超声换能器的设计及性能检测

在超声键合系统中,超声换能器是键合装备的核心部分。基于等效电路法和解析法设计超声换能器,获得换能系统的基本结构尺寸：采用阻抗分析仪与多普勒测振仪对系统进行性能分析。实验表明实测频率与设计频率吻合,换能系统阻抗为21．3Q,振动位移达到3．7μm,满足超声芯片封装的工艺要求。     

Al-Ni超声楔焊中输入功率与界面键合的特征分析

为了研究超声键合中在超声能量作用下金属间形成键合界面而构成键合力的机理,确定金属间吸收的超声能量与形成的界面质量的关系,在超声楔焊键合试验中,对Al-Ni楔焊通过改变焊接参数而获得完全键合和半键合的界面,并对其界面特征进行扫描电镜测试分析;同时,利用示波器采集超声键合机焊接时的电信号,分析了PZT驱动的输入阻抗和功率特性,并与界面质量对比.研究结果表明:超声键合而形成的Al-Ni界面为中央未键合的椭圆界面;相同参数条件下,一焊输入阻抗和吸收功率大于二焊,一焊的界面质量也高于二焊.     

引线键合系统键合工具振动特性研究

研究微电子封装超声引线键合系统键合工具的动态特性和摩擦行为,运用有限单元法建立了键合工具的动态接触模型,初步掌握微电子超声键合系统键合机理。通过对键合工具施加不同的加载频率和正压力的计算结果进行对比,定性地给出了键合过程中加载频率和正压力的变化对键合工具动态响应和摩擦应力的影响.研究结果表明:键合工具的加载频率偏离固有频率,键合工具针尖部分的幅值响应将迅速减小,同时摩擦应力的均值也相对减小;正压力增大,响应幅值将会相应减小;正压力增大到一定值时,幅值响应将会波动比较大,如果要得到适合的键合点尺寸的要求,同时保证键合质量,就必须选择合适的加载频率和正压力。     

超声波流量计换能器系统理论分析及应用

为了使超声波流量计能够获得最佳的超声波信号,从理论上分析了超声波流量计的换能器系统,在此基础上提出了用收发电压灵敏度参数来表征换能器系统的综合发射和接收性能。采用等效网络理论,计算了超声波压电换能器的发射特性和接收特性,同时给出了收发电压灵敏度的表达式以及在流量计工作频率下换能器的最优设计准则。应用该准则设计并制作了适用于热量表的超声波换能器。实验结果表明:采用该设计理论研制的换能器系统可以使热量表在工作频率上获得最优的超声波信号,同时也证明了采用该理论设计的超声波流量计换能器系统的有效性。     

超声换能器接触界面的非线性谐波

超声波在换能器中的非线性不仅引起劈刀振动的混乱而且导致芯片键合的失效,本文建立了超声波在接触界面传播的模型,并进行了数学仿真,最后在试验平台上采用多普勒测振仪测量了不同接触界面压力条件下的劈刀的振动波形,用剪切强度测试仪测试了键合强度。波形的畸变和高次谐波的产生是由于接触界面层的非线性引起的,为了保证键合强度应该将变幅杆和劈刀之间的拧紧力矩设定在一个合适的范围内,使接触界面层材料的二阶非线性系数最小。可以通过检测劈刀的高次谐波来反映超声键合的强度。     

热超声键合换能系统设计及性能分析

在热超声键合系统中,超声换能系统是键合装备的核心部分。基于等效电路法和解析法设计,获得换能系统的基本结构尺寸;基于有限元方法建立系统的仿真模型,获得系统的振动模态特性：采用阻抗分析仪与Doppler测振仪对系统进行性能分析。实验表明实测频率与设计频率吻合,换能系统阻抗为12．7Ω,振动位移达到3．725μm,满足超声芯片封装的工艺要求。     

空心变截面杆的等效网络

设计换能器时一般忽略螺杆的影响,将前、后盖板和压电陶瓷晶堆作为均匀的实心杆件,这种方法有一定的近似性.将任意空心变截面杆等效为同种形状的实心杆件,并推导出了出几种常见形状空心杆件的等效几何参数及其网络传输系数,从而可以利用等效网络的方法方便准确地设计超声振动系统.     

