双重膜厚监控在中远红外光学镀膜工艺中的应用

为提高中远红外增透膜镀膜工艺中膜厚监控的精度,对石英晶振监控和光学极值法监控进行了对比研究,分析了两者的优缺点。通过对两种监控方法的结合,在镀膜工艺中应用一种新的薄膜厚度监控方法——双重监控法。该方法适合于监控中长波段红外光学薄膜的沉积,提高了膜厚监控的精度。     

基于离子束溅射Ta2O5薄膜的紫外吸收膜技术

为获得高性能紫外激光薄膜元件,急需研制紫外高反射吸收薄膜,实现吸收损耗的精确测量。本文采用离子束溅射技术,通过调控氧气流量实现了具有不同吸收的Ta_2O_5薄膜的制备。以Ta_2O_5薄膜作为高折射率材料,设计了355nm的紫外高反射吸收薄膜。采用离子束溅射沉积技术,在熔融石英基底上制备了355nm的吸收薄膜,对于A=5%的紫外吸收光谱,在355nm的透射率、反射率和吸收率分别为0.1%,95.0%和4.9%;对于A=12%的紫外吸收光谱,在355nm的透射率、反射率和吸收率分别为0.1%,87.4%和12.5%。实验结果表明,采用离子束溅射沉积技术,可以实现不同吸收率的355nm高反射吸收薄膜的制备,对于基于光热偏转测量技术的紫外光学薄膜弱吸收测量仪的定标具有重要的意义。     

光学薄膜元件在舞台灯光中的应用

舞台灯光灯具采用传统光学系统,光学系统主要实现灯光的视觉效果如光强、颜色及其他一些特殊效果。而光学系统中的各种光学元件都需要光学镀膜。现主要介绍舞台灯光中常用的光学薄膜元件类型、设计膜系和光谱曲线,探讨光学镀膜材料和工艺,以及光学薄膜元件的应用场合。     

单晶硅激光辅助超精密切削工艺优化与表面特性

为了获得优化的单晶硅激光辅助超精密切削工艺,探究切削加工后单晶硅元件的表面特性,采用正交实验方法对单晶硅的激光原位辅助单点金刚石切削工艺参数进行优化,并对切削加工单晶硅表面质量、面形精度、残余应力和光学透过率等表面特性进行了测量与分析。通过正交实验数据的表面粗糙度方差分析和信噪比分析,获得的优化工艺参数组合为主轴转速为1 500 r/min、进给速率为5 mm/min、切削深度为3 μm、激光功率为4.5 W。采用上述工艺参数加工的165 mm口径单晶硅非球面光学元件的表面粗糙度和面形精度PV分别为2.74 nm和0.52 μm。激光辅助切削加工后的单晶硅表面存在(-1 760.8±362.1) MPa的残余压应力。激光辅助超精密切削加工的单晶硅光学元件在3～5 μm中红外波段镀膜前后的透过率分别为55%和98%,折射率为3.43。实验结果表明,激光辅助超精密切削技术可作为单晶硅光学元件的半精加工或最终精加工工序,以提升复杂面形单晶硅元件的制造效率。     

Mo/Si多层膜残余应力的研究

在极紫外光刻技术中,光学系统对多层膜光学元件表面面形精度有严格的要求,并且多层膜光学元件需要较高的反射率.由于多层膜中存在的内应力将改变光学元件的表面面形,因此在不减少反射率的前提下,一定要减少或补偿多层膜内的残余应力.论述了Mo/Si多层膜应力产生的原因和几种减少与补偿应力的技术,介绍应力的几种测量方法.     

消应力消偏振胶合棱镜二向色膜的设计与制备

根据薄膜的偏振效应,运用Essential Macleod光学薄膜设计软件,完成DVD棱镜中消偏振二向色膜的设计,并采用光控法精确控制膜层厚度,制备出了满足客户要求的消偏振分光棱镜。残余应力大的薄膜容易产生脱膜现象,使得薄膜失去所需功能。为了消除薄膜应力,从膜料之间应力匹配关系及制备工艺2个方面,提出了控制薄膜应力的设计思想,并对其影响进行了讨论,利用镀膜前后光圈变化来反映膜层应力的大小。制备过程中,通过设计制作可调工装来改变镀膜有效孔径,通过调节标准块来满足非常严格的镀膜有效孔径要求。本文给出了该棱镜的消偏振膜系的设计和试验结果。     

