The optimal stochastic control of an epitaxial process unit

The problem of computerized batch control of the silicon epitaxial layer deposition technological process has been solved using optimal stochastic control methods. A control algorithm is presented the main emphasis being given to the forecasting and compensating of disturbing processes which act on a process unit under real operation conditions. The method of multidimensional time series, stochastic model form identification for the process noise is developed based on multidimensional time series, correlation analysis results. The “maximum likelihood” identification method is applied in order to obtain efficient estimates of the model parameters. The identification of the model form and model parameters is carried out on the basis of a rather extensive set of data obtained from operation records of a high capacity epitaxial unit. The adequacy of the identified models is checked by means of a correlation analysis of the model residuals. It is demonstrated that results comparable to those with an intuitive process control by an experienced operator, can be achieved when using the algorithm presented in the present work for process computer control. This algorithm thus represents a reliable and rational basis for process control computer software development.     

含正弦扰动奇异摄动时滞系统的最优减振控制

研究奇异摄动时滞系统在正弦扰动下的最优减振控制问题．基于奇异摄动的快慢分解理论,将原最优控制问题转化为无时滞快子问题和受扰线性时滞慢子问题,通过摄动法和前馈补偿技术求解时滞慢子系统的最优控制问题,得到了系统的前馈反馈组合控制(FFCC)律及其存在唯一性条件．FFCC律由线性解析项和共态向量无穷级数和表示的时滞补偿项组成,其中线性解析项可通过求解Riccati方程和Sylvester方程得到,时滞补偿项通过递推求解共态向量方程得到,仿真算例表明了方法的有效性．     

具有控制时滞系统的最优无静差正弦扰动抑制

研究在外部正弦扰动作用下，控制含时滞的线性系统的最优无静差调节器设计问题．首先利用Artstein变换将控制变量含时滞的系统转化为不舍时滞的系统；然后利用内模原理构造扰动补偿器，将带扰动的系统转化为无扰动的增广系统，从而将无静差扰动抑制问题转化为无扰动增广系统的最优调节器设计问题；最后利用最优控制理论求得最优无静差反馈控制律．仿真结果表明了所提出方法的有效性．     

Organised structures in wall turbulence as deduced from stability theory-based methods

In earlier work, we have explored the relevance of hydrodynamic stability theory to fully developed turbulent wall flows. Using an extended Orr-Sommerfeld Equation, based on an anisotropic eddy-viscosity model, it was shown that there exists a wide range of unstable wave numbers (wall modes), which mimic some of the key features of turbulent wall flows. Here we present experimental confirmation for the same. There is good qualitative and quantitative agreement between theory and experiment. Once the dominant coherent structure is obtained from stability theory, control of turbulence would be the next logical step. As shown, the use of a compliant wall shows considerable promise. We also present some theoretical work for bypass transition (Klebanoff/K-modes), wherein the receptivity of a laminar boundary layer to a vortex sheet in the freestream has been studied. Further, it is shown that triadic interaction between K-modes, 2D TS waves and 3D TS waves can lead to rapid algebraic growth. A similar mechanism seems to carry over to inner wall structures in wall turbulence and perhaps this is the “root cause” for sustenance of turbulence.     

DESIGN OF TWO-PHASE SINUSOIDAL POWER CLOCK AND CLOCKED TRANSMISSION GATE ADIABATIC LOGIC CIRCUIT

First the research is conducted on the design of the two-phase sinusoidal power clock generator in this paper. Then the design of the new adiabatic logic circuit adopting the two-phase sinusoidal power clocks--Clocked Transmission Gate Adiabatic Logic （CTGAL） circuit is presented. This circuit makes use of the clocked transmission gates to sample the input signals, then the output loads are charged and discharged in a fully adiabatic manner by using bootstrapped N-Channel Metal Oxide Semiconductor （NMOS） and Complementary Metal Oxide Semiconductor （CMOS） latch structure. Finally, with the parameters of Taiwan Semiconductor Manufacturing Company （TSMC） 0.25um CMOS device, the transient energy consumption of CTGAL, Bootstrap Charge-Recovery Logic （BCRL） and Pass-transistor Adiabatic Logic （PAL） including their clock generators is simulated. The simulation result indicates that CTGAL circuit has the characteristic of remarkably low energy consumption.     

CISPR15 A1:2006对灯具电磁骚扰测试新增的要求

本文介绍了灯具电磁骚扰测试标准CISPR15对灯具辐射电磁场骚扰的新要求.同时也介绍了相应的实验室的应对策略.     

电力系统3阶解析解的推导及验证

推出基于模态级数法的电力系统动态方程3阶解析解，提出求解电力系统动态方程3阶偏导数的数值微分算法。分别在单机无穷大系统及4机2区域系统，应用2个指标定量对比1阶解析解、2阶解析解及3阶解析解在分析遭受大扰动电力系统动态特性的精确性；并应用prony算法检测数值积分曲线中3阶复合模式的存在。从而，验证采用该文推出的3阶解析解分析遭受大扰动时电力系统动态特性的有效性。     

基于低速面阵CCD的正弦相位调制干涉测量

正弦相位调制(SPM)干涉测量技术用于表面形貌测量时,需要帧速高于300 frame/s的图像传感器,同时要求调制信号频率与图像传感器帧速成确定的整数倍关系。提出一种基于低速CCD(30 frame/s)的帧速可调的高速图像传感技术,通过控制每帧像素总数提高CCD帧速,研制出一种高帧速图像传感器,帧速可达300~1600 frame/s,且每帧大小连续可调。将该CCD传感器用于正弦相位调制干涉泰曼-格林干涉仪,测量镀膜玻璃板表面形貌,当CCD图像传感器的帧速与调制信号频率呈16,8,4倍的关系时,得到玻璃板表面形貌的轮廓平均算术偏差Ra小于1.8 nm,重复精度优于3 nm。     

频谱泄漏对正弦相位调制干涉测量精度的影响

在正弦相位调制(SPM)干涉仪中,若调制频率或者采样频率发生变化将使干涉信号出现频谱泄漏,减小了谐波分量的幅值,在测量结果中引入了误差。对频谱泄漏的产生及其对测量精度的影响进行了理论分析,获得了频谱泄漏引入测量误差的计算方法。实验测得频率漂移量在-0.3~0.3Hz内,得到的频谱泄漏引入的误差为0.3~7.9nm,当超出这个范围时,频谱泄漏误差将迅速增长。实验结果与模拟分析结果一致。     

有损均匀传输线的PSpice仿真分析

有损均匀传输线的电压、电流既是时间的函数,也是距离的函数,需要用分布参数电路模型分析.有损均匀传输线方程是偏微分方程,正弦稳态解的手算求解比较复杂.应用PSpice对有损均匀传输线进行仿真分析,可得到传输线上任一点的电压、电流的频率特性和正弦稳态波形.本文介绍了有损均匀传输线的PSpice模型和参数,通过实例说明了其应用方法,通过对比可知仿真分析比手算求解更清晰地阐明了物理概念.