金属基圆弧形金刚石砂轮在位精密修整实验研究

金属基圆弧形金刚石砂轮具有耐磨性好、结合强度高、寿命长等优点,广泛的应用于非回转、非对称大尺寸光学自由曲面的精密磨削中,但是,金属基体砂轮在位精密修整困难。基于此,采用旋转GC磨棒在位精密修整法,提出了金属基圆弧形金刚石砂轮的进给补偿在位精密修整策略,并在超精密机床上搭建在位修整系统,对D46金属基圆弧形金刚石砂轮进行了修整实验,同时对修整前后的砂轮轮廓误差进行了在位测量,最后采用超景深显微镜和Zygo白光干涉仪对修整后砂轮表面的金刚石磨粒和轮廓形貌进行了观察。结果表明,D46金属基圆弧形砂轮的修整效果明显,验证了本文提出的金属基圆弧形砂轮进给补偿修整策略的正确性和可操作性,实现了金属基圆弧形金刚石砂轮的在位精密修整。     

圆弧形金刚石砂轮的数控对磨成形修整试验

针对圆弧形金刚石砂轮精密修整的操作困难和装置复杂的问题,提出一种新的数控对磨成形修整方法.在该成形修整中,金刚石砂轮被驱动沿着圆弧插补运动轨迹与GC磨石对磨,逐渐形成砂轮的圆弧形轮廓,用于超硬材料的曲面磨削.在建立砂轮圆弧形轮廓的数控修整模式的基础上,分析定位误差与修整形状偏差的关系.此外,建立修整精度和修整率的评价指标,进行正交试验,研究修整工艺参数,即砂轮转速、行走速率和进给深度,对修整精度和修整率的影响.对该数控修整模式分析表明,在该数控对磨成形修整中不同半径的砂轮圆弧形轮廓能够被修整成形,可用于不同曲率的曲面磨削.同时,当定位误差在0.1 mm以内时,最大的修整形状偏差不超过5μm/10 mm.成形修整试验结果显示,影响修整精度和修整率的主要修整工艺参数分别为砂轮转速和行走速率.增加砂轮转速可以同时改善修整精度和修整率;增加行走速率会提高修整率,但会降低修整精度.此外,采用适宜的修整工艺,目标形状误差和目标修整率可以分别达到25.1μm/8mm和7.31x10-3mm3/mm3,分别提高修整精度2～3倍和修整率约7倍.     

圆弧形砂轮精密修整及其声发射在线监测技术

针对球面、非球面及自由曲面超精密磨削加工用圆弧形金刚石砂轮难以精密修整的问题,提出基于旋转绿碳化硅（GC）磨棒的端部在位精密修整方法及修整过程的声发射在线监测技术。基于圆弧形金刚石砂轮的结构特性,制订圆弧形金刚石砂轮的在位精密修整与修整过程的声发射在线监测技术方案。依据修整与在线监测方案,对D64圆弧形金刚石砂轮进行修整实验及其声发射信号采集,修整后跳动误差小于10μm,比修整前减小30μm左右,砂轮精度显著提高。利用声发射信号均方根值获取砂轮修整结束的特征预警阈值,实现了旋转GC磨棒端部在位精密修整过程的在线监测以及修整结束时间的准确判断,可以有效提高球面非球面磨削加工过程的效率。     

传动机构齿轮精密制造技术中硬质合金插齿刀磨削用碟形金刚石砂轮修整试验研究

重点研究了传动机构齿轮精密制造技术中,硬质合金插齿刀磨削用碟形金刚石砂轮的内侧进给、外侧进给和交替进给修整方式,对砂轮整形精度的影响规律,进一步分析了不同进给方式修整后的碟形砂轮磨制硬质合金插齿刀时,对插齿刀齿形精度的影响,同时采用粉末冶金棒、GC杯形砂轮、D/GC杯形砂轮3种修整方法,修整碟形金刚石砂轮,与原有修整方法进行对比试验,使修整后的碟形砂轮磨制整体硬质合金插齿刀而获得的齿形精度,分别提高了2.3倍、2.6倍和5.3倍。     

