基于石墨烯/铟砷量子点/砷化镓异质结新型光电探测器（英文）

研究了一种石墨烯/铟砷量子点/砷化镓界面形成的异质结探测器的暗电流特性以及光电响应性质.虽然石墨烯具有很高的电子迁移率,但受限于较低的光子吸收率,使其在光电探测领域的应用受到了限制.而半导体量子点具有量子效率高,光吸收能力强等独特优点.于是利用石墨烯-砷化铟量子点-砷化镓异质结结构制备了一种新型光电探测器.并对该探测器的响应率、I-V特性曲线、暗电流特性、探测率、开关比等关键性能进行了研究.其在637 nm入射光情况下的响应率、探测率以及开关比可分别达到为17. 0 m A/W、2. 3×10~(10)cm Hz~(1/2)W~(-1)和1×10~3.而当入射光为近红外波段的940纳米时,响应率进一步增加到了207 m A/W.同时,还证实了该器件的暗电流、肖特基势垒高度和理想因子对温度的都具有较高的依赖性都较强.     

基于InAs/GaAs量子点-石墨烯复合结构的肖特基光电探测器研究

石墨烯具有电子迁移率高、透过率高(T≈97.7%)且费米能级可调的特性。砷化镓的电子迁移率比硅的大5到6倍。引入砷化铟量子点后,光电探测器具有低暗电流、高工作温度、高响应率和探测率的特点,因而可被用于制备响应快、量子效率高和光谱宽的光电探测器。对基于InAs/GaAs量子点-石墨烯复合结构的肖特基结的I-V特性和光电响应进行了研究。结果表明,在0 V偏压下,该器件在400 nm～950 nm均有响应,峰值响应率可达0.18 A/W;在反向偏压下,器件的峰值响应率可达到0.45 A/W。通过对暗电流随温度变化的特性进行分析,得到了InAs/GaAs量子点-石墨烯肖特基结在室温附近以及80 K附近的势垒高度。     

基于碳管/石墨烯/GaAs双异质结自驱动的近红外光电探测器

基于单壁碳纳米管(SWCNT)/单层石墨烯/GaAs双异质结结构构筑了自驱动近红外光电探测器,利用GaAs优异的光电特性和石墨烯的高载流子迁移率特点,该光电探测器在无偏压情况下光电响应率可达393.8mA/W,比探测率达到6.48×1011 Jones,开关比为103。而且,利用半导体性SWCNT对近红外光子的高吸收特性以及SWCNT/石墨烯异质结对SWCNT产生光生载流子进行有效分离,使得该双异质结光电器件的光谱响应可拓展至1 064nm,突破了GaAs自身的响应极限860nm。     

基于石墨烯/硅微米孔阵列异质结的高性能近红外光探测器

本文报道了一种由石墨烯和硅微米孔阵列构筑的异质结探测器,具备高性能近红外光探测能力。通过光刻和反应离子刻蚀技术制备的硅微米孔阵列具有整齐光滑的表面,保证了较低的表面载流子复合速率。同时,孔阵列结构能有效地抑制入射光的反射,增加了有效光照面积,提高了石墨烯/硅异质结的吸收效率,从而提高了器件的光响应度。器件在±3 V偏压下表现出明显的电流整流特性,整流比为4.30×105,在功率密度为4.25 mW/cm2的810 nm入射光照射下器件的开关比达到了9.20×105。在入射光强为118.00 μW/cm2的810 nm光照下,光探测器的电流响应度可达到679.70 mA/W,探测率为3.40×1012 Jones;入射光强为7.00 μW/cm2电压响应度为1.79×106 V/W。更重要的是,该器件具有20.00/21.30 μs的升/降响应速度。相比于商业化硅光电二极管,石墨烯/硅微米孔阵列光电探测器结构简单、制备工艺简便,有望大幅降低制备成本。研究结果显示了石墨烯/硅微米孔阵列异质结探测器在未来低成本、稳定和高效近红外光探测应用方面的巨大潜力。     

基于石墨烯/砷化镓异质结构的毫米波/太赫兹探测器

单层石墨烯具有较低的固有光吸收效率,且材料中含有较多的缺陷,导致仅依靠石墨烯本身很难制备高性能的光电器件。通过石墨烯与半导体材料复合形成异质结构的方法可以克服这一瓶颈。本工作中利用石墨烯/砷化镓高迁移率异质晶体管结构制备了毫米波光电探测器,有效地提升了二维电子气特性,大幅度提高了器件在室温条件下的毫米波响应和探测能力。实验证明,400 mV的偏置电压下,该器件在25 GHz波段的获得了20.6 V?W^-1响应率,响应时间为9.8 μs,噪声等效功率为3.2×10^-10 W?Hz^-1/2。在太赫兹波0.12 THz下响应率仍然达到了4.6 V?W^-1,响应时间为10 μs,噪声等效功率为1.4×10^-9 W?Hz^-1/2。该工作展示了石墨烯/砷化镓异质结构毫米波太赫兹探测器的巨大应用前景。     

