大数值孔径物镜的波像差测量及其特殊问题

设计了基于振幅型棋盘光栅的二维剪切干涉仪,用于测量大数值孔径(NA)物镜的波像差。研究了棋盘光栅剪切干涉仪的基本原理,分析了大数值孔径物镜波像差测量时涉及的几个特殊问题。首先,根据棋盘光栅的远场衍射函数分析了棋盘光栅的衍射效率和衍射级分布,给出了剪切干涉图数据的处理方法。接着,根据球面光瞳坐标与平面探测器坐标的投影关系,分析了光瞳坐标畸变的影响;采用几何光线追迹方法,分析了光栅方程非线性对系统误差的影响。最后,推导了物镜光瞳边缘的相对照度与数值孔径的关系。试验结果表明:采用相同光瞳坐标,NA为0.6的显微物镜的波像差测量重复性(3σ)可达到3.7 mλ。对大数值孔径物镜测量过程中涉及的特殊问题进行了探讨,结果提示:测量大数值孔径物镜的波像差时,需要考虑光瞳坐标畸变、光栅方程引入的系统误差、光瞳边缘照度衰减的影响等。     

基于单压电变形镜的可控环形焦斑整形

为了实现可控环形焦斑的整形,提出了一套基于单压电变形镜的整形方法。首先结合波前衍射理论和随机并行梯度下降算法模拟迭代出环形焦斑整形所需的调制相位,进而利用波前传感器探测光束的波前信息,控制变形镜重构目标光斑对应的调制相位,实现聚焦光斑的整形。搭建了一套基于62单元单压电变形镜的光斑整形实验平台,采用焦平面上的CCD记录远场聚焦光斑。实验结果表明,该方法实现了对不同直径(0.32,0.4,0.6 mm)和宽度(0.05,0.08,0.1mm)环形焦斑的整形,可有效应用于激光束整形。     

子孔径合成光学成像系统像质评价研究

子孔径合成光学成像系统的出瞳波前是离散的,需要同时引入波象差和衍射光学理论,拟合最佳高斯参考球面,计算出瞳波前和波象差,并通过对像面的衍射积分,评估系统像质。对比了两种像质评估的方法,其一是直接利用干涉仪实测获得的整体出瞳波面参数拟合Zernike多项式衍射直接积分法计算像面复振幅分布,其二是对子出瞳波面衍射直接积分在像面的复振幅的叠加。设计并制造了一个三子镜合成的成像光学系统,在此基础上用ZYGO GPI XP干涉仪验证并对比了使用两种方法的对像质计算的特点。结果表明,子出瞳波面直接衍射积分叠加法的精度更高,但计算量大;在衍射限附近,前者的拟合精度也能满足像质的定性评估要求,且计算量较小。     

利用相位差异法检测镜面面形

为了验证相位差异波前检测器演示系统利用自带光源独立完成波前检测任务的能力,搭建了基于相位差异法检测镜面面形的实验平台。测试时在焦面和离焦面上同时采集短曝光图像,在已知离焦量的前提下解算出波前相位分布并恢复出目标,从而实现对大镜面像差的估计。为了进一步验证相位差异测量方法的准确性,对相位差异法与高精度的ZYGO干涉仪得到的测量结果进行了比较分析。实验结果表明:两种方法获得的面形误差分布及误差的峰谷值(PV)和均方根值(RMS)一致性很好,而波前RMS的测量精度达到了2.83/1 000λ。得到的结果表明提出的相位差异法能有效地检测出镜面的像差,且准确性很好。     

Quantification of the NA dependent change of shape in the image formation of a z-polarized fluorescent molecule using vectorial diffraction simulations

The point spread function of a fixed fluorophore with its dipole axis colinear to the optical axis appears donut-shaped when seen through a microscope, and its light distribution in the pupil plane is radially polarized. Yet other techniques, such as photolithography, report that this same light distribution in the pupil plane appears as a solid spot. How can this same distribution lead to a spot in one case but a donut in the other? Here, we show how the tube lens of the system plays a critical role in determining this shape. Using a vectorial treatment of image formation, we simulate the relative contributions of both longitudinal and radial components to the image of a dipole emitter and thus show how the donut (typically reported for z-polarized single molecule fluorescence microscopy) transforms into a solid spot (as commonly reported for photolithography) as the numerical aperture of the tube lens increases. We find that the transition point occurs around 0.7 NA, which is significantly higher than used for most microscopy systems and lower than for common photolithography systems, thus resolving the seeming paradox of dipole shape.     

光学成像系统光学波前的高精度测试

基于扩展奈波尔-泽尼克理论,分析了不同出瞳振幅分布情况对光学系统焦面处光强分布的影响.针对光学成像系统出瞳振幅实际分布状态,提出了一种新的测试光学波前的方法,解决了相位恢复算法中出瞳振幅分布不均匀和快速傅里叶变换引入计算误差的问题.通过测评实验,对一光学系统进行了测试,获得的光学系统出瞳波前(PV)值为0.196 5λ...     

