Resolving Deep Sub-Wavelength Scattering of Nanoscale Sidewalls Using Parametric Microscopy

The quantitative optical measurement of deep sub-wavelength features with sub-nanometer sensitivity addresses the measurement challenge in the semiconductor fabrication process. Optical scatterings from the sidewalls of patterned devices reveal abundant structural and material information. We demonstrated a parametric indirect microscopic imaging (PIMI) technique that enables recovery of the profile of wavelength-scale objects with deep sub-wavelength resolution, based on measuring and filtering the variations of far-field scattering intensities when the illumination was modulated. The finite-difference time-domain (FDTD) numerical simulation was performed, and the experimental results were compared with atomic force microscopic (AFM) images to verify the resolution improvement achieved with PIMI. This work may provide a new approach to exploring the detailed structure and material properties of sidewalls and edges in semiconductor-patterned devices with enhanced contrast and resolution, compared with using the conventional optical microscopy, while retaining its advantage of a wide field of view and relatively low cost.     

Electrical polarization and ionic conduction properties of β-tricalcium phosphate bioceramics with controlled vacancies by sodium ion substitution

With the aim to understand electric polarization mechanisms of β-tricalcium phosphate as an advanced biomaterial, Na ion-substituted β-Ca₃(PO₄)₂ (Na-β-TCPs) ceramics with controlled lattice vacancies were synthesized and structural refinement was performed by the Rietveld method. The Rietveld analysis revealed that Ca and vacancies at Ca(4) sites in the β-TCP structure decreased with an increase in Na substitution. Electrical measurements by the complex impedance method revealed that the conductivity and the activation energy calculated from Cole-Cole plots rapidly decreased to a constant value with an increase in Na substitution and decrease in vacancies. The thermally stimulated depolarization current (TSDC) curve of the electrically polarized Na-β-TCP showed one large peak at 530–610 °C. However, the accumulated charge decreased with an increase in Na ions and decrease in vacancies up to 2.37 mol%, after which it became constant. These results are consistent with the presumed formation of a dipole moment between aligned Ca²⁺ ions and their vacancies along the direction of the external polarization field applied at high temperature. We conclude that the large amount of stored charge in β-TCP caused by electrical polarization is due to the low site occupancy of calcium ions and vacancies at Ca(4) sites in the β-TCP structure, which is not the case for hydroxyapatite (HAp), as previously reported.     

Insight into tribological and corrosion behaviour of binderless TiCxNy ceramic composites processed via pulsed electric current sintering technique

The study presents the corrosion behaviour and wear response of pulsed electric current sintered binderless TiC₅₀N₅₀, TiC₇₀N₃₀, and TiC₉₀N₁₀ based ceramic composites, consolidated by spark plasma sintering (SPS), and the relative densities were evaluated using the Archimedes principle. The microstructural evolutions of the sintered samples were examined through various microscopy techniques, and their susceptibility to corrosion in aggressive chloride environment was assessed using open circuit potential, potentiodynamic polarization and electrochemical impedance spectroscopy (EIS) methods. The microstructural examination of the specimens showed the presence of different phases within the titanium carbonitride (TiCN) cermets. The wear resistance evaluated using the frictional coefficient (COF) and calculated wear rate showed that the specimens exhibited an improved resistance. The specimens further showed enhanced resistance to corrosion in the test electrolyte, as the TiC₅₀N₅₀ cermet displayed enhanced resistance to the aggressive chloride ions in comparison to the other specimens.     

Adsorption‐concentration polarization model for ultrafiltration in mixed matrix membrane

Adsorption has been found to be significant in ultrafiltration by mixed matrix membrane. Removal of very low molecular weight solutes compared to the molecular weight cut off of the membrane is facilitated by adsorption. The modeling of the adsorption coupled with concentration polarization is presented based on the mathematical approach developed by Gekas et al. (Gekas et al. Chem Eng Sci. 1993;48:2753–2765), from the first principles. However, extensive modifications were included in theoretical development including those suggested by Ruiz‐Bevia et al. (Ruiz‐Bevia et al. Chem Eng Sci. 1997;52:2343–2352). The developed model captured the rejection dynamics with the help of retention factor. The model equations were solved under the framework of boundary layer analysis, using the integral approach. Effects of the adsorption isotherm and the different parameters affecting the system performance were also investigated. Further, experimental validation of the model results with two different mixed matrix ultrafiltration studies was also elucidated. © 2014 American Institute of Chemical Engineers AIChE J, 60: 2354–2364, 2014     

