低温等离子复合技术制备氧化铝阻氚涂层（英文）

采用低温等离子复合技术,先后经过磁控溅射镀铝,热处理及氧离子注入,在不锈钢基体上制备了氧化铝阻氚涂层。利用XRD、SEM、EDS、AES对涂层进行了相结构、表面形貌、成分、氧元素分布等分析,并进行了划痕试验、抗热震及阻氚性能测试。结果表明:磁控溅射获得了高质量的铝涂层,热处理后形成了Fe Al合金过渡层。在氧离子注入中,当注入剂量不变电压增加时,离子注入深度增加,而氧元素分布梯度降低;当注入剂量达到8×10~(17) ions/cm~2以上时,氧元素分布变得均匀。所获得的氧化铝涂层具有较好膜/基结合力、抗热震性能及阻氚性能。经过叠加电压注入且剂量达到8×10~(17) ions/cm~2的膜层具有最好的阻氚性能,在600℃能使不锈钢的氚渗透率降低3个数量级。     

离子注入法在316L不锈钢基体上制备Al2O3 阻氚涂层

采用离子注入技术在316L不锈钢基体上制备了氧化铝阻氚涂层。对离子注入法的不同工艺参数对α-Al₂O₃涂层摩擦磨损、耐腐蚀、抗热震、阻氚性能的影响进行了研究。结果表明：温度、加速电压及离子注入剂量对α-Al₂O₃的含量均有影响。温度升高时, α-Al₂O₃的含量增加。增大加速电压及离子注入剂量时,α-Al₂O₃含量均出现先升高后降低的规律。离子注入剂量对涂层的摩擦磨损、耐腐蚀性能影响比较大：离子注入剂量越大,涂层的耐磨、耐腐蚀性能越好。涂层经过200次热震测试后未发生变化,抗热震性能较好。Al₂O₃膜层具有优异的阻氚性能,在600 ℃下能使316L不锈钢的氚渗透率降低3个数量级。     

微弧氧化制备氧化铝阻氚涂层的研究（英文）

采用微弧氧化技术在316L不锈钢基体上制备了氧化铝阻氚涂层,利用XRD、SEM、涡流法对涂层进行了相结构、表面形貌、膜厚的分析,并进行了划痕实验、抗热震性能及阻氚性能测试。结果表明:相结构、表面形貌、膜厚受到微弧氧化电流密度、电压、反应时间的影响。其中,电流密度、电压都能改变涂层相结构,较高电流密度将促进Al→Al_2O_3的形成,而较高电压将促进γ-Al_2O_3→α-Al_2O_3的相变。提高电压、反应时间,涂层表面放电孔洞将变大从而影响表面质量;最佳电流密度为9 A/dm~2,此时表面质量较好。通过性能测试及综合分析,最佳工艺参数为6 A/dm~2、300 V、30 min,膜基结合力、抗热震较好,能使316L不锈钢的氚渗透率降低3个数量级。     

微弧氧化制备阻氚涂层的研究

通过微弧氧化技术在316L不锈钢表面制备了氧化铝阻氚涂层。研究了不同微弧氧化工艺参数对涂层相结构、表面形貌、膜厚的影响,并分别通过XRD、SEM、涡流法进行了分析。通过划痕实验、抗热震实验、气相氘渗透试验,经过分析得到了制备最佳涂层的工艺参数。结果表明：涂层相结构、表面形貌、膜厚受到微弧氧化电流密度、电压及反应时间的影响。电流密度、电压能过影响涂层相结构,电流密度增大时更多铝相变成氧化铝相,电压增大时将促进α相氧化铝的形成;增大电压及反应时间,膜层表面不均匀质量变差,电流密度为9A/dm2时,膜层表面形貌最佳;膜层厚度受到电流密度、电压及反应时间的影响。经过一系列的测试（划痕实验、抗热震实验、气相氘渗透试验）,发现参数为6A/dm2, 300V, 30min时,得到了膜基结合力为 86.0N、能抗280次热震、阻氚性能至少达达3数量级的涂层。     

