微细电火花加工技术的研究进展

研究和综述了微细电火花加工技术的研究现状和发展趋势。比较分析了常用微细加工与微细电火花加工方法的特点及应用，论述了线电极电火花磨削技术的原理及在微细加工中的作用。结合电火花加工过程中无宏观作用力的特点，论述了微细电火花加工装置微小型化的可行性和几种主要形式。     

微细电火花加工及其关键技术

综述了微细电火花加工的基本原理及最新研究进展。比较了LIGA技术与微细电火花加工的特点与应用。简要分析了微细电火花加工的关键技术：微细电极的在线制作、微进给装置、微小能量的脉冲电源、微小电极的运动轨迹规划、电极的损耗及补偿策略。展望了微细电火花加工在微三维结构加工中的应用前景。     

一种三轴联动微细电火花加工装置的研制

1.微细电火花的加工原理及特点 微细电火花加工的原理与普通电火花加工并无本质区别。其加工的表面质量主要取决于电蚀凹坑的大小和深度,即单个放电脉冲的能量;而其加工精度则与放电间隙、工艺系统稳定性、电极损耗等     

微细电火花加工技术

本文介绍了微细电火花加工技术的研究开发现状,讨论了传统的电火花加工、线放电磨削加工等微细加工的方法及其应用。     

微制造系统中的微细电火花加工技术

文章系统地研究和综述了微细电火花加工技术的研究现状和发展趋势，论述了微细电火花加工技术在微三维结构制作及微制造系统中的应用。     

微细电火花加工中电极材料的蚀除机理研究

在微细电火花加工过程中 ,由于放电时间极短 ,使得其阴阳两极的电极材料蚀除过程产生较大的差异。本文应用传热学和电场的基本理论 ,分别对微细电火花加工阴阳两极的材料蚀除机理进行了理论研究 ,得出了在窄脉宽微细电火花加工中 ,尽量缩短脉宽可提高阳极材料的去除效率 ,同时又不会明显增加阴极材料损耗的结论。为微细电火花加工脉冲电源设计及加工工艺的改进提供了理论依据     

新型微能可控的MWEDM脉冲电源

分析了以往的微细电火花线切割加工(MWEDM)脉冲电源的不足。在现代电力电子技术基础上，开发出新型微能可控的微细电火花线切割加工脉冲电源。试验表明，这种高质量的脉冲电源为改善微细电火花线切割加工整体性能、拓展加工领域提供了技术保证。     

功能梯度材料微细电火花电极损耗机理研究

论述了功能梯度材料Ni-TiN/Cu微细电火花电极的制备方法,并用实验的方法研究功能梯度材料层在电火花微细加工对电极损耗的影响。Ni-TiN/Cu微细电火花电极通过在圆柱铜电极外侧电沉积功能梯度材料层来制备,纳米颗粒TiN做为增强相。通过使用SEM分析功能梯度材料层的显微组织,使用光学显微镜测量电极加工孔质量与电极损耗情况,对比功能梯度材料电极与均质电极的电火花加工性能。在微细电火花加工中,功能梯度材料层可以有效的抑制高频脉冲条件下电极的损耗效应,改善电流密度分布,从根本上解决因尖端放电引起的电极形状变化问题,实现端面等损耗,保证了微细电火花加工电极的形状精度。实验结果验证了功能梯度材料作为工具电极在微细电火花加工应用的前景。     

三维微细电火花加工伺服控制系统设计及实验研究

针对微细电火花加工伺服控制系统的要求,进行了微细电火花加工伺服控制系统总体设计.伺服控制系统特点是执行机构采用步进电机+压电陶瓷的宏微细合式驱动机构,实现了大行程和小步距的有机结合,能够提高电火花加工机床的加工性能.同时Z轴增加一个振动源,实现自动排屑和微调加工间隙.通过实验验证,证明系统运行良好,运动平台能够达到较高的精度,并实现了简单的极微细电火花加工.     

基于热学仿真的微细电火花加工表面形貌预测

根据热传导基本理论和微细电火花加工的实际情况,建立起微细电火花加工的热传播模型.采用ANSYS分析软件,基于有限元方法对P+硅和45钢两种材料单脉冲放电情况的温度场进行了数值模拟,分析了微细电火花铣削加工中表面粗糙度与放电能量之间的关系.结果表明,微细电火花仿真能够很好地模拟放电凹坑的温度场分布,进而预测加工表面形貌.     

Review of size effects in micro electrical discharge machining

Electrical discharge machining (EDM) is one of the most promising non-traditional micro-scale machining methods. Because several operating parameters that are insignificant in macro EDM cannot be neglected during micro EDM process, models derived from the macro EDM process may be inappropriate at the micro scale. This paper contains a comprehensive review of size effects in traditional micro-machining and characteristics specific to micro EDM compared to macro EDM techniques. The very concept of size effects in micro EDM is thoroughly defined and three categories of effects are presented: material microstructure, processing parameter and thermal conduction size effects. Future potential research directions on the subject are also summarized. We assert that careful research and precise attention must be given to size effects in micro EDM. Size effect information especially benefits the machining speed and machining precision of micro EDM.     

