减≥35&;#177;5dB，最小衰减时输入／输出驻波≤1.5，最大衰减时输入／输出驻波≤2.2，衰减相移比≤1.2&;#176;/dB。芯片尺寸为2.33mm&;#215;0.68mm&;#215;0.1mm。芯片成品率高达80％以上，工作环境温度达125℃，可靠性高，稳定性好。     

超宽带延时幅相控制多功能芯片的设计

针对航空航天和卫星通信等设备的需求,介绍了一款超宽带延时幅相控制多功能芯片。该芯片集成了数字和微波电路,有T/R 开关、5 位数控延时器(10 ps 步进TTD)、5位数控衰减器(1 dB 步进ATT)、2 个行波放大器、均衡器及数字电路。基于GaAs E/D PHEMT 工艺研制出了芯片实物,芯片尺寸为4.5 mm*5.0 mm*0.07 mm。采用微波在片测试系统对该幅相控制多功能芯片进行了实际测试,在3 ~ 17 GHz 频段内实现了10~310 ps 延时范围,1~31 dB 衰减范围。测试结果显示,发射/接收增益大于2 dB,发射1 dB 压缩输出功率P1 dB_Tx大于12 dBm,接收1 dB 压缩输出功率P1 dB_Rx大于10 dBm,全态输入输出驻波均小于1.7,+5 V 下工作电流130 mA,-5 V 下工作电流12 mA。衰减器全态RMS 精度小于1.4 dB,全态附加调相小于±8°。延时器全态RMS 精度小于3 ps,全态附加调幅小于±1 dB。     

一种星载天线前端滤波功分组件设计

为抑制一颗卫星中多付天线之间的射频干扰,设计了一种用于天线前端的、采用滤波器与功分网络相串联原理的滤波功分组件。文中分析了低通原型滤波器和功分网络的等效电路,介绍了滤波功分组件的电性能和环境适应性设计方法。利用HFSS 仿真软件进行了模型仿真和参数优化,并制作了实物进行数据测试。滤波功分组件的实物测试结果为:总口驻波VSWR<1.06,通道插入损耗小于0.21 dB,带内幅度起伏0.05 dB,通道间幅度一致性±0.1 dB,通道间相位一致性±1°,带外抑制(X 波段)大于33dB。实际测试结果与仿真结果相一致。     

星用高性能高可靠微波放大器单机研制

作为新一代长寿命高可靠卫星有效载荷系统的关键单机,本文设计了一款星用S波段微波放大器,通过突破单机高可靠架构设计技术,大动态输入过载保护、电源及射频通道安全性等保护电路设计技术,微波电路防自激及腔体效应、EMC等稳定性设计技术,单机高效散热技术等关键技术;使得单机实测带内增益起伏≤0.081dB、驻波≤1.27、通道间幅度一致性≤±0.075dB,在激励过载20dB、电压拉偏90～110V、驻波拉偏3∶1下仍能正常工作,供电单元具有输入过流保护、输出过流保护、输出过压保护等功能,12年末期可靠度优于0.998;从而实现了放大器单机的高性能、长寿命和高可靠,本单机初、正样阶段零归零、指标零超差、星载环境试验零故障;目前在轨工作正常、稳定。     

采用电流复用拓扑的宽带收发一体多功能电路

基于标准的GaAs赝配高电子迁移率晶体管(PHEMT)单片微波集成电路(MMIC)工艺设计并制备了一款宽带收发一体多功能电路芯片.该多功能芯片包含了功率放大器、低噪声放大器和收发开关.放大器采用电流复用拓扑结构实现了低功耗的目标.收发开关采用浮地结构避免了使用负电源.芯片在14～ 24 GHz工作频率的实测结果显示:接收支路噪声系数小于3.0dB,增益大于18 dB,输入及输出电压驻波比(VSWR)均小于2.0,1 dB压缩点输出功率大于0 dBm,直流功耗为60 mW;发射支路增益大于21 dB,输入输出VSWR均小于1.8,1dB压缩点输出功率大于10 dBm,直流功耗为180 mW.芯片尺寸为2 600 μm×1 800 μm.该多功能收发电路的在片测试结果和仿真结果一致,性能达到了设计要求.     

基于异构集成技术的相控阵T/R组件微系统

基于硅基微电子机械系统(MEMS)工艺和三维异构集成技术,研制了一款硅基X波段2×2相控阵T/R组件.该组件采用收发一体多功能芯片方案,将所有器件封装于两层硅基中.其中上层硅基集成了低噪声放大器、功率放大器、开关、电源调制驱动器和PMOSFET等芯片,下层硅基集成了多功能芯片、串/并转换芯片以及逻辑运算芯片;两层硅基封装之间通过植球进行堆叠.最终样品尺寸仅为20 mm×20 mm×3 mm.实测结果显示,在8～ 12 GHz内,该T/R组件饱和输出功率约为29 dBm,接收增益约为21 dB,接收噪声系数小于3 dB,在具备优良射频性能的同时实现了组件的小型化.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Influence of polarization extinction ratio on distributed polarization coupling detection

Distributed polarization coupling in polarization-maintaining fibers can be detected by using a white light Michelson interferometer. This technique usually requires that only one polarization mode is excited. However, in practical measurement, the injection polarization direction could not be exactly aligned to one of the principal axes of the PMF, so the influence of the polarization extinction ratio should be considered. Based on the polarization coupling theory, the influence of the incident polarization extinction on the measurement result is evaluated and analyzed, and a method for distributed polarization coupling detection is developed when both two orthogonal eigenmodes are excited.     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.     

High-quality single-crystal CdSe nanoribbons and their optical properties

Large-scale synthesis of single-crystal CdSe nanoribbons is achieved by a modified thermal evaporation method, in which two-step-thermal-evaporation is used to control CdSe sources＇ evaporation. The synthesized CdSe nanoribbons are usually several micrometers in width, 50 nm in thickness, and tens to several hundred micrometers in length. Studies have shown that high-quality CdSe nanoribbons with regular shapes can be obtained by this method. Room-temperature photolumines-cence indicates that the lasing emission at 710 nm has been observed under optical pumping （266 nm） at power densities of 25-153 kW/cm^2. The full width half maximum （FWHM） of the lasing mode is 0.67 nm     

Propagation of hermite-cosh-gaussian beams passing through ABCD optical system with an annular aperture

By using the expansion of the aperture function into a finte sum of complex Gaussian functions, the corresponding analytical expressions of Hermite-cosh-Gaussian beams passing through annular apertured paraxially and symmetrically optical systems written in terms of ABCD matrix were derived, and they could reduce to the cases with squared aperture. In a similar way, the corresponding analytical expressions of cosh-Gaussian beams through annular apertured ABCD matrix were also given. The method could save more calculation time than that by using the diffraction integral formula directly.     

中国建立EB级存储实验室,致力云计算应用(英文)

正With the support of 863 programs,Sugon Information Industry Co.,Ltd.,set up a dawning EB-class storage laboratory to address massive data storage requirements and largescale cloud computing demonstration applications.The Dawning EB-class cloud storage system adopts advanced fault-tolerant architecture,efficient data fault-tolerant algorithms with user authentication and data encryption policies to deal with the"lost""wrong"and"stolen"problems of data for ensuring the reliability and safety of the EB-class storage system in the public network application environments.The Dawning EB-class Storage Laboratory taking advan-