钼合金MoSi2涂层高温热震行为与裂纹扩展

采用料浆烧结法在钼合金表面制备了MoSi₂涂层,利用内热法测试了涂层室温～1600℃抗热震性能,通过扫描电镜(SEM)、电子探针(EPMA)、波谱分析(WDS)和X射线衍射(XRD)等测试手段分析了不同热震次数的涂层微观形貌、组织结构以及裂纹萌生扩展。结果表明：涂层可承受室温～1600℃热震400次,热震过程中涂层由原始的MoSi₂-Mo₅Si₃双层结构演变为SiO₂-MoSi₂-Mo₅Si₃多层结构,涂层热震初期形成纵向裂纹并不断向基体扩展,热震后期裂纹贯穿涂层到达基体,MoO₃挥发使涂层/基体界面应力增大产生横向裂纹,导致涂层剥落失效。     

银离子注入马氏体不锈钢表面改性研究

利用MEVVA源强流离子注入机将银离子注入到马氏体不锈钢表面,注入能量和注入剂量分别为100keV和(0.1~8)×1017ions/cm2。选用革兰氏阳性金黄色葡萄球菌和革兰氏阴性大肠杆菌研究了银离子注入不锈钢的抗菌性能,电化学法测定了其耐蚀性能,AES分析了不锈钢注入层中主要元素的浓度分布,讨论了注入剂量与不锈钢抗菌性能及耐蚀性能的关系。研究表明:随银离子注入剂量的增加,银在注入层中的峰值浓度变化不大,但分布深度增加,马氏体不锈钢抗菌性能显著提高。在100keV注入能量、8×1017ions/cm2注入剂量条件下,银离子注入马氏体不锈钢后可以使其具有最佳的抗菌性能,但耐蚀性能略有下降。     

Nb-Hf合金表面Si-Ti-Cr硅化物涂层在大气和真空中的高温热震性能

为了提高Nb-Hf合金的高温热震性能,采用浆料烧结和高温渗透法制备了Si-Ti-Cr硅化物涂层,对比分析了Si-Ti-Cr硅化物包覆的Nb-Hf合金样品在大气和真空条件下的高温热震性能。通过模拟在热冲击过程中涂层的温度场和热应力场分布,揭示了Si-Ti-Cr涂层在大气和真空条件下的热冲击失效机理。结果表明,在1300 ℃热震循环100次条件下,涂层的真空失重小于0.8 mg/cm²;在1600 ℃热震循环200次条件下,涂层的空气增重小于3 mg/cm²。硅化物涂层在1300 ℃真空环境下和1600 ℃空气环境下具有优异的抗热震性能。     

石墨抗氧化SiC涂层的制备与性能研究

本文以SiC、Si和酚醛树脂为主要原料,通过浸涂和气相渗硅两步法在石墨表面制备了SiC抗氧化涂层。利用XRD、SEM研究了涂层的相组成与形貌。结果表明,气相渗硅后涂层的主相为α-SiC,β-SiC和Si,其中Si是气相渗硅过程中残留的。涂层与基体之间具有过渡结构,致密度良好。抗氧化和抗热震实验表明：由气相渗硅工艺制备的SiC涂层结构致密,具有良好的抗氧化性能,1200℃空气条件下氧化16 h后试样每小时增重量约为2.18 mg/cm₂。涂层具有良好的抗热震性能,经1000 ℃—室温循环热震15次后试样质量变化百分率仅为-0.17%。     

离子注入304不锈钢表面耐腐蚀性的研究

采用先进的等离子注入技术,对304不锈钢分别进行N、Ti、Al离子注入,对比研究了304不锈钢注入不同种离子后的表面耐腐蚀性。研究了离子注入后各试样的表面微观形貌、物相成分和电化学腐蚀性。结果表明:离子注入304不锈钢的表面组织平整、致密。但随着注入剂量的增大,表面光洁度降低,形成多孔形貌;适量的离子注入剂量可获得非晶态注入层,形成单相过饱和固溶体,提高不锈钢的耐腐蚀性;相较两种注入剂量,剂量为5×10~(17)ions/cm~2的各离子注入试样,耐腐蚀性提高;而相同剂量的各离子注入试样,Ti离子注入的效果最好,相比304不锈钢基材,耐腐蚀性能约提高了72%(剂量为5×10~(17) ions/cm~2),其次是注入N,耐腐蚀性约提高了59%(剂量为5×10~(17)ions/cm~2)。     

