分立半导体

高电压肖特基整流管。MBR60100CT肖特基整流管最适合100至300W供电应用，具有100V反向电压和60A正向电流，封装形式是TO-220AB。该器件典型正向电压是0．64V，最大反向漏电流20mA，典型漏电流仅8．5mA。     

栅条状和蜂窝状结构结势垒肖特基整流器（JBSR）性能对比

栅条状和蜂窝状平面结构的结势垒肖特基整流管（JBSR）的不同之处在于其沟道有效面积的大小不同。从这两种平面结构的结势垒肖特基整流管（JBSR）的工艺和电学特性来看,适当的增大JBSR器件的沟道有效面积,可使JBSR器件的击穿电压得到提高。蜂窝状平面结构JBSR器件的沟道有效面积较栅条状器件的小,开启电压低,但反向耐压不如栅条状平面结构JBSR器件,这可能是因为蜂窝状器件的P+区的缺陷较于栅条状结构器件的多,同样器件的I-V特性也与结构参数密切相关。     

3 A/40 V新型肖特基势垒二极管的设计与研制

为提高传统肖特基二极管的击穿电压,减小了器件的漏电流,提高芯片利用率,文中设计研制了适合于裸片封装的新型肖特基势垒二极管(SBD)。利用Silvaco Tcad软件模拟,在器件之间采用PN结隔离,器件周围设计了离子注入形成的保护环,实现了在浓度和厚度分别为7.5×1012 cm-3和5 μm的外延层上,制作出了反向击穿电压45 V和正向导通压降0.45 V的3 A/45 V肖特基二极管,实验和仿真结果基本吻合。此外,还开发了改进SBD结构、提高其电特性的工艺流程。     

6H-SiC高压肖特基势垒二极管

在可商业获得的N型6H-SiC晶片上,通过化学气相淀积,进行同质外延生长,在此结构材料上,通过热蒸发,制作Ni/6H-SiC肖特基势垒二极管．测量并分析了肖特基二极管的电学特性,结果表明,肖特基二极管具有较好的整流特性：反向击穿电压约为450V,室温下,反向电压VR=-200V时,反向漏电流JL=5×10-4A*cm-2;理想因子为1.09,肖特基势垒高度为1.24—1.26eV,开启电压约为0.8V．     

具有场板结构的AlGaN/GaN HEMT的直流特性

研制成功具有场板结构的AIGaN/GaN HEMT器件,对源场板、栅场板器件的性能进行了分析.场板的引入减小了器件漏电和肖特基漏电,提高了肖特基反向击穿电压.源漏间距4靘的HEMT的击穿电压由常规器件的65V提高到100V以上,肖特基反向漏电由37霢减小到5.7霢,减小了一个量级.肖特基击穿电压由常规结构的78V提高到100V以上.另外,还初步讨论了高频特性.     

具有场板结构的AlGaN/GaN HEMT的直流特性

研制成功具有场板结构的AIGaN/GaN HEMT器件,对源场板、栅场板器件的性能进行了分析.场板的引入减小了器件漏电和肖特基漏电,提高了肖特基反向击穿电压.源漏间距4靘的HEMT的击穿电压由常规器件的65V提高到100V以上,肖特基反向漏电由37霢减小到5.7霢,减小了一个量级.肖特基击穿电压由常规结构的78V提高到100V以上.另外,还初步讨论了高频特性.     

6H-SiC高压肖特基势垒二极管

在可商业获得的 N型 6 H - Si C晶片上 ,通过化学气相淀积 ,进行同质外延生长 ,在此结构材料上 ,通过热蒸发 ,制作 Ni/6 H- Si C肖特基势垒二极管 .测量并分析了肖特基二极管的电学特性 ,结果表明 ,肖特基二极管具有较好的整流特性 :反向击穿电压约为 45 0 V,室温下 ,反向电压 VR=- 2 0 0 V时 ,反向漏电流 JL=5× 10 - 4 A· cm- 2 ;理想因子为 1.0 9,肖特基势垒高度为 1.2 4— 1.2 6 e V ,开启电压约为 0 .8V     

元器件与组件

小封装高电流肖特基二极管 ZHCS400肖特基二极管以SOD323形式封装,正向电流400mA时正向压降425mV。该二极管的平均电 流为1A,脉冲电流为6.75A,功耗250mW。 反向电压30V时反向漏电流为15μA,反向电流200μA的击穿电压为40V。(10000只时单价0.14美元,接     

高压 Ti/ 6H- SiC肖特基势垒二极管

在 N型 6 H - Si C外延片上 ,通过热蒸发 ,制作 Ti/ 6 H- Si C肖特基势垒二极管 (SBD) .通过化学气相淀积 ,进行同质外延生长 ,详细测量并分析了肖特基二极管的电学特性 ,该肖特基二极管具有较好的整流特性 .反向击穿电压约为 40 0 V,室温下 ,反向电压 VR=2 0 0 V时 ,反向漏电流 JR 低于 1e- 4 A / cm2 .采用 Ne离子注入形成非晶层 ,作为边缘终端 ,二极管的击穿电压增加到约为 80 0 V.     

