毫米波三维异质异构集成技术的进展与应用

三维异质异构集成技术是实现电子信息系统向着微型化、高效能、高整合、低功耗及低成本方向发展的最重要方法,也是决定信息化平台中微电子和微纳系统领域未来发展的一项核心高技术。文章详细介绍了毫米波频段三维异质异构集成技术的优势、近年来的发展趋势以及面临的挑战。利用硅基MEMS 光敏复合薄膜多层布线工艺可实现异质芯片的低损耗互连,同时三维集成高性能封装滤波器、高辐射效率封装天线等无源元件,还能很好地处理布线间的电磁兼容和芯片间的屏蔽问题。最后介绍了一款新型毫米波三维异质异构集成雷达及其在远距离生命体征探测方面的应用。     

An improved feedrate scheduling method for NURBS interpolation in five-axis machining

Five-axis machining plays an important role in manufacturing by dint of its high efficiency and accuracy. While two rotation axes benefit the flexibility of machining, it also brings limitations and challenges. In order to further balance machining precision and efficiency, an improved feedrate scheduling method is presented considering geometric error and kinematic constraints for the Non Uniform Rational B-Spline (NURBS) interpolation in five-axis machining. A simplification method is proposed to calculate the geometric error which describes the deviation between the ideal tool path and the real tool path induced by the non-linear movement. A linear relation between geometric error and feedrate is built to limit the feedrate. The constraints determined by single axis kinematic performance and tangential kinematic performance are also considered. Under these constraints, a constrained feedrate profile is determined. Aiming to get more constant feedrate in the difficult-to-machine areas, this work proposes a scheduling method which combines morphological filtering and S-shape acceleration/deceleration (acc/dec) mode. Simulations and experiments are performed to compare the proposed feedrate scheduling method with two previous feedrate scheduling method and the results prove that the proposed feedrate scheduling method is reliable and effective.     

基于SolidWorks和三坐标测量仪的螺杆转子精滚刀建模与检测方法

介绍了基于SolidWorks软件的螺杆转子精加工滚刀的一种精确建模方法和利用该模型对滚刀的关键工序进行模拟验证的方法,同时介绍了在三坐标测量仪上利用螺杆转子精滚刀模型和曲线功能对螺杆转子精滚刀齿形进行检测的方法。     

Multi-discharge EDM coring of single crystal SiC ingot by electrostatic induction feeding method

A new technique of EDM coring of single crystal silicon carbide (SiC) ingot was proposed in this paper. Currently single crystal SiC devices are still of high cost due to the high cost of bulk crystal SiC material and the difficulty in the fabrication process of SiC. In the manufacturing process of SiC ingot/wafer, localized cracks or defects occasionally occur due to thermal or mechanical causes resulted from fabrication processes which may waste the whole piece of material. To save the part of ingot without defects and maximize the material utilization, the authors proposed EDM coring method to cut out a no defect ingot from a larger diameter ingot which has localized defects. A special experimental setup was developed for EDM coring of SiC ingot in this study and its feasibility and machining performance were investigated. Meanwhile, in order to improve the machining rate, a novel multi-discharge EDM coring method by electrostatic induction feeding was established, which can realize multiple discharges in single pulse duration. Experimental results make it clear that EDM coring of SiC ingot can be carried out stably using the developed experimental setup. Taking advantage of the newly developed multi-discharge EDM method, both the machining speed and surface integrity can be improved.     

菌型叶根动叶片叶根叶冠内径向的加工

菌型叶根动叶片是一种新型的动叶片,采用数控铣加工叶根内径向面时留0.1~0.2mm余量,然后在进行叶根内径向磨削,叶冠直接加工到位,没有后序磨削加工,由于叶根叶冠在加工过程中不是一次装夹完成的,根冠存在一定的落差,在后续的装配中容易产生配合间隙,无法达到要求。文中介绍了一种新的加工工艺,解决了这一问题。     

Abrasive waterjet micro-machining of channels in metals: Comparison between machining in air and submerged in water

Abrasive water jet technology can be used for micro-milling using recently developed miniaturized nozzles. Abrasive water jet (AWJ) machining is often used with both the nozzle tip and workpiece submerged in water to reduce noise and contain debris. This paper compares the performance of submerged and unsubmerged abrasive water jet micro-milling of channels in 316L stainless steel and 6061-T6 aluminum at various nozzle angles and standoff distances. The effect of submergence on the diameter and effective footprint of AWJ erosion footprints was measured and compared. It was found that the centerline erosion rate decreased with channel depth due to the spreading of the jet as the effective standoff distance increased, and because of the growing effect of stagnation as the channel became deeper. The erosive jet spread over a larger effective footprint in air than in water, since particles on the jet periphery were slowed much more quickly in water due to increased drag. As a result, the width of a channel machined in air was wider than that in water. Moreover, it was observed that the instantaneous erosion rate decreased with channel depth, and that this decrease was a function only of the channel cross-sectional geometry, being independent of the type of metal, the jet angle, the standoff distance, and regardless of whether the jet was submerged or in air, in either the forward or backward directions. It is shown that submerged AWJM results in narrower features than those produced while machining in air, without a decrease in centerline etch rate.     