预沉积Cu 膜对不锈钢基体上沉积C-90%SiC 涂层的影响

C-90%SiC 涂层涂覆在不锈钢废物包装桶的内壁上,可以有效防止放射性废物中氚的渗透,涂层与不锈钢基体材料的粘着性能是此类阻氚涂层使用寿命长短的关键。采用中频磁控溅射结合离子束混合技术,在不锈钢基体上沉积C-90%SiC 涂层,探索提高涂层粘着性能的方法,通过二次离子质谱和SEM 形貌表征涂层与基体之间的结合性能。结果表明,预沉积一层Cu 膜,可以使涂层与基体之间的元素混合效应大大提高,有利于提高涂层的粘着性能。     

Al2O3/Au Composite Coating on Stainless Steel Prepared by Electro-deposition

Tritium permeation barriers on stainless steels are required in fusion technology in order to reduce the tritium permeation rate through the structural material into the cooling water system.Preparation of tritium permeation barrier Al2O3 is an important way to solve the problem of leakage of tritium permeation.It is worth to note that the noble Au is an excellent barrier of hydrogen dissolution.Al2O3/Au composite coating was designed for potential tritium permeation barrier on stainless steel.The alternation coatings have been prepared by electrochemical deposition method.The processing parameters and subsequent sinter temperature for composite coatings were optimized.The oxidation resistance of the coating has been tested.A hydrogen diffusion test simulating tritium permeation has been conducted to compare the sample with and without coating.Microstructure was examined by scanning electron microcopy(SEM).The results showed Al2O3/Au multi-alternation coatings can be prepared on the surface of stainless steel at the case of controlling processing well.The coatings have the characteristic of high temperature oxidation resistance and good hydrogen permeability barrier.The tritium permeation should be study further.     

Au/Al_2O_3层状复合纳米涂层的制备及其抗氧化性能(英文)

采用磁控溅射法成功制备Al2O3/Au层状复合纳米涂层,所制备的涂层结构致密且由Al2O3层和Au层交替组成。采用高温循环氧化实验对复合涂层在不锈钢基体上的高温抗氧化性能进行分析评价。结果表明:Al2O3/Au层状复合纳米涂层极大地改善不锈钢基体的抗氧化和抗剥落性能。其抗氧化机理与涂层能够有效地抑制氧向合金基体的扩散并促进不锈钢基体中Cr元素的选择性氧化有关;抗剥落机理可归因于复合涂层中的Au层和纳米结构的Al2O3层能够有效地松弛高温热循环过程中产生的热应力,从而提高涂层的抗剥落性能。     

Effect of substrate temperature and nitrogen concentration during sputtering on corrosion behaviour of AlN coatings

Aluminium nitride coatings were formed on stainless steel substrate by DC-reactive balanced magnetron sputtering at various nitrogen concentrations in the sputtering gas mixture, and different substrate temperatures. The electrochemical corrosion behaviour of the coatings obtained was studied in 0.5?M H₂SO₄. Continuous improvement in corrosion resistance of the coatings was observed with increasing coating deposition temperature up to 500?°C. The corrosion potential shifted from ?0.66 V_SCE at 100?°C to ?0.33?V_SCE at 500?°C. Accordingly, the corrosion current density decreased significantly with increase in the deposition temperature. However, no major difference in corrosion behaviour could be noticed for the coatings formed at various nitrogen concentrations.     