GC杯型砂轮粒度与金刚石砂轮修整效率间的关系建模

在GC杯型砂轮修整金刚石砂轮修整机理以及实验的基础上,建立了GC粒度与碟形金刚石砂轮修整效率间的关系模型,通过模型的分析表明:不同粒度和浓度的金刚石砂轮应采用相应粒度的GC杯型砂轮来修整,浓度越低、粒度越小时应采用的GC颗粒越大,反之则越小。为检验模型的可靠性作了两个验证性实验,实验结果表明:该模型具有较强的实用性;100#粒度、100%浓度,200#粒度、100%浓度的树脂结合剂碟型金刚石砂轮分别采用60#和100#粒度的GC杯型砂轮修整时效率最高。最后,在模型及实验基础上分析了GC粒度与常用金刚石砂轮修整效率间的关系,并对模型的应用进行了推广。     

可调超小凹圆弧砂轮修整器

修整砂轮圆弧的工具种类很多,但其工作原理都是一致的。如图1所示,当金刚石刀杆以O点为旋转点旋转,修整后的砂轮呈凹圆弧,圆弧的半径R以通过调整OA的距离来确定。如图2所示,当金刚石刀杆绕O点旋转,修整后的砂轮呈凸圆弧,圆弧的半径R以通过调整OA的距离来确定。上述砂轮圆弧修整器在修整凸圆弧时半径大些或小些都不成问题,但在修整凹圆弧时,当半径很小时就难以实施了。     

金刚石砂轮V形尖端切向磨削修整试验研究

针对超硬模具微结构磨削过程中金刚石砂轮V形尖端几何精度难以保证以及修整困难等问题,提出碳化硅修整轮切向磨削修整方法,采用不同修整参数对树脂结合剂和金属结合剂金刚石砂轮V形尖端进行修整试验,并采用修整后的金刚石砂轮进行了微结构阵列磨削试验。结果表明:在一定的修整参数下,树脂结合剂和金属结合剂金刚石砂轮的尖端圆弧半径分别达到3.5μm和2.0μm;两种砂轮尖端圆弧半径随着修整轮进给速度、修整深度的增加而增大,随着金刚石砂轮转速和修整轮粒度号的增加而减小;金属结合剂金刚石砂轮修整效率较低,修整后的尖端圆弧半径较小。微结构阵列磨削结果表明,修整后的两种金刚石砂轮能够满足微结构加工,而且发现树脂结合剂金刚石砂轮加工的微结构表面质量较好,更易于实现延性域磨削。     

基于金刚石微粉烧结棒的超硬砂轮修整试验研究

对金刚石微粉烧结棒修整树脂结合剂金刚石砂轮进行了试验研究。以反映砂轮平面度的端面跳动和径向跳动作为修整效率的评价依据 ,通过试验对比了主轴转速、砂轮组织参数和修整棒进给速度对砂轮修整效率的影响 ,认为低主轴转速下修整棒对金刚石砂轮的修整效率较高、砂轮参数对修整效率的影响很小以及修整棒进给速度与修整效率呈非线性关系     