真空紫外辐照对Lumogen薄膜损伤及光学性能的影响

为研究Lumogen(C₂₂H₁₆N₂O₆)薄膜在真空紫外波段的光致发光特性及辐照损伤,采用热阻蒸发法,以氟化镁为基底制备Lumogen薄膜。使用真空紫外荧光光谱仪、原子力显微镜(AFM)、扫描电子显微镜(SEM)、紫外?可见分光光度计等仪器分别对薄膜的光致发光特性、荧光强度衰减变化、表面形貌、透过率等进行测试与表征。实验结果表明,真空紫外波段的最佳激发波长为160 nm;发射峰宽为500~620 nm,峰值位置是在528 nm处;在160 nm激发波长持续辐照20 h后,发射峰位置的荧光强度由快及慢地从8.76衰减为0.83,整体下降了90.5%;薄膜表面的均方根粗糙度从10.96 nm增加到14.96 nm;160 nm真空紫外光的高光子能量使Lumogen分子中的荧光助色团-OH断裂,薄膜表面受损,造成不可逆的破坏;被真空紫外光持续辐照后的Lumogen薄膜在250~450 nm波段内的透过率下降了约50%。研究结果表明,Lumogen薄膜在持续高能真空紫外光辐照下,薄膜表面会造成损伤,光学性能会下降,为其在紫外探测器件及航空航天领域的应用研究提供一定参考。     

高性能偏振膜的研制

综述了国内外科研人员在高性能偏振膜的研制方面开展的工作,主要涉及偏振膜光谱性能、抗激光损伤阈值和膜层应力控制等方面的研究。针对我国神光系列装置对偏振膜的性能要求,简述了中国科学院上海光学精密机械研究所采用电子束沉积技术在光谱性能、损伤阈值和面形精度三个方面开展的研究工作。给出了在薄膜设计、制备和后处理等方面进行的研究和取得的进展。结合上述研究成果,得到了低缺陷密度、低应力的高性能偏振膜。由本科研团队研制的布儒斯特角薄膜偏振器在在2012年和2013年SPIE激光损伤国际会议(SPIE Laser Damage)组织的全球性偏振膜激光损伤阈值水平竞赛中连续取得了p分量损伤阈值和平均损伤阈值最佳的结果。另外,通过解决应力诱导膜层龟裂的重大技术问题,在国内首先推出了大口径偏振片,该大口径偏振片满足透射率TP98%,反射率RS99%的光谱性能要求和17J/cm2(9ns)的通量运行要求,有力支撑了我国SGII-UP大型激光装置的稳定运行。     

聚变反应速率测量光学系统设计

基于塑料闪烁体和条纹相机设计了聚变反应速率测量系统,论述了测量光学系统的工作原理和设计方法。通过设置防辐射石英玻璃窗,防止了光学元件受强X射线辐射而变暗;采用晶体等紫外透过率高的光学材料,满足了光学系统对透过率的要求;光学系统像面与条纹相机的阴极面直接对接,解决了条纹相机孔径不匹配的问题;最后在一次像面设置场镜,大幅缩小了光学元件的口径。设计的光学系统总长为2 660mm,放大倍率为1/3,像方F/#数达到0.667,系统透过率达到67%,时间弥散小于7.3ps。这些结果能够适应不同中子产额的实验需求,在激光打靶实验中取得了较好的实验效果。     

膜厚控制仪

一、序言在现代科学技术蓬勃发展的形势下,要求光学镀膜工艺能够精确地控制真空蒸发金属或非金属薄膜的厚度,以满足广泛应用的各种光学系统的需要。目前国内外镀膜工作中控制光学镀膜厚度     

Weak absorption test and defect analysis of optical coatings

1Introduction Inmodernoptics,especiallylasertechnolo gy,absorptionisoneofthemostimportant characterswhichmustbeconsidered,notonly foropticalproperties,butalsoforlaser induced damagethreshold(LIDT).Forexample,ab sorptiondefecthasplayedagreatroleinfluen cinglaserinduceddamagebehaviorsofthedie lectricopticalcoatings.Inmanyapplications,veryweakabsorption,1×10-6orless,should bemeasuredandcontrolled.However,thesensitivityofthebestregular spectrometerisonlylowto0.1%.Solutionshad beenfoundtoresolve…     

