Rare-earth-enabled universal solders for microelectromechanical systems and optical packaging

In packaging of microelectromechanical systems (MEMS), optical, and electronic devices, there is a need to directly bond a wide variety of inorganic materials, such as oxides, nitrides, and semiconductors. Such applications involve hermetic-sealing components, three-dimensional MEMS assembly components as well as active semiconductor or optical components, dielectric layers, diffusion barriers, waveguides, and heat sinks. These materials are known to be very difficult to wet and bond with low melting-point solders. New Sn-Ag- or Au-Sn-based universal solders doped with a small amount of rare-earth (RE) elements have been developed, which now allow direct and powerful bonding onto the surfaces of various MEMS, optical, or electronic device materials. The microstructure, interface properties, and mechanical behavior of the bonds as well as the potential packaging applications of these new solder materials for MEMS and optical fiber devices are described. Various packaging-related structural, thermal, or electrical issues in MEMS are also discussed.     

MEMS系统级设计与基于多端口组件网络的建模方法

MEMS的系统级设计对保证其整体综合性能和合理开发MEMS产品至关重要。针对MEMS的多能量域耦合、多信号混合的特点以及能量非保守等特殊要求 ,提出了基于多端口组件网络的MEMS系统级建模方法———采用多端口组件表示MEMS的功能结构部件 ,组件与组件通过端口联成网络表示整个系统 ;用统一规范化的微分代数方程表征并用硬件描述语言表述多端口组件。针对梁等具体的MEMS功能结构部件 ,采用宏建模方法确定其行为方程 ,从而得到有特定物理意义的、可供重用的组件模型。最后 ,给出了微加速度计的基于多端口组件网络方法的系统级设计示例     

利用背面曝光技术制造大高宽比SU8结构的一种新方法

提出了一种解决大高宽比SU8结构的新方法.该方法是将SU8胶涂在一块掩模上,紫外光从掩模的背面照射,这样SU8胶的曝光将从底部开始,不需要进行过曝光来保证底部胶的曝光剂量,从而很容易控制曝光剂量和SU8胶结构的内应力.实验结果表明,该方法能够得到高宽比为32的SU8结构,而文献报道的SU8胶结构的高宽比最大仅为18.     

Design and application of functional absorbers

This paper gives an overview of the research at Institute of Acoustics, Tongji University, on functional absorbers and experience acquired in practical applications over the past three decades. Experiments and analysis of the absorption characteristics of three different geometrical forms of functional absorbers, i.e., panels, cubes and tubes, were conducted with different arrangements. The resulting esthetical effects are illustrated with pictures. Several non-fiber materials are used to compose functional absorbers with advantages both in acoustic properties and in architectural features. Cost effectiveness analysis is also given in order to provide design guidelines.     

MEMS技术对火控系统的影响

结合火控系统的发展趋势 ,说明了MEMS技术在火控系统中的应用 ,分析了MEMS技术在机械结构、系统性能以及体系结构等方面对火控系统的影响     

Acoustic study of nano-crystal embedded PbO-P2O5 glass

Nano-crystal embedded PbO-P₂O₅ glass has been prepared and characterized by XRD and TEM measurements. The ultrasonic velocity and attenuation measured within the temperature range 80–300 K show significant structure and interesting feature with the presence of nano-crystalline region. The glass samples were prepared by melt-quench method and nano-crystals of different sizes were produced by heat treatment of the glasses for different durations of heating. All the processes were carried out at or above glass transition temperature. A theoretical model that takes account of the effects of thermally activated relaxation, anharmonicity as well as microscopic elastic inhomogeneities arising out of fluctuations has been successfully applied to interpret the variation of ultrasonic velocity and attenuation data. An interesting outcome of this application has been to propose a method for the determination of the size of nano-crystals from the ultrasonic attenuation data.     

PCR芯片和生化微分析系统

介绍了PCR微芯片的最新研究进展,给出了不同结构的PCR芯片设计原理以及特点,介绍由PCR芯片为主要单元的集成微全分析系统的相关研究,同时简要介绍了对PCR的仿真模拟等。     

高电容比射频/微波MEMS膜开关的理论分析和数值模拟

建立了一个MEMS膜开关电容比理论模型，由于这个模型比较全面地考虑了开关阈值电压、维持电压、偏置电压和介质膜内的电场强度等因素对电容比的影响，因而能较为正确地反映开关的电容特性。用数值方法计算了影响开关电容比的因素，并对计算结果进行了分析和讨论。提出了使用脉冲电压作为偏置电压可以使介质膜gj的厚度减少到50nm，从而使开关的电容比增加到3800。最后，讨论了实现高电容比MEMS膜开关的可行性。     

Numerical Study of Scale Effects of Ultra-Thin Nickel Beams

Recent experiments have shown that metallic materials display significant size effects when the characteristic length scale of non-uniform plastic deformation is close to a micron. Couple stress plasticity has been developed to explain such phenomena by Fleck and Hutchinson. The mechanical behaviors of ultra-thin nickel beams in different boundary conditions were studied with the hybrid element developed for couple stress plasticity before. Strong scale effects are found when the beam's thickness is close to the material characteristic length scale. Such phenomena will disappear if the beam' s thickness is greatly larger than the material characteristic length scale. The scale effect is the beams inherent property and it does not change with the change of support conditions.     

DSU与DSU采集链

文章介绍了超精度的新型地震传感器DSU，它由微机电系统(MEMS)和兼有模拟电路和24位△—∑数字电路的混合器件(ASIC)组成，其失真度可达0．0032％，响应频带0～800Hz。DSU采集链使采集站、大线和检波器合为一体，既消除了电磁干扰和道间串音，又提高了采集数据的精度。DSU及DSU采集链的应用将为地震采集技术向超精度发展提供可靠保证。