质子注入和快速退火对GaAs／AlGaAs量子阱红外探测器的影响

利用质子注入和快速退火技术改变GaAs/AlGaAs 量子阱能级分布,使量子阱红外探测器的光电特性发生变化,在较大地移动了探测波长的同时,探测器的响应率、探测率以及暗电流特性也发生相应变化.在质子注入剂量为2.5×10     

长波InAs/GaSb II类超晶格红外探测器

报道了50％截止波长为12.5μm的InAs/GaSb Ⅱ类超晶格长波红外探测器材料及单元器件.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.吸收区结构为15ML(InAs)/7ML(GaSb),器件采用PBIN的多层异质结构以抑制长波器件暗电流.在77K温度下测试了单元器件的电流-电压(I-v)特性,响应光谱和黑体响应.在该温度下,光敏元大小为100μm×100μm的单元探测器RmaxA为2.5Ωcm2,器件的电流响应率为1.29A/W,黑体响应率为2.1×109cmHz12/W,11μm处量子效率为14.3％.采用四种暗电流机制对器件反向偏压下的暗电流密度曲线进行了拟合分析,结果表明起主导作用的暗电流机制为产生复合电流.     

基于SnS2/InSe异质结的高性能宽带光电探测器

我们报道了一种基于SnS₂ / InSe垂直异质结的宽带光电探测器,其光谱范围为365-965 nm。其中,InSe作为光吸收层,有效扩展了光谱范围,SnS₂作为传输层,与InSe形成异质结,促进了电子-空穴对的分离,增强了光响应。该光电探测器在 365 nm 下具有813 A/W 的响应度。并且,在965nm光照下它仍然具有371 A/W的高响应度,1.3×10⁵%的外量子效率,3.17×10¹² Jones的比探测率,以及27 ms的响应时间。该研究为高响应宽带光电探测器提供了一种新的方法。     

PbSe/MoSe2异质结光敏二极管研制

采用分子束外延制备了PbSe与MoSe_2薄膜,使用Raman光谱和XRD衍射谱进行表征;并研制出PbSe/MoSe_2异质结光敏二极管,研究了其光电响应特性。使用1300 nm红外光源照射,在零偏压和-5 V偏压加载下,所研制异质结光敏二极管的探测率分别为5×10~9 cm·Hz~(1/2)·W~(-1)和2.9×10~(11) cm·Hz~(1/2)·W~(-1),显示出优异的光电响应特性。尤其在负偏压工作模式下,由于器件处于关断状态,具有更低的暗电流,因此,具有更高的光/暗电流比和更加优异的综合性能。     

高性能石墨烯/硅纳米线阵列异质结光探测器

设计了基于石墨烯/硅纳米线阵列异质结的高灵敏度自驱动光探测器。该探测器中的纳米线阵列为直径约为100nm的周期性结构,表面纳米结构的光捕获效应可以有效地抑制入射光的反射,增加了有效光照面积,增强了异质结的吸收,从而提高了器件的光电检测性能。实验制备出的异质结在±3 V偏压下表现出明显的电流整流特性,整流比为693×105。此外,由于纳米线阵列的光捕获效应增强了探测器在紫外到近红外的吸收,所以该探测器的探测范围可以从紫外到近红外光。在入射波长810nm、光强为90 μW/cm2的光照下,光探测器的光电流响应度可以达到056 A·W-1,光电压响应度达124×106 V·W-1,探测率为118×1012Jones。更重要的是,该器件具有30/32 μs的快速升/降响应速度。     

Study of the Structural and Luminescence Properties of InAs/GaAs Heterostructures with Bi-Doped Potential Barriers

The influence of Bi in GaAs barrier layers on the structural and optical properties of InAs/GaAs quantum-dot heterostructures is studied. By atomic-force microscopy and Raman spectroscopy, it is established that the introduction of Bi into GaAs to a content of up to 5 at % results in a decrease in the density of InAs quantum dots from 1.58 × 10¹⁰ to 0.93 × 10¹⁰ cm^–2. The effect is defined by a decrease in the mismatch between the crystal-lattice parameters at the InAs/GaAsBi heterointerface. In this case, an increase in the height of InAs quantum dots is detected. This increase is apparently due to intensification of the surface diffusion of In during growth at the GaAsBi surface. Analysis of the luminescence properties shows that the doping of GaAs potential barriers with Bi is accompanied by a red shift of the emission peak related to InAs quantum dots and by a decrease in the width of this peak.     