电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究

大尺寸光学玻璃元件主要采用细磨粒金刚石砂轮进行精密/超精密磨削加工,但存在砂轮修整频繁、工件表面面形精度难以保证、加工效率低等缺点。采用大磨粒金刚石砂轮进行加工则具有磨削比大、工件面形精度高等优点,然而高效精密的修整是其实现精密磨削的关键技术。采用Cr12钢对电镀金刚石砂轮(磨粒粒径151 μm)进行粗修整,借助修整区域聚集的热量加快金刚石的磨损,可使砂轮的回转误差快速降至10 μm以内。结合在线电解修锐技术,采用杯形金刚石修整滚轮对粗修整后的电镀砂轮进行精修整,砂轮的回转误差可达6 μm以内,轴向梯度误差由6 μm降至2.5 μm。通过对修整前后的金刚石砂轮表面磨损形貌成像及其拉曼光谱曲线分析了修整的机理。对应于不同的砂轮修整阶段进行熔融石英光学玻璃磨削试验,结果表明,砂轮回转误差较大时,工件材料表面以脆性断裂去除为主;随着砂轮回转误差和轴向梯度误差的减小,工件表面材料以塑性去除为主,磨削表面粗糙度为Ra19.6 nm,亚表层损伤深度低至2 μm。可见,经过精密修整的大磨粒电镀金刚石砂轮可以实现对光学玻璃的精密磨削。     

基于金刚石微粉烧结棒的超硬砂轮修整试验研究

对金刚石微粉烧结棒修整树脂结合剂金刚石砂轮进行了试验研究.以反映砂轮平面度的端面跳动和径向跳动作为修整效率的评价依据,通过对主轴转速、砂轮组织参数、修整棒进给速度3个方面进行对比试验,得出了以下结论:低主轴转速下修整棒对金刚石砂轮的修整效率较高,砂轮参数对修整效率的影响很小以及修整棒进给速度与修整效率呈非线性关系.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

Wear of the blade diamond tools in truing vitreous bond grinding wheels: Part II. Truing and grinding forces and wear mechanism

Truing and grinding forces and the wear mechanism of particle and rod diamond blade tools used to generate precise and intricate forms on rotating vitreous bond silicon carbide grinding wheels are presented. A Hall effect sensor was used to measure the change of grinding spindle power during truing and grinding. A signal processing procedure was developed to identify individual truing passes and to extract the average, peak-to-valley, and standard deviation of the variation of truing force for each pass. The truing force data and SEM micrographs of worn surfaces on blade tools reveal micro- and macro-fracturing of the diamond. The attritious and erosion wear of the diamond rod and particle, erosion of the metal bond, and pulling-out of the diamond particle are also identified. Grinding force data shows that, for the same truing parameters, a wheel trued by the rod diamond blade tool has higher grinding forces than one trued by a particle diamond blade tool.     

Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

A mechanical fabrication of micro pyramid-structured silicon surface is proposed using crossed grooving with a 60° V-tip of diamond grinding wheel. It can obtain high form-accuracy, good surface quality and efficient productivity in contrast to laser machining and etching, and also assure a high aspect ratio in contrast to other mechanical processes. In order to describe its micro-structured topography, a white-light interferometer was employed, and its measured point cloud was matched using an Iterative Closest Point (ICP) algorithm. In micro grinding, a novel CNC mutual-wear truing was first developed to sharpen the wheel V-tip; then, the effects of microscopic wheel topography, silicon crystal-orientation and grinding parameter were investigated on ground micro-topography, truing ratio and material removal ratio; finally, its form-accuracy, pyramid top radius, groove tip radius, surface roughness and aspect ratio were evaluated. It is shown that better microscopic grain protrusion topography on wheel V-tip produces much larger material removal ratio and much better micro-structured topography in micro grinding, but it leads to much less truing ratio in finer GC truing. In micro grinding, silicon crystal-orientation has little effect on micro-structured topography due to diamond crystal-orientations that are randomly distributed on wheel V-tip. Although the micro pyramid-structured form error is only about 3.4 μm, its V-groove bottom and pyramidal top have very large form errors (23.1-47.9 μm) due to the sharpness of wheel V-tip and the frangibility of micro pyramid top. On increasing feed speed, its pyramid top radius decreases and its groove tip radius slightly increases, ultimately leading to an increase in aspect ratio, whereas its surface quality descends. It is concluded that the micro-pyramid arrays may be precisely patterned on silicon surface using a SD600 wheel with crossed tool paths, on-machine V-tip truing and the depth of cut in 1 μm.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Abstract

