Reactive Power Generation and Control by Thyristor Circuits

Generally, static var generators function as variable reactances (capacitive or inductive impedances) or controllable ac current and voltage sources. Possible methods of var generation and control by static thyristor circuits are reviewed, and new approaches are described in which power frequency changers (cycloconverters) are employed. Oscillographic recordings illustrate the operation and performance of practical systems, including a 35-Mvar arc furnace compensator.     

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Next-generation control equipment for the transmission grid was installed in 2001 at a New York Power Authority (NYPA) substation as part of a project that will increase power flow transfer limit by 240 MW, approximately enough electricity for more than 200,000 homes. The project is the result of long-term collaborative research with EPRI, Siemens, and numerous energy companies including NYPA, Tennessee Valley Authority (TVA), and American Electric Power (AEP). The new control equipment, called a convertible static compensator (CSC) is quietly revolutionizing the way electricity is transported and controlled on the US National power grid, updating the grid to the standards needed to meet the demands of the electronic revolution while benefiting the environment by reducing the need to build new transmission lines.     

The High-Frequency Base Converter?A New Approach to Static High-Power Conversion

A new approach to high-power conversion in which two naturally commutated converters (cycloconverters) are used in tandem, each with its input connected to a (passive) high-frequency (HF) source (``base') is presented. The arrangement approximates an ideal converter; its ``input' and ``output' frequency can be equal or different, and the power factor at both external terminals can be maintained at unity or any other value. Potential utility applications in which the HF base converter functions as an asynchronous intertie between two ac power systems and as a tie between a dc transmission line and a weak ac system are discussed, and technical and economic comparisons with conventional approaches are given.     

Input Power Factor of AC to AC Power Converters

AC to ac power converters are static systems using solid-state switching devices that directly convert ac power of a given frequency to ac power of some desired frequency. They are used to link ac power systems of different frequencies, to provide variable power frequency supplies for ac motor drives, and to generate constant frequency power from the output of variable-speed ac generators. The power conversion process requires the construction of output voltage waveforms, with the required frequency and amplitude, from the ac supply voltages given. The method of output waveform construction determines the input power factor of the ac to ac converter. The practical methods of output waveform construction are summarized and their effects on the input power factor are examined. The relationships between the output and input phase angles for differently controlled ac to ac converters are presented in graphical forms. It is shown that the input power factor of an ac to ac converter can be varied or kept at unity, without the use of passive reactive components, and independently of the output load.     

Rapid thermal multiprocessing for a programmable factory foradaptable manufacturing of ICs

This paper presents an overview of research at Stanford University on the development of concepts of a programmable factory, based on a new generation of flexible multifunctional equipment implemented in a smaller flexible factory. This approach is demonstrated through the development of a novel single wafer Rapid Thermal Multiprocessing (RTM) reactor with extensive integration of sensors, computers and related technology for specification, communication, execution, monitoring, control, and diagnosis to demonstrate the programmable nature of the RTM. The RTM combines rapid thermal processing and several other process environments in a single chamber, with applications for multilayer in-situ growth and deposition of dielectrics, semiconductors and metals. Because it is highly instrumented, the RTM is very flexible for in-situ multiprocessing, allowing rapid cycling of ambient gases, temperature, pressure, etc. It allows several processing steps to be executed sequentially in-situ, while providing sufficient flexibility to allow optimization of each processing step. This flexibility is partially the result of a new lamp system with three concentric rings each of which is independently and dynamically controlled to provide for better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions namely temperatures, pressures and gas flow rates. The lamp system has been optimally designed through the use of a newly developed thermal simulator. For equipment and process control, a variety of sensors for real-time measurements and a model based control system have been developed     

Power electronics in electric utilities: static VAR compensators

The author deals with dynamic VAR compensation of electric power systems, applying power electronics for reactive power generation and control. After an overview of the emergence and status of modern, solid-state VAR compensators in utility and industrial applications, it is shown how dynamic VAR compensation increased transmittable power by providing voltage support, transient stability improvement, and power oscillation damping in electric power transmission systems. Methods of reactive power generation and control using thyristor-controlled reactors, with fixed and thyristor-switched capacitors or modern gate-turn-off (GTO) power converters that can function without AC capacitors or reactors, are described. A summary is included of the control structure and operation to provide the desired characteristics and performance in power systems applications     

Supervisory control of a rapid thermal multiprocessor

An application of supervisory control theory to a piece of semiconductor manufacturing equipment is presented. The approach allows the flexible design and reliable update of processing recipes to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implementation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of 10⁶ states. The actual implementation of the logic sequencing control software for the application under investigation is described