Molecular beam epitaxy of AlGaAs/Zn(Mn)Se hybrid nanostructures with InAs/AlGaAs quantum dots near the heterovalent interface

Features of the growth of InAs quantum dots in an Al_0.35Ga_0.65As matrix by molecular beam epitaxy at different substrate temperatures, deposition rates, and amounts of deposited InAs are studied. The optimum conditions for growing an array of low-density (≤2 × 10¹⁰ cm^?2) small (height of no more than 4 nm) self-organized quantum dots are determined. The possibility of the formation of optically active InAs quantum dots emitting in the energy range 1.3–1.4 eV at a distance of no more than 10 nm from the coherent heterovalent GaAs/ZnSe interface is demonstrated. It is established that inserting an optically inactive 5-nm GaAs quantum well resonantly coupled with InAs quantum dots into the upper AlGaAs barrier layer enhances the photoluminescence efficiency of the quantum-dot array in hybrid heterostructures.     

The sandwich InGaAs/GaAs quantum dot structure for IR photoelectric detectors

A new possibility for growing InAs/GaAs quantum dot heterostructures for infrared photoelectric detectors by metal-organic vapor-phase epitaxy is discussed. The specific features of the technological process are the prolonged time of growth of quantum dots and the alternation of the low-and high-temperature modes of overgrowing the quantum dots with GaAs barrier layers. During overgrowth, large-sized quantum dots are partially dissolved, and the secondary InGaAs quantum well is formed of the material of the dissolved large islands. In this case, a sandwich structure is formed. In this structure, quantum dots are arranged between two thin layers with an increased content of indium, namely, between the wetting InAs layer and the secondary InGaAs layer. The height of the quantum dots depends on the thickness of the GaAs layer grown at a comparatively low temperature. The structures exhibit intraband photoconductivity at a wavelength around 4.5 μm at temperatures up to 200 K. At 90 K, the photosensitivity is 0.5 A/W, and the detectivity is 3 × 10⁹ cm Hz^1/2W^?1.     

Localization of holes in an InAs/GaAs quantum-dot molecule

Deep-level transient spectroscopy is used to study the emission of holes from the states of a vertically coupled system of InAs quantum dots in p-n InAs/GaAs heterostructures. This emission was considered in relation to the thickness of a GaAs interlayer between two layers of InAs quantum dots and to the reversebias voltage U_r. It is established that hole localization at one of the quantum dots is observed for a quantum-dot molecule composed of two vertically coupled self-organized quantum dots in an InAS/GaAs heterostructure that has a 20-Å-thick or 40-Å-thick GaAs interlayer between two layers of InAs quantum dots. For a thickness of the GaAs interlayer equal to 100 Å, it is found that the two layers of quantum dots are incompletely coupled, which results in a redistribution of the hole localization between the upper and lower quantum dots as the voltage U_r applied to the structure is varied. The studied structures with vertically coupled quantum dots were grown by molecular-beam epitaxy using self-organization effects.     

Coupling of electron states in the InAs/GaAs quantum dot molecule

Deep level transient spectroscopy (DLTS) is used to study electron emission from the states in the system of vertically correlated InAs quantum dots in the p-n InAs/GaAs heterostructures, in relation to the thickness of the GaAs spacer between the two layers of InAs quantum dots and to the reverse-bias voltage. It is established that, with the 100 Å GaAs spacer, the InAs/GaAs heterostructure manifests itself as a system of uncoupled quantum dots. The DLTS spectra of such structures exhibit two peaks that are defined by the ground state and the excited state of an individual quantum dot, with energy levels slightly shifted (by 1–2 eV), due to the Stark effect. For the InAs/GaAs heterostructure with two layers of InAs quantum dots separated by the 40 Å GaAs spacer, it is found that the quantum dots are in the molecule-type phase. Hybridization of the electron states of two closely located quantum dots results in the splitting of the levels into bonding and antibonding levels corresponding to the electron ground states and excited states of the 1s ⁺, 1s ^?, 2p ⁺, 2p ^?, and 3d ⁺ types. These states manifest themselves as five peaks in the DLTS spectra. For these quantum states, a large Stark shift of energy levels (10–40 meV) and crossing of the dependences of the energy on the electric field are observed. The structures with vertically correlated quantum dots are grown by molecular beam epitaxy, with self-assembling effects.     