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

大口径光学元件高精度平面磨床加工系统研究

以实现高精度、高效率、高自动化程度加工为目的,基于高精度平面磨床MGK7160的加工系统,详细分析了加工规划控制、计算机辅助制造软件系统开发、砂轮修整及动平衡、在位测量等关键配套工艺技术。在已有设备及配套工艺基础上利用400#粒度金刚石圆弧砂轮,实现口径400mm×400mm平面光学元件的加工,获得了较好的加工精度,验证了机床及加工技术系统的可靠性。     

Investigation of internal ultrasonically assisted grinding of small holes: effect of ultrasonic vibration in truing and dressing of small CBN grinding wheel

In internal grinding of small holes, it is hard to realize high accuracy truing and dressing for the grinding wheel when a conventional truing/dressing method using single diamond dresser or rotary cup wheel is employed. Because of the cantilever support condition of the spindle shaft the stiffness of shaft is reduced. Thus the truing force leads the shaft to a significant deformation during truing/dressing. In this study, for improving the truing and dressing accuracy, a new truing/dressing method was proposed, in which the grinding wheel is ultrasonically vibrated along its axis during truing/dressing with a GC rotary cup wheel. A series of experiments were carried out to investigate the effects of the wheel ultrasonication on the truing force reduction, the truing accuracy improvement and the wheel surface condition. In addition, the grinding force and work surface roughness experimentally obtained by using the wheels trued with or without ultrasonication were compared. The experimental results indicated that applying ultrasonic vibration to the wheel decreases the normal and tangential grinding forces by more than 20% and 24%, respectively, and the surface roughness by as much as 18%.     

IN SITU TRUING/DRESSING OF DIAMOND WHEEL FOR PRECISION GRINDING

An application for achieving on-machine truing/dressing and monitoring of diamond wheel is dealt with in dry grinding. A dry electrical discharge （ED） assisted truing and dressing method is adopted in preparation of diamond grinding wheels. Effective and precise truing/dressing of a diamond wheel is carried out on a CNC curve grinding machine by utilizing an ED assisted diamond dresser. The dressed wheel is monitored online by a CCD vision system. It detects the topography changes of a wheel surface. The wear condition is evaluated by analyzing the edge deviation of a wheel image. The benefits of the proposed methods are confirmed by the grinding experiments. The designed truing/dressing device has high material removal rate, low dresser wear, and hence guarantees a desired wheel surface. Real-time monitoring of the wheel profile facilitates determining the optimum dressing amount, dressing interval, and the compensation error.     

Form-truing error compensation of diamond grinding wheel in CNC envelope grinding of free-form surface

In computer numerical control (CNC) grinding of free-form surface, an ideal arc profile of trued diamond grinding wheel is generally employed to plan 3D tool paths, whereas its form-truing errors greatly influence the ground form accuracy. A form-truing error compensation approach is proposed by using an approached wheel arc profile to replace the previously designed ideal one. The objective is to directly compensate the trued wheel arc-profile errors. It may avoid the time consumption of traditional approach that compensates the measured coordinate point errors of workpiece to an iterative grinding operation. First, the 3D tool path surface was constructed to plan the 3D tool paths. Second, the CNC arc truing of grinding wheel was conducted to analyze the form-truing error distribution relative to the applied wheel arc profile. Then, the form-truing error compensation was carried out in CNC envelope grinding. Finally, the iterative closest point (ICP) algorithm was used to match the measured coordinate points of workpiece to ideal free-form surface. It is shown that the 3D tool path surface constructed is practicable to plan arbitrary 3D tool paths for the form-truing error compensation. The ICP matching may be used to investigate 3D ground form error distribution. It is confirmed that the form-truing error compensation can directly improve the 3D ground form accuracy. It may decrease the 3D ground form error by about 20% when the 2D form-truing error is reduced by about 58% using the same truing conditions for CNC grinding.