基于共沉积技术的AgTCNQ的有机双稳态器件

采用共沉积技术制备了AgTCNQ薄膜,并进行了红外、紫外光谱表征.利用微电子工艺制备了基于AgTCNQ薄膜的有机双稳态器件.研究发现,Ti/AgTCNQ/Au双稳态器件具有可逆、可重复的开关存储特性.将器件从初始的高阻态转变为低阻态的正向开关阈值电压为3.8～5V,将低阻态转变为高阻态的负向阈值电压仅为-3.5～-4.4V,与通常的CuTCNQ器件相比较小.这种基于AgTCNQ交叉结构的有机双稳态器件可应用于非易失性有机存储器.     

基于Rotaxane单分子层的双稳态器件研究

利用微电子工艺制备了基于Rotaxane单分子层的双稳态分子电子器件,并对其电学特性进行了表征.研究发现,在Ti/Rotaxane/Au双稳态,器件具有可逆可重复的开关存储特性.将器件从初始的高阻态转变为低阻态的正向开关阈值电压为1.3 V,将低阻态转变为高阻态的负向开关阈值电压仅为-1.7 V.这种基于Rotaxane交叉结构的有机双稳态器件可望应用于非易失性分子存储器.     

PMMA:C60存储器件制备及其电双稳特性

采用氯苯/三氯甲烷混合溶剂配制聚甲基丙烯酸甲酯(PMMA):富勒烯(C60)溶液,运用旋涂法以氧化铟锡为基底制备薄膜,运用原子力显微镜对薄膜表面形貌进行表征。制备了ITO/PMMA:C60/Al结构的有机双稳态器件,采用伏安法对器件的电双稳态性能进行测试。最后,分析了有机层中的电荷陷阱对器件电双稳特性的影响。实验表明,当溶剂体积比为1:1时,薄膜粗糙度较低,以此薄膜为功能层制备的器件阈值电压为5.4 V,高/低电阻态的电阻比值达到32.1。器件的阈值电压随着薄膜表面粗糙的增加而加大。     

悬臂式RF MEMS开关的设计与研制

介绍了一种制作在低阻硅(3～8Ω*cm)上的悬臂式RF MEMS开关.在Cr/Au CPW共面波导上,金/SiOxNy/金三明治结构或电镀金作为悬置可动臂,静电受激作为开关机理.当开关处于"关断"态,其隔离度小于-35dB(20～40GHz);阈值电压为13V;开关处于"开通"态,插入损耗为4～7dB(1～10GHz),反射损耗为-15dB.另外,还分析了开关的悬臂梁弯曲度与驱动电压的关系,并应用ANSYS软件对开关进行了电学、力学及耦合特性的计算机模拟.     

基于双绝缘层低电压n-型OFET的研制

采用顶接触结构研制了以Ta2O5/PMMA为绝缘层,有机材料PTCDI-C12为有源层的低电压n型有机场效应晶体管.其中Ta2O5薄膜采用阳极氧化方法制备,PMMA薄膜通过溶液旋涂法制备.与基于单一Ta2O5绝缘层的器件相比,双绝缘层器件的电学性能大幅提高.经测试得到器件场效应电子迁移率为0.063 cm2/Vs,开关电流比为1.7×104,阈值电压为2.3 V.     

悬臂式RF MEMS开关的设计与研制

介绍了一种制作在低阻硅(3～8Ω·cm)上的悬臂式RF MEMS开关.在Cr/ Au CPW共面波导上,金/Si Ox Ny/金三明治结构或电镀金作为悬置可动臂,静电受激作为开关机理.当开关处于“关断”态,其隔离度小于- 35 d B(2 0～4 0 GHz) ;阈值电压为13V ;开关处于“开通”态,插入损耗为4～7d B(1～10 GHz) ,反射损耗为- 15 d B.另外,还分析了开关的悬臂梁弯曲度与驱动电压的关系,并应用ANSYS软件对开关进行了电学、力学及耦合特性的计算机模拟     