Study of the Batch Production of Micro Parts Using the EDM Process

The micro machining of copper plates by the electrical discharge machining (EDM) process is described. Tungsten carbide was selected as the material for the electrode. Experiments were carried out on a conventional CNC-EDM machine to investigate machining of micro holes, and micro slots. The results show that micro holes, and micro slots can be successfully processed on a conventional CNC-EDM machine. To improve the productivity of micro parts using the EDM process, a batch production method of micro EDM using multi-electrodes has been studied. A new technique for preparing multi-electrodes has been developed. Results also show that the batch production of micro parts using EDM is feasible and that the batch production of micro parts using EDM process with multi-electrodes is very effective.     

An investigation of tube and rod electrode wear in micro EDM drilling

This paper studies the influence of various factors contributing to micro electrode wear during electrical discharge machining (EDM) drilling with micro rod and micro tube electrodes. In this paper, a simple method for calculating volumetric wear ratios is proposed based only on geometrical information obtained from the process. The objective of the research is to investigate the wear behaviour of electrodes and the suitability of electrode wear compensation methods. Electrode shape deformation and random variation of the volumetric wear are studied as the main factors affecting the applicability of wear compensation methods and as an indicator of the accuracy achievable with the micro EDM process.     

喷油嘴微孔电火花加工机床机电控制系统设计

喷油嘴喷孔加工质量直接影响发动机的燃料喷射和燃烧性能。喷油嘴喷孔机械钻削加工已难以适应高压力、微细喷孔喷油嘴发展的需要。微细电火花加工喷油嘴喷孔具有无宏观加工力、无毛刺、可加工微细喷孔以及可在热处理后加工等优点。文章结合自主设计研发的喷油嘴微细孔电火花加工机床,设计了机床的机电伺服控制系统,并进行了控制系统性能优化,进行了喷油嘴微细喷孔的电火花加工实验和工业应用,较好地满足了喷油嘴微细喷孔加工的工业需求。     

微细电火花加工设备技术研究

微细电火花加工的关键设备技术涉及电极的微进给伺服机构、电极和工件的附加树对运动机构、微小能量放电电源以及加工状态检测与控制系统等。文章围绕微细电火花加工系统的设计系统，介绍基于压电致动原理以及摩擦传动的微进给机构、工具电极的线放电磨削机构和旋转主轴、以及微小能量放电电源的设计等，并指出需要进一步研究的课题。     

Scale effects and a method for similarity evaluation in micro electrical discharge machining

Electrical discharge machining(EDM) is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at the micro-scale, which can make it difficult to predict and optimize the machining performances of micro EDM. A new concept of “scale effects” in micro EDM is proposed, the scale effects can reveal the difference in machining performances between micro EDM and conventional macro EDM. Similarity theory is presented to evaluate the scale effects in micro EDM. Single factor experiments are conducted and the experimental results are analyzed by discussing the similarity difference and similarity precision. The results show that the output results of scale effects in micro EDM do not change linearly with discharge parameters. The values of similarity precision of machining time significantly increase when scaling-down the capacitance or open-circuit voltage. It is indicated that the lower the scale of the discharge parameter, the greater the deviation of non-geometrical similarity degree over geometrical similarity degree, which means that the micro EDM system with lower discharge energy experiences more scale effects. The largest similarity difference is 5.34 while the largest similarity precision can be as high as 114.03. It is suggested that the similarity precision is more effective in reflecting the scale effects and their fluctuation than similarity difference. Consequently, similarity theory is suitable for evaluating the scale effects in micro EDM. This proposed research offers engineering values for optimizing the machining parameters and improving the machining performances of micro EDM.     

RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES

Micro electro discharge machining (micro EDM) is a feasible way to manufacture micro structures and has potential application in advanced industrial fields. For the realization of micro EDM, it is necessary to pay careful attention to its equipment design and the development of process techniques. The present status of research and development of micro EDM equipment and process techniques is overviewed. A micro electro discharge machine incorporated with an inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine for drilling micro holes suitable to industrial use is also introduced. Some of the machining experiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDM technology to practical use is discussed.     

钛合金深小孔超声电火花加工工艺与实验研究

针对钛合金深小孔加工的技术难点,研制了具有四轴联动功能的微细超声电火花加工机床,在所研制的机床上,进行了钛合金深小孔超声电火花复合加工实验,就超声振动及削边电极在加工中的作用进行了系统和研究。     

Realization of micro EDM drilling with high machining speed and accuracy by using mist deionized water jet

In electrical discharge machining, both the gas and liquid dielectric have unique advantages and inevitable disadvantages. The mist medium with a special property between gas with liquid is expected to have a better performance in EDM. In this paper, the performance of mist deionized water jet has been studied based on the disadvantages of deionized water in deep micro hole drilling: electrolysis action, electrophoresis action and gap-contamination by debris. Based on the analyzation on the advantages of mist jet, three projects of experiments have been done to verify its performance on the suppressing of electrolysis action and improving the debris exhaust. The results show that the micro EDM drilling with high machining speed and accuracy can be realized with mist jet. This method is particularly effective in deep micro hole drilling, since deeper holes can be obtained at faster machining speed with mist jet due to its significant improvement in debris exhaust.