平面并联机构工作空间的三维螺旋扫描CAD求解

针对平面并联机构无奇异位置工作空间求解困难、过程繁琐、计算量大等问题，提出了基于CAD求解平面并联机构工作空间的三维螺旋扫描方法。将[n]自由度平面并联机构分解成[n]条支链进行独立分析，得到每条支链下末端执行器的可达区域，再将所有支链可达区域取交集即为平面并联机构工作空间。应用SolidWorks软件建立平面并联机构模型，进行几何特征处理，通过自动求解器求解，将求解过程图形化，快速得到同轴布局5R机构和平面3-RPR并联机构的无奇异位置工作空间。通过同轴布局5R机构的运动学实验，验证了该求解方法的可行性。     

航空发动机复杂扭曲叶片分步电解加工研究

为实现复杂扭曲叶片在较小间隙下的稳定加工,提出了一种分步式电解加工的工艺方法,建立了复杂扭曲叶片小间隙(0.2 mm)和大间隙下(0.5 mm)扭曲流道的流道模型,采用有限元法进行了流场仿真研究,结果表明增加流道间隙可以解决流道中涡流和流场紊乱的问题。开展了复杂扭曲叶片小间隙连续式加工和分步式加工的试验研究。结果表明,采用小间隙连续式加工,当阴极进给至3.8 mm位置时,在叶片排气边靠近叶根流道扭曲处出现短路打火情况;而采用分步式加工方式能够实现加工的顺利进行。     

Electromagnetism-like algorithms for optimized tool path planning in 5-axis flank machining

Optimization of tool path planning using metaheuristic algorithms such as ant colony systems (ACS) and particle swarm optimization (PSO) provides a feasible approach to reduce geometrical machining errors in 5-axis flank machining of ruled surfaces. The optimal solutions of these algorithms exhibit an unsatisfactory quality in a high-dimensional search space. In this study, various algorithms derived from the electromagnetism-like mechanism (EM) were applied. The test results of representative surfaces showed that all EM-based methods yield more effective optimal solutions than does PSO, despite a longer search time. A new EM-MSS (electromagnetism-like mechanism with move solution screening) algorithm produces the most favorable results by ensuring the continuous improvement of new searches. Incorporating an SPSA (simultaneous perturbation stochastic approximation) technique further improves the search results with effective initial solutions. This work enhances the practical values of tool path planning by providing a satisfactory machining quality.     

基于3D打印技术复制砂浆节理的剪切试验及峰值抗剪强度模型

为进一步研究节理三维形貌特征与节理峰值抗剪强度的关系,首先采用巴西劈裂试验获取了自然劈裂岩石表面,通过三维扫描技术获取了节理面形态的高精度点云,通过逆向建模得到了自然岩石表面的立体模型,结合3D打印技术制作出了与自然岩石表面一致的PLA模具,以3D打印获得的底模通过水泥砂浆浇筑了含有自然结构面形貌的相似节理面试样。PLA模具与复制材料差异较大,复制材料在凝结过程中不易与PLA模具黏结,进而使脱模过程较为方便,不会破坏节理面。同时PLA模具可重复进行相似材料复制工作,具有可重复使用的优点。然后进行了具有5组形貌面的20个水泥砂浆节理面在4种不同法向荷载情况下的结构面剪切试验,得到了结构面剪切位移-荷载曲线。研究了结构面峰值抗剪强度、峰值位移、剪切刚度影响因素。节理经过剪切后形貌面出现不同程度的磨损,其磨损范围与等效高差分布范围基本一致,并且在等效高差为剪断破坏模式且成片的区域磨损较为严重。在新粗糙度指标基础上提出了新的峰值抗剪强度模型,经试验对比显示出新模型的有效性。在新模型基础上提出了一个简化模型。对比发现新模型简化后其计算精度较新模型有所降低但由于所需参数减小计算较为方便,新模型简化结果精度虽然有所下降但是还是比Barton公式精度高。