基于聚合物绝缘栅的低电压有机薄膜晶体管

利用甲基丙烯酸甲酯-甲基丙烯酸环氧丙脂为栅绝缘层制备了酞箐铜有机薄膜晶体管,在电压为10V时器件具有较好的性能,栅绝缘层的漏电流密度低至2×10-8A/cm2 。测量其电容特性,该绝缘薄膜的介电常数介于3.9-5.0 。通过对绝缘层的减薄,阈值电压由 -3.5V 升至-2.0V,该酞箐铜有机薄膜晶体管可以在低电压下工作,其场效应迁移率为1.2×10-3 cm2/Vs 。     

高性能有机薄膜晶体管(OTFT)制备及其导电机制

详细介绍了在SiO2和高kHfO2介质层上制备并五苯薄膜晶体管方面的研究,特别是利用原子力显微技术(AFM)和静电力显微技术(EFM)研究了并五苯分子初始生长模式,揭示了衬底形貌、表面化学性能(包括化学清洗和聚合物层修饰)对有机半导体成膜结构和薄膜场效应晶体管性能之间的关联,包括晶体管迁移率、开关比和阈值电压等;针对并五苯初始生长成核模式的差异,分析了不同岛(畴)间畴边界对载流子在有机薄膜内输运的影响,有助于理解有机半导体薄膜导电机理。通过优化和控制介电层和有机半导体薄膜层的界面化学性质,在SiO2介质层上成功制备出迁移率为1.0cm2/V.s、开关电流比达到106的OTFT器件;在高kHfO2介质层上获得的OTFT器件的工作电压在-5V以下,开关电流比达到105,载流子迁移率为0.6cm2/V.s;器件性能指标已经达到目前国际上文献报道的最好水平。     

栅槽刻蚀工艺对增强型GaN HEMT器件性能的影响

基于凹槽栅增强型氮化镓高电子迁移率晶体管(GaN HEMT)研究了不同的栅槽刻蚀工艺对GaN器件性能的影响。在栅槽刻蚀方面,采用了一种感应耦合等离子体(ICP)干法刻蚀技术与高温热氧化湿法刻蚀技术相结合的两步法刻蚀技术,将AlGaN势垒层全部刻蚀掉,制备出了阈值电压超过3 V的增强型Al_2O_3/AlGaN/GaN MIS-HEMT器件。相比于传统的ICP干法刻蚀技术,两步法是一种低损伤的自停止刻蚀技术,易于控制且具有高度可重复性,能够获得更高质量的刻蚀界面,所制备的器件增强型GaN MIS-HEMT器件具有阈值电压回滞小、电流开关比(I_ON/I_OFF)高、栅极泄漏电流小、击穿电压高等特性。     

高性能70nm CMOS器件

首次在国内成功地制作了栅长为 70 nm的高性能 CMOS器件 .为了抑制 70 nm器件的短沟道效应同时提高它的驱动能力 ,采用了一些新的关键工艺技术 ,包括 3nm的氮化栅氧化介质 ,多晶硅双栅电极 ,采用重离子注入的超陡倒掺杂沟道剖面 ,锗预无定形注入加低能注入形成的超浅源漏延伸区 ,以及锗预无定形注入加特殊清洗处理制备薄的、低阻自对准硅化物等 . CMOS器件的最短的栅长 (即多晶硅栅条宽度 )只有 70 nm,其 NMOS的阈值电压、跨导和关态电流分别为 0 .2 8V、 490 m S/m和 0 .0 8n A/μm ;而 PMOS阈值电压、跨导和关态电流分别为- 0 .3V、 34 0 m S/m m和     

Controlled growth of a graphene charge-floating gate for organic non-volatile memory transistors

We report memory application for graphene as a floating gate in organic thin-film transistor (OTFT) structure. For graphene floating gate, we demonstrate a simpler synthesis method to form a discrete graphene layer by controlling the growth time during a conventional CVD process. The resulting organic memory transistor with the discrete graphene charge-storage layer is evaluated. The device was demonstrated based on solution-processed tunneling dielectric layers and evaporated pentacene organic semiconductor. The resulting devices exhibited programmable memory characteristics, including threshold voltage shifts (∼28 V) in the programmed/erased states when an appropriate gate voltage was applied. They also showed an estimated long data retention ability and program/erase cycles endurance more than 100 times with reliable non-volatile memory properties although operated without encapsulation and in an ambient condition.     

