基于加速度计的航空遥感器扫描反射镜姿态控制研究

提出了一种航空遥感器扫描反射镜姿态控制的新方法,用小型、低造价的线性加速度计代替陀螺感测飞行器的三维角运动,反射镜姿态控制系统用实测的角加速度作为控制系统的反馈信号.根据用线性加速度计指示角加速度的公式,讨论了将加速度计直接配置在扫描反射镜镜体上的方案,并给出了执行扫描反射镜姿态控制策略的控制系统原理图,证明该方法在理论上是简易可行的,具有一定的实用性.     

Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

The fabrication of silicon based micromechanical sensors often requires bulk silicon etching after aluminum metallization. All wet silicon etchants including ordinary undoped tetramethyl ammonium hydroxide (TMAH)-water solution attack the overlaying aluminum metal interconnect during the anisotropic etching of (100) silicon. This paper presents a TMAH-water based etching recipe to achieve high silicon etch rate, a smooth etched surface and almost total protection of the exposed aluminum metallization. The etch rate measurements of (100) silicon, silicon dioxide and aluminum along with the morphology studies of etched surfaces are performed on both n-type and p-type silicon wafers at different concentrations (2, 5, 10 and 15%) for undoped TMAH treated at various temperatures as well as for TMAH solution doped separately and simultaneously with silicic acid and ammonium peroxodisulphate (AP). It is established through a detailed study that 5% TMAH-water solution dual doped with 38 gm/l silicic acid and 7 gm/l AP yields a reasonably high (100) silicon etch rate of 70 μm/h at 80 °C, very small etch rates of SiO₂ and pure aluminum (around 80 Å/h and 50 Å/h, respectively), and a smooth surface (±7 nm) at a bath temperature of 80 °C. The etchant has been successfully used for fabricating several MEMS structures like piezoresistive accelerometer, vaporizing liquid micro-thruster and flow sensor. In all cases, the bulk micromachining is carried out after the formation of aluminum interconnects which is found to remain unaffected during the prolonged etching process at 80 °C. The TMAH based etchant may be attractive in industry due to its compatibility with standard CMOS process.     

单天线GPS/加速度计组合测姿方法研究

为了提高微小型飞行器和导弹等横向尺寸不足以安装多天线GPS的飞行载体的姿态测量精度,研究了利用单天线GPS和加速度计组合进行姿态测量的方法.引入了伪姿态的概念,提出了由伪姿态测量辅助求取载体姿态的具体算法,阐述了单天线GPS和加速度计组合测姿的基本原理.建立了单天线GPS姿态测量的数学模型,给出了其姿态的求解过程,阐明了其物理意义.对单天线GPS测姿系统进行了半实物仿真试验.仿真结果表明:该测姿系统可以实时提供高精度的姿态信息,为单天线GPS/SINS组合导航系统在微小飞行器上的应用奠定了基础.     

一种扭摆式硅微机械加速度传感器

介绍了一种基于体硅微机电系统(MEMS)工艺制作的扭摆式硅微机械加速度传感器,对制作过程的一些工艺问题进行探讨,并提出相应的解决办法,主要涉及到硅-玻璃阳极键合、结构释放等关键工艺。对测试结果进行了初步分析,分辨力可以达到1mgn,测试±1gn范围内线性度可以达到99.99%。     

基于微加速度传感器的无线鼠标的设计

研究基于微加速度传感器的无线鼠标的设计,讨论了MEMS无线鼠标的软件、硬件设计和系统组成,给出了M atlab环境下系统的模型和算法。模拟结果说明:无线鼠标的设计是合理可行的,提出的二次积分近似算法是简捷有效的。     

一种三维加速度计弹性体的分析与设计

介绍了一种可用于振动测量的三维加速度计弹性体结构,其采用3个相互垂直的双平行应变梁组合的形式,每个平行梁敏感一个分量的加速度.经分析和试验结果表明:该加速度计具有灵敏度较高、交叉干扰小,完全满足预期设计要求.     

电容式硅微加速度计在小型飞行器上的应用

低成本传感器的应用是小型飞行器迅速发展的现实要求,将MEMS传感器技术结合飞行器应用是一个全新的前沿发展方向;对电容式硅微加速度计在小型飞行器上的应用进行了研究,提出此类加速度计存在输出不完全的问题,创新性的给出重力补偿解决方法;通过分析加速度计的误差,并做静态实验以修正,推导了加速度计的工作函数;最后由振动实验,证明在小机动飞行状况下,电容式硅微加速度计能够满足小型飞行器的控制要求.     

单片集成的高性能压阻式三轴高g加速度计的设计、制造和测试

设计、制造并测试了一种单片集成的压阻式高性能三轴高g加速度计,量程可达105g.x和y轴单元均采用一种带微梁的三梁-质量块结构,z轴单元采用三梁-双岛结构.与传统的单悬臂梁结构或者悬臂梁-质量块结构相比,这两种结构均同时具有高灵敏度和高谐振频率的优点.采用ANSYS软件进行了结构分析和优化设计.中间结构层主要制作工艺包括压阻集成工艺和双面Deep ICP刻蚀,并与玻璃衬底阳极键合和上层盖板BCB键合形成可以塑封的三层结构,从而提高加速度计的可靠性.封装以后的加速度计采用落杆方法进行测试,三轴灵敏度分别为2.28,2.36和2.52 μV/g,谐振频率分别为309,302和156 kHz.利用东菱冲击试验台,采用比较校准法测得y轴和z轴加速度计的非线性度分别为1.4%和1.8%.     

随机振动校准加速度计方法研究

介绍了随机振动校准加速度计系统的实现.使用随机信号传感器绝对校准方法,得到了较为理想的加速度计频响曲线.与传统的方法相比在保证校准精度的前提下,提高了效率.     

Dissymmetrical 3×3 Coupled Optical Accelerometer

Without adding feedback to modulate light path system, the dissymmetrical 3×3 coupled optical accelerometer reduces the complexity of the design of light path system. Experiments prove that it can attain good demodulation effects. As carrier is not needed in this system, the frequency range of input signal is diminished so as to decrease the sampling frequency of accelerometer. This makes for the system on programmable chip(SOPC) design of digital demodulating system. The upper limit of accelerometer working frequency can reach 3 500 Hz. But affected by the inherent frequency of sensitive components, its working frequency is 10 Hz～1 000 Hz, and the sensitivity is 8.718 0 V/(m·s-2). This accelerometer can detect the dynamic range of acceleration signal real-timely, steadily and accurately, solving the dissymmetrical problem of light path caused by circumstances and the complexity of process.