高性能InAs/GaAs量子点外腔激光器

为了获得高性能的量子点外腔激光器(ECL),利用InAs/GaAs量子点Fabry-Perot(FP)腔激光器研制了光栅外腔可调谐ECL。对InAs/GaAs量子点ECL进行了一系列的性能测试,主要包括单模稳定性测试、单模调谐范围测试、阈值电流密度测试、无跳模连续调谐测试和输出功率测试。在室温条件下获得了24.6nm的连续调谐范围,覆盖波长从999.2nm到1 023.8nm,并且实现了波长无跳模连续调谐。在调谐范围内最低阈值电流密度为1 525A/cm2,而且在中心波长处获得的单模输出功率为15mW,单模边模抑制比(SMSR)高达35dB。研究结果表明,通过构建光栅外腔可以实现高性能的InAs/GaAs量子点ECL。     

快速率生长MBE InAs/GaAs(001)量子点

用快速率(1.0ML/s)生长MBE InAs/GaAs(001)量子点。原子力显微镜观察结果表明,在量子点体系形成的较早阶段,量子点密度N(θ)随InAs沉积量θ的变化符合自然指数形式N(θ)∝ek(θ-θc),这与以前在慢速生长(≤0.1ML/s)条件下出现的标度规律N(θ)∝(θ-θc)α明显不同。另外,在N(θ)随θ增加的过程中,快速率生长量子点的高度分布没有经历量子点平均高度随沉积量θ逐渐增加的过程。这些实验观察说明,以原子在生长表面作扩散运动为基础的生长动力学理论至少是不全面的,不适用于解释InAs量子点的形成。这些观察和讨论说明,即使在1.0ML/s的快速率生长条件下,量子点密度也可以通过InAs沉积量有效地控制在1.0×108cm-2以下,实现低密度InAs量子点体系的制备。     

Electron microscopy of GaAs-based structures with InAs and As quantum dots separated by an AlAs barrier

Electron microscopy studies of GaAs-based structures grown by molecular beam epitaxy and containing arrays of semiconductor InAs quantum dots and metal As quantum dots are performed. The array of InAs quantum dots is formed by the Stranski-Krastanov mechanism and consists of vertically coupled pairs of quantum dots separated by a GaAs spacer 10 nm thick. To separate the arrays of semiconductor and metal quantum dots and to prevent diffusion-induced mixing, the array of InAs quantum dots is overgrown with an AlAs barrier layer 5 or 10 nm thick, after which a GaAs layer is grown at a comparatively low temperature (180°C). The array of As quantum dots is formed in an As-enriched layer of the low-temperature GaAs by means of post-growth annealing at 400–760°C for 15 min. It is established that the AlAs barrier layer has a surface profile corresponding to that of a subbarrier layer with InAs quantum dots. The presence of such a profile causes the formation of V-shaped structural defects upon subsequent overgrowth with the GaAs layer. Besides, it was obtained that AlAs layer is thinned over the InAs quantum dots tops. It is shown that the AlAs barrier layer in the regions between the InAs quantum dots effectively prevents the starting diffusion of excess As at annealing temperatures up to 600°C. However, the concentration of mechanical stresses and the reduced thickness of the AlAs barrier layer near the tops of the InAs quantum dots lead to local barrier breakthroughs and the diffusion of As quantum dots into the region of coupled pairs of InAs quantum dots at higher annealing temperatures.     

Effect of local structural defects on the precipitation of as in the vicinity of InAs quantum dots in a GaAs matrix

Electron-microscopy studies of GaAs structures grown by the method of molecular-beam epitaxy and containing arrays of semiconductor InAs quantum dots and metallic As quantum dots are performed. An array of InAs quantum dots is formed using the Stranski-Krastanow mechanism and consists of five layers of vertically conjugated quantum dots divided by a 5-nm-thick GaAs spacer layer. The array of As quantum dots is formed in an As-enriched GaAs layer grown at a low temperature above an array of InAs quantum dots using postgrowth annealing at temperatures of 400–600°C for 15 min. It is found that, during the course of structure growth near the InAs quantum dots, misfit defects are formed; these defects are represented by 60° or edge dislocations located in the heterointerface plane of the semiconductor quantum dots and penetrating to the surface through a layer of “low-temperature” GaAs. The presence of such structural defects leads to the formation of As quantum dots in the vicinity of the middle of the InAs conjugated quantum dots beyond the layer of “low-temperature” GaAs.