多层膜界面粗糙度的低角X射线衍射研究

对磁控溅射方法制备的Ｗ／Ｓｉ周期多层膜在Ｘ射线衍时仪上进行了低角Ｘ射线衍射实验，并用动力学理论分析了膜层的周期结构和界面粗糙度，在对实验谱线的拟合过程中，考虑了界面的不对称性、周期的随机涨落及系统偏差等因素对衍射强度的影响，并讨论了各个参量对衍射强度影响的程度．     

Preparation of flee-standing diamond films for high frequency SAW devices

Free-standing diamond films were prepared by hot filament chemical vapor deposition （HFCVD） method under different conditions. Inter-digital transducers （IDTs） were formed on the nucleation sides of free-standing diamond films by photolithography technique. Then piezoelectric ZnO films were deposited by radio-frequency（RF） reactive magnetron sputtering to obtain the ZnO/diamond film structures. Surface morphologies of the nucleation sides and the IDTs were characterized by means of scanning electron microscopy （SEM）, atomic force microscope （AFM） and optical microscopy. The results indicate that the surfaces of nucleation sides are very smooth and the IDTs are of high quality without discontinuity and short circuit phenomenon. Raman spectra show the sharp diamond feature peak at about 1 334 cmI and the small amount of non-diamond carbon in the nucleation side. X-ray diffraction （XRD） patterns of the structure of ZnO/diamond films show a strong diffraction peak of ZnO （002）, which indicates that as-sputtered ZnO films are highly c-axis oriented.     

A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings

Approximately 1.5 μm thick CrN and CrAlN coatings were deposited on silicon and mild steel substrates by reactive direct current (DC) magnetron sputtering. The structural and mechanical properties of the coatings were characterized using X-ray diffraction (XRD) and nanoindentation techniques, respectively. The bonding structure of the coatings was characterized by X-ray photoelectron spectroscopy (XPS). The surface morphology of the coatings was studied using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The XRD data showed that the CrN and CrAlN coatings exhibited B1 NaCl structure. Nanoindentation measurements showed that as-deposited CrN and CrAlN coatings exhibited a hardness of 18 and 33 GPa, respectively. Results of the surface analysis of the as-deposited coatings using SEM and AFM showed a more compact and dense microstructure for CrAlN coatings. The thermal stability of the coatings was studied by heating the coatings in air from 400 to 900 °C. The structural changes as a result of heating were studied using micro-Raman spectroscopy. The Raman data revealed that CrN coatings got oxidized at 600 °C, whereas in the case of CrAlN coatings, no detectable oxides were formed even at 800 °C. After annealing up to 700 °C, the CrN coatings displayed a hardness of only about 7.5 GPa as compared to CrAlN coatings, which exhibited hardness as high as 22.5 GPa. The potentiodynamic polarization measurements in 3.5% NaCl solution indicated that the CrAlN coatings exhibited superior corrosion resistance as compared to CrN coatings.     

Technical note: Plasma-sprayed ceramic thermal barrier coatings for smooth intermetallic alloys

A durable ceramic thermal barrier coating is applied directly to a smooth, highly oxidation resistant intermetallic alloy in two layers. The first layer of ceramic is applied by low pressure plasma spraying and the second layer is applied by conventional atmospheric pressure plasma spraying. This approach would allow the use of plasma sprayed ceramic coatings in applications where a metallic bond coat is not desirable.     

超声深滚对TC4钛合金表面形貌和表面粗糙度的影响

研究了采用超声深滚处理（UDR）对钛合金（TC4）试件表面形貌和表面粗糙度的影响.采用扫描电子显微镜观察分析了超声深滚处理前后的试件表面形貌,采用表面粗糙度仪分析研究了强化处理前后的表面粗糙度变化.结果表明,超声深滚处理可以显著降低机加工痕迹,消除表面微损伤,大幅降低表面粗糙度,可使表面粗糙度由Ra 2.32 m降低到Ra 0.11 m.     

