微型机电系统与微细加工技术

本文介绍了一个新兴的机械电子研究和应用领域－微型机电系统的产生、发展和应用前景，这种机电系统有着传统机电系统不能比拟的特点和优势，例如经济、制造快速等。本文列举了几个常见的微型机电系统和它们的应用举例。与微型机电系统密切相关的微细加工技术在本文中有详细的介绍，以硅加工和LIGA技术为例，本文比较了微细加工技术之间的特点和各自的应用范围，最后说明微型机电系统有广阔的发展前途。     

微细机械加工技术

随着微型机械的应用领域进一步拓展,微细机械制造加工技术得到了快速发展.在介绍了微细切削加工、微细电火花加工、微细蚀刻以及微细电解加工的基础上,对其加工特点和性能进行了比较,讨论了微细机械加工发展的方向与关键问题.     

基于快速成型的微细加工技术

一、引言 微细加工(micro-fabrication)技术主要研究对微小机械(micro-machine)的加工,其加工精度一般是10μm以下。微小机械产品由于具有尺寸小、精度高、能耗低、灵敏性和工作效率高等特点而在精密仪器、生物医学等领域有着广阔的应用潜力。研究微小机械及微细加工的目的不仅在于缩小机械产品的尺寸和体积,还在于通过微型化、集成化来探索和开发新原理、新功能的元件和系统,开辟一个新技术领域。快速成型技术是80年代后期出现的全新制造技术,具有可以迅速成型产品、产品加工不受形状和复杂程度的限制以及无需专用工具等特点。将快速成型技术应用于微小机械加工领域是近年来国际上兴起的一门新技术,由于它独有的一些特点,目前已受到国际学术界的广泛重视。     

微型弯曲模制造

随着微机电系统技术的发展对微型制件需求的不断增长,以传统的微细加工方法成形微小制件难以满足微系统的应用要求,而用微型模具成形微小制件,具有生产效率高、制件质量稳定等优点,成为微成形加工领域的重要工艺发展方向。研究对实验所用的微型弯曲模进行了总体结构设计,得到了模具的装配图和零件图。在分析微细加工方法的技术特点的基础上采用微机械加工法加工模具,并在万能试验机上进行试验,试验表明,所冲制的弯曲件符合要求。     

微细切削加工技术（上）

随着民用和尖端国防等领域对微小型产品需求的不断增加,对微小零件的加工精度、结构复杂程度、材料特性等要求越来越高。微细加工技术可以满足微余量、三维微形状和材料多样性的加工需求,是达到极限尺寸加工精度的手段。现已发展成为克服MEMS（微机械或微机电系统）技术局限性的重要使能技术之一。     

微细电火花加工系统及其工艺技术

开发了一套微细电火花加工系统,该系统不仅能加工微细轴、微细孔,还能实现微三维结构的微细电火花加工。研究了针对该系统的微细电火花加工工艺技术,研究了放电电压、放电电容等工艺参数,主轴转速,以及工作液介质对微细电火花加工效率、相对电极损耗率的影响规律。采用旋转削边电极技术大大提高了进行大深径比微细孔加工时的加工效率。进行了大量的加工实验,加工出了最小直径为6μm的微细轴以及最小直径为10μm的微细孔;通过对电极损耗的在线补偿策略研究,实现了微三维结构的加工,加工出了外径为4mm、具有24个叶片的微型涡轮盘及具有微三维结构的微细梁,充分证实了该系统的广泛适用性。     

基于LIGA技术的微细电火花加工

随着众多消费产品向“轻、薄、短、小”方向的发展,微细加工技术日益成为新产品研发中的最重要组成之一,基于微细加工技术的微型机电系统(MEMS)已经成为众多研究机构和企业竞相投资的热门领域之一,其产品遍布工业、农业、医疗、     

微细光成形和LIGA工艺集成的可行性分析

微机电系统的发展，对微细加工技术提出了更高的要求。目前常用的微细制造技术本质是基于掩模光刻的二维半微加工技术，难以进行真三维结构的制造。对单光子和双光子微细光成形技术的成形原理、加工分辨能力进行分析和实验研究，将其与微细电铸等工艺集成，提出一种能实现真三维制造的、具有不同应用材料的微细加工新方法，并从原理上验证了两者集成的可行性，为后续研究奠定了基础。微细光成形与微细电铸集成工艺技术为进一步拓展微细制造技术提供了新途径。     