Flexible rewritable organic memory devices using nitrogen-doped CNTs/PEDOT:PSS composites

Nonvolatile rewritable organic memory devices based on poly(3,4-ethylene dioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) and nitrogen doped multi-walled carbon nanotube (NCNT) nanocomposites were fabricated on glass and PET substrates.Organic memory devices with bistable resistive switching were obtained using very low NCTN concentration (∼0.002 wt%) in the polymeric matrix. The memory devices exhibited a good ON/OFF ratio of approximately three orders of magnitude, a good retention time of 10⁴ s under operating voltages ≤ |4V| and a few hundredths of write-read-erase-read cycles. The bistable resistive switching is mainly attributed to the creation of oxygen vacancies. These defects are introduced into the thin native Al oxide (AlOx) layer on the bottom electrode during the first voltage sweep. The well-dispersed NCNTs immersed in PEDOT:PSS play a key role as conductive channels for the electronic transport, hindering the electron trapping at the AlOx-polymer interface and inducing a soft dielectric breakdown of the AlOx layer. These PEDOT:PSS + NCNTs memory devices are to easy to apply in flexible low-cost technology and provide the possibility of large-scale integration.     

Organic bistable memory device using MoO3 nanocrystal as a charge trapping center

Organic bistable memory devices (OBDs) with MoO₃ as a nanocrystal inside organic layer were developed and bistability of MoO₃ based OBDs was investigated. High on/off ratio over 200 was obtained at a low reading voltage of 1 V. MoO₃ OBDs could be electrically switched between high conductance state and low conductance state over more than 100 cycles and space charge limited conduction mechanism dominated switching behavior in MoO₃ OBDs.     

Enhanced electrical and photosensing properties of pentacene organic thin-film phototransistors by modifying the gate dielectric thickness

The effects of dielectric layer thickness on the electrical performance and photosensing properties of organic pentacene thin-film transistors have been investigated. To improve the electrical performance of pentacene thin-film transistors (TFTs), the poly-4-vinylphenol (PVP) polymer with various thicknesses was used in fabrication of the pentacene transistors. The pentacene thin-film transistor with the PVP dielectric layer of 70 nm exhibited a field-effect mobility of 4.46 cm²/Vs in the saturation region, a threshold voltage of −4.0 V, a gate voltage swing of 2.1 V/decade and an on/off current ratio of 5.1 × 10⁴. In the OFF-state, the photoresponse of the transistors increases linearly with illumination intensity. The pentacene transistor with the thinner dielectric layer thickness indicates the best photosensing behavior. It is evaluated that the electrical performance and photosensing properties of pentacene thin-film transistors can be improved by using various thickness dielectric layer.     

Versatile threshold voltage control of OTFTs via discontinuous pn-heterojunction formation

We demonstrate the versatility of the threshold voltage control for organic thin-film transistors (OTFTs) based on formation of discontinuous pn-heterojunction on the active channel layer. By depositing n-type dioctyl perylene tetracarboxylic diimide molecules discontinuously onto base p-type pentacene thin films (the formation of the discontinuous pn-heterojunction), a positive shift of the threshold voltage was attained which enabled realizing a depletion-mode transistor from an original enhancement-mode pristine pentacene transistor. Careful control of the threshold voltage based on this method led assembling a depletion-load inverter comprising a depletion-mode transistor and an enhancement-mode transistor connected in series that yielded tunable signal inversion voltage approaching 0 V. In addition, the tunability could be applied to improve the program/erase signal ratio for non-volatile transistor memories by more than 4 orders of magnitude compared to reference memory devices made of pristine pentacene transistors.     

