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1.
A large-scale high-precision scan stage is important equipment in the industrial productions of micro-fabrication such as flat panel display (FPD) lithography systems. Designing controllers for multi-input multi-output (MIMO) systems is time-consuming and needs experience because of the interaction between each axis and many controller tuning parameters. The aim of this study is to develop a peak filter design method based on frequency response data to reduce repetitive disturbance. This data-based approach does not use the model and only uses the frequency response data of the controlled system and the disturbance spectrum calculated from the scanning error data (Contribution 1). The peak filter is designed by convex optimization and satisfies robust stability conditions for six-degree-of-freedom systems (Contribution 2). The control performance of the designed peak filter is experimentally demonstrated with an industrial MIMO large-scale high-precision scan stage in reducing the scanning error of the main stroke of the translation along the x-axis (Contribution 3).  相似文献   
2.
The development of efficient filters is an essential part of industrial machinery design, specifically to increase the lifespan of a machine. In the filter chamber design considered in this study, the magnetic material is placed along the horizontal surface of the filter chamber. The inside of the filter chamber is layered with a porous material to restrict the outflow of unwanted particles. This study aims to investigate the flow, pressure, and heat distribution in a dilating or contracting filter chamber with two outlets driven by injection through a permeable surface. The proposed model of the fluid dynamics within the filter chamber follows the conservation equations in the form of partial differential equations. The model equations are further reduced to a steady case through Lie's symmetry group of transformation. They are then solved using a multivariate spectral-based quasilinearization method on the Chebyshev–Gauss–Lobatto nodes. Insights and analyses of the thermophysical parameters that drive optimal outflow during the filtration process are provided through the graphs of the numerical solutions of the differential equations. We find, among other results, that expansion of the filter chamber leads to an overall decrease in internal pressure and an increase in heat distribution inside the filter chamber. The results also show that shrinking the filter chamber increases the internal momentum inside the filter, which leads to more outflow of filtrates.  相似文献   
3.
为解决贵重物品与其内包装“契合度”不高的问题,提出基于纸浆纤维的贵重物品内包装塑造系统。系统通过三维扫描获取待包装物品的点云信息,经主控计算机进行数据处理,以下位机为执行中枢,辅之其他外部设备,利用纸浆纤维为贵重物品塑造“量身定制”的内包装,提升内包装契合度,增强保护效果,绿色环保,安全稳定。  相似文献   
4.
5.
The article investigates the finite-time adaptive fuzzy control for a class of nonlinear systems with output constraint and input dead-zone. First, by skillfully combining the barrier Lyapunov function, backstepping design method, and finite-time control theory, a novel adaptive state-feedback tracking controller is constructed, and the output constraint of the nonlinear system is not violated. Second, the fuzzy logic system is used to approximate unknown function in the nonlinear system. Third, the finite-time command filter is introduced to avoid the problem of “complexity explosion” caused by repeated differentiations of the virtual control signal in conventional backstepping control schemes. Meanwhile, a new saturation function is added in the compensating signal for filter error to improve control accuracy. Finally, based on Lyapunov stability analysis, all the signals of the closed-loop are proved to be semi-globally uniformly ultimately bounded, and the tracking error converges to a small neighborhood region of the origin in a finite time. A simulation example is presented to demonstrate the effectiveness for the proposed control scheme.  相似文献   
6.
To operate a bag filter continuously, pulse-jet cleaning of dust particles from the filter medium is commonly required, and the pulse-jet pressure significantly affects the filter performance. In this study, the accumulation structure of residual dust particles inside and on the surface of a filter medium at different pulse-jet pressures was investigated by constructing a simple model, and the influence of the dust structure on the filter performance was clarified. Using a simple model, we determined the effective ratio of filtration area β, which represents the ratio of the filterable area to the total filtration area, the true resistance coefficient due to the primary dust layer ζp’ thinly deposited on the filter surface, and the true resistance coefficient inside the filter media itself ζf. The effective ratio of filtration area β decreased with operation time for all pulse-jet pressures; however, it maintained a high value when the pulse-jet pressure was high. The validity of β analyzed by the model was verified using two different methods, and the results showed good agreement, indicating that the model is effective in identifying real conditions. The true resistance coefficient due to the primary dust layer ζp’ decreased as the pulse-jet pressure increased; however, the true resistance coefficient inside the filter media itself ζf’ was the highest at 0.5 MPa. In addition, the dust collection efficiency was different at each pulse-jet pressure, which was considered to be caused by the difference in the dust particle accumulation structure.  相似文献   
7.