溅射法制备多层膜沉积速率的标定

为消除溅射沉积多层膜过程中产生的膜厚随机误差,实现多层膜膜厚的精确控制,提出了一种精确标定薄膜沉积速率的方法。该方法通过对多次实验结果进行最小二乘拟合得到薄膜沉积速率。对随机误差基本特性的分析表明,随着实验次数的增加,沉积速率将逐渐逼近真值。基于这一原理,可以对薄膜的沉积速率进行精确标定,同时提取出膜厚随机误差,进而确定镀膜机的膜厚控制精度,获得精确控制多层膜膜厚所需要的完整信息。选用两种精度不同的沉积设备,采用提出的方法对所制备的多层膜进行了测试。结果表明,多层膜的膜厚控制精度随沉积设备而异:其中低成本的普通镀膜机只能实现0.1 nm的膜厚控制精度;而另一台性能较高的镀膜机的膜厚控制精度优于0.01 nm。     

Optical coating and nano-structuring on plastics

1Introduction Injectionmouldedorhot embossedpolymer opticswillreplaceglassopticsaslongasim provedpropertiesorlowercostscanbeachieved withtheplasticparts.Highlytransparentther moplasticpolymersoffersignificantweightre duction,costsavingandmanufacturingadvanta gesforopticalcomponents.Coatingsplayanim portantroleinthisdevelopment.Opticalinter ferencecoatingsarerequiredtoprovideaspecific opticalfunctionwithinadesiredspectralrange.Themostcommonapplicationsareantireflection(AR)coatingstoincreaseth…     

光学直接监控技术在镀膜中的应用

展示真实的工艺结论,介绍在基片本身或监控片上进行光学直接监控的方法应用于大面积(最大基片盘直径1400 mm)镀膜的成功经验。直接监控技术可以最快速的再现高难度的设计要求,保证大面积,高精度镀膜设备上的高成品率。文中列举的各类多层膜的实验结果清楚地证明了这种强大的监控手段的应用潜力。可使用直接监控方式镀膜的膜系包括截至滤光片,偏振膜,分光膜以及多腔带通滤光片。所有这些膜系都是在PIAD(等离子辅助沉积)和PARMS(等离子体辅助反应磁控溅射)的方式下完成的。实验的重复性和均匀性体现了直接监控的优势。在塑料基底上应用等离子体辅助工艺的关键在于调整离子源或等离子源本身。他们改变热度和等离子轰击的能力通常是工艺的关键因素,从而使工艺更适合于象塑料这样对温度和等离子轰击敏感的基材。     

The compatibility of TiB2 protective coatings with SiC fibre and Ti-6Al-4V

TiB₂ coatings have been studied as prospective protective layers to inhibit the interfacial reaction between SiC fibres and Ti-alloy matrices. This protective coating has been deposited onto SiC monofilament fibres using a chemical vapour deposition (CVD) technique. The fibre-matrix compatibility of these TiB₂-coated SiC fibres in Ti-6Al-4V composites was evaluated by incorporating the coated fibres into Ti-6Al-4V using a diffusion bonding technique. The interfaces of this composite were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and electron probe microanalysis, to evaluate the interfacial microstructures, chemical stability and the efficiency of TiB₂ as a protective coating for SiC fibres in Ti-alloy matrices, and to study the effects of deposition temperature on the interface of the coated fibre. Results show that stoichiometric TiB₂ coatings are stable chemically to both SiC fibres and Ti-6Al-4V and hinder the deleterious fibre-matrix reactions effectively. Boron-rich TiB₂ coatings should be avoided, as they lead to the formation of a needle-like TiB phase at the fibre–matrix interface. These findings provide promising evidence for the value of further exploration of the use of stoichiometric TiB₂ as a protective coating for SiC fibre in Ti-based composites.     