模拟古代铸铁在典型碱液中的电化学行为

通过动电位极化曲线法,在几种含不同氯离子浓度的典型碱性水溶液中研究了模拟古代灰口铸铁、白口铸铁的电化学行为。结果表明,在不同碱性溶液中同种铸铁试样对氯离子浓度的钝化/活化敏感性不同;不同材质的铸铁试样在相同溶液中对氯离子的敏感性也不相同。并且,对于同种溶质的碱性溶液,铸铁对氯离子的敏感性则随着溶液的pH值增加而降低。这一结果将为铁质文物脱盐除氯的终点判定提供重要的依据。     

NBH-2.7自然循环电解槽改膜极距相关工艺

新疆中泰化学股份有限公司氯碱厂第1期1#、2#装置的改造证明：膜极距电解槽改造可以降低电耗,是一种工期短、回收成本快的节能技术.对北化机NBH-2.7自然循环槽改膜极距后,在极化电流、气相压力、控制槽温工艺等方面进行了优化控制及改进,延长了膜的使用寿命,达到节能和降低生产成本的目的.     

外加压应力对Ti-35421合金钝化膜损伤修复影响的原位电化学研究

以Ti-35421(Ti-3Al-5Mo-4Cr-2Zr-1Fe)合金为研究对象,采用自制的钝化膜损伤修复原位电化学测试装置研究了模拟深海静水压力对Ti-35421合金经过Al₂O₃陶瓷刀划伤后钝化膜破裂损伤和自修复的原位电化学行为。Ti-35421合金在3.5%NaCl溶液中的钝化平台为-0.27～0.01 V。在-0.13 V钝化电压条件下极化并进行划痕实验,无压应力作用时破损钝化膜发生快速修复。压应力增大导致原子间结合力降低,金属溶解速度增加,再钝化减缓,在原位电化学上表现为电流上升,电流回复时间增长,自修复能力减弱。再钝化过程中的暂态阶段钝化膜生长符合线性高场模型。观察划痕形貌发现压应力下划痕槽中出现微裂纹,说明较高压应力损伤作用下在划痕槽近表面产生应力集中,对合金产生的伤害部分不可修复。钝化膜破损加剧和自修复能力减弱是残余应力与环境腐蚀共同作用的结果。     

过期药呋塞米在醋酸溶液中对冷轧钢的缓蚀作用

通过电导率测量、pH测量、同步热分析(STA)、Tafel极化曲线法和电化学交流阻抗谱法研究了不同浓度和温度下过期药呋塞米在1 mol/L的醋酸溶液中对冷轧钢缓蚀作用。实验结果表明:过期药呋塞米在1 mol/L的醋酸溶液中对冷轧钢有较好的缓蚀效果,且缓蚀率随着缓蚀剂浓度和温度的增加而增大。该缓蚀剂在醋酸中对钢是一种抑制阴极和阳极的混合型缓蚀剂。缓蚀剂在冷轧钢表面的吸附符合Langmuir吸附等温式,其吸附是自发、物理吸附过程。同步热分析还说明了该缓蚀剂易稳定吸附在冷轧钢表面。     

氯氧镁钢筋混凝土中涂层钢筋腐蚀的电化学特性

通过Z350电化学工作站,研究了氯氧镁钢筋混凝土中裸露钢筋和涂层钢筋在不同环境中的开路电位、极化电阻及腐蚀电流密度,并且利用扫描电镜(SEM)和X射线衍射(XRD)对腐蚀产物进行分析.结果表明:锌美特(XMT)涂层在不同环境中可以很好地保护钢筋免受腐蚀,氯氧镁钢筋混凝土中涂层钢筋在水、氯盐溶液和硫酸盐溶液中的腐蚀电流密度是裸露钢筋的1/35,1/43和1/19;氯氧镁钢筋混凝土中裸露钢筋表面存在疏松多孔的层状和块状腐蚀产物,而涂层钢筋表面只存在点蚀.由此可见,XMT涂层对氯氧镁混凝土中的钢筋有一定的防腐效果.