一种超结高压肖特基势垒二极管

改善反向击穿电压和正向导通电阻之间的矛盾关系一直以来都是功率半导体器件的研究热点之一。介绍了一种超结肖特基势垒二极管(SJ-SBD),将p柱和n柱交替构成的超结结构引入肖特基势垒二极管中作为耐压层,在保证正向导通电阻足够低的同时提高了器件的反向耐压。在工艺上通过4次n型外延和4次选择性p型掺杂实现了超结结构。基于相同的外延层厚度和相同的外延层杂质浓度分别设计和实现了常规SBD和SJ-SBD,测试得到常规SBD的最高反向击穿电压为110 V,SJ-SBD的最高反向击穿电压为229 V。实验结果表明,以超结结构作为SBD的耐压层能保证正向压降等参数不变的同时有效提高击穿电压,且当n柱和p柱中的电荷量相等时SJ-SBD的反向击穿电压最高。     

Characteristics of Schottky Rectifier Diodes Based on Silicon Carbide at Elevated Temperatures

Semiconductors - Forward and reverse current–voltage characteristics of commercial rectifier diodes based on a Schottky barrier to 4H-SiC are studied in the temperature range...     

A fully planarized 4H-SiC trench MOS barrier Schottky (TMBS)rectifier

A fully planarized 4H-SiC trench MOS barrier Schottky (TMBS) rectifier has been designed, fabricated and characterized for the first time. The use of a TMBS structure helps improve the reverse leakage current by more than three orders of magnitude compared to that of a planar Schottky rectifier. We have achieved a low reverse leakage current density of 6×10^-6 A/cm² and a low forward voltage drop of 1.75 V at 60 A/cm² for the TMBS rectifier. The static current-voltage (I-V) and switching characteristics of the TMBS rectifier have been measured at various temperatures. A barrier height of 1.0 eV and an ideality factor of 1.8 were extracted from the forward characteristics. The switching characteristics do not change with temperature indicating the essential absence of stored charge     

A new 4H-SiC lateral merged double Schottky (LMDS) rectifier withexcellent forward and reverse characteristics

The novel characteristics of a new Schottky rectifier structure, known as the lateral merged double Schottky (LMDS) rectifier, on 4H-SiC are explored theoretically and compared with those of the compatible conventional 4H-SiC Schottky rectifiers. The anode of the proposed lateral device utilizes the trenches filled with a high barrier Schottky (HBS) metal to pinch off a low barrier Schottky (LBS) contact during reverse bids. Numerical simulation of any such SiC structure is complicated by the fact that the thermionic emission theory predicts the reverse leakage current to be orders of magnitude smaller than the measured data. We, therefore, first propose a simple empirical model for barrier height lowering to accurately estimate the reverse leakage current in a SiC Schottky contact. The accuracy of the empirical model is verified by comparing the simulated reverse leakage current with the reported experimental results on different SiC Schottky structures. Using the proposed empirical model, the two-dimensional (2-D) numerical simulations reveal that the new LMDS rectifier demonstrates about three orders of magnitude reduction in the reverse leakage current and two times higher reverse breakdown voltage when compared to the conventional lateral low barrier Schottky (LLBS) rectifier while keeping the forward voltage drop comparable to that of the conventional LLBS rectifier     

1200V/100A高温大电流4H-SiC JBS器件的研制

基于SiC结势垒肖特基(JBS)二极管工作原理及其电流/电场均衡分布理论,采用高温大电流单芯片设计技术及大尺寸芯片加工技术,研制了1 200 V/100 A高温大电流4H-SiCJBS二极管.该器件采用优化的材料结构、有源区结构和终端结构,有效提高了器件的载流子输运能力.测试结果表明,当正向导通压降为1.60 V时,其正向电流密度达247 A/cm2(以芯片面积计算).在测试温度25和200℃时,当正向电流为100 A时,正向导通压降分别为1.64和2.50 V;当反向电压为1 200 V时,反向漏电流分别小于50和200μA.动态特性测试结果表明,器件的反向恢复特性良好.器件均通过100次温度循环、168 h的高温高湿高反偏(H3TRB)和高温反偏可靠性试验,显示出优良的鲁棒性.器件的成品率达70％以上.     