Al2O3–TiO2 composite coatings with enhanced anticorrosion properties for 316L stainless steel

316L stainless steel is used as an important structural material in various industries. However, its service life is limited in the presence of chloride ions due to severe chemical corrosion. Herein, a facile radiofrequency magnetron sputtering process is reported for the synthesis of various Al₂O₃–TiO₂ composite coatings as an anticorrosion layer for 316L stainless steel substrates. The enhanced chemical stability of Al₂O₃–TiO₂ composite coatings was investigated by X-ray photoelectron spectroscopy, electron paramagnetic resonance, and X-ray diffraction measurements. Moreover, the high specific surface area of Al₂O₃–TiO₂ composite coatings displayed better hydrophobic property which can be confirmed by scanning electron microscopy and contact angle measurements. Finally, the direct characterization of anticorrosion properties was carried out using electrochemical tests. All of the above results exhibited the enhanced anticorrosion properties of Al₂O₃ coating after the incorporation of TiO₂. Significantly, the Al₂O₃–TiO₂ composite coatings with 15.56% Ti content provided the best corrosion resistance for 316L stainless steel.     

低Si含量WSiN涂层的结构和摩擦学行为

利用反应磁控溅射法制备W₂N和WSiN涂层,利用XRD,SEM和AFM研究涂层的显微结构,利用纳米压痕仪测试涂层的力学性能,利用摩擦磨损仪表征涂层的摩擦磨损行为。结果表明,原子数分数2.4% Si掺杂没有引起W₂N涂层相结构和力学性能的明显变化,但降低了涂层的表面粗糙度（从10.56 nm到8.35 nm）。不锈钢基底、W₂N涂层、WSiN涂层与Al₂O₃对偶球的摩擦因数分别为0.62、0.42和0.35,对应的磨损率分别为4.2×10^-14、3.8×10^-16和3×10^-16 m³/N·m。不锈钢基底、W₂N涂层、WSiN涂层与GCr15对偶球的摩擦因数分别为0.56、0.47和0.49,对应的磨损率分别为5.9×10^-15、2.8×10^-16和3.2×10^-16 m³/N·m。在上述两种对偶球情况下,W₂N涂层、WSiN涂层均能够降低不锈钢的摩擦因数10%~40%和磨损率1~2个量级。W₂N涂层和WSiN涂层具有较好的润滑抗磨性,能给不锈钢基底提供防护作用,且WSiN涂层的防护效果更佳。     

Improvement of corrosion resistance of high-velocity oxyfuel-sprayed stainless steel coatings by addition of molybdenum

To improve the marine corrosion resistance of stainless steel coatings fabricated by high-velocity oxyfuel (HVOF) spraying with a gas shroud attachment, the molybdenum (Mo) content of stainless steel was increased to form coatings with a chemical composition of Fe balance-18mass%Cr-22mass%Ni-2∼8mass%Mo. These coatings were highly dense, with <0.1 vol.% in porosity, and less oxidized, with 0.5 mass% in oxygen content at most. The corrosion mechanism and resistance of the coatings were investigated by electrochemical measurement, chemical analysis, and statistical processing. The general corrosion resistance of the coatings in 0.5 mol/dm³ sulfuric acid was improved with increases in Mo content, and the corrosion rate could be decreased to 8.8 × 10⁻² mg/cm² per hour (∼1 mm/year) at 8 mass% Mo. The pitting corrosion resistance of the coatings in artificial seawater was improved with increases in Mo content and was superior to that of the 316L stainless steel coating. The crevice corrosion resistance of the coatings in artificial seawater was improved and the number of rust spots at 4 mass% Mo was decreased to 38% of that for the 316L coating. Accordingly, Mo is highly effective in improving the corrosion resistance of the stainless steel coatings by HVOF spraying.     