Emerging graphene/organic phototransistors are eye-catching technologies owing to their unique merits including easy/low-cost fabrication, temperature independent, and achieving various functions. However, their development in the near-infrared (NIR) region is experiencing a bottleneck of inferior sensitivity due to low exciton dissociation efficiency and inefficient charge extraction rate. Here, a novel-design solution-processed graphene/organic NIR phototransistor is reported, that is, creatively introducing electron extraction layer of ZnO on graphene channel and employing organic ternary bulk heterojunction as photosensitive layer, successfully breaking that bottleneck. The phototransistor exhibits a high responsivity of 6.1 × 106 A W−1, a superior detectivity of 2.4 × 1013 Jones, and a remarkable minimum detection power of 1.75 nW cm−2 under 850 nm radiation. Considering its excellent NIR detection performance, a noncontact transmission-type pulse monitoring is carried out with no external circuit support, from which human pulse signal and heart rate can be displayed in real time. The phototransistor, interestingly, can be switched into a photomemory function with a retention time of 1000 s in the atmosphere through a gate voltage of −20 V. The design takes the characteristics of graphene/organic phototransistors to a higher level, beyond the limit of sensitivity, and opens up a novel approach for developing multifunction devices.  相似文献   
8.
Chemical filters are the most important devices for removing gas-phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler-Jonas kinetic equation were combined to establish an adsorption performance prediction model of chemical filters under actual conditions. The predicted values of the model were in good agreement with the experimental results, which indicated the high accuracy of the prediction model. The model does not need to test the microscopic parameters of the adsorbent and can maintain high accuracy at low concentrations. A fast method for calculating the service life of chemical filters was also presented. Based on this model, the total cost of using a chemical filter with a high carbon content in microelectronic clean rooms could be decreased by 45% due to decreasing the number of filter replacements over 3 months. So a chemical filter with a high carbon content should be preferred over a filter with low resistance in microelectronic clean rooms.  相似文献   
9.
As global air pollution becomes increasingly severe,various types of fibrous filters have been devel-oped to improve air filter performance.However,fibrous filters have limitations such as high packing density that generally causes high-pressure drop and ultimately deterioration in the filtration effi-ciency.High-pressure particulate matter precipitators are limited in terms of scope for commercialization because they require high voltage supplies and ozone generators.In this study,we develop fibrous fil-ters with enhanced durability and improved performance using metallized microfibers decorated with metal-organic-framework(MOF)nanocrystals.Not only does the efficiency of the developed filters remain at or above 97%for 0.50-1.5 μm PMs but the durability also significantly increases.In addi-tion,using the water purification ability of the MOF,we explore the dye degradation effect of the hybrid microfibers by immersing them into Rhodamine B aqueous solution.In such an experiment the Rho-damine B aqueous solution is completely purified by the presence of the hybrid microfibers under the UV irradiation.  相似文献   
10.
The Fe−Ni−TiO2 nanocomposite coatings were electrodeposited by pulse frequency variation. The results showed that the nanocomposite with a very dense coating surface and a nanocrystalline structure was produced at higher frequencies. By increasing the pulse frequency from 10 to 500 Hz, the iron and TiO2 nanoparticles contentswere increased in expense of nickel content. XRD patterns showed that by increasing the frequency to 500 Hz, an enhancement ofBCC phase was observed and the grain size of deposits was reduced to 35 nm. The microhardness and the surface roughness were increased to 647 HV and 125 nm at 500 Hz due to the grain size reduction and higher incorporation of TiO2 nanoparticles into the Fe−Ni matrix (5.13 wt.%). Moreover, the friction coefficient and wear rate values were decreased by increasing the pulse frequency;while the saturation magnetization and coercivity values of the composite deposits were increased.  相似文献   
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