平面无阀微泵的设计与制作

依据扩散口/喷嘴理论,设计了具有单向整流特性的无阀微泵.采用硅平面工艺、各向异性腐蚀、削角补偿和静电键合等微机械加工工艺技术,制作了平面尺寸为18 mm×13 mm的无阀微泵.经过测试,当扩散口/喷嘴长度为2.5μm、扩散口/喷嘴的窄口宽度为150μm、腐蚀深度为150μm时,微泵的最大泵压达14.8 kPa,最大流量为558μL/m in.     

Simulation and design of a self-heating continuous-flow PCR chip

A novel continuous-flow PCR chip adopting self-heating, passive-cooling mode to realize the DNA fragments amplification was presented. Using the ANSYS finite element analysis, the temperature distribution of the chip is simulated and analyzed. The optimal size of the chip is 30 × 22 mm2, the roundabout micro-channel is the 90 μm width, 40 μm depth. Two micro-heater with the nickel-chrome alloy material film are formed on the side of silicon belonging to denaturation and renaturation zones needed for PCR reaction, and two adiabatic structures with groove on side of silicon by anisotropy etching. By the mede of heating local zones at single side,three wider constant temperature zones could be formed, which are 60 ℃ ,72 ℃ ,95 ℃ and suitable for PCR,and the temperature-difference could be restricted in less than 5 ℃.     

电泳微芯片进样口与微沟道形状的优化设计

基于电渗流场的理论,建立电泳芯片的不同结构模型,以计算流体力学(CFD)方法来模拟不同设计参数和电压组合下的电泳微芯片微沟道中流体流动现象.最终优化基本型毛细管微沟道交叉口形状为矩形,微沟道宽度为20 μm,进样与分离场强为200～250V/cm.为在有限芯片面积下增加有效分离距离,设计螺旋形沟道电泳芯片模式.     

一种用于陀螺闭环驱动的CMOS可变增益放大器

采用0.5 μm CMOS工艺设计了一种单极可变增益放大器.该可变增益放大器以Gilbert单元为原型,并通过设计指数电压产生电路来实现增益与控制电压在dB域呈线性关系.控制电压范围较宽,从1.5～3.5 V变化时,实现了-2～35 dB的增益变化范围,最大增益时的3 dB带宽是19.045 MHz.电源工作电压为5V,电路功耗为1.7mW.     

应用CAD技术加速我国MEMS技术的发展

在微电子机械系统技术飞速发展的今天,由于ＭＥＭＳ(Ｍｉｃｒｏ-Ｅｌｅｃｔｒｏ-Ｍｅｃｈａｎｉｃａｌ-Ｓｙｓｔｅｍ)器件在国防和民用领域有着广泛的应用前景,ＭＥＭＳ研究已成为世界上发达国家高科技发展的重点方向之一。近年来我国政府对ＭＥＭＳ研究非常重视,在政府的...     

静电键合在高温压力传感器中的应用

分析了硅－玻璃静电键合界面受热循环作用,或者受反向电压作用后,在高温时,键合力的特点,实验验证了高温（４５０℃）时键合面牢固、稳定。研究结果表明高温压力传感器可以采用静电键合技术进行封装。     

用于Pb2+、Hg2+离子选择性固相萃取的微流控芯片

为实现微流控芯片对重金属Pb~(2+)、Hg~(2+)离子的选择性固相萃取,首先采用3-氯丙基三甲氧基硅烷和5-甲基苯并三氮唑对纳米二氧化硅进行硅烷偶联改性,随后以改性纳米二氧化硅为基础,设计并制备了可更换吸附剂的一体化填充式固相萃取芯片.测试结果表明:改性后不仅吸附剂的团聚现象得到明显改善,且当pH=5时,对Pb~(2+)的吸附率可达99.1%,对Hg~(2+)的吸附率可达98.9%,而对Cr~(3+)的吸附率为20.4%,对Mn~(2+)的吸附率仅为13.2%.即使样品中混有干扰离子(K~+、Na~+或Mn~(2+))时,对Pb~(2+)、Hg~(2+)离子的吸附率仍均可达97%以上.当进样流速≤1.5 mL/min时,微流控芯片对Pb~(2+)或Hg~(2+)的吸附率可达98%以上;以0.5 mol/L的盐酸和2%的硫代尿素为洗脱液,控制流速在0.20.3 mL/min范围内时,芯片对Pb~(2+)或Hg~(2+)的洗脱率均达到92%以上.用于Pb~(2+)、Hg~(2+)离子的选择性固相萃取芯片的成功制备,有助于微流控技术在重金属污染监测领域的应用和推广.     

Noise analysis and characterization of a full differential CMOS interface circuit for capacitive closed-loop micro-accelerometer

To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.     

闭环电容式微加速度计全差分CMOS接口电路

提出了一种用于电容式微加速度计的低噪声、高线性度全差分接口电路.基于开关电容检测技术,该电路采用一种新的双路反馈结构来提高系统线性度,并采用2 μm n阱CMOS工艺完成芯片设计.仿真结果证明,电路中采用的双路反馈和全差分检测结构使系统的线性度达到0.01%.加入经过优化设计的比例-微分-积分控制器后,有效减小了系统稳...