Barrier inhomogeneities and electrical characteristics of Ti/4H-SiCSchottky rectifiers

Forward density-voltage (J-V) measurements of titanium/4H-SiC Schottky rectifiers are presented in a large temperature range. While some of the devices present a behavior in accordance with the thermionic current theory, others present an excess forward current at low voltage level. This anomaly appears more or less depending on the rectifier and on the temperature. A model based on two parallel Schottky rectifiers with different barrier heights is presented. The characteristics show good agreement. It is shown that the excess current at low voltage can be explained by a lowering of the Schottky barrier in localized regions. A proposal for the physical origin of these low barrier height areas is given     

Si基JBS整流二极管的设计与制备

基于JBS整流二极管理论,详细介绍了一种Si基JBS整流二极管设计方法、制备工艺及测试结果。在传统肖特基二极管(SBD)有源区,利用光刻和固态源扩散工艺形成掺硼的蜂窝状结构,与n型衬底形成pn结,反向偏置时抑制了因电压增加引起的金属-半导体势垒高度降低,减小了漏电流;采用离子注入形成两道场限环的终端结构,有效防止了边缘击穿,提高了反向击穿电压。对制备的器件使用Tektronix 370B可编程特性曲线图示仪进行了I-V特性测试,结果表明本文设计的Si基JBS整流二极管正向压降VF=0.78 V(正向电流IF=5 A时),反向击穿电压可达340 V。     

一种隐埋缓冲掺杂层高压SBD器件新结构

提出了一种新型隐埋缓冲掺杂层(IBBD)高压SBD器件,对其工作特性进行了理论分析和模拟仿真验证。与常规高压SBD相比,该IBBD-SBD在衬底上方引入隐埋缓冲掺杂层,将反向击穿点从常规结构的PN结保护环区域转移到肖特基势垒区域,提升了反向静电释放(ESD)能力和抗反向浪涌能力,提高了器件的可靠性。与现有表面缓冲掺杂层(ISBD)高压SBD相比,该IBBD-SBD重新优化了漂移区的纵向电场分布形状,在保持反向击穿点发生在肖特基势垒区域的前提下,进一步降低反向漏电流、减小正向导通压降,从而降低了器件功耗。仿真结果表明,新器件的击穿电压为118 V。反向偏置电压为60 V时,与ISBD-SBD相比,该IBBD-SBD的漏电流降低了52.2%,正向导通电压更低。     

A novel planarized, silicon trench sidewall oxide-merged p-i-nSchottky (TSOX-MPS) rectifier

A new high-voltage rectifier structure, a planarized silicon Trench Sidewall OXide Merged P-i-n Schottky (TSOX-MPS) rectifier is described. This TSOX-MPS rectifier exhibits a far superior switching performance, compared to the p-i-n rectifier, for the same reverse leakage current and on-state voltage. In addition, for the same lifetime, the reverse leakage current of the TSOX-MPS rectifier is equal to that of the p-i-n rectifier, not so much sensitive than the MPS rectifier does. These aspects of the TSOX-MPS rectifier have been experimentally verified, by fabrication of 400 V TSOX-MPS rectifiers     

PECVD diamond-based high performance power diodes

In this study, we have designed, fabricated, characterized, and analyzed plasma-enhanced chemical vapor deposition (PECVD) diamond-based Schottky diodes for high power electronics applications. We have elaborated four critical issues in the synthetic-diamond semiconductor technology: 1) growth, 2) doping, 3) Schottky contact, and 4) different device structures in order to achieve better performance parameters. We have obtained 500 V of breakdown voltage on one device and 100 A/cm/sup 2/ of current density on another device, optimized for different applications. These values are among the highest reported with the polycrystalline diamond-based devices. We have utilized different fabrication techniques for the growth of PECVD-diamond, different metals as a Schottky contact on diamond film and also optimized structural parameters such as diamond film thickness and doping concentration in order to achieve a high-performance power diodes. Analysis of the current conduction mechanisms of these devices in this study revealed a space-charge-limited current conduction mechanism in the forward bias region while thermionic field emission controlled current conduction mechanism in the reverse bias region. Performance parameters such as forward voltage drop, barrier height, and current density were analyzed as a function of temperature and type of metal Schottky contacts.     

High-voltage and high-temperature applications of DTMOS with reverse Schottky barrier on substrate contacts

In this letter, for the first time, application of dynamic threshold voltage MOSFET (DTMOS) with reverse Schottky barrier on substrate contacts (RSBSCs) for high voltage and high temperature is presented. By this RSBSC, DTMOS can be operated at high voltage (>0.7 V), and exhibits excellent performance at high temperature in terms of ideal subthreshold slope, low threshold voltage and high driving current.