A simple method for checking the illumination profile in a laser scanning microscope and the dependence of resolution on this profile

One of the conditions for a laser scanning microscope to reach its optimal performance is for it to operate at its full numerical aperture (NA). In most commonly used systems, the illumination intensity at the back focal plane of the objective lens is apodized. This paper presents a simple method using a photodiode for checking the actual illumination intensity profile. We show as an example the measured profiles of a laser beam when working with two high-NA immersion objectives in two different confocal systems, and also show that in theoretical studies of the point-spread function, the assumption of a flat compared with a truncated Gaussian beam profile gives rise to severe discrepancies. The measured profiles also serve as an indication of the necessity of a realignment of the optical system.     

成像光学系统的相对波像差梯度偏离值评价法

针对成像光学系统的波像差检测,提出了相对波像差梯度偏离值评价方法,用于直接表征波前的成像性能。给出了波像差梯度偏离值的定义,即为波前成像点与成像能量中心的偏离值。在此基础上定义相对波像差梯度偏离值为波像差梯度偏离值与艾里斑大小的比值,并提出了相对波像差梯度偏离值评价方法。相对波像差梯度偏离值与波前口径、形状、焦距均无关,故文中提出用成像尺寸、成像集中度以及成像能量分布等多种方法进行相对波像差梯度偏离值评价。其中成像集中度和成像能量分布在不同的检测分辨率条件下的稳定性较好,分辨率每相差一倍产生的差异通常小于10%。根据出瞳位置的相对波像差梯度偏离值分布和像面位置的波像差梯度分布情况,可以方便地指导光学加工和系统装调。进行了相应的实验分析,结果显示:相对波像差梯度偏离值评价方法可以用于制定波像差指标,进行波前质量控制。     

高数值孔径投影光刻物镜的光学设计

针对45nm节点投影光刻物镜的应用,开展了工作波长为193nm的深紫外浸没式高数值孔径(NA)投影光刻物镜的研究和研制。设计了数值孔径(NA)为1.30的离轴三反射镜投影光刻物镜和NA为1.35的同轴两反射镜投影光刻物镜,并对两个设计方案的优劣进行对比分析,选择了同轴式结构作为最终的设计方案。分析了系统在不同NA情况下可变光阑与其远心度之间的关系,提出了用双可变曲面光阑的设计方案来优化系统的远心度。实验表明,应用本文设计方案,光刻物镜的波像差小于1nm,畸变小于1nm;新型的可变光阑使系统NA在0.85~1.35变化时的最大远心度由5.83~17.57mrad降低至0.26~3.21mrad。本文提出的设计方案为45nm节点高数值孔径投影光刻物镜的研制提供了有益的理论依据和指导。     

Integration of a high‐NA light microscope in a scanning electron microscope

We present an integrated light‐electron microscope in which an inverted high‐NA objective lens is positioned inside a scanning electron microscope (SEM). The SEM objective lens and the light objective lens have a common axis and focal plane, allowing high‐resolution optical microscopy and scanning electron microscopy on the same area of a sample simultaneously. Components for light illumination and detection can be mounted outside the vacuum, enabling flexibility in the construction of the light microscope. The light objective lens can be positioned underneath the SEM objective lens during operation for sub‐10 μm alignment of the fields of view of the light and electron microscopes. We demonstrate in situ epifluorescence microscopy in the SEM with a numerical aperture of 1.4 using vacuum‐compatible immersion oil. For a 40‐nm‐diameter fluorescent polymer nanoparticle, an intensity profile with a FWHM of 380 nm is measured whereas the SEM performance is uncompromised. The integrated instrument may offer new possibilities for correlative light and electron microscopy in the life sciences as well as in physics and chemistry.     

Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running

A common path lateral-shearing interferometer with a minimum number of optical components has been developed. Because the interferometer is little affected by mechanical vibrations and air turbulence, it can be mounted on an ultraprecision lathe and can be used to measure the shapes of workpieces. A plane parallel glass plate is used to shear the wavefront under test in the interferometer. To analyze the interference fringes obtained by the interferometer precisely, a fringe-scanning method using a slight tilt of the glass plate is used. Zone plates that are computer-generated holograms are used to measure spherical and aspherical surfaces with the interferometer. A spherical and a parabolic concave mirror were measured with the interferometer. The spherical mirror was also measured by a Fizeau interferometer to compare the error with that measured by the lateral-shearing interferometer. The experimental results agreed well with those measured by the lateral-shearing interferometer.     