基于机械品质因数的全波压电超声换能器设计

针对全波压电超声换能器常规设计方法存在的尺寸参数较多、计算较复杂等问题,研究了一种利用机械品质因数设计全波压电超声换能器的方法。基于压电超声理论推导了全波压电超声换能器的频率方程,利用电学理论推导了全波压电超声换能器各组成部分的等效电路,利用等效电路求取了在任意等效截面处的等效机械阻抗,进而推导出全波压电超声换能器各部分尺寸参数与其机械品质因数的关系式。利用机械品质因数及频率方程的等高线图,对全波压电超声换能器各部分尺寸进行了设计计算。利用ANSYS对该尺寸全波压电超声换能器的谐振频率进行了仿真分析,结果表明所设计的全波压电超声换能器的谐振频率具有较高的精度,满足工程应用的要求。     

匹配层厚度振动换能器研究

随着水声信号处理技术的发展,对宽带信号的需求日益增长。换能器的带宽是宽带信号处理的基础,而匹配层技术是拓宽厚度振动换能器频带最有效的方法。研究了多匹配层厚度振动换能器的设计方法,建立了复数形式的多匹配层厚度振动换能器等效网络模型,仿真研究了匹配层参数对换能器响应带宽的影响,指出了单、双匹配层在拓宽换能器带宽方面的限制,还指出匹配层的最佳厚度并非一定就是四分之一波长。在此基础上,制作了单、双匹配层换能器样品,对仿真结果进行了试验验证。测试结果和仿真结果符合得很好。     

纵－扭复合振动夹心式压电超声换能器的研究

本文从纵振动和扭转振动的波动方程出发，结合复合振动换能器各组成部分在一维条件下，纵振动和扭转振动的等效网络，以一维声传输线理论为基础，推导出了复合振动换能器所满足的纵振动和扭转振动共振频率方程，通过合理地选择变截面杆的弯延指数β，从而设计出了同一长度下，纵振动的基波和扭转振动的二次谐波可以共振的纵－扭复合振动换能器，并对影响弯延指数β的因素进行了初步的探讨。实验结果表明，理论计算与实验结果基本符合。     

Design of advanced ultrasonic transducers for welding devices

A new high frequency ultrasonic transducer has been conceived, designed, prototyped, and tested. In the design phase, an advanced approach was used and established. The method is based on an initial design estimate obtained with finite element method (FEM) simulations. The simulated ultrasonic transducers and resonators are then built and characterized experimentally through laser interferometry and electrical resonance spectra. The comparison of simulation results with experimental data allows the parameters of the FEM models to be adjusted and optimized. The achieved FEM simulations exhibit a remarkably high predictive potential and allow full control of the vibration behavior of the transducer. The new transducer is mounted on a wire bonder with a flange whose special geometry was calculated by means of FEM simulations. This flange allows the transducer to be attached on the wire bonder, not only in longitudinal nodes, but also in radial nodes of the ultrasonic field excited in the horn. This leads to a total decoupling of the transducer to the wire bonder, which has not been achieved so far. The new approach to mount ultrasonic transducers on a welding device is of major importance, not only for wire bonding, but also for all high power ultrasound applications and has been patented     

Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers

The electromechanical coupling coefficient is an important figure of merit of ultrasonic transducers. The transducer bandwidth is determined by the electromechanical coupling efficiency. The coupling coefficient is, by definition, the ratio of delivered mechanical energy to the stored total energy in the transducer. In this paper, we present the calculation and measurement of coupling coefficient for capacitive micromachined ultrasonic transducers (CMUTs). The finite element method (FEM) is used for our calculations, and the FEM results are compared with the analytical results obtained with parallel plate approximation. The effect of series and parallel capacitances in the CMUT also is investigated. The FEM calculations of the CMUT indicate that the electromechanical coupling coefficient is independent of any series capacitance that may exist in the structure. The series capacitance, however, alters the collapse voltage of the membrane. The parallel parasitic capacitance that may exist in a CMUT or is external to the transducer reduces the coupling coefficient at a given bias voltage. At the collapse, regardless of the parasitics, the coupling coefficient reaches unity. Our experimental measurements confirm a coupling coefficient of 0.85 before collapse, and measurements are in agreement with theory.     

Prediction of surface temperature rise of ultrasonic diagnostic array transducers

Temperature rise at the surface of an ultrasound transducer used for diagnostic imaging is an important factor in patient safety and regulatory compliance. This paper presents a semianalytical model that is derived from first principles of heat transfer and is simple enough to be implemented in a commercial ultrasound scanner for real-time forecasting of transducer surface temperature. For modeling purposes, one-dimensional array transducers radiating into still air are considered. Promising experimental verification data are shown and practical implementation benefits of the model for thermal design and management of ultrasonic array transducers are discussed. In particular, the reduction in the amount of thermal characterization data required, compared to empirical models, shows promise.     