Surface fatigue behaviour mapping of PVD coatings for mechanical purposes

Most mechanical components used for transmission of movement are subjected to repeated impacts or cyclic stress. If these elements are well designed and the materials well chosen, their durability is linked to surface fatigue mechanisms. In order to improve the fatigue behaviour of these parts, hard coatings, such as physical vapour deposition (PVD) or plasma‐assisted chemical vapour deposition (PACVD) coatings, can be appropriate. Unfortunately, such hard coatings cannot be used for elements whose replacement is more difficult than, say, cutting tools. An understanding of failure mechanisms should make it possible to optimise the fatigue behaviour of hard coatings. In order to study the surface fatigue behaviour of thin, hard PVD coatings, a special apparatus has been developed to carry out repeated impacts over a broad range of speeds. The possibility of mapping the fatigue behaviour of different coatings is illustrated through the examples of TiN and TiN/CrN multilayer coatings of different thicknesses deposited on several substrates.     

Friction and wear response of nitride coating deposited through PVD magnetron sputtering

Surface engineering with applied coating plays a vital role in any industrial application. These coatings are meant for better mechanical and tribological characteristics when applied on to the materials. The major challenge in selecting a suitable coating strategy is their input process parameters. There are several parameters which influences the coating properties, but it is hard to choose one of them and ignoring others. Multilayers of tungsten nitride are attracting great interest to modulate their tribological and mechanical properties through physical vapour deposition process due to their wide application range. These multilayer nitride films were deposited through unbalanced reactive magnetron sputtering technique. The tribological tests were performed on a pin-on-disc tribometer at room temperature and it has been observed that friction and wear values reduce drastically while applying multilayer coatings. Later, artificial neural network (ANN) is employed to optimize the tribological properties of sputtered coatings.     

Tribological Dependence of the High-Performance Ferrous-Based Coating on Different Coating Counterparts in Engine Oil

A ferrous-based coating with significant chromium was fabricated on aluminum alloy substrate using a plasma spray technique. The tribological performance of the as-fabricated ferrous-based coating sliding against different coatings including Cr, CrN, TiN, and diamond-like carbon (DLC) in an engine oil environment were comparatively studied. Results showed that the high hardness of the sprayed ferrous-based coating was achieved due to the dispersion strengthening effect of Cr₇C₃ phase embedded in the austenite matrix. The ferrous-based coating exhibited low friction coefficients when coupled with these four coating counterparts, which could be attributed to the boundary lubricating effect of engine oil. However, both friction and wear of the ferrous-based coating were different when sliding against these different coating counterparts, which might be closely related to the surface roughness, self-lubricating effect, and mechanical properties of the coupled coatings. Ferrous-based coating sliding against CrN and DLC coatings exhibited good tribological performance in engine oil. The best coating counterpart for the ferrous-based coating in an engine was DLC coating.     

Improvements in the thread cutting torque for a 6082-T6 aluminum-based alloy with tapping tools utilizing diamond coating

The use of thin film diamond as a hard tool coating offers a significant wear protection in numerous machining operations and increases considerably tool's lifetime. The extreme hardness of the diamond is especially needed in machining highly abrasive materials such as aluminum-silicon alloys. Tapping is widely used for thread fabrication and it is often a time consuming process causing a delay on an automated production line. This study investigated diamond coatings in thread cutting and the aim was to gain knowledge about the performance of diamond-coated taps. PVD diamond coatings were deposited using ultra short pulsed laser deposition (USPLD) techniques. Another type of nanodiamond coating was a chrome-nanodiamond (CND) coating deposited by a two-phase electrochemical process to produce a metal matrix with embedded detonation nanodiamond (DND) particles. The main points were the analysis of tool torques of the thread machining data, sticking of aluminum alloy and wear behavior and mechanism of tested tapping tools. The tested tools were analyzed by Scanning Electron Microscopy (SEM) regarding tool wear and sticking of aluminum on tool surface caused by mechanical interaction. Coating approaches turned out to provide 13–30% improvements in cutting and 37–51% improvements in reversing for overall mean torques compared to uncoated reference tools.     

新型减反膜的设计与制备

根据近年来实际应用中对减反膜的新的需求和指标要求,利用光学薄膜设计软件进行模拟和理论分析,采用常规的薄膜工艺和设备进行大量实验,设计并制备出三种新型的减反膜:含金属膜的减反膜(包括窄带金属减反膜,宽带金属减反膜,减反防静电抗电磁辐射膜),超低反射率减反膜和大角度减反膜,满足了实际器件的应用要求。