大气相干长度的瞬时测量

由于差分像运动监测法测量大气相干长度需要多帧统计,本文应用波前结构函数法,提出了一种大气相干长度的瞬时测量方法。该方法通过Shack-Hartmann波前探测器测量单帧短曝光畸变波前的Zernike系数;然后减去光学系统初始像差的Zernike系数,去除倾斜项,计算波前结构函数;最后,与满足Kolmogorov湍流理论的大气短曝光理论波前结构函数进行最小二乘拟合,得到瞬时大气相干长度。利用湍流相位板构造了相应的测试系统,并进行了外场实测对比。结果表明:提出的基于波前结构函数法的测量结果与差分像运动监测法的测量结果基本吻合;不同格林伍德频率下,标准差与均值之比小于4.1%,稳定性较好;外场比对累计16个夜晚,得到的平均偏差小于0.45cm。该方法可以实现空间目标大气相干长度的单帧瞬时测量,并可用于观测站点的视宁度、自适应光学系统内部大气湍流强度和地基大口径望远镜主镜视宁度的监测。     

基于波前编码的光数混合景深延拓技术的研究

波前编码技术通过在光学系统的出瞳面加入一个非球面透镜,使光学系统的焦深增加一个数量级,并能够校正由各种原因的离焦引起的像差。介绍了波前编码技术的工作原理及其应用,并给出了采用三次相位掩模板时系统的成像结果。实验结果表明,波前编码技术将光学设计和数字图像处理相结合并进行整体优化,大大提高了光学系统的成像性能,在各类光学系统中具有非常广阔的应用前景。     

无限共轭距物镜的数值孔径全自动测量方法与系统

提出了一种针对无限共轭距显微物镜的数值孔径测量方法,采用载玻片与空气界面处的全反射效应以及其在物镜的后焦面产生的全反射圆作为数值孔径参考基准,根据阿贝正弦定理推导出物镜的数值孔径。完成了基于该原理的实验测试系统的研发,包括光学系统、控制系统和完整的后焦面算法流程。其中的图像处理算法采用了二维傅立叶相关分析和灰度统计。对若干实际的油浸物镜的数值孔径进行了测量,结果表明本方法相对误差低于1%,远低于本文对比的其它方法。本方法对应的实验测量装置简单,可快速、全自动化地对实际的油浸物镜的数值孔径进行测量,且测量结果具有高精度和高重复性的优势,能直接用于无限共轭距油浸物镜的数值孔径测量,解决当前制约我国高端镜头检测方面的困难,具有很好的应用前景。     

大口径拼接式合成孔径光学系统设计

在三反消像散系统基础上,介绍了一种大视场长焦子孔径合成光学成像系统的设计方法。在对子出瞳波前利用菲涅尔衍射直接积分叠加的基础上进行像质评估,以实现对拼接镜面的全面仿真和分析;用非序列面误差分析和分配的结果修改初始结构;通过高次曲面平衡象差,并在结构优化时使用较小F数的系统,增加结构对子镜的失调的误差冗余度,迭代完成系统的最终设计。设计了一个同轴三反子孔径合成光学成像系统,焦距44m,f/8,7子镜拼接,视场角达0.6°×0.06°,通过不断迭代,获得了较好的结构和成像质量。     

Adaptive correction of depth-induced aberrations in multiphoton scanning microscopy using a deformable mirror

We demonstrate adaptive aberration correction for depth‐induced spherical aberration in a multiphoton scanning microscope with a micromachined deformable mirror. Correction was made using a genetic learning algorithm with two‐photon fluorescence intensity feedback to determine the desired shape for an adaptive mirror. For a 40×/0.6 NA long working distance objective, the axial scanning range was increased from 150 mm to 600 mm.     

Exploration of the optimisation algorithms used in the implementation of adaptive optics in confocal and multiphoton microscopy

We report on the introduction of active optical elements into confocal and multiphoton microscopes in order to reduce the sample-induced aberration. Using a flexible membrane mirror as the active element, the beam entering the rear of the microscope objective is altered to produce the smallest point spread function once it is brought to a focus inside the sample. The conventional approach to adaptive optics, commonly used in astronomy, is to utilise a wavefront sensor to determine the required mirror shape. We have developed a technique that uses optimisation algorithms to improve the returned signal without the use of a wavefront sensor. We have investigated a number of possible optimisation methods, covering hill climbing, genetic algorithms, and more random search methods. The system has demonstrated a significant enhancement in the axial resolution of a confocal microscope when imaging at depth within a sample. We discuss the trade-offs of the various approaches adopted, comparing speed with resolution enhancement.     

人眼像差仪中瞳孔自动跟踪的实现

瞳孔自动跟踪技术是通过对像差仪采集到的人眼图像进行图像处理,对准分子激光人眼屈光手术中患者眼球进行准确定位,消除患者眼球转动对手术造成的影响。该技术已用于人眼像差仪中,并取得了良好的效果。     

The theory of scanning microscopes with Gaussian pupil functions

The theory of imaging in scanning microscopes with lenses, source and detector all having Gaussian pupil function is developed. This assumption is useful as the expressions may be evaluated analytically. It is shown that Type 2 microscopes exhibit superior performance to those of Type 1. Effects of defocus are considered. It is found that defocus can be used in a Type 2 microscope to observe phase information without the limitation in resolution associated with stopping down the collector of a conventional microscope. It is also found that a Type 2 microscope discriminates against light scattered by parts of the object outside of the focal plane, allowing observation of detail within a thick object.