微细切削加工技术研究进展

微细加工技术是精密加工技术的一个分支,是加工微小尺寸零件的多种技术方法的总称。是各种传统精密加工方法的延伸和半导体加工技术的进一步创新发展而来的一系列加工技术．．微型机械与电子技术紧密结合,使种类繁多的微型器件相继问世,广泛地应用于人类生活的众多领域,．对工农业、信息、环境、生物医学、空间、国防等领域的发展将产生重大影响,微细加工技术的发展有着巨大的产业化应用前景……     

《精密加工技术实用手册》王先逵 主编／2001

精密加工和超精密加工技术是先进制造技术的基础和关键，是一个国家制造工业水平的重要标志之一。本书分4篇共14章，内容包括总论、精密加工常用材料、超精密车削、精密和超精密磨削、光整加工、超精密加工机床、精密特种加工及微细加工、微型机械与微型机电系统、精密测量及微尺寸测量技术、微位移技术、误差的在线检测与补偿技术、精密和超精密加工的支持环境及精密基础件加工等。     

微细加工与装备技术进展

讨论微细加工与装备技术现状,介绍刻蚀技术、LIGA技术和准LIGA技术、微细特种加工等典型的微细加工工艺原理与技术特点,并指出各种加工方法的优缺点,分析微细加工技术的发展走向及装备技术的发展趋势。     

A review on 3D micro-additive manufacturing technologies

New microproducts need the utilization of a diversity of materials and have complicated three-dimensional (3D) microstructures with high aspect ratios. To date, many micromanufacturing processes have been developed but specific class of such processes are applicable for fabrication of functional and true 3D microcomponents/assemblies. The aptitude to process a broad range of materials and the ability to fabricate functional and geometrically complicated 3D microstructures provides the additive manufacturing (AM) processes some profits over traditional methods, such as lithography-based or micromachining approaches investigated widely in the past. In this paper, 3D micro-AM processes have been classified into three main groups, including scalable micro-AM systems, 3D direct writing, and hybrid processes, and the key processes have been reviewed comprehensively. Principle and recent progress of each 3D micro-AM process has been described, and the advantages and disadvantages of each process have been presented.     

Review of size effects in micro electrical discharge machining

Electrical discharge machining (EDM) is one of the most promising non-traditional micro-scale machining methods. Because several operating parameters that are insignificant in macro EDM cannot be neglected during micro EDM process, models derived from the macro EDM process may be inappropriate at the micro scale. This paper contains a comprehensive review of size effects in traditional micro-machining and characteristics specific to micro EDM compared to macro EDM techniques. The very concept of size effects in micro EDM is thoroughly defined and three categories of effects are presented: material microstructure, processing parameter and thermal conduction size effects. Future potential research directions on the subject are also summarized. We assert that careful research and precise attention must be given to size effects in micro EDM. Size effect information especially benefits the machining speed and machining precision of micro EDM.     

Vibration assisted electrochemical micromachining of high aspect ratio micro features

The most used processes for generation of high aspect ratio microchannels are Nd: YAG laser technology on silica substrate and ultra violate lithography (UV-LIGA) process on metals. There are a few micromachining technologies such as micro mechanical milling, micro electro discharge machining (EDM) and electrochemical micromachining (EMM) for production of high-aspect-ratio micro features on highly stressed and anticorrosive metal like stainless steel. This paper discusses the micro fabrication of high aspect ratio micro features at the intended location on high strength stainless steel sheet of very small thickness to high thickness with highest average aspect ratio 14.33 achieved during microchannel generation by EMM with the help of coated microtool. Mathematical model relating aspect ratio with various parameters and machining conditions is derived to explore the ways to increase the aspect ratio of micro features. Experimental investigations were carried out to know the effect of vibration of microtool, frequency of pulsed voltage, microtool tip shape, thickness of work piece and non-conducting layer coated microtool on high aspect ratio micro features. Vibration of microtool with very small amplitude improved the stability of micromachining due to improved flow of electrolyte.     

基于机械—化学方法硅表面芳香烃重氮盐单层膜的制备

基于金刚石刀具建立能在溶液中加工微小结构的微加工系统,在一端为硝基的四氟化硼芳烃重氮盐溶液(NO2 C6H4N2BF4)中用该系统切削硅片,利用机械与化学结合的方法使得芳香烃分子和切削过的硅片之间以共价键连接,实现硅表面的“成形并功能化”的一步完成,为纳米尺度功能化结构的构筑提供一定的试验基础。用扫描电子显微镜(Scanning electronic microscopy,SEM)表征不同切削力下的微结构表面形貌图,为下一步在溶液中“成形并功能化”硅表面提供好的基底。用X射线光电子能谱(X-ray photoelectron spectroscopy,XPS )和原子力显微镜(Atomic force microscopy,AFM)分别研究组装时间和切削速度对切削处生成自组装单层膜(Self-assembly monolayer,SAMs)质量的影响,总结出本试验条件下切削力为20 mN,组装时间为12 h左右,切削速度为500 nm/s的时候组装膜表面质量较好。并用AFM对自组装膜的纳米摩擦性能进行检测,证明组装前后硅基底表面的化学组成发生了变化,组装后SAMs表面的摩擦力较大。     

Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

In this work, the influence of electrode surface patterning on shape evolution in through-mask electrochemical micromachining (EMM) process is investigated numerically and experimentally. With finite element method, the anodic dissolution process is predicted and the etching behavioral trends under various parameters involving spacing and opening ratio, mask aspect ratio, and the etched feature aspect ratio have been identified and interpreted in which the etched depth non-uniformity is mostly ascribed to the current aggregate effect due to surface patterning on substrate. The validation experiment is conducted and the procedure of island formation and disappearing gradually along with etching progress in the center of the etched region is observed, which is in good agreement with the numerical calculation prediction. With the combination of experiments and numerical simulation, the optimized electroetching conditions and the formulation of the electrolyte in through-mask EMM are achieved, with which the ordered microstructures with a feature size down to 15 μm and smooth etched surface in large scale are obtained.     

微纳制造技术文献计量分析

对微纳制造技术领域2000-2010年时间段的SCI和EI文献计量分析,结果显示,近年来该领域的研究呈现出增长趋势,美国在微纳制造领域的研究处于绝对领先的地位.SCI文献分析表明,纳米尺度的制造技术、微米尺度的制造技术、微机电系统、微流体、微加工等是近年来研究的热点领域;EI分析则显示,光刻技术、微加工、微机电器件、纳米结构材料、扫描电子显微镜等是研究的热点.     

Fabrication of 3D Metal Microstructures Using a Hybrid Process of Micro-EDM and Laser Assembly

A fabrication technique for 3D metal microstructures using hybrid process integrated micromachining and welding on a workstation is described in the paper. The system uses a micro-EDM (micro electro-discharge machining) process to fabricate microparts, and Nd-YAG laser welding to microassemble these microparts precisely. A diverse pattern of 3D metal microstructures or micromoulds can be attained via further machining procedures controlled by a CAD/CAM path after assembling. Since the product is completed in one integrated manufacturing process, some particular problems resulting from their small dimensions can be overcome, e.g. their high failure sensitivity, and the required micro-precision in the microassembly process. Using these procedures, diverse patterns, and high aspect ratios and high joint strength microstructures can be created precisely. To illustrate the microassembly strategies and procedures, a diverse pin–plate metal microstructure has been used and discussed in the study. It requires that the perpendicular tolerance between pin and plate, and the parallel tolerance between pins are good, and the twisting strength at the joint is strong. A diverse feature on the top of the pin was then further machined as a square, or hollow construction having an equiangular partition.     

聚合物基表面微结构的逐面式制造技术研究进展

聚合物基表面微结构在软体机器人、柔性电子器件、仿生机械、生物医学、组织工程等领域有着广泛的应用,将逐面式制造技术应用于聚合物基表面微结构的制造过程可解决传统微压印、光刻、逐点和逐线式制造方法加工周期长、效率低、大面积表面微结构制造脱模难等问题。发展聚合物基表面微结构的逐面式制造技术是当前先进制造技术的研究热点之一,具有广阔的应用前景。首先在阐述了常见的聚合物基表面微结构设计及其制造材料的基础上,重点论述了光刻、纳米压印、数字光投影式3D打印、能场辅助制造、自组装制造等五类逐面式成形制造技术方面的最新研究进展,包括各种制造技术的制造原理、工艺特点及表面微结构的典型应用等。最后,总结预测了聚合物基表面微结构设计、制造及应用方面的发展趋势,并对聚合物基表面微结构的逐面式成形制造技术的未来发展进行了展望。     

基于感应耦合等离子刻蚀技术的三维微拉伸梁制作工艺

根据感应耦合等离子(Inductively coupled plasma,ICP)刻蚀的机理,针对热氧化硅薄膜微拉伸梁的结构特点,研究ICP刻蚀制作3D微拉伸梁结构的工艺并解决其中的难点问题。介绍ICP刻蚀工艺参数对刻蚀质量的影响,包括存在的微负载效应和深宽比效应。详细介绍热氧化硅薄膜微拉伸梁的制作,其关键步骤是双掩膜两次ICP刻蚀形成阶梯状窗口结构,并在硅衬底表面形成释放了的热氧化硅薄膜梁。利用ICP刻蚀对单晶硅的高选择性,此制作工艺适用于各种薄膜的微拉伸梁制作。