An analytical model of multilayer ultrasonic transducers with an inversion layer

Inversion layer ultrasonic transducers have been investigated recently as an interesting approach in wideband transducer design. In this paper we present an analytical model of multilayer ultrasonic transducers with an inversion layer. Our analysis of the wave propagation problem of an inversion layer transducer includes a functional decomposition of the electrical input impedance. It becomes clear from this decomposition that an inversion layer transducer can be modeled as three elements in series connection, i.e., a clamped capacitance, a classical motional impedance, and a coupled motional impedance. The first two elements make up the classical model of a single element transducer. The coupled motional impedance describes the coupled interaction between the regular and the inverted piezoelectric sublayers, and thus reflects the effect of an inversion layer. We present examples which show that inversion layer transducers are advantageous in achieving such useful features as dual-frequency operation mode as used in harmonic imaging or broadband performance desired in most ultrasonic applications.     

Electroacoustic model for electrostatic ultrasonic transducers withV-grooved backplates

Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems     

Modified Ultrasonic Technique to Study Gd-Doped ZnO Films

Normal ultrasonic transducers of 0.5, 1, and 2 MHz are modified using delay lines which are made of Quartz. Such modification is to ameliorate the capability of the transducer to investigate Gd-doped ZnO thin films whose thickness is too thin. The normal transducers cannot test materials that have too thin thickness due to the near fields of these transducers. The near field is considered as blind area of the transducer. Therefore, the specimen under test must have thickness bigger than the near field of the used transducer, or instead delay lines can be used. Samples of Gd-doped ZnO thin films are prepared using sol gel technique. The ultrasonic pulse echo method is used at room temperature. Flaws are found in different prepared specimens. Results show that such delay lines are suitable to ameliorate the ultrasonic transducer to test Gd-doped ZnO thin films.     

Radially composite piezoelectric ceramic tubular transducer in radial vibration

The radially composite piezoelectric tubular transducer is studied. It is composed of radially poled piezoelectric and a long metal tube. The electro-mechanical equivalent circuit of the radially poled piezoelectric and metal tube in radial vibration is obtained. Based on the force and velocity boundary conditions, the six-port electro-mechanical equivalent circuit for the composite tubular transducer is given and the resonance/anti-resonance frequency equations are obtained. The relationship between the resonance frequency and the dimensions is analyzed. Numerically simulated results obtained by the finite element method are compared with those from the analytical method. Composite piezoelectric tubular transducers are designed and manufactured. The resonance/anti-resonance frequencies are measured, and it is shown that the theoretical results are in good agreement with the simulated and experimental results. It is expected that radially composite piezoelectric tubular transducers can be used as high-power ultrasonic radiators in ultrasonic applications, such as ultrasonic liquid processing.     

Ultrasonic Transducer Sensitivity and Model-Based Transducer Characterization

It is shown that the role that an ultrasonic piezoelectric transducer plays in both generating and receiving ultrasound in an ultrasonic nondestructive evaluation (NDE) measurement system can be completely described in terms of the transducer's electrical impedance and open-circuit, blocked force receiving sensitivity. Furthermore, it is shown that both of these quantities can be obtained experimentally via a model-based approach and purely electrical measurements. The measurement of sensitivity uses a method originally developed for lower-frequency acoustic transducers. However, it is shown that at the higher frequencies found in ultrasonic NDE applications electrical cabling effects play an important role and must be compensated for in determining the transducer sensitivity. Examples of experimental measurement results using these new approaches are given.     

Finite-element simulation of transient heat response in ultrasonic transducers

The application of the finite-element method to a transient heat response problem in electrostrictive ultrasonic transducers during their pulsed operation is described. The temperature and thermal stress distribution are of practical importance for the design of the ultrasonic transducers when they are operated at intense levels. Mechanical vibratory loss is responsible for heat in the elastic parts, while dielectric loss is responsible in the ferroelectric parts. A finite-element computer model is proposed for the temperature change evaluation in the transducers with time. Natural and forced cooling convection and heat radiation from the transducers' boundaries are included. Simulation is made for Langevin-type transducer models, for which comparison is made with experimental data.