Bistable electrical switching and nonvolatile memory effect in mixed composite of oxadiazole acceptor and carbazole donor

Bistable electrical switching and nonvolatile memory devices with the configuration of indium tin oxide (ITO)/active layer/aluminum (Al) are reported. The active layer were prepared from the mixed compositions of 2-(4-tert-butylphenyl)-5-(4-biphenylyl)-1,3,4-oxadiazole, (PBD) and poly(N-vinylcarbazole) (PVK). The as-fabricated ITO/PBD:PVK/Al sandwiched devices exhibited rewriteable flash memory property. Due to the strong interaction between oxadiazole acceptor and carbazole donor, the devices demonstrate excellent performance. The memory devices can operate over a small voltage range, the absolute value of switching-on threshold voltage is less than 1 V and the switching-off threshold voltage is less than 3.5 V. The ON/OFF ratio of current switches in the range of 10⁴–10² during the variation of applied voltage and the two different resistance states can be maintained over 4 h.     

Electrical bistability,negative differential resistance and carrier transport in flexible organic memory device based on polymer bilayer structure

Bistable nonvolatile memory devices containing two different layers of polymers, viz. MEH-PPV (poly[2-methoxy-5-(2′-ethyl-hexyloxy)-1,4-phenyl vinylene]) and PEDOT:PSS (poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate)) has been fabricated by a simple spin-coating technique on flexible polyimide (PI) substrates with a structure Al/MEH-PPV/PEDOT:PSS/Ag-Pd/PI. The current–voltage measurements of the as-fabricated devices showed a nonvolatile electrical bistability with electric field induced charge transfer through the polymer layers and negative differential resistance (NDR) which is attributed to the charge trapping in the MEH-PPV layer. The current ON/OFF ratio between the high-conducting state (ON state) and low-conducting state (OFF state) is found to be of the order of 10³ at room temperature which is comparable to organic field effect transistor based memory devices. We propose that such an improvement of rectification ratio (ON/OFF ratio) is caused due to the inclusion of PEDOT:PSS, which serves as a conducting current path for carrier transport; however, NDR is an effect of the trapped charges in the MEH-PPV electron confinement layer. The device shows excellent stability over 10⁴ s without any significant degradation under continuous readout testing in both the ON and OFF states. The carrier transport mechanism of the fabricated organic bistable device has been explained on the basis of different conduction mechanisms such as thermionic emission, space-charge-limited conduction, and Fowler–Nordheim tunneling. A band diagram is proposed to explain the charge transport phenomena. These bilayer structures are free from the drawbacks of the single organic layer based memory devices where the phase separation between the nanoparticles and polymers leads to the degradation of device stability and lifetime.     

Organic TFT array on a paper substrate

We demonstrate a high-performance organic thin-film transistor array fabricated on a flexible paper substrate. As a water and chemical barrier layer, 6-/spl mu/m-thick parylene has been coated on the paper substrate by using the vacuum deposition. The parylene layer protects the paper substrate from becoming damp during the wet chemical process. Using poly (3-hexylthiophene) as an active layer, a high-performance organic transistor with field effect mobility up to 0.086 cm/sup 2//V/spl middot/s and an on/off ratio of 10/sup 4/ can be achieved. Organic transistors built on a cheap paper substrate open a channel for future applications in flexible and disposable electronics with extremely low-cost.     

Oscillation neuron based on a low-variability threshold switching device for high-performance neuromorphic computing

Low-power and low-variability artificial neuronal devices are highly desired for high-performance neuromorphic com-puting.In this paper,an oscillation neuron based on a low-variability Ag nanodots(NDs)threshold switching(TS)device with low operation voltage,large on/off ratio and high uniformity is presented.Measurement results indicate that this neuron demon-strates self-oscillation behavior under applied voltages as low as 1 V.The oscillation frequency increases with the applied voltage pulse amplitude and decreases with the load resistance.It can then be used to evaluate the resistive random-access memory(RRAM)synaptic weights accurately when the oscillation neuron is connected to the output of the RRAM crossbar ar-ray for neuromorphic computing.Meanwhile,simulation results show that a large RRAM crossbar array(＞128×128)can be sup-ported by our oscillation neuron owing to the high on/off ratio(＞108)of Ag NDs TS device.Moreover,the high uniformity of the Ag NDs TS device helps improve the distribution of the output frequency and suppress the degradation of neural network recognition accuracy(＜1％).Therefore,the developed oscillation neuron based on the Ag NDs TS device shows great poten-tial for future neuromorphic computing applications.