共查询到19条相似文献,搜索用时 156 毫秒
1.
2.
哥氏振动陀螺脱颖而出 总被引:1,自引:0,他引:1
哥氏振动陀螺是一种无转子陀螺,它用振动元件取代了传统陀螺的机械转子,用微幅振动取代了高速旋转,因而具有寿命长、可靠性高、体积小、重量轻、精度高等突出特点,是一种新型的极有发展潜力的惯性仪表。哥氏振动陀螺代表一种重要的惯性技术,它不仅具有所有的惯性品质,而且在众多的陀螺中只有它能够实现微型化。哥氏振动陀螺主要包括压电振动陀螺半球谐振陀螺和微机械振动陀螺。随着科学技术的发 相似文献
3.
MEMS微陀螺仪研究进展 总被引:3,自引:1,他引:2
回顾了MEMS微陀螺仪的研究进展,简单介绍了MEMS微陀螺仪的市场应用。微陀螺仪是MEMS器件中非常重要的一类器件。它的运用已经从单纯的航空领域逐渐转向汽车、消费电子行业等低端市场,这意味着微陀螺仪除了传统意义上的高精度高稳定性的要求,也可以向低精度商品化发展。传统的振动式陀螺,由于原理的局限性和加工技术的限制,很难达到战术级和惯性级的要求。导航级集成微陀螺(NGIMG)项目建议使用其他途径,以减少器件的可移动部件和降低工艺难度,从而提高其精度和抗干扰能力。各种设计方法近年来层出不穷,其中悬浮转子式微陀螺是目前精度最高的陀螺仪,微集成光学式陀螺也将在未来一段时间拥有巨大的研究潜力和发展空间。 相似文献
4.
5.
6.
7.
微机械叉指换能器声表面波陀螺 总被引:5,自引:2,他引:3
回顾了声表面波(SAW)陀螺发展史,总结了声表面波陀螺设计思想的变迁,重点介绍了一种新型微机械-叉指换能器(MEMS—IDT)声表面波陀螺。它具有适合标准IC工艺生产的简单二维结构,具备体积小、成本低、便于批量生产以及不用真空封装的特点。由于没有普通微机械陀螺的悬浮机构,抗冲击及振动的能力较普通微机械陀螺显著提高。同时,提出了一些迫待解决的问题。 相似文献
8.
MEMS-IDT声表面波陀螺 总被引:4,自引:0,他引:4
声表面波陀螺的概念出现在70年代初期,发展为MEMS-IDT声表面波陀螺仅是最近几年的事情。MEMS-IDT声表面波陀螺仪是一种MEMS微机械振动陀螺,这种陀螺为单层平面结构,采用标准IC工艺就可完成加工,勿需悬浮的振动元件,有很强的抗冲击振动能力,可靠性高,可不用真空封装而保持较高的灵敏度。 相似文献
9.
10.
基于机械杠杆的位移放大效应,提出了一种具有微杠杆结构的电容检测式微机械陀螺结构,所设计的杠杆放大机构设置在陀螺的检测模态中,通过杠杆将科氏质量块的检测位移放大传递到检测框上,以提升检测位移。建立杠杆结构陀螺的二阶振动微分方程,分析了杠杆结构对微机械陀螺结构静刚度和固有频率的影响,探讨了在不同结构条件下杠杆结构对检测位移的放大效果。通过仿真验证了理论的准确性与可行性,结果表明,在陀螺谐振情况下,可有效增大检测框位移60%以上,提升了检测位移,进而提升检测灵敏度。 相似文献
11.
This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h. 相似文献
12.
This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h. 相似文献
13.
14.
石英微机械陀螺的研究进展 总被引:1,自引:0,他引:1
首先介绍了石英微机械陀螺基于压电效应和科氏加速度的工作原理,回顾了石英微机械陀螺的发展历程,并且介绍了石英微机械陀螺的国内外发展现状。然后,针对石英微机械陀螺不同的结构进行了分类,并且对于不同结构的石英微机械陀螺的具体加工工艺、性能参数、应用领域等进行了综述。最后,对不同结构类型的石英微机械陀螺的尺寸、加工工艺,检测轴向,精度等参数进行了总结和对比,在此基础上分析了石英微机械陀螺的发展趋势,并指出了石英微机械陀螺研究中存在的问题,例如石英加工过程中产生的侧壁晶棱的不平整、石英侧壁电极的制作困难以及石英微机械陀螺多轴化应用的限制等。 相似文献
15.
Micromachined inertial sensors 总被引:36,自引:0,他引:36
Yazdi N. Ayazi F. Najafi K. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1998,86(8):1640-1659
This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication, technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10× every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors 相似文献
16.
A single-loop fourth-order sigma-delta (∑△) interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of a ∑Δ accelerometer,mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5 μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1 μg(Hz) and 8 μV/(Hz)respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results. 相似文献
17.
Dae-Hee Weon Jeong-Il Kim Saeed Mohammadi 《Analog Integrated Circuits and Signal Processing》2007,50(2):89-93
Design of 3-Dimensional micromachined inductors on high-(10 KΩ·cm) and low-resistivity(10 Ω·cm) Si substrate fabricated using stress metal technology we have developed [1, 2] is presented. Using high frequency electromagnetic simulation of 3-Dimensional inductors performed by Ansoft HFSS®, we have investigated the effects of number of turns, effective radius, metal line width, and different substrates on the quality factor, Q and self-resonant frequency, f sr of these inductors. We also have compared the simulated results with the measurement results of 3-D inductors fabricated using this technology. 相似文献
18.
19.
Micromachined devices for wireless communications 总被引:15,自引:0,他引:15
Nguyen C.T.-C. Katehi L.P.B. Rebeiz G.M. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1998,86(8):1756-1768
An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers 相似文献