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针对加速度传感器在爆炸与冲击测试中的应用,从理论与有限元仿真出发,分析传感器结构的静态响应与冲击响应.在15.4×104gn的静态载荷下,传感器结构最大应力超过材料的许用应力,将会发生结构断裂.在静态载荷下,加速度传感器在15.4×104gn的冲击加速度载荷下结构最大应力超过材料的许用应力,将会发生结构断裂.在加速度传感器的工作方向上施加幅值为15×104gn,半周期为5μs、10μs、20μs、30μs、40μs的半正弦加速度冲击载荷.在幅值为15×104gn、半周期为30μs的冲击载荷下,传感器的固定端处应力为334MPa,将会使传感器断裂失效.在幅值为15×104gn、半周期为5μs、10μs、20μs的冲击载荷下,固定端处应力超过材料许用应力,将也会发生结构断裂.悬臂梁在半周期为5μs、10μs、20μs的冲击下,将会出现断裂.大体上,冲击载荷的周期越小,固定端的应力越大集中越严重.由于传感器固有周期为9.5μs,加速度传感器在半周期为10μs的冲击载荷下出现谐振,固定端处应力变大集中加剧.分析加速度传感器在冲击载荷下的结构响应为传感器的结构设计与具体应用时的可靠性分析提供了理论依据. 相似文献
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Jun LiuAuthor VitaeYunbo Shi Author Vitae Ping LiAuthor VitaeJun TangAuthor Vitae Rui ZhaoAuthor VitaeHe ZhangAuthor Vitae 《Sensors and actuators. A, Physical》2012,173(1):1-8
In this paper, the effect of the package die adhesive and package shell on the performances of silicon based MEMS high-g accelerometers was reported. Using Raman spectroscopy, the residual stress caused by different package die adhesive thickness and different package shell material was characterized. It can be concluded from the testing results that: with thicker die adhesive, the residual stress increment was much smaller; the piezoresistance variation caused by this residual stress was much smaller; and the temperature shift of the output voltage was much smaller. Comparing with the ceramic package, the stainless steel package has bigger sensitivity and bigger anti-overload ability. 相似文献
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《Ergonomics》2012,55(5):663-670
The aim of this study was to compare estimation of energy expenditure (EE) in working environments, either from accelerometry or from an individual oxygen consumption/heart rate ([Vdot]O2/HR) regression curve. The study participants were 46 volunteer workers aged 27±6 years old. A significant correlation between EE predicted by the [Vdot]O2/HR curve and the accelerometer was observed (r=0.78, p <0.01). However, more disparities were observed between the two methods when the mean job intensity was not within 16% and 23% higher than resting HR. The accelerometer overestimated by a mean of 34.4% the prediction by [Vdot]O2/HR regression if the intensity of the task was lower than a total of 1000 kcal/shift and underestimated the prediction by a mean of –24.9% if EE estimation of the work shift was higher than a total of 1500 kcal/shift. Despite a high correlation between both methods in the whole group, EE evaluated by accelerometry does not correspond to EE predicted by the [Vdot]O2/HR regression curves when evaluated individually. 相似文献
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The fabrication of silicon based micromechanical sensors often requires bulk silicon etching after aluminum metallization. All wet silicon etchants including ordinary undoped tetramethyl ammonium hydroxide (TMAH)-water solution attack the overlaying aluminum metal interconnect during the anisotropic etching of (100) silicon. This paper presents a TMAH-water based etching recipe to achieve high silicon etch rate, a smooth etched surface and almost total protection of the exposed aluminum metallization. The etch rate measurements of (100) silicon, silicon dioxide and aluminum along with the morphology studies of etched surfaces are performed on both n-type and p-type silicon wafers at different concentrations (2, 5, 10 and 15%) for undoped TMAH treated at various temperatures as well as for TMAH solution doped separately and simultaneously with silicic acid and ammonium peroxodisulphate (AP). It is established through a detailed study that 5% TMAH-water solution dual doped with 38 gm/l silicic acid and 7 gm/l AP yields a reasonably high (100) silicon etch rate of 70 μm/h at 80 °C, very small etch rates of SiO2 and pure aluminum (around 80 Å/h and 50 Å/h, respectively), and a smooth surface (±7 nm) at a bath temperature of 80 °C. The etchant has been successfully used for fabricating several MEMS structures like piezoresistive accelerometer, vaporizing liquid micro-thruster and flow sensor. In all cases, the bulk micromachining is carried out after the formation of aluminum interconnects which is found to remain unaffected during the prolonged etching process at 80 °C. The TMAH based etchant may be attractive in industry due to its compatibility with standard CMOS process. 相似文献
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