高功率脉冲磁控溅射制备金属氮化物涂层EI北大核心CSCD

高功率脉冲磁控溅射(HiPIMS)作为目前研究热门的物理气相沉积方法之一,已经在刀具材料、不锈钢、聚合物、复合材料等基体上实现硬质涂层、生物涂层、耐腐蚀涂层、耐高温氧化涂层、绝缘涂层等多种类型涂层制备。通过高功率脉冲磁控溅射与复合方法及后续热处理等工艺方法复合,调节高功率脉冲磁控溅射的脉冲频率、峰值功率、占空比、多脉冲和双极性实现对靶材离化率、等离子体空间分布、涂层沉积速率、相结构、微观结构、元素成分、内应力等等离子体参数和涂层物相结构的调整,以提高基体材料的硬度、耐磨损、耐腐蚀、耐高温氧化及生物相容性等综合使役性能。特别是在应用于金属氮化物涂层的制备及性能研究方面,具有巨大的工程应用价值。结合目前硬质涂层材料的应用现状,探讨高功率脉冲溅射技术沉积涂层的特性和技术优势,介绍20多年来高功率脉冲磁控溅射技术在制备单元单层、多元多层、纳米多层与多元复合、高熵合金及含Si、O、C等金属氮化物硬质涂层工艺及性能等方面应用的研究进展。     

Properties of Aluminum Oxide (AlO_x) Barrier Coatings Deposited on Poly(Ethylene Terephthalate)(PET)Substrates by Reactive Magnetron Sputtering

The aluminum oxide(AlOx)coatings were deposited on poly(ethylene terephthalate)(PET)surface by reactive magnetron sputtering for improving its barrier property.With O2 flux increasing,three modes including metallic mode,transition mode and oxide mode exist in sputtering.The properties of the aluminum oxide(AlOx)coatings prepared at different modes were discussed.Also,the influences of oxygen flux on the stoichiometry,structure,gas permeation of the coatings were investigated.The chemical composition of AlOx films fabricated in transition mode is different as oxygen flux varies slightly,and the gas barrier property is better as the stoichiometry is closer to 1.5 with oxygen flux increasing.The coating uniformity,roughness and particle size depend remarkably upon oxygen flux.The coatings deposited at oxide mode have a good barrier performance to oxygen and water,and the permeability to oxygen decreases by sixty times and water vapor ten times compared with uncoated PET     

Effect of nitrogen ion implantation on the localized corrosion behavior of titanium modified type 316L stainless steel in simulated body fluid

Nitrogen ion implantation on titanium-modified type 316L stainless steel (SS) at the energy of 70 keV was carried out at different doses ranging from 1×10¹⁵ to 2.5×10¹⁷ ions/cm². These samples were subjected to open circuit potential (OCP)—time measurement, cyclic polarization, and accelerated leaching studies—in order to discover the optimum dose that can provide good localized corrosion resistance in a simulated body fluid condition. The results showed that the localized corrosion resistance improved with an increase in doses up to 1×10¹⁷ ions/cm², beyond which it started to deteriorate. The results of the accelerated leaching studies showed that the leaching of the major alloying elements was arrested upon nitrogen ion implantation. Gracing incidence x-ray diffraction studies showed the formation of chromium nitrides at a dose of 2.5×10¹⁷ ions/cm². X-ray photoelectron spectroscopy studies revealed the presence of these chromium nitrides in the passive film, which was attributed to the decreased corrosion resistance at a higher dose. Secondary ion mass spectroscopy studies on the passive film showed the variation in the depth profile upon nitrogen ion implantation. Thus, nitrogen ion implantation can be effectively used as a method to improve the corrosion resistance of the orthopedic implant devices made of titanium-modified type 316L SS. The nature of the passive film and its influence on corrosion resistance are discussed in this article.     

α-Alumina coatings on WC/Co substrates by physical vapor deposition

Physical vapor deposition coatings for cutting tools may be deposited by, e.g. reactive magnetron sputtering. Alumina growth in Ar/O₂ gas mixtures gives rise to problems due to insulating layers on targets, and hysteresis effects with respect to oxygen gas flow. In this paper is described a technology for the deposition of crystalline alumina: reactive high power impulse magnetron sputtering. Pure Al was used as target material, and the cemented carbide (WC/Co) substrates were kept at 500–650 °C. Hysteresis effects with respect to oxygen gas flow were alleviated, which enabled stable growth at a high deposition rate. The high power impulses were helpful in obtaining a crystalline oxide coating. X-ray diffraction and cross-section transmission electron microscopy showed that α-alumina films were formed. Technological testing of these PVD alumina coatings, with state-of-the-art AlTiN as benchmark, showed significantly improved crater wear resistance in steel turning.