二次喷丸42CrMo钢表面完整性的数值模拟研究

目的探究二次喷丸工艺参数对42CrMo钢零件表面完整性的影响规律。方法建立三维随机喷丸有限元模型,并通过实验验证有限元模型预测残余应力的准确性。将一次喷丸后零件的表面形貌和应力应变结果作为初始状态导入到二次喷丸模型中,构建出二次喷丸预测模型。分析二次喷丸参数对42CrMo钢零件表面残余应力场、表面粗糙度以及等效塑性形变场的影响情况。结果二次喷丸后,42CrMo钢零件近表层(0～100μm)的残余压应力值均比初始状态有所增加。增加二次喷丸覆盖率对表面残余应力的提升作用最为明显,最大可比初始状态提高63.3%,而增加二次喷丸直径对残余应力的改善效果最不明显。过度增加二次喷丸速度会导致表面粗糙度明显增加,提高二次喷丸覆盖率可显著降低表面粗糙度,覆盖率为300%时,粗糙度比初始状态减小了14.4%。表层PEEQ值随着二次喷丸速度、弹丸直径和覆盖率的增加而增加,但当二次喷丸速度、弹丸直径和覆盖率增加到一定程度后,表层PEEQ值会趋于饱和。结论二次喷丸预测模型揭示了二次喷丸参数与42CrMo钢零件表面完整性之间的影响规律,为二次喷丸的工业应用提供了一定的参考意义。     

自锐性金刚石树脂砂轮磨削性能的研究

本文通过对比磨削试验，研究了自锐性金刚石(CSD)树脂砂轮的磨削性能。试验结果表明，由于CSD形状小规则，有许多凹入角和粗糙表面，树脂结合剂对CSD的把持力较普通金刚石强，所以在磨削各参数相同的条件下，自锐性金刚石砂轮与普通金刚石砂轮相比，其磨削比提高60％以上。且由于CSD的内部为许多单个亚晶粒所组成的镶嵌的颗粒，因此在应力作用下，只有很小的不规则的碎片崩掉，从而在每个颗粒的表面上留下许多新的小切削刃，故其加工工件的表面粗糙度值较低。     

扫描隧道显微镜在金属表面粗糙度检测上的应用

本文用扫描隧道显微镜(STM)观察了钢预磨和抛光后的表面形貌,测量了表面粗糙度Ra,并与表面轮廓仪的测量结果进行了对比,取得了一致的结果,从而提供了一种测量高光洁金属表面微区粗糙度的新方法.     

长余辉发光粒子与光催化剂在SiC晶圆化学机械抛光中的协同作用

目的 获得一种可改善单晶SiC晶圆化学机械抛光(CMP)效率的复合增效技术，实现单晶SiC晶圆高效率和低成本的加工要求，并对其增效机理进行深入研究。方法 通过抛光实验和原子力显微镜测试，探究长余辉发光粒子(LPPs)与不同光催化剂的协同作用对SiC–CMP的材料去除速率和表面粗糙度的影响。结合扫描电子显微镜(SEM)、紫外–可见漫反射光谱仪(UV–vis)、光致发光光谱仪(PL)和X射线光电子能谱仪(XPS)等仪器的测试结果，研究LPPs与光催化剂的协同增效机理。结果 与传统CMP的条件相比，在光催化条件下采用LPPs(质量分数0.5%)+TiO2(质量分数0.5%)+ H2O2(质量分数1.5%)+Al2O3(质量分数2%)的抛光液时，SiC的材料去除速率(MRR)由294 nm/h提高到605 nm/h，同时获得的晶圆表面粗糙度(Ra)为0.477 nm。然而，采用含有LPPs和ZrO2的抛光液抛光SiC时，其材料去除速率和表面粗糙度都未得到明显改善。XPS测试结果表明，LPPs与光催化剂的协同作用增强了抛光液对SiC的氧化作用。UV–vis和PL测试结果显示，LPPs与不同光催化剂协同效果的差异主要与其光学性能有关。结论 在光催化条件下，LPPs和TiO2对单晶SiC–CMP具有协同增效的作用，然而LPPs和ZrO2没有展现出协同增效的作用，即LPPs与光催化剂的协同作用可以改善SiC–CMP的性能，但是光催化剂的选择需要考虑LPPs的发光特性。     

表面处理状态对Fecralloy合金氧化膜完整性的影响

研究了表面粗糙度对Fecralloy (Fe 2 2Cr 5Al 0 .3Y ,质量分数 ,% )合金在 12 0 0℃空气中循环氧化生成表面氧化膜完整性的影响。采用SEM技术着重研究了合金表面氧化膜的性质和特点。结果表明合金表面粗糙度对Fecralloy合金表面氧化膜的完整性有重要的影响 ,初始合金表面粗糙度越大 ,氧化膜越容易开裂。讨论了合金表面粗糙度